CN106208806B - The rotatory inertia piezoelectric actuator and start method of the mechanism of tandem drive containing Double Diamond - Google Patents
The rotatory inertia piezoelectric actuator and start method of the mechanism of tandem drive containing Double Diamond Download PDFInfo
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- CN106208806B CN106208806B CN201610530701.5A CN201610530701A CN106208806B CN 106208806 B CN106208806 B CN 106208806B CN 201610530701 A CN201610530701 A CN 201610530701A CN 106208806 B CN106208806 B CN 106208806B
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- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 31
- 239000010432 diamond Substances 0.000 title claims abstract description 31
- 230000007246 mechanism Effects 0.000 title claims abstract description 28
- 238000000034 method Methods 0.000 title claims abstract description 14
- 230000004044 response Effects 0.000 claims abstract description 11
- 230000002457 bidirectional effect Effects 0.000 claims description 12
- 230000008569 process Effects 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims description 3
- 230000006870 function Effects 0.000 description 3
- 235000003283 Pachira macrocarpa Nutrition 0.000 description 2
- 241001083492 Trapa Species 0.000 description 2
- 235000014364 Trapa natans Nutrition 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 235000009165 saligot Nutrition 0.000 description 2
- 241000446313 Lamella Species 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011089 mechanical engineering Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
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- 230000003287 optical effect Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The rotatory inertia piezoelectric actuator and start method of the mechanism of tandem drive containing Double Diamond, the actuator are made up of upper and lower baffle plate, bearing, rotating output shaft, Double Diamond tandem drive mechanism and piezoelectric pile;Double Diamond tandem drive mechanism includes series connection Double Diamond ring, and its internal interference fit has piezoelectric pile, and both have brake pad at joining place of connecting;The rotating output shaft of actuator is connected with overhead gage and lower baffle plate respectively by bearing, and Double Diamond tandem drive mechanism fixing assembling is between overhead gage and lower baffle plate, and when assembling is completed, brake pad side is in close contact with rotating output shaft;By controlling the voltage sequential and amplitude of piezoelectric pile, actuator band dynamic load output shake double-direction turning movement can be made;The present invention has the characteristics of assembling is simple, and response is rapid, and start is accurate.
Description
Technical field
The invention belongs to inertial piezoelectric Actuator technique field, and in particular to a kind of rotation of the mechanism of tandem drive containing Double Diamond
Turn inertial piezoelectric actuator and start method.
Background technology
The operation principle of Piezoelectric Driving is the inverse piezoelectric effect being had based on piezoelectricity, and Piezoelectric Driving has small volume, rigidity
Greatly, displacement resolution and positioning precision height, good linearity, frequency response is high, do not generate heat, noiseless, it is easily controllable the advantages that.
Piezoelectric actuator is in life science, medical science and bioengineering, semiconductor and microelectronics, data storage, optics, photon
The field such as, optical fiber, measurement and e measurement technology, precision optical machinery and mechanical engineering has a wide range of applications background.Wherein inertia-type
Actuator is based on inertia --- the Piezoelectric Driving principle of friction, it is infinitely great, high-resolution fast that half step distance, theoretical stroke can be achieved
Fast bidirectional-movement.Rotary inertia actuator was usually used as driving element, complicated and low intensity by the use of twin lamella in the past;Separately
Outside, conventional piezoelectric actuator is more by the way of energization clamper, and remains to keep output under powering-off state in the system that requires
In displacement application scenario, conventional actuator can not complete this generic task.
The content of the invention
In order to solve the above-mentioned problems of the prior art, it is an object of the invention to provide one kind series connection containing Double Diamond to drive
The rotatory inertia piezoelectric actuator and start method of motivation structure, being capable of quick response and driving load under the conditions of high-frequency drive
Bidirectional rotation, there is provided power off the function of clamper;This actuator has the advantages of assembling simple, fast response time, high resolution,
Locking can be powered off and realize bidirectional rotation.
In order to achieve the above object, the present invention adopts the following technical scheme that:
A kind of rotatory inertia piezoelectric actuator of the mechanism of tandem drive containing Double Diamond, including overhead gage 1, lower baffle plate 4, fixation
The Double Diamond tandem drive mechanism 2 being assemblied between overhead gage 1 and lower baffle plate 4, rotating output shaft 9 passes through upper bearing (metal) 8 and lower bearing 7
It is connected respectively with overhead gage 1 and lower baffle plate 4;The Double Diamond tandem drive mechanism 2 includes series connection Double Diamond ring 5, its inside points
Guo Yingpeihe there are not left piezoelectric pile 3 and right piezoelectric pile 6, left piezoelectric pile 3 and right piezoelectric pile 6 series connection joining place is provided with brake pad
10;The side of brake pad 10 contacts closely with rotating output shaft 9, installation direction and the friction of the left piezoelectric pile 3 and right piezoelectric pile 6
Block 10 is parallel with the side that rotating output shaft 9 contacts;By controlling the voltage sequential and amplitude of left piezoelectric pile 3 and right piezoelectric pile 6,
The actuator band continuous bidirectional rotation of dynamic load can be made.
When the left piezoelectric pile 3 and right piezoelectric pile 6 are in power-off, belong between rotating output shaft 9 and the side of brake pad 10
Linear contact lay, it is in close contact and stiction is present, now rotating output shaft 9 can bears certain outer load, be assigned in powering-off state
To reliable clamper.
In the Double Diamond tandem drive mechanism 2, by controlling two piezoelectric piles to realize rotary motion simultaneously, water chestnut compensate for
The response of shape mechanism is slowly insufficient, can be consistent angular distance and response speed of the inertia actuator in bidirectional rotation.
The start method of the rotatory inertia piezoelectric actuator of the described mechanism of tandem drive containing Double Diamond, when being not powered on, rotation
Transfer shaft 9 and be in initial clamping state;When starting start, the first step, while left piezoelectric pile 3 and right piezoelectric pile 6 are applied just
Beginning balanced voltage, now both are relative, and active force is cancelled out each other, and brake pad 10 is in situ and keeps phase with rotating output shaft 9
To static;Second step, slowly to left piezoelectric pile 3 from initial balance voltage drop voltage up to power-off, while slowly to right pressure
Pile 6 is from initial balance voltage up voltage up to full stroke voltage, and now brake pad 10 slowly move to the left by the direction of piezoelectric pile 3
It is dynamic, because stiction of the brake pad 10 between rotating output shaft 9 is more than rotating output shaft 9 with needed for the motion of brake pad 10
Inertia force, rotating output shaft 9 driven and driving load rotate counterclockwise certain angle by brake pad 10;3rd step, promptly
To left piezoelectric pile 3 from off-position up voltage up to initial balance voltage, while promptly to right piezoelectric pile 6 from full stroke voltage
Drop voltage is promptly kept in the center up to initial balance voltage, now brake pad 10, due between brake pad 10 and rotating output shaft 9
Stiction required inertia force is moved with brake pad 10 much smaller than rotating output shaft 9, and the process time is short enough
Temporarily, rotating output shaft 9 can be kept essentially stationary, and so be achieved that the complete rotation counterclockwise of rotating output shaft 9;Repeat
Second and third step, the continuously driving load rotation counterclockwise of rotating output shaft 9 can be made, after the completion of driving, while to left piezoelectric pile
3 and right piezoelectric pile 6 power off, rotating output shaft 9 recovers initial clamping state;Similarly, left piezoelectric pile 3 and right piezoelectric pile 6 are exchanged
Step mode, rotating output shaft 9 can continuous driving load clockwise, by this realize it is automatically controlled in a manner of under bidirectional rotation inertia
Start.
Compared to the prior art, the invention has the advantages that:
1) present invention has power-off clamper function.When left piezoelectric pile 3 and right piezoelectric pile 6 are in power-off, rotating output shaft 9
Belong to linear contact lay between the side of brake pad 10, be in close contact and stiction be present, now rotating output shaft 9 can be born necessarily
Outer load, reliable clamper is issued in powering-off state.Change general piezoelectric actuator energization clamper and power off the present situation of unblock,
Power-off clamper function is demand common in common engineering application.
2) present invention can contain mismachining tolerance, it is initial to actuator adjustment clamping state when assembling process requirement not
Height, greatly reduce the difficulty of processing and assembling;Inside configuration space utilization is reasonable, small volume, light weight, simple in construction tight
Gather.
3) in Double Diamond tandem drive mechanism 2 of the invention, by controlling two piezoelectric piles to realize rotary motion simultaneously, more
Rhombus-mechanism response slowly deficiency has been mended, angular distance and response speed of the inertia actuator in bidirectional rotation can be made to keep one
Cause, realize rapid, stabilization and exactly driving load.
Brief description of the drawings
Fig. 1 is structure partial sectional view of the present invention.
Fig. 2 is structural perspective of the present invention.
Fig. 3 is Double Diamond tandem drive mechanism stereogram of the present invention.
Embodiment
The present invention is described in further detail below in conjunction with the drawings and specific embodiments.
As shown in Figure 1, Figure 2 and Figure 3, the rotatory inertia piezoelectric actuator of the mechanism of tandem drive containing Double Diamond of the invention, bag
Include overhead gage 1, lower baffle plate 4, upper bearing (metal) 8, lower bearing 7, rotating output shaft 9, Double Diamond tandem drive mechanism 2, the and of left piezoelectric pile 3
Right piezoelectric pile 6;The Double Diamond tandem drive mechanism 2 includes series connection Double Diamond ring 5, and interference fit has left piezoelectricity respectively inside it
Heap 3 and right piezoelectric pile 6, joining place of connecting there is brake pad 10 in both;The rotating output shaft 9 of actuator is by upper bearing (metal) 8 with
Bearing 7 is connected with overhead gage 1 and lower baffle plate 4 respectively, and the fixing assembling of Double Diamond tandem drive mechanism 2 is in overhead gage 1 and lower baffle plate 4
Between, now the side of brake pad 10 contacts closely with rotating output shaft 9, the installation direction of the left piezoelectric pile 3 and right piezoelectric pile 6
It is parallel with brake pad 10 and rotating output shaft 9 side contacted;By the voltage sequential for controlling left piezoelectric pile 3 and right piezoelectric pile 6
And amplitude, the actuator band continuous bidirectional rotation of dynamic load can be made.
When the left piezoelectric pile 3 and right piezoelectric pile 6 are in power-off, belong between rotating output shaft 9 and the side of brake pad 10
Linear contact lay, it is in close contact and stiction is present, now rotating output shaft 9 can bears certain outer load, be assigned in powering-off state
To reliable clamper.
In the Double Diamond tandem drive mechanism 2, by controlling two piezoelectric piles to realize rotary motion simultaneously, water chestnut compensate for
The response of shape mechanism is slowly insufficient, can be consistent angular distance and response speed of the inertia actuator in bidirectional rotation.
The start method of the present invention is described in detail below:
When being not powered on, rotating output shaft 9 is initially in clamping state;For driving load rotate counterclockwise when, the first step, together
When initial balance voltage is applied to left piezoelectric pile 3 and right piezoelectric pile 6, now both are relative, and active force is cancelled out each other, brake pad 10
Geo-stationary is kept in original position and with rotating output shaft 9;Second step, slowly to left piezoelectric pile 3 from initial balance voltage drop
Voltage until power-off, while slowly to right piezoelectric pile 6 from initial balance voltage up voltage up to full stroke voltage, now rub
Block 10 slowly move to the left by the direction of piezoelectric pile 3, because the stiction between brake pad 10 and rotating output shaft 9 is defeated more than rotating
Shaft 9 moves required inertia force with brake pad 10, and rotating output shaft 9 is driven by brake pad 10 and driving load is counterclockwise
Rotate to an angle;3rd step, promptly to left piezoelectric pile 3 from off-position up voltage up to initial balance voltage, it is while fast
Fastly to right piezoelectric pile 6 from full stroke voltage drop voltage up to initial balance voltage, now brake pad 10 is promptly kept in the center,
Due to stiction of the brake pad 10 between rotating output shaft 9 much smaller than rotating output shaft 9 with needed for the motion of brake pad 10
Inertia force, and the process time is of short duration enough, and rotating output shaft 9 can be kept essentially stationary, and is so achieved that rotation output
The complete rotation counterclockwise of axle 9;Second and third step is repeated, the continuously driving load rotation counterclockwise of rotating output shaft 9 can be made
Turn, powered off after the completion of driving, while to left piezoelectric pile 3 and right piezoelectric pile 6, rotating output shaft 9 recovers initial clamping state.For
When driving load turns clockwise, the first step, while initial balance voltage is applied to right piezoelectric pile 6 and left piezoelectric pile 3, now two
Person is relative, and active force is cancelled out each other, and brake pad 10 is in situ and keeps geo-stationary with rotating output shaft 9;Second step, slowly
Ground to right piezoelectric pile 6 from initial balance voltage drop voltage up to power-off, while slowly to left piezoelectric pile 3 from initial balance voltage
Up voltage is to full stroke voltage, and now brake pad 10 slowly move to the right by the direction of piezoelectric pile 6, because brake pad 10 is defeated with rotating
Stiction between shaft 9 moves required inertia force, the quilt of rotating output shaft 9 with brake pad 10 more than rotating output shaft 9
Brake pad 10 drives and driving load turns clockwise certain angle;3rd step, promptly to right piezoelectric pile 6 from off-position liter
Voltage is to initial balance voltage, while promptly to left piezoelectric pile 3 from full stroke voltage drop voltage to initial balance voltage, now
Brake pad 10 is promptly kept in the center, because the stiction between brake pad 10 and rotating output shaft 9 is much smaller than rotation output
Axle 9 moves required inertia force with brake pad 10, and the process time is of short duration enough, and rotating output shaft 9 can be kept substantially
It is motionless, so it is achieved that 9 clockwise complete rotations of rotating output shaft;Second and third step is repeated, rotation can be exported
The continuously driving load rotation clockwise of axle 9, is powered off, rotation is defeated after the completion of driving, while to right piezoelectric pile 6 and left piezoelectric pile 3
Shaft 9 recovers initial clamping state, by this realize it is automatically controlled in a manner of under bidirectional rotation inertia start.
Claims (4)
- A kind of 1. rotatory inertia piezoelectric actuator of the mechanism of tandem drive containing Double Diamond, it is characterised in that:Including overhead gage (1), Lower baffle plate (4), the Double Diamond tandem drive mechanism (2) being securely fitted between overhead gage (1) and lower baffle plate (4), rotating output shaft (9) it is connected respectively with overhead gage (1) and lower baffle plate (4) by upper bearing (metal) (8) and lower bearing (7);The Double Diamond tandem drive Mechanism (2) includes series connection Double Diamond ring (5), and interference fit has left piezoelectric pile (3) and right piezoelectric pile (6), left pressure respectively inside it Pile (3) and right piezoelectric pile (6) series connection joining place are provided with brake pad (10);Brake pad (10) side and rotating output shaft (9) Contact is close, and installation direction and the brake pad (10) and rotating output shaft (9) of the left piezoelectric pile (3) and right piezoelectric pile (6) connect Tactile side is parallel;By controlling the voltage sequential and amplitude of left piezoelectric pile (3) and right piezoelectric pile (6), actuator band can be made The continuous bidirectional rotation of dynamic load.
- 2. the rotatory inertia piezoelectric actuator of the mechanism of tandem drive containing Double Diamond according to claim 1, it is characterised in that: When the left piezoelectric pile (3) and right piezoelectric pile (6) are in power-off, belong between rotating output shaft (9) and brake pad (10) side Linear contact lay, it is in close contact and stiction is present, now rotating output shaft (9) can bears certain outer load, under powering-off state Reach reliable clamper.
- 3. the rotatory inertia piezoelectric actuator of the mechanism of tandem drive containing Double Diamond according to claim 1, it is characterised in that: In the Double Diamond tandem drive mechanism (2), by controlling two piezoelectric piles to realize rotary motion simultaneously, inertia start can be made Angular distance and response speed of the device in bidirectional rotation are consistent.
- 4. the start method of the rotatory inertia piezoelectric actuator of the mechanism of tandem drive containing Double Diamond described in claim 1, it is special Sign is:When being not powered on, rotating output shaft (9) is in initial clamping state;When starting start, the first step, while to left piezoelectricity Heap (3) and right piezoelectric pile (6) apply initial balance voltage, and now both are relative, and active force is cancelled out each other, and brake pad (10) is in Original position simultaneously keeps geo-stationary with rotating output shaft (9);Second step, slowly to left piezoelectric pile (3) from initial balance voltage drop Voltage is until power off, while slowly to right piezoelectric pile (6) from initial balance voltage up voltage to full stroke voltage, now rub Block (10) slowly move to the left by piezoelectric pile (3) direction, because the stiction between brake pad (10) and rotating output shaft (9) is big Required inertia force is moved with brake pad (10) in rotating output shaft (9), rotating output shaft (9) is driven by brake pad (10) And driving load rotate counterclockwise certain angle;3rd step, promptly to left piezoelectric pile (3) from off-position up voltage to initial Balanced voltage, while promptly to right piezoelectric pile (6) from full stroke voltage drop voltage to initial balance voltage, now brake pad (10) promptly keep in the center, because the stiction between brake pad (10) and rotating output shaft (9) is much smaller than rotating output shaft (9) required inertia force is moved with brake pad (10), and the process time is of short duration enough, rotating output shaft (9) can be basic Remain stationary as, be so achieved that rotating output shaft (9) complete rotation counterclockwise;Second and third step is repeated, rotation can be made The continuous driving load rotation counterclockwise of shaft (9) is transferred, after the completion of driving, while to left piezoelectric pile (3) and right piezoelectric pile (6) Power-off, rotating output shaft (9) recover initial clamping state;Similarly, the energization of left piezoelectric pile (3) and right piezoelectric pile (6) is exchanged Mode, rotating output shaft (9) can continuous driving load clockwise, by this realize it is automatically controlled in a manner of under bidirectional rotation inertia make It is dynamic.
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CN106911264B (en) * | 2017-04-01 | 2019-04-09 | 西安交通大学 | Small-sized list piezoelectric stack drive-type bidirectional rotation inertia actuator and actuation method |
CN107222126B (en) * | 2017-05-18 | 2018-03-16 | 西安交通大学 | The driving bidirectional rotation inertia actuator of antisymmetry arrangement formula list piezoelectric pile and method |
CN107623461B (en) * | 2017-09-05 | 2018-12-18 | 西安交通大学 | A kind of shearing-type inertial piezoelectric rotary actuator and actuation method |
CN110707963B (en) * | 2019-10-21 | 2020-11-17 | 西安交通大学 | Self-locking high-thrust linear actuator driven based on inertia type principle and actuating method |
DE102021113751A1 (en) | 2021-05-27 | 2022-12-01 | Physik Instrumente (PI) GmbH & Co KG | Drive device, drive motor and method for driving a spindle |
DE102022112809A1 (en) | 2022-05-20 | 2023-11-23 | Physik Instrumente (PI) GmbH & Co KG | Drive device, drive system, actuating system and drive motor |
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US6163100A (en) * | 1997-12-26 | 2000-12-19 | Asmo Co., Ltd. | Driving circuit of ultrasonic motor |
JP2003284367A (en) * | 2002-03-26 | 2003-10-03 | Seiko Instruments Inc | Control system for ultrasonic motor |
CN101984550B (en) * | 2010-11-24 | 2012-07-18 | 南京航空航天大学 | Flexible hinge based clamping and positioning device for linear ultrasonic motor |
CN105391336B (en) * | 2015-11-26 | 2017-06-20 | 西安交通大学 | The symmetrical two-way large displacement piezoelectric actuator of tension and compression based on screw mandrel self-locking and method |
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