CN106249549A - 有机膜技术与ito薄膜技术共用掩膜板的方法 - Google Patents
有机膜技术与ito薄膜技术共用掩膜板的方法 Download PDFInfo
- Publication number
- CN106249549A CN106249549A CN201610916619.6A CN201610916619A CN106249549A CN 106249549 A CN106249549 A CN 106249549A CN 201610916619 A CN201610916619 A CN 201610916619A CN 106249549 A CN106249549 A CN 106249549A
- Authority
- CN
- China
- Prior art keywords
- substrate
- organic membrane
- technology
- mask plate
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 title claims abstract description 51
- 238000005516 engineering process Methods 0.000 title claims abstract description 43
- 238000000034 method Methods 0.000 title claims abstract description 26
- 239000010409 thin film Substances 0.000 title claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 26
- 239000010408 film Substances 0.000 claims abstract description 14
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 12
- 239000011651 chromium Substances 0.000 claims abstract description 12
- 239000010453 quartz Substances 0.000 claims abstract description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000011248 coating agent Substances 0.000 claims abstract description 9
- 238000000576 coating method Methods 0.000 claims abstract description 9
- 230000008021 deposition Effects 0.000 claims abstract description 4
- 238000007747 plating Methods 0.000 claims abstract description 4
- 239000011800 void material Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002198 insoluble material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
Description
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610916619.6A CN106249549A (zh) | 2016-10-21 | 2016-10-21 | 有机膜技术与ito薄膜技术共用掩膜板的方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610916619.6A CN106249549A (zh) | 2016-10-21 | 2016-10-21 | 有机膜技术与ito薄膜技术共用掩膜板的方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN106249549A true CN106249549A (zh) | 2016-12-21 |
Family
ID=57600582
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610916619.6A Pending CN106249549A (zh) | 2016-10-21 | 2016-10-21 | 有机膜技术与ito薄膜技术共用掩膜板的方法 |
Country Status (1)
Country | Link |
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CN (1) | CN106249549A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110989292A (zh) * | 2019-12-10 | 2020-04-10 | 东莞市友辉光电科技有限公司 | 一种基板制备精细纹理的方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101114126A (zh) * | 2006-07-28 | 2008-01-30 | 比亚迪股份有限公司 | 一种ito图案的形成方法 |
CN102468243A (zh) * | 2010-11-11 | 2012-05-23 | 北京京东方光电科技有限公司 | Tft阵列基板、制造方法及液晶显示装置 |
CN104102094A (zh) * | 2014-06-27 | 2014-10-15 | 京东方科技集团股份有限公司 | 掩模挡板及其制造方法 |
CN104810322A (zh) * | 2015-05-18 | 2015-07-29 | 京东方科技集团股份有限公司 | 阵列基板及其制造方法、显示面板、显示装置、掩模板 |
-
2016
- 2016-10-21 CN CN201610916619.6A patent/CN106249549A/zh active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101114126A (zh) * | 2006-07-28 | 2008-01-30 | 比亚迪股份有限公司 | 一种ito图案的形成方法 |
CN102468243A (zh) * | 2010-11-11 | 2012-05-23 | 北京京东方光电科技有限公司 | Tft阵列基板、制造方法及液晶显示装置 |
CN104102094A (zh) * | 2014-06-27 | 2014-10-15 | 京东方科技集团股份有限公司 | 掩模挡板及其制造方法 |
CN104810322A (zh) * | 2015-05-18 | 2015-07-29 | 京东方科技集团股份有限公司 | 阵列基板及其制造方法、显示面板、显示装置、掩模板 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110989292A (zh) * | 2019-12-10 | 2020-04-10 | 东莞市友辉光电科技有限公司 | 一种基板制备精细纹理的方法 |
CN110989292B (zh) * | 2019-12-10 | 2023-03-17 | 东莞市友辉光电科技有限公司 | 一种基板制备精细纹理的方法 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C41 | Transfer of patent application or patent right or utility model | ||
CB03 | Change of inventor or designer information |
Inventor after: Min Su Inventor after: Zhao Hui Inventor after: Sha Shuangqing Inventor after: Jin Yanglin Inventor before: Min Su |
|
COR | Change of bibliographic data | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20170227 Address after: A city road Nanjing city Jiangsu province 210033 Qixia Xianlin University No. 7 Applicant after: Nanjing Huadong Electronics Information Technology Co.,Ltd. Applicant after: China Electric panda flat panel display technology Co., Ltd. Address before: A city road Nanjing city Jiangsu province 210033 Qixia Xianlin University No. 7 Applicant before: Nanjing Huadong Electronics Information Technology Co.,Ltd. |
|
CB02 | Change of applicant information |
Address after: A city road Nanjing city Jiangsu province 210033 Qixia Xianlin University No. 7 Applicant after: Nanjing CLP panda flat panel display technology Co., Ltd. Applicant after: Nanjing Huadong Electronics Information Technology Co.,Ltd. Address before: A city road Nanjing city Jiangsu province 210033 Qixia Xianlin University No. 7 Applicant before: Nanjing Huadong Electronics Information Technology Co.,Ltd. Applicant before: Nanjing CLP panda flat panel display technology Co., Ltd. |
|
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20161221 |
|
RJ01 | Rejection of invention patent application after publication |