CN106067327B - The mechanical device of heavy-caliber optical grating oversquare nano-precision decoupling splicing - Google Patents
The mechanical device of heavy-caliber optical grating oversquare nano-precision decoupling splicing Download PDFInfo
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- CN106067327B CN106067327B CN201610352556.6A CN201610352556A CN106067327B CN 106067327 B CN106067327 B CN 106067327B CN 201610352556 A CN201610352556 A CN 201610352556A CN 106067327 B CN106067327 B CN 106067327B
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- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
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Abstract
The mechanical device of heavy-caliber optical grating oversquare nano-precision decoupling splicing, it is therefore an objective to solve the problems, such as that heavy-caliber optical grating splicing cannot achieve the decoupling adjustment of nano-precision multiple degrees of freedom.Multivariant adjustment is realized that flexible stanchions and two piezoelectric ceramic actuators one are connected to the first and second platform, the rotation of the stretch each X for controlling the first platform, Y-direction of two piezoelectric ceramic actuators one by three motion platforms；Second platform is connect by two elastic reeds and two piezoelectric ceramic actuators two with third platform, is suspended in the second platform in third platform, and two piezoelectric ceramic actuators two can adjust X-direction translation and Z-direction rotation；There are one piezoelectric ceramic actuators three to be responsible for Y-direction translation between third platform and marble pedestal.The present invention can realize accurate adjustment of the grating within the scope of 0.05~+0.05mm oversquares, and can realize the translation splicing precision of 10 nanometers of grating.High-accuracy multiple-degree-of-freedom decoupling adjustment of the present invention for heavy-caliber optical grating splicing.
Description
Technical field
The present invention relates to a kind of mechanical device of heavy-caliber optical grating decoupling splicing, specially a kind of heavy-caliber optical grating is realized super
The mechanical device of nano-precision decoupling splicing under the conditions of short stroke.
Background technology
In recent years, improve with the continuous development of science and technology, the especially land of some large-scale high-tech engineering projects
It is continuous to carry out, such as the needs in terms of astrophysics, the needs of synchrotron radiation engineering, the needs of laser fusion facility project, to spreading out
Penetrating the technical performance of grating, more stringent requirements are proposed.Moreover, applicable large size diffraction grating can be obtained, have become shadow
Ring the key of these large-scale high-tech engineering project success or failure.Simultaneously as these large construction projects are to large size diffraction grating
There is an urgent need to make development large size diffraction grating become one of the key subjects of international raster domain.
Grating splicing is highly important key technology in national defence and civil field, and foreign countries' starting is more early than domestic, but
Technology blockage is implemented to China to a certain extent.Currently, domestic, there has been no heavy-caliber optical grating oversquares to realize nanoscale
The essence application of precision decoupling splicing.Thus, it is urgent necessary to the development of this technology to develop relevant mechanical device.
Invention content
The purpose of the present invention is cannot achieve the decoupling adjustment of nano-precision multiple degrees of freedom to solve heavy-caliber optical grating splicing
The problem of, a kind of mechanical device of heavy-caliber optical grating oversquare nano-precision decoupling splicing is provided.
Realize above-mentioned purpose, the technical scheme is that：
Heavy-caliber optical grating oversquare nano-precision decoupling splicing mechanical device, it include marble pedestal, grating,
Two grating seats and three motion platforms；Three motion platforms be respectively the first motion platform, the second motion platform and
Third motion platform；First motion platform includes the first platform and two piezoelectric ceramic actuators one；Described second
Motion platform includes the second platform, a flexible stanchions, two elastic reeds and two piezoelectric ceramic actuators two；Described
Three motion platforms include third platform and piezoelectric ceramic actuator three；The marble pedestal include marble pedestal, three pieces
Grating seat support plate and two pieces of aluminium alloy plates；Three pieces of grating seat support plates are grating seat support plate one, grating seat respectively
Support plate two and grating seat support plate three, described two pieces of aluminium alloy plates are aluminium alloy plate one and aluminium alloy plate two respectively；It is described
The grating setting that mutually reclined side by side by two grating monomers or so constitute, the grating monomer for being located at left side is dynamic grating, is located at the right side
The grating monomer of side is quiet grating；
The dynamic grating and quiet grating are mounted on corresponding grating seat, are equipped under the grating seat of quiet grating
End is connected and fixed on three upper surface of grating seat support plate, and the lower end for being equipped with the grating seat of dynamic grating is connected and fixed on the first platform
Upper surface；The flexible stanchions and two piezoelectric ceramic actuators one are arranged between the first platform and the second platform, institute
The second platform stated is located at the lower section of the first platform, two flexible hinges on flexible stanchions and two piezoelectric ceramic actuators
One connect with the first platform with the second platform simultaneously, to realize splicing of the grating in X, Y both direction rotational freedom；Institute
The third platform stated is hollow structure, and for the second platform suspension in the notch of third platform, second platform passes through two
A elastic reed and two piezoelectric ceramic actuators two are connect with third platform, and the third platform is fastened on marble
Base upper surface, the grating seat support plate one are placed on marble base upper surface, the grating seat support plate two patch
On the right side for being placed on marble pedestal, grating seat support plate one and grating seat support plate two are placed in parallel, and the two top
Portion is aligned, bottom not in same level, the leading flank of aluminium alloy plate one and grating seat support plate one and marble pedestal
Leading flank connects, and grating seat support plate two connect with marble pedestal right side, aluminium alloy plate two and grating seat support plate one and
Grating seat support plate two connects, and aluminium alloy plate two is arranged in the surface of aluminium alloy plate one；The grating seat support plate three
It is connect with the upper surface of grating seat support plate one and grating seat support plate two, the both ends of the piezoelectric ceramic actuator three and the
Three platforms and grating seat support plate two connect.
The advantageous effect of the present invention compared with the existing technology is：The present invention have stroke it is short, it is compact-sized, easy to adjust,
The advantages that operation is flexible, without coupling degree of freedom, achievable nano-precision, the present invention is used for the high-precision of heavy-caliber optical grating splicing
Multiple degrees of freedom decoupling adjustment, may be implemented spliced grating in five, space degree of freedomDirection
On multiple degrees of freedom high-precision attitude adjustment.
Description of the drawings
Fig. 1 is the integrally-built axonometric drawing of the present invention；
Fig. 2 is the integrally-built front view of the present invention；
Fig. 3 is the M-M sectional views of Fig. 2；
Fig. 4 is the partial sectional view of the grating of the present apparatus and the connection type of grating seat；
Fig. 5 is the integrally-built upward view of the present invention；
Fig. 6 is the partial view of the integrally-built right view of the present invention；
Fig. 7 is the integrally-built left view of the present invention；
Fig. 8 is partial enlarged view at the A of Fig. 1；
Fig. 9 is partial enlarged view at the B of Fig. 1；
Figure 10 is partial enlarged view at the C of Fig. 1；
Figure 11 is partial enlarged view at the D of Fig. 2；
Figure 12 is partial enlarged view at the E of Fig. 2；
Figure 13 is partial enlarged view at the F of Fig. 2；
Figure 14 is partial enlarged view at the G of Fig. 2；
Figure 15 is partial enlarged view at the H of Fig. 3；
Figure 16 is partial enlarged view at the I of Fig. 3；
Figure 17 is partial enlarged view at the J of Fig. 7；
Figure 18 is partial enlarged view at the K of Fig. 7.
In figure：Grating seat support plate 21, piezoelectric ceramic actuator 32, spring washer 3, thread bush 4, grating seat support plate
One 5, elastic reed 6, marble pedestal 7, the second platform 8, piezoelectric ceramic actuator 29, piezoelectric ceramic actuator 1, third
Platform 11, flexible stanchions 12, the first platform 13, grating seat 14, boss 14-1, aluminium alloy plate 2 15, rubber press 16, grating
17, grating monomer 17-1, aluminium alloy plate 1, grating seat support plate 3 19.
Each coordinate is directed toward explanation in figure, and coordinate Z is directed toward：Refer to from apparatus of the present invention it is parallel with the groove direction of grating 17 to
On direction；The direction of coordinate X：Direction perpendicular to 17 surface of grating；The direction of coordinate Y：The direction of two gratings 17 side by side；
Dependent coordinate direction instruction in Fig. 1 referring to indicating.
Specific implementation mode
Specific implementation mode one：As shown in Fig. 1~Figure 18, present embodiment discloses a kind of heavy-caliber optical grating oversquare
The mechanical device of nano-precision decoupling splicing, it includes that marble pedestal, 17, two grating seats 14 of grating and three movements are flat
Platform；Three motion platforms are the first motion platform, the second motion platform and third motion platform respectively；Described first
Motion platform includes the first platform 13 and two piezoelectric ceramic actuators 1；Second motion platform includes the second platform
8,12, two elastic reeds 6 of a flexible stanchions and two piezoelectric ceramic actuators 29；The third motion platform includes
Third platform 11 and piezoelectric ceramic actuator 32；The marble pedestal includes 7, three pieces of grating seat supports of marble pedestal
Plate and two pieces of aluminium alloy plates；Three pieces of grating seat support plates are grating seat support plate 1, grating seat support plate 21 respectively
With grating seat support plate 3 19, described two pieces of aluminium alloy plates are aluminium alloy plate 1 and aluminium alloy plate 2 15 respectively；Described
Grating 17 constitutes (grating 17 for constituting splicing) by two grating monomer 17-1 or so the setting that mutually reclines side by side, is located at the light in left side
Grid monomer 17-1 is dynamic grating, and the grating monomer 17-1 for being located at right side is quiet grating；
The dynamic grating and quiet grating are mounted on corresponding grating seat 14, are equipped with the grating seat 14 of quiet grating
Lower end (passing through screw three) be connected and fixed on 3 19 upper surface of grating seat support plate, be equipped under the grating seat 14 of dynamic grating
End (passing through screw four) is connected and fixed on 13 upper surface of the first platform；The flexible stanchions 12 and two piezoelectric ceramic actuators
One 10 are arranged between the first platform 13 and the second platform 8, and second platform 8 is located at the lower section of the first platform 13, soft
Property pillar 12 on two flexible hinges and two piezoelectric ceramic actuators 1 simultaneously it is flat with the first platform 13 and second
Platform 8 connects, to realize grating 17 in X, Y both direction rotational freedomSplicing；The third platform 11
For hollow structure, the second platform 8 is suspended in the notch of third platform 11, and second platform 8 passes through two elastic pieces
Spring 6 and two piezoelectric ceramic actuators 29 are connect with third platform 11, and the third platform 11 (passing through screw five) connection is solid
It is scheduled on 7 upper surface of marble pedestal, the grating seat support plate 1 is placed on 7 upper surface of marble pedestal, the grating
Seat supports plate 21, which reclines, to be placed on the right side of marble pedestal 7, and grating seat support plate 1 and grating seat support plate 21 are flat
Row is placed, and alignment at the top of the two, and bottom is not in same level, before aluminium alloy plate 1 and grating seat support plate 1
The leading flank (passing through screw six) of side and marble pedestal 7 connects, grating seat support plate 21 and 7 right side of marble pedestal
(passing through screw seven) connects, and aluminium alloy plate 2 15 connects with grating seat support plate 1 and grating seat support plate 21 (passing through screw eight)
It connects, and aluminium alloy plate 2 15 is arranged in the surface of aluminium alloy plate 1；The grating seat support plate 3 19 and grating seat branch
Fagging 1 is connected with the upper surface of grating seat support plate 21, both ends and the third platform of the piezoelectric ceramic actuator 32
11 and the connection of grating seat support plate 21 (third platform 11 under the driving of piezoelectric ceramic actuator 32, on marble pedestal 7
It is translatable along Y-direction, to realize that grating 17 is translatable in Y-directionSplicing).
Since third platform 11 is that rotational stiffness at square shape and four angles of cut is weakened, be equivalent to become one it is parallel
Four-bar mechanism will produce so the power output of piezoelectric ceramic actuator 32 is equivalent to is applied with a turning moment to square shape
The translation of Z-direction, but the groove direction that the translation of Z-direction is grating 17, splicing is required not influence, so the present apparatus
The decoupling adjustment of 17 5 degree of freedom of grating may be implemented.
Specific implementation mode two：As shown in Figure 1, Figure 2, shown in Fig. 4, Fig. 7, Fig. 8, Figure 11 and Figure 17, one institute of specific implementation mode
The mechanical device for the heavy-caliber optical grating oversquare nano-precision decoupling splicing stated, each grating monomer 17-1's is upper
Along the longitudinal direction (i.e. left and right directions) of grating monomer 17-1, respectively there are one grooves for processing for lower surface, are arranged in two grating monomer 17-1
Two grooves of upper surface are oppositely arranged, and two grooves two lower surfaces grating monomer 17-1 are arranged and are oppositely arranged, each
There are two rubber press 16 for fastening setting in the groove；The top and bottom of each grating seat 14 are respectively equipped with
Two boss 14-1, the boss 14-1 described in four on each grating seat 14 is prominent to the front side of grating seat 14, Mei Gesuo
The boss 14-1 stated corresponds to the rubber press 16 described in one, and each rubber press 16 passes through fastener with corresponding boss 14-1
(fastener is screw nine) is tight (16 lower part of rubber press generation flexible deformation, so that rubber press 16 and grating monomer 17-1
It compresses；The thickness of rubber press 16 is slightly larger than the recess width of grating monomer 17-1.After installation, each grating monomer 17-1 passes through
Four 16 collective effects of rubber press make grating monomer 17-1 laterally fasten).
Specific implementation mode three：As shown in Figure 1, Figure 2 and shown in Fig. 7, the heavy-caliber optical grating described in specific implementation mode one is ultrashort
Stroke nanometer class precision decoupling splicing mechanical device, 12 axial line of flexible stanchions setting the first platform 13 and on
At the center of gravity line of part totality.Flexible stanchions 12 play main support, in order to avoid piezoelectric ceramics bear precompressed or
Pulling force.
Specific implementation mode four：As shown in Figure 1, Figure 2, shown in Fig. 7, Fig. 8 and Figure 10, the heavy caliber described in specific implementation mode one
The mechanical device of grating oversquare nano-precision decoupling splicing, the both ends of the flexible stanchions 12 be each provided with one it is soft
Property hinge, 12 both ends of flexible stanchions pass through flexible hinge described in two and the first platform 13 and the second platform 8 (passing through bolt)
Connection.
Specific implementation mode five：As shown in Fig. 1~Fig. 3 and Figure 10, the heavy-caliber optical grating described in specific implementation mode one is super
The mechanical device of short stroke nano-precision decoupling splicing, the two of one of described two elastic reeds 6 elastic reed 6
End is connect with the slot left side (passing through screw ten) of the left side of the second platform 8 and third platform 11, two elastic reeds 6 it is another
The both ends of one elastic reed 6 connect with the right side of the second platform 8 and the slot right side (passing through screw 11) of third platform 11
It connects (so that third platform 11 is the structure with flexible hinge, the second platform 8 is not contacted with third platform 11), and two elasticity
Leaf spring 6 is symmetrical arranged, and the trailing flank of one end of two piezoelectric ceramic actuators 29 with the second platform 8 (passes through screw
Two) 10 connect, the other ends of two piezoelectric ceramic actuators 29 with the slot trailing flank of third platform 11 (passing through screw 13)
Connection, (2 9 collective effect of piezoelectric ceramic actuator of two antithesis arrangement is real for two 29 antithesis of piezoelectric ceramic actuator arrangements
Existing grating 17 along X to translationIt is rotated with Z-direction)。
Specific implementation mode six：As shown in Fig. 1~Fig. 3, Figure 15 and Figure 16, the heavy caliber light described in specific implementation mode one
The mechanical device of grid oversquare nano-precision decoupling splicing, the leading flank of the marble pedestal 7 and right side difference
Multiple unthreaded holes are machined with, there are one the thread bush 4 with threaded hole, the grating seat supports for bonding in each unthreaded hole
Multiple threaded holes are machined on plate 1, on the leading flank of multiple threaded holes in grating seat support plate 1 and marble pedestal 7
Multiple unthreaded holes correspond and be coaxially disposed respectively, be machined with multiple through-holes, aluminium alloy plate on the aluminium alloy plate 1
Multiple through-holes on one 18 are corresponded and are coaxially disposed respectively, aluminium alloy with multiple unthreaded holes on 7 leading flank of marble pedestal
Screw one is housed, aluminium alloy plate 1 is corresponding in grating seat support plate 1 by screw one in each through-hole of plate 1
Thread bush 4 on threaded hole and marble pedestal leading flank in corresponding unthreaded hole is threadedly coupled；The grating seat support plate 21
On be machined with multiple counter sinks, multiple counter sinks in grating seat support plate 21 with it is multiple on the right side of marble pedestal 7
Unthreaded hole is corresponded and is coaxially disposed respectively, and screw two is housed in each counter sink of grating seat support plate 21, screw two with it is heavy
Spring washer 3 is housed, grating seat support plate 21 passes through the unthreaded hole corresponding with 7 right side of marble pedestal of screw two between head bore
Interior thread bush 4 is threadedly coupled.
The present invention is suitable for the grating of bore 300mm x400mm.
The present invention claims gratings 17 to realize that (pre-assembled refers to by quiet grating for preliminary installation before being spliced by pre-assembled
It is all assembled with all kinds of machine components, then the relative position error of quiet grating and dynamic grating will move in ± 50 μ ms
Grating carries out high-precision joining with quiet grating), the piezoelectric ceramic actuator after installation (refers to piezoelectric ceramic actuator 29 and pressure
2) the accurate adjustment within the scope of -0.05~+0.05mm oversquares may be implemented in electroceramics driver 3.
As a result of two piezoelectric ceramic actuators 29, and combine on two elastic reeds 6 and flexible stanchions 12
10 nanometers of translation splicing precision may be implemented in flexible hinge structure, grating 17.
Although the present invention has been disclosed in the preferred embodiments as above, what however, it is not intended to limit the invention, art technology
Personnel can also do other variations in spirit of that invention, and be applied in the unmentioned field of the present invention, certainly, these according to
The variation done according to spirit of that invention should be all included in scope of the present invention.
Claims (6)
1. a kind of mechanical device of heavy-caliber optical grating oversquare nano-precision decoupling splicing, it is characterised in that：It includes big
Reason stone pedestal, grating（17）, two grating seats（14）And three motion platforms；Three motion platforms are the first fortune respectively
Moving platform, the second motion platform and third motion platform；First motion platform includes the first platform（13）And two pressures
Electroceramics driver one（10）；Second motion platform includes the second platform（8）, a flexible stanchions（12）, two bullets
Property leaf spring（6）And two piezoelectric ceramic actuators two（9）；The third motion platform includes third platform（11）And piezoelectricity pottery
Porcelain driver three（2）；The marble pedestal includes marble pedestal（7）, three blocks of grating seat support plate and two blocks of aluminium alloys
Plate；Three pieces of grating seat support plates are grating seat support plate one respectively（5）, grating seat support plate two（1）With grating seat branch
Fagging three（19）, two pieces of aluminium alloy plates are aluminium alloy plate one respectively（18）With aluminium alloy plate two（15）；The grating
（17）By two grating monomers（17-1）Left and right mutually reclines to be arranged side by side and constitute, and is located at the grating monomer in left side（17-1）To move light
Grid are located at the grating monomer on right side（17-1）For quiet grating；
The dynamic grating and quiet grating are mounted on corresponding grating seat（14）On, the grating seat of quiet grating is installed（14）
Lower end be connected and fixed on grating seat support plate three（19）Upper surface is equipped with the grating seat of dynamic grating（14）Lower end connection it is solid
Due to the first platform（13）Upper surface；The flexible stanchions（12）And two piezoelectric ceramic actuators one（10）It is arranged at
One platform（13）With the second platform（8）Between, second platform（8）Positioned at the first platform（13）Lower section, flexible stanchions
（12）On two flexible hinges and two piezoelectric ceramic actuators one（10）Simultaneously with the first platform（13）It is flat with second
Platform（8）Connection, to realize grating（17）X、YThe splicing of both direction rotational freedom；The third platform（11）For
Hollow structure, the second platform（8）It is suspended in third platform（11）Notch in, second platform（8）Pass through two bullets
Property leaf spring（6）With two piezoelectric ceramic actuators two（9）With third platform（11）Connection, the third platform（11）Connection is solid
It is scheduled on marble pedestal（7）Upper surface, the grating seat support plate one（5）It is placed on marble pedestal（7）Upper surface, it is described
Grating seat support plate two（1）It reclines and is placed on marble pedestal（7）Right side on, grating seat support plate one（5）And grating
Seat supports plate two（1）It is placed in parallel, and alignment at the top of the two, bottom is not in same level, aluminium alloy plate one（18）With light
Grid seat supports plate one（5）Leading flank and marble pedestal（7）Leading flank connection, grating seat support plate two（1）With marble
Pedestal（7）Right side connects, aluminium alloy plate two（15）With grating seat support plate one（5）With grating seat support plate two（1）Connection, and
Aluminium alloy plate two（15）It is arranged in aluminium alloy plate one（18）Surface；The grating seat support plate three（19）With grating seat branch
Fagging one（5）With grating seat support plate two（1）Upper surface connection, the piezoelectric ceramic actuator three（2）Both ends and the
Three platforms（11）And grating seat support plate two（1）Connection.
2. the mechanical device of heavy-caliber optical grating oversquare nano-precision decoupling splicing according to claim 1, special
Sign is：Each grating monomer（17-1）Upper and lower surface along grating monomer（17-1）Longitudinal each processing there are one recessed
Slot is arranged in two grating monomers（17-1）Two grooves of upper surface are oppositely arranged, and are arranged in two grating monomers（17-1）
Two grooves of lower surface are oppositely arranged, and there are two rubber press for fastening setting in each groove（16）；Each institute
The grating seat stated（14）Top and bottom be respectively equipped with two boss（14-1）, each grating seat（14）On four described in
Boss（14-1）To grating seat（14）Front side protrude, the boss（14-1）Rubber press described in one corresponding
（16）, each rubber press（16）With corresponding boss（14-1）By fastener tight.
3. the mechanical device of heavy-caliber optical grating oversquare nano-precision decoupling splicing according to claim 1, special
Sign is：The flexible stanchions（12）Axial line is arranged in the first platform（13）On and at the center of gravity line of part totality.
4. the mechanical device of heavy-caliber optical grating oversquare nano-precision decoupling splicing according to claim 1, special
Sign is：The flexible stanchions（12）Both ends be each provided with a flexible hinge, flexible stanchions（12）Both ends pass through two
The flexible hinge and the first platform（13）With the second platform（8）Connection.
5. the mechanical device of heavy-caliber optical grating oversquare nano-precision decoupling splicing according to claim 1, special
Sign is：Two elastic reeds（6）One of elastic reed（6）Both ends and the second platform（8）Left side
And third platform（11）Slot left side connection, two elastic reeds（6）Another elastic reed（6）Both ends and second flat
Platform（8）Right side and third platform（11）The connection of slot right side, and two elastic reeds（6）It is symmetrical arranged, described two
A piezoelectric ceramic actuator two（9）One end with the second platform（8）Trailing flank connection, two piezoelectric ceramic actuators two
（9）The other end with third platform（11）Slot trailing flank connection, two piezoelectric ceramic actuators two（9）It is arranged symmetrically.
6. the mechanical device of heavy-caliber optical grating oversquare nano-precision decoupling splicing according to claim 1, special
Sign is：The marble pedestal（7）Leading flank and right side be machined with multiple unthreaded holes respectively, in the unthreaded hole
There are one the thread bush with threaded hole for bonding（4）, the grating seat support plate one（5）On be machined with multiple threaded holes, light
Grid seat supports plate one（5）On multiple threaded holes and marble pedestal（7）Leading flank on multiple unthreaded holes correspond and point
It is not coaxially disposed, the aluminium alloy plate one（18）On be machined with multiple through-holes, aluminium alloy plate one（18）On multiple through-holes with
Marble pedestal（7）Multiple unthreaded holes on leading flank are corresponded and are coaxially disposed respectively, aluminium alloy plate one（18）Each of it is logical
Screw one, aluminium alloy plate one are housed in hole（18）Pass through screw one and grating seat support plate one（5）Upper corresponding threaded hole and big
Thread bush on reason stone pedestal leading flank in corresponding unthreaded hole（4）It is threadedly coupled；The grating seat support plate two（1）Upper processing
There are multiple counter sinks, grating seat support plate two（1）On multiple counter sinks and marble pedestal（7）Right side on multiple light
Hole corresponds and is coaxially disposed respectively, grating seat support plate two（1）Each counter sink in screw two is housed, screw two with it is heavy
Spring washer is housed between head bore（3）, grating seat support plate two（1）Pass through screw two and marble pedestal（7）Right side corresponds to
Unthreaded hole in thread bush（4）It is threadedly coupled.
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| CN201610352556.6A CN106067327B (en) | 2016-05-25 | 2016-05-25 | The mechanical device of heavy-caliber optical grating oversquare nano-precision decoupling splicing |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102969031A (en) * | 2012-12-12 | 2013-03-13 | 中国科学院光电技术研究所 | Z-theta x-theta y three-degree-of-freedom nanoscale precision two-body workbench |
| CN104464839A (en) * | 2014-10-21 | 2015-03-25 | 清华大学 | Two-dimensional nano flexible motion platform |
| CN105108579A (en) * | 2015-09-25 | 2015-12-02 | 哈尔滨工业大学 | Three-dimensional micrometric displacement adjusting table |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3498911B2 (en) * | 2000-09-21 | 2004-02-23 | ヒーハイスト精工株式会社 | Rotary multi-degree-of-freedom mechanism |
-
2016
- 2016-05-25 CN CN201610352556.6A patent/CN106067327B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102969031A (en) * | 2012-12-12 | 2013-03-13 | 中国科学院光电技术研究所 | Z-theta x-theta y three-degree-of-freedom nanoscale precision two-body workbench |
| CN104464839A (en) * | 2014-10-21 | 2015-03-25 | 清华大学 | Two-dimensional nano flexible motion platform |
| CN105108579A (en) * | 2015-09-25 | 2015-12-02 | 哈尔滨工业大学 | Three-dimensional micrometric displacement adjusting table |
Non-Patent Citations (1)
| Title |
|---|
| 高精度大口径光栅拼接装置的控制算法;邵忠喜，张庆春，白清顺，富宏亚;《光学精密工程》;20090131;第17卷(第1期);158-165 * |
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