CN106208806A - Rotatory inertia piezoelectric actuator and start method containing Double Diamond tandem drive mechanism - Google Patents
Rotatory inertia piezoelectric actuator and start method containing Double Diamond tandem drive mechanism Download PDFInfo
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- CN106208806A CN106208806A CN201610530701.5A CN201610530701A CN106208806A CN 106208806 A CN106208806 A CN 106208806A CN 201610530701 A CN201610530701 A CN 201610530701A CN 106208806 A CN106208806 A CN 106208806A
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- 230000007246 mechanism Effects 0.000 title claims abstract description 28
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- 230000002457 bidirectional effect Effects 0.000 claims description 12
- 238000011065 in-situ storage Methods 0.000 claims description 4
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
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Abstract
Rotatory inertia piezoelectric actuator and start method containing Double Diamond tandem drive mechanism, this actuator is made up of upper and lower baffle plate, bearing, rotating output shaft, Double Diamond tandem drive mechanism and piezoelectric pile；Double Diamond tandem drive mechanism comprises series connection Double Diamond ring, and its internal interference fit has piezoelectric pile, and both exist brake pad at joining place of connecting；The rotating output shaft of actuator is connected with overhead gage and lower baffle plate respectively by bearing, and Double Diamond tandem drive mechanism is fixing to be assemblied between overhead gage and lower baffle plate, when assemble, and brake pad side and rotating output shaft close contact；By controlling voltage sequential and the amplitude of piezoelectric pile, it is possible to make actuator band dynamic load export shake double-direction turning movement；It is simple that the present invention has assembling, and response is rapid, start feature accurately.
Description
Technical field
The invention belongs to inertial piezoelectric Actuator technique field, be specifically related to a kind of rotation containing Double Diamond tandem drive mechanism
Turn inertial piezoelectric actuator and start method.
Background technology
The operation principle of Piezoelectric Driving is the inverse piezoelectric effect having based on piezoelectricity, and Piezoelectric Driving has that volume is little, rigidity
Greatly, displacement resolution and positioning precision height, good linearity, frequency response is high, do not generate heat, noiseless, the advantage such as easily controllable.
Piezoelectric actuator is at life sciences, medical science and biological engineering, quasiconductor and microelectronics, data storage, optics, photon
, optical fiber, measure and the field such as measurement technology, precision optical machinery and mechanical engineering has a wide range of applications background.Wherein inertia-type
Actuator Piezoelectric Driving based on inertia friction principle, can realize half step distance, theoretical stroke infinitely great, high-resolution soon
Speed bidirectional-movement.Conventional rotary inertia actuator usually utilizes twin lamella as driving element, and structure is complicated and intensity is low；Separately
Outward, the conventional piezoelectric actuator mode using energising clamper more, and requiring that remaining to holding under system is at powering-off state exports
In displacement application scenario, conventional actuator cannot complete this generic task.
Summary of the invention
In order to solve the problem that above-mentioned prior art exists, it is an object of the invention to provide a kind of series connection containing Double Diamond and drive
The rotatory inertia piezoelectric actuator of motivation structure and start method, under the conditions of high-frequency drive, it is possible to quickly respond and drive load
Bidirectional rotation, it is provided that the function of power-off clamper；It is simple that this actuator has assembling, fast response time, the advantage that resolution is high,
Can power-off locking realize bidirectional rotation.
In order to achieve the above object, the present invention adopts the following technical scheme that
A kind of rotatory inertia piezoelectric actuator containing Double Diamond tandem drive mechanism, including overhead gage 1, lower baffle plate 4, fixing
The Double Diamond tandem drive mechanism 2 being assemblied between overhead gage 1 and lower baffle plate 4, rotating output shaft 9 is by upper bearing (metal) 8 and lower bearing 7
It is connected with overhead gage 1 and lower baffle plate 4 respectively；Described Double Diamond tandem drive mechanism 2 comprises series connection Double Diamond ring 5, part in it
Other interference fit has left piezoelectric pile 3 and right piezoelectric pile 6, left piezoelectric pile 3 and right piezoelectric pile 6 joining place of connecting to be provided with brake pad
10；Brake pad 10 side contacts with rotating output shaft 9 closely, described left piezoelectric pile 3 and the installation direction of right piezoelectric pile 6 and friction
The side that block 10 contacts with rotating output shaft 9 is parallel；By controlling left piezoelectric pile 3 and the voltage sequential of right piezoelectric pile 6 and amplitude,
The actuator continuous bidirectional rotation of band dynamic load can be made.
When described left piezoelectric pile 3 and right piezoelectric pile 6 are in power-off, belong between rotating output shaft 9 and brake pad 10 side
Linear contact lay, is in close contact and there is stiction, and now rotating output shaft 9 can bear certain outer load, assigns at powering-off state
To reliable clamper.
In described Double Diamond tandem drive mechanism 2, realize rotary motion by controlling two piezoelectric pile simultaneously, compensate for Pedicellus et Pericarpium Trapae
The response of shape mechanism is not enough slowly, it is possible to make inertia actuator angular distance in bidirectional rotation and response speed keep consistent.
The start method of the described rotatory inertia piezoelectric actuator containing Double Diamond tandem drive mechanism, when being not powered on, rotation
Transfer shaft 9 and be in initial clamping state；When starting start, the first step, at the beginning of applying left piezoelectric pile 3 and right piezoelectric pile 6 simultaneously
Beginning balanced voltage, now both are relative, and active force is cancelled out each other, and brake pad 10 is in situ and keeps phase with rotating output shaft 9
To static；Second step, the most simultaneously to the power-off of left piezoelectric pile 3, right piezoelectric pile 6 up voltage, to full stroke voltage, now rubs
Block 10 moves in piezoelectric pile 3 direction the most to the left, owing to the stiction between brake pad 10 and rotating output shaft 9 is defeated more than rotating
Shaft 9 moves required inertia force with brake pad 10, and rotating output shaft 9 is driven and drive load counterclockwise by brake pad 10
Rotate to an angle；3rd step, the most simultaneously to left piezoelectric pile 3 up voltage to initial balance voltage, voltage drops in right piezoelectric pile 6
To initial balance voltage, now brake pad 10 is promptly kept in the center, due to the static friction between brake pad 10 and rotating output shaft 9
Power is moved required inertia force with brake pad 10 much smaller than rotating output shaft 9, and this process time is the ofest short duration, rotates defeated
Shaft 9 can be kept essentially stationary, and thus achieves the complete rotation that rotating output shaft 9 is counterclockwise；Repeat second and third
Step, it is possible to make rotating output shaft 9 drive load to rotate, after driving completes, simultaneously to left piezoelectric pile 3 and right pressure the most counterclockwise
Pile 6 power-off, rotating output shaft 9 recovers initial clamping state；Similarly, left piezoelectric pile 3 and the energising side of right piezoelectric pile 6 are exchanged
Formula, rotating output shaft 9 can drive load the most clockwise, realizes the bidirectional rotation inertia start under automatically controlled mode with this.
Compared to the prior art, present invention have the advantage that
1) present invention has power-off clamper function.When left piezoelectric pile 3 and right piezoelectric pile 6 are in power-off, rotating output shaft 9
And brake pad 10 belongs to linear contact lay between side, is in close contact and there is stiction, and now rotating output shaft 9 can bear necessarily
Outer load, is issued to reliable clamper at powering-off state.Change general piezoelectric actuator energising clamper and power-off unlock present situation,
Power-off clamper function is demand common in common engineering application.
2) present invention can contain mismachining tolerance, assembling during adjustment clamping state initial to actuator range request not
Height, greatly reduces processing and the difficulty of assembling；Inside configuration space utilization is reasonable, and volume is little, light weight, and simple in construction is tight
Gather.
3), in the Double Diamond tandem drive mechanism 2 of the present invention, rotary motion is realized, more by controlling two piezoelectric pile simultaneously
Mend rhombus-mechanism response not enough slowly, it is possible to make inertia actuator angular distance in bidirectional rotation and response speed keep one
Cause, it is achieved rapidly, stablize and drive load exactly.
Accompanying drawing explanation
Fig. 1 is present configuration partial sectional view.
Fig. 2 is present configuration axonometric chart.
Fig. 3 is Double Diamond of the present invention tandem drive mechanism axonometric chart.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
As shown in Figure 1, Figure 2 and Figure 3, the present invention is containing the rotatory inertia piezoelectric actuator of Double Diamond tandem drive mechanism, bag
Include overhead gage 1, lower baffle plate 4, upper bearing (metal) 8, lower bearing 7, rotating output shaft 9, Double Diamond tandem drive mechanism 2, left piezoelectric pile 3 and
Right piezoelectric pile 6；Described Double Diamond tandem drive mechanism 2 comprises series connection Double Diamond ring 5, and inside it, interference fit has left piezoelectricity respectively
Heap 3 and right piezoelectric pile 6, joining place of connecting there is brake pad 10 in both；The rotating output shaft 9 of actuator by upper bearing (metal) 8 and under
Bearing 7 is connected with overhead gage 1 and lower baffle plate 4 respectively, and Double Diamond tandem drive mechanism 2 is fixing is assemblied in overhead gage 1 and lower baffle plate 4
Between, now brake pad 10 side contacts with rotating output shaft 9 closely, described left piezoelectric pile 3 and the installation direction of right piezoelectric pile 6
Parallel with the side that brake pad 10 and rotating output shaft 9 contact；By controlling left piezoelectric pile 3 and the voltage sequential of right piezoelectric pile 6
And amplitude, it is possible to make the actuator continuous bidirectional rotation of band dynamic load.
When described left piezoelectric pile 3 and right piezoelectric pile 6 are in power-off, belong between rotating output shaft 9 and brake pad 10 side
Linear contact lay, is in close contact and there is stiction, and now rotating output shaft 9 can bear certain outer load, assigns at powering-off state
To reliable clamper.
In described Double Diamond tandem drive mechanism 2, realize rotary motion by controlling two piezoelectric pile simultaneously, compensate for Pedicellus et Pericarpium Trapae
The response of shape mechanism is not enough slowly, it is possible to make inertia actuator angular distance in bidirectional rotation and response speed keep consistent.
Below the start method of the present invention is described in detail:
When being not powered on, rotating output shaft 9 is initially in clamping state；During for driving load to rotate counterclockwise, the first step, with
Time left piezoelectric pile 3 and right piezoelectric pile 6 applied initial balance voltage, now both relatively, active force is cancelled out each other, brake pad 10
It is in situ and keeps geo-stationary with rotating output shaft 9；Second step, the most simultaneously to the power-off of left piezoelectric pile 3, right piezoelectric pile
6 up voltages are to full stroke voltage, and now brake pad 10 moves in piezoelectric pile 3 direction the most to the left, due to brake pad 10 and rotation
Stiction between output shaft 9 moves required inertia force with brake pad 10 more than rotating output shaft 9, rotating output shaft 9
Driven and drive load to rotate to an angle counterclockwise by brake pad 10；3rd step, the most simultaneously to left piezoelectric pile 3 up voltage
To initial balance voltage, right piezoelectric pile 6 drops voltage to initial balance voltage, and now brake pad 10 is promptly kept in the center, due to
Stiction between brake pad 10 and rotating output shaft 9 is much smaller than being used to needed for rotating output shaft 9 moves with brake pad 10
Property power, and this process time is the ofest short duration, rotating output shaft 9 can be kept essentially stationary, and thus achieves rotating output shaft 9 inverse
Complete rotation of hour hands；Repeat second and third step, it is possible to make rotating output shaft 9 drive load to rotate, when driving the most counterclockwise
After having moved, simultaneously to left piezoelectric pile 3 and right piezoelectric pile 6 power-off, rotating output shaft 9 recovers initial clamping state.Negative for driving
When load turns clockwise, the first step, right piezoelectric pile 6 and left piezoelectric pile 3 are applied initial balance voltage, now both phases simultaneously
Right, active force is cancelled out each other, and brake pad 10 is in situ and keeps geo-stationary with rotating output shaft 9；Second step, same lentamente
Time to the power-off of right piezoelectric pile 6, left piezoelectric pile 3 up voltage to full stroke voltage, now brake pad 10 piezoelectric pile 6 side the most to the right
To movement, owing to the stiction between brake pad 10 and rotating output shaft 9 moves with brake pad 10 more than rotating output shaft 9
Required inertia force, rotating output shaft 9 is driven and drives load to turn clockwise certain angle by brake pad 10；3rd step, fast
Fastly simultaneously to right piezoelectric pile 6 up voltage to initial balance voltage, left piezoelectric pile 3 drops voltage to initial balance voltage, now rubs
Cleaning block 10 is promptly kept in the center, owing to the stiction between brake pad 10 and rotating output shaft 9 is much smaller than rotating output shaft 9
Moving required inertia force with brake pad 10, and this process time is the ofest short duration, rotating output shaft 9 can keep not substantially
Dynamic, thus achieve the clockwise complete rotation of rotating output shaft 9；Repeat second and third step, it is possible to make rotating output shaft
9 drive load to rotate the most clockwise, after driving completes, simultaneously to right piezoelectric pile 6 and left piezoelectric pile 3 power-off, rotate output
Axle 9 recovers initial clamping state, realizes the bidirectional rotation inertia start under automatically controlled mode with this.
Claims (4)
1. the rotatory inertia piezoelectric actuator containing Double Diamond tandem drive mechanism, it is characterised in that: include overhead gage (1),
Lower baffle plate (4), Double Diamond tandem drive mechanism (2) being securely fitted between overhead gage (1) and lower baffle plate (4), rotating output shaft
(9) it is connected with overhead gage (1) and lower baffle plate (4) respectively by upper bearing (metal) (8) and lower bearing (7)；Described Double Diamond tandem drive
Mechanism (2) comprises series connection Double Diamond ring (5), and inside it, interference fit has left piezoelectric pile (3) and right piezoelectric pile (6), left pressure respectively
Pile (3) and right piezoelectric pile (6) series connection joining place are provided with brake pad (10)；Brake pad (10) side and rotating output shaft (9)
Closely, the installation direction of described left piezoelectric pile (3) and right piezoelectric pile (6) connects with brake pad (10) and rotating output shaft (9) in contact
The side touched is parallel；By controlling left piezoelectric pile (3) and the voltage sequential of right piezoelectric pile (6) and amplitude, it is possible to make actuator band
The continuous bidirectional rotation of dynamic load.
Rotatory inertia piezoelectric actuator containing Double Diamond tandem drive mechanism the most according to claim 1, it is characterised in that:
When described left piezoelectric pile (3) and right piezoelectric pile (6) are in power-off, belong between rotating output shaft (9) and brake pad (10) side
Linear contact lay, is in close contact and there is stiction, and now rotating output shaft (9) can bear certain outer load, under powering-off state
Reach reliable clamper.
Rotatory inertia piezoelectric actuator containing Double Diamond tandem drive mechanism the most according to claim 1, it is characterised in that:
In described Double Diamond tandem drive mechanism (2), realize rotary motion by controlling two piezoelectric pile simultaneously, compensate for rhombus-mechanism
Response is not enough slowly, it is possible to make inertia actuator angular distance in bidirectional rotation and response speed keep consistent.
4. the start method of the rotatory inertia piezoelectric actuator containing Double Diamond tandem drive mechanism described in claim 1, it is special
Levying and be: when being not powered on, rotating output shaft (9) is in initial clamping state；When starting start, the first step, simultaneously to left piezoelectricity
Heap (3) and right piezoelectric pile (6) apply initial balance voltage, and now both are relative, and active force is cancelled out each other, and brake pad (10) is in
Keep geo-stationary in situ and with rotating output shaft (9)；Second step, the most simultaneously to left piezoelectric pile (3) power-off, right piezoelectric pile
(6) up voltage is to full stroke voltage, and now brake pad (10) piezoelectric pile the most to the left (3) direction is moved, due to brake pad
(10) stiction and between rotating output shaft (9) is more than being used to needed for rotating output shaft (9) moves with brake pad (10)
Property power, rotating output shaft (9) by brake pad (10) drive and drive load rotate to an angle counterclockwise；3rd step, promptly
Simultaneously to left piezoelectric pile (3) up voltage to initial balance voltage, right piezoelectric pile (6) fall voltage, to initial balance voltage, now rubs
Cleaning block (10) is promptly kept in the center, owing to the stiction between brake pad (10) and rotating output shaft (9) is defeated much smaller than rotating
Shaft (9) moves required inertia force with brake pad (10), and this process time is the ofest short duration, rotating output shaft (9) meeting
It is kept essentially stationary, thus achieves the complete rotation that rotating output shaft (9) is counterclockwise；Repeat second and third step, it is possible to
Rotating output shaft (9) is made to drive load to rotate, after driving completes, simultaneously to left piezoelectric pile (3) and right piezoelectricity the most counterclockwise
Heap (6) power-off, rotating output shaft (9) recovers initial clamping state；Similarly, left piezoelectric pile (3) and right piezoelectric pile (6) are exchanged
Step mode, rotating output shaft (9) can drive load the most clockwise, realizes the bidirectional rotation inertia under automatically controlled mode with this
Start.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610530701.5A CN106208806B (en) | 2016-07-06 | 2016-07-06 | The rotatory inertia piezoelectric actuator and start method of the mechanism of tandem drive containing Double Diamond |
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| CN201610530701.5A CN106208806B (en) | 2016-07-06 | 2016-07-06 | The rotatory inertia piezoelectric actuator and start method of the mechanism of tandem drive containing Double Diamond |
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| CN106208806A true CN106208806A (en) | 2016-12-07 |
| CN106208806B CN106208806B (en) | 2018-03-09 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106911264A (en) * | 2017-04-01 | 2017-06-30 | 西安交通大学 | Small-sized single piezoelectric stack drive-type bidirectional rotation inertia actuator and start method |
| CN107222126A (en) * | 2017-05-18 | 2017-09-29 | 西安交通大学 | Antisymmetry arranges the driving bidirectional rotation inertia actuator of formula list piezoelectric pile |
| CN107623461A (en) * | 2017-09-05 | 2018-01-23 | 西安交通大学 | A kind of shearing-type inertial piezoelectric rotary actuator and start method |
| CN110707963A (en) * | 2019-10-21 | 2020-01-17 | 西安交通大学 | Self-locking high-thrust linear actuator driven based on inertia type principle and actuating method |
| DE102021113751A1 (en) | 2021-05-27 | 2022-12-01 | Physik Instrumente (PI) GmbH & Co KG | Drive device, drive motor and method for driving a spindle |
| DE102022112809A1 (en) | 2022-05-20 | 2023-11-23 | Physik Instrumente (PI) GmbH & Co KG | Drive device, drive system, actuating system and drive motor |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106911264A (en) * | 2017-04-01 | 2017-06-30 | 西安交通大学 | Small-sized single piezoelectric stack drive-type bidirectional rotation inertia actuator and start method |
| CN106911264B (en) * | 2017-04-01 | 2019-04-09 | 西安交通大学 | Small-sized list piezoelectric stack drive-type bidirectional rotation inertia actuator and actuation method |
| CN107222126A (en) * | 2017-05-18 | 2017-09-29 | 西安交通大学 | Antisymmetry arranges the driving bidirectional rotation inertia actuator of formula list piezoelectric pile |
| CN107222126B (en) * | 2017-05-18 | 2018-03-16 | 西安交通大学 | The driving bidirectional rotation inertia actuator of antisymmetry arrangement formula list piezoelectric pile and method |
| CN107623461A (en) * | 2017-09-05 | 2018-01-23 | 西安交通大学 | A kind of shearing-type inertial piezoelectric rotary actuator and start method |
| CN110707963A (en) * | 2019-10-21 | 2020-01-17 | 西安交通大学 | Self-locking high-thrust linear actuator driven based on inertia type principle and actuating method |
| DE102021113751A1 (en) | 2021-05-27 | 2022-12-01 | Physik Instrumente (PI) GmbH & Co KG | Drive device, drive motor and method for driving a spindle |
| WO2022248711A1 (en) | 2021-05-27 | 2022-12-01 | Physik Instrumente (Pi) Gmbh & Co. Kg | Drive device, drive motor and method for driving a spindle |
| DE102022112809A1 (en) | 2022-05-20 | 2023-11-23 | Physik Instrumente (PI) GmbH & Co KG | Drive device, drive system, actuating system and drive motor |
| WO2023222925A1 (en) | 2022-05-20 | 2023-11-23 | Physik Instrumente (Pi) Gmbh & Co. Kg | Drive device, drive system, control system and drive motor |
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Effective date of registration: 20240313 Address after: 1st Floor, Northwest Building of Eleven Science and Technology, No. 532 Shenzhousan Road, National Civil Aerospace Industry Base, Xi'an City, Shaanxi Province, 710100 Patentee after: XI'AN LANGWEI TECHNOLOGY Co.,Ltd. Country or region after: China Address before: 710049 No. 28, Xianning Road, Xi'an, Shaanxi Patentee before: XI'AN JIAOTONG University Country or region before: China |