CN106057956A - Ionic-liquid-gel-electrolyte-based quasi-solid flexible self-powered ZnO-based ultraviolet detector and preparation method thereof - Google Patents
Ionic-liquid-gel-electrolyte-based quasi-solid flexible self-powered ZnO-based ultraviolet detector and preparation method thereof Download PDFInfo
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- CN106057956A CN106057956A CN201610506459.8A CN201610506459A CN106057956A CN 106057956 A CN106057956 A CN 106057956A CN 201610506459 A CN201610506459 A CN 201610506459A CN 106057956 A CN106057956 A CN 106057956A
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- 239000011245 gel electrolyte Substances 0.000 title claims abstract description 33
- 239000007787 solid Substances 0.000 title claims abstract description 24
- 238000002360 preparation method Methods 0.000 title claims abstract description 11
- 239000002608 ionic liquid Substances 0.000 claims abstract description 45
- 239000000758 substrate Substances 0.000 claims abstract description 45
- 239000013078 crystal Substances 0.000 claims abstract description 20
- 239000000565 sealant Substances 0.000 claims abstract description 10
- VKYKSIONXSXAKP-UHFFFAOYSA-N hexamethylenetetramine Chemical compound C1N(C2)CN3CN1CN2C3 VKYKSIONXSXAKP-UHFFFAOYSA-N 0.000 claims description 20
- NLKNQRATVPKPDG-UHFFFAOYSA-M potassium iodide Chemical compound [K+].[I-] NLKNQRATVPKPDG-UHFFFAOYSA-M 0.000 claims description 15
- 238000003756 stirring Methods 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 235000010299 hexamethylene tetramine Nutrition 0.000 claims description 10
- 239000004312 hexamethylene tetramine Substances 0.000 claims description 10
- 235000013904 zinc acetate Nutrition 0.000 claims description 10
- 239000012530 fluid Substances 0.000 claims description 9
- DJWUNCQRNNEAKC-UHFFFAOYSA-L zinc acetate Chemical class [Zn+2].CC([O-])=O.CC([O-])=O DJWUNCQRNNEAKC-UHFFFAOYSA-L 0.000 claims description 9
- -1 1-methyl-3-propyl group iodate imidazoles Chemical class 0.000 claims description 6
- 239000002202 Polyethylene glycol Substances 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 6
- 229920001223 polyethylene glycol Polymers 0.000 claims description 6
- 238000005566 electron beam evaporation Methods 0.000 claims description 5
- 239000010408 film Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 150000002825 nitriles Chemical class 0.000 claims description 5
- 238000004549 pulsed laser deposition Methods 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000013077 target material Substances 0.000 claims description 2
- ZOIORXHNWRGPMV-UHFFFAOYSA-N acetic acid;zinc Chemical compound [Zn].CC(O)=O.CC(O)=O ZOIORXHNWRGPMV-UHFFFAOYSA-N 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 238000001027 hydrothermal synthesis Methods 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 125000002560 nitrile group Chemical group 0.000 claims 1
- JLKDVMWYMMLWTI-UHFFFAOYSA-M potassium iodate Chemical compound [K+].[O-]I(=O)=O JLKDVMWYMMLWTI-UHFFFAOYSA-M 0.000 claims 1
- 238000007761 roller coating Methods 0.000 claims 1
- 239000004246 zinc acetate Substances 0.000 claims 1
- 239000003792 electrolyte Substances 0.000 abstract description 14
- 238000010923 batch production Methods 0.000 abstract 1
- 238000007789 sealing Methods 0.000 abstract 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 92
- 239000011787 zinc oxide Substances 0.000 description 46
- 230000005611 electricity Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 238000000825 ultraviolet detection Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000026267 regulation of growth Effects 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000005923 long-lasting effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 230000033116 oxidation-reduction process Effects 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/09—Devices sensitive to infrared, visible or ultraviolet radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses an ionic-liquid-gel-electrolyte-based quasi-solid flexible self-powered ZnO-based ultraviolet detector comprising a transparent conductive flexible substrate, a ZnO seed crystal layer, a ZnO nano array, an ionic liquid gel electrolyte layer, a Pt conductive layer and a flexible substrate. The edge of the detector is sealed by a sealant. According to a preparation method for the detector, a ZnO seed crystal layer grows on a transparent conductive flexible substrate and then a ZnO nano array grows; the ZnO nano array layer is coated with an ionic liquid gel electrolyte; a Pt conductive layer is plated on another flexible substrate; and after binding and sealing, the detector is obtained. Compared with the traditional ultraviolet detector, the provided detector has advantages of not needing an external bias voltage, being carried conveniently, having fast speed, and being capable of bent for usage; and the preparation process is simple and large-area batch production can be realized. Besides, the detector can work stably and continuously without the need to replace an electrolyte frequently.
Description
Technical field
The invention belongs to technical field of semiconductor device, solid particularly to a kind of standard based on ionic liquid gel electrolyte
State flexibility self energizing type zno-based ultraviolet detector and preparation method thereof.
Background technology
Along with space, the developing rapidly of electronic technology, the mankind are the denseest to the research interest of ultraviolet.In recent years, purple
Outer detection has developed into a dual-use technology.At military aspect, ultraviolet detection can be used for space communication, and ultraviolet is done
Disturb, ultraviolet guidance；At civilian aspect, ultraviolet detection can be used for the detection of daily uitraviolet intensity, naked light detects, biological medicine is divided
Analysis, environment pollution detection etc..The ultraviolet detector having put into commercialization and Military Application at present is photomultiplier tube and silica-based purple
External detector.But, the report about self-energizing ultraviolet detector is also little, and such detector is the most also deposited
At electrolyte volatile obstruction detector long lasting for work.It is further preferred that based on flexible substrate photochemistry
The quasi-solid-state self energizing type zno-based ultraviolet detector of battery structure is not also reported.
ZnO is a kind of semiconductor material with wide forbidden band, and under room temperature, energy gap is 3.37eV, by more in terms of ultraviolet detection
Get over and pay close attention to widely.ZnO material source is wide, cheap, and ZnO is also a kind of environmentally friendly material, have nontoxic,
The features such as bio-compatible.Therefore, defer to the principle of sustainable development, carry out the research of zno-based ultraviolet detector highly significant.Phase
Ratio is in traditional thin film ultraviolet detector, and flexible substrate self energizing type zno-based ultraviolet detector has without applying bias, response
Speed is fast, response sensitivity is high, simple in construction, portability, the advantage such as collapsible.
Recently, it has been developed that various viscosity is low, chemical stability good, fusing point is low, the ionic liquid of Heat stability is good
Electrolyte.Different from usual vehicle, ionic liquid does not has molecule, is all anion and cation, therefore in ionic liquid
Ion will not form molecule and go in air, even if under the high temperature of 200 DEG C, also will not make ionic liquid volatilization or evaporation, from
And decrease the pollution to soil and air.Ionic liquid has that saturated vapor forces down, dissolubility is big, electrochemical window is big, hot
Stability and good chemical stability.These advantages are expected to promote photoelectric transformation efficiency and the responsiveness of detector, it is easy to
Encapsulation produces, and not easy to blast has safety, will have broad application prospects in commercial and domestic environments.Therefore, will
It is expected to improve detection performance and the recycling of detector for the flexible self energizing quasi solid electrolyte of type ultraviolet detector
Property.
Summary of the invention
It is an object of the invention to provide that a kind of preparation cost is low, technique simple and function admirable based on ionic liquid gel
Quasi-solid flexible self energizing type zno-based ultraviolet detector of electrolyte and preparation method thereof.
Based on ionic liquid gel electrolyte the quasi-solid flexible self energizing type zno-based ultraviolet detector of the present invention, from
Lower and on have electrically conducting transparent flexible substrate, ZnO inculating crystal layer, ZnO nano array, Pt conductive layer and flexible substrate successively, receive at ZnO
It is filled with ionic liquid gel dielectric substrate between rice array and Pt conductive layer, and this detector edge bonds by fluid sealant close
Envelope.
In technique scheme, electrically conducting transparent flexible substrate, ZnO inculating crystal layer constitute the work of device with ZnO nano array
Electrode, Pt conductive layer and flexible substrate constitute device to electrode, the electrolyte of employing is ionic liquid gel electrolyte.
Described electrically conducting transparent flexible substrate can be to be coated with the PET of ITO conducting film.
Generally, the thickness of ZnO inculating crystal layer is 20～100 nanometers, and the thickness of ZnO nano array is 1～3 micron；Ionic liquid
Body gel electrolyte layer is coated uniformly on ZnO nano array layer, and thickness is 40～60 microns；The thickness of Pt conductive layer be 60～
100 nanometers.
The preparation method of quasi-solid flexible self energizing type zno-based ultraviolet detector based on ionic liquid gel electrolyte,
Comprise the following steps:
1) the electrically conducting transparent flexible substrate of cleaned process is put into pulsed laser deposition equipment, with ZnO ceramic target as target
Material, at 20～60 DEG C, O2Under the conditions of pressure is 1～3Pa, grow ZnO inculating crystal layer；The substrate of ZnO seed crystal is had to put into by long subsequently
Water heating kettle, configures growth-promoting media with two water zinc acetates and hexamethylenetetramine for source, rubbing of two water zinc acetates and hexamethylenetetramine
Your ratio is 1:1, is incubated 4～10h at 80～95 DEG C, grows ZnO nano array on ZnO inculating crystal layer, it is thus achieved that the work electricity of device
Pole；
2) 50mg 1-methyl-3-propyl group iodate imidazoles is dissolved in 2～3mL in nitrile, stirs 10～20min, afterwards
Add 0.1～0.2g potassium iodide stirring extremely to dissolve, be eventually adding the polyethylene glycol oxide of 0.5～2g, stir 12h, be prepared into ion
Liquid gel electrolyte；
3) flexible substrate of cleaned process is put into electron beam evaporation equipment, with Pt metal as evaporation source, control thin film
The speed of growth at 0.7～1.1 angstrom of meter per second, on flexible substrates growth Pt conductive layer, prepare electrode；
4) by step 2) ionic liquid gel electrolyte be coated uniformly in ZnO nano array, then have Pt to lead growth
The flexible substrate upset of electric layer is covered on ionic liquid gel dielectric substrate, is glued with to electrode by working electrode with fluid sealant
Knot, will the edge adhesive seal of electrically conducting transparent flexible substrate and flexible substrate, obtain based on ionic liquid gel electrolyte
Quasi-solid flexible self energizing type zno-based ultraviolet detector.
The work function of operation principle: ZnO is higher than the oxidation-reduction potential of electrolyte, as ZnO and electrolyte contact,
The electrons of zinc oxide conduction band is diffused into this side of electrolyte until forming new equilibrium state.Now, space-charge region is formed, i.e.
Built in field is set up, and direction of an electric field points to this side of electrolyte from this side of zinc oxide.When ultraviolet is radiated on ZnO, because of
Energy for ultraviolet photon is more than the energy gap of ZnO, and photon can be absorbed by ZnO, thus produce photo-generated carrier and i.e. produce sky
Cave--electronics pair.Hole-electron can separate under the effect of built in field, and electrons drifts about to zinc oxide side, empty
Cave drifts about to this side of electrolyte.Hole can be by the I in electrolyte-It is oxidized to I3 -, electronics transmits to ITO in ZnO nano-wire
On conductive layer, then arriving electrode through external circuit, electronics is by I3 -Capture, under the catalysis of Pt, I3 -I will be reduced into-, thus structure
Become a complete current loop.Only needing ultraviolet light persistently according on the detector, device just energy continuous firing, just as solar-electricity
Pond is the same, directly converts light energy into electric energy, it is not necessary to applied voltage, is a kind of self-driven device.
The beneficial effects of the present invention is:
1) preparation process of the present invention is simple, preparation cost is low, be easily achieved large area produces；
2) ultraviolet detector that the present invention obtains is without applied voltage driving, fast response time；
3) in detector, electrolyte is the most volatile and reveals, charge transport properties preferably and can use steadily in the long term；
4) whole device can bend freely, and lightweight is easy to carry.
Accompanying drawing explanation
Fig. 1 is based on ionic liquid gel electrolyte the quasi-solid flexible self energizing type zno-based ultraviolet detection of the present invention
The structural representation of device.
In figure: 1 be electrically conducting transparent flexible substrate, 2 for ZnO inculating crystal layer, 3 for fluid sealant, 4 for ZnO nano array, 5 for from
Sub-liquid gel dielectric substrate, 6 be Pt conductive layer, 7 for flexible substrate.
Detailed description of the invention
The present invention is described in detail below in conjunction with accompanying drawing.
With reference to Fig. 1, based on ionic liquid gel electrolyte the quasi-solid flexible self energizing type zno-based ultraviolet of the present invention is visited
Survey device, the most promising electrically conducting transparent flexible substrate 1, ZnO inculating crystal layer 2, ZnO nano array 4, ionic liquid gel electricity
Solving matter layer 5, Pt conductive layer 6, flexible substrate 7, device edge passes through fluid sealant 3 adhesive seal.Wherein ZnO nano array thickness is
1～3 micron, ionic liquid gel dielectric substrate thickness is 40～60 microns.
Embodiment 1
1) PET substrate being coated with ITO conducting film of cleaned process is put into pulsed laser deposition equipment, with ZnO pottery
Target is target, growth regulation temperature 60 C, O2Pressure is 1Pa, and growth thickness is the ZnO inculating crystal layer of 50nm；It is then placed in hydro-thermal
In reactor, with two water zinc acetates and hexamethylenetetramine as source, the mol ratio of two water zinc acetates and hexamethylenetetramine is 1:
1, it is incubated 4h at 80 DEG C, on ZnO inculating crystal layer, growth length is the ZnO nano array of 1.5 μm, is prepared into working electrode；
2) 50mg 1-methyl-3-propyl group iodate imidazoles is dissolved in 2mL nitrile, stirs 10min, add afterwards
The stirring of 0.1g potassium iodide, to dissolving, is eventually adding the polyethylene glycol oxide of 0.5g, stirs 12h, is prepared into ionic liquid gel electrolysis
Matter；
3) the PET flexible substrate of cleaned process is put into electron beam evaporation equipment, with Pt metal as evaporation source, control raw
Long speed is 0.7～1.1 angstrom of meter per second, grows Pt conductive layer on PET, and thickness is 100nm；It is prepared into electrode；
4) by step 2) electrolyte be coated uniformly on step 1) ZnO nano array on, then by working electrode with to electricity
Pole fluid sealant encapsulates, and obtains quasi-solid flexible self energizing type zno-based ultraviolet detector based on ionic liquid gel electrolyte.
Based on ionic liquid gel electrolyte the quasi-solid flexible self energizing type zno-based ultraviolet detector that this example prepares rings
Answering speed is 0.15s.
Embodiment 2
1) PET substrate being coated with ITO conducting film of cleaned process is put into pulsed laser deposition equipment, with ZnO pottery
Target is target, growth regulation temperature 30 DEG C, O2Pressure is 2Pa, and growth thickness is the ZnO inculating crystal layer of 20nm；It is then placed in hydro-thermal
In reactor, with two water zinc acetates and hexamethylenetetramine as source, the mol ratio of two water zinc acetates and hexamethylenetetramine is 1:
1, it is incubated 7h at 85 DEG C, on ZnO inculating crystal layer, growth length is the ZnO nano array of 3 μm, is prepared into working electrode；
2) 50mg 1-methyl-3-propyl group iodate imidazoles is dissolved in 3mL nitrile, stir 10min, add 0.2g afterwards
Potassium iodide stirring, to dissolving, is eventually adding the polyethylene glycol oxide of 1g, stirs 12h, is prepared into ionic liquid gel electrolyte；
3) the PET flexible substrate of cleaned process is put into electron beam evaporation equipment, with Pt metal as evaporation source, control raw
Long speed is 0.7～1.1 angstrom of meter per second, grows Pt conductive layer on PET, and thickness is 60nm, is prepared into electrode；
4) by step 2) electrolyte be coated uniformly on step 1) ZnO nano array on, then by working electrode with to electricity
Pole fluid sealant encapsulates, and obtains quasi-solid flexible self energizing type zno-based ultraviolet detector based on ionic liquid gel electrolyte.
Based on ionic liquid gel electrolyte the quasi-solid flexible self energizing type zno-based ultraviolet detector that this example prepares rings
Answering speed is 0.13s.
Embodiment 3
1) PET substrate being coated with ITO conducting film of cleaned process is put into pulsed laser deposition equipment, with ZnO pottery
Target is target, growth regulation temperature 50 C, O2Pressure is 1Pa, and growth thickness is the ZnO inculating crystal layer of 80nm；It is then placed in hydro-thermal
In reactor, with two water zinc acetates and hexamethylenetetramine as source, the mol ratio of two water zinc acetates and hexamethylenetetramine is 1:
1, it is incubated 5h at 85 DEG C, on ZnO inculating crystal layer, growth length is the ZnO nano array of 2.5 μm, is prepared into working electrode；
2) 50mg 1-methyl-3-propyl group iodate imidazoles is dissolved in 3mL nitrile, stirs 10min, add afterwards
The stirring of 0.2g potassium iodide, to dissolving, is eventually adding the polyethylene glycol oxide of 2g, stirs 12h, is prepared into ionic liquid gel electrolyte；
3) the PET flexible substrate of cleaned process is put into electron beam evaporation equipment, with Pt metal as evaporation source, control raw
Long speed is 0.7～1.1 angstrom of meter per second, grows Pt conductive layer on PET, and thickness is 60nm, is prepared into electrode；
4) by step 2) electrolyte be coated uniformly on step 1) ZnO nano array on, then by working electrode with to electricity
Pole fluid sealant encapsulates, and obtains quasi-solid flexible self energizing type zno-based ultraviolet detector based on ionic liquid gel electrolyte.
Based on ionic liquid gel electrolyte the quasi-solid flexible self energizing type zno-based ultraviolet detector that this example prepares rings
Answering speed is 0.11s.
Claims (7)
1. a quasi-solid flexible self energizing type zno-based ultraviolet detector based on ionic liquid gel electrolyte, is characterized in that
There are electrically conducting transparent flexible substrate (1), ZnO inculating crystal layer (2), ZnO nano array (4), Pt conductive layer (6) and soft the most successively
Property substrate (7)；Ionic liquid gel dielectric substrate (5) it is filled with between ZnO nano array (4) and Pt conductive layer (6), and should
Detector edge passes through fluid sealant (3) adhesive seal.
Quasi-solid flexible self energizing type zno-based ultraviolet based on ionic liquid gel electrolyte the most according to claim 1
Detector, is characterized in that described ionic liquid gel dielectric substrate (5) is coated uniformly on ZnO nano array (4) layer, thickness
It it is 40～60 microns.
Quasi-solid flexible self energizing type zno-based ultraviolet based on ionic liquid gel electrolyte the most according to claim 1
Detector, is characterized in that the thickness of described ZnO inculating crystal layer (2) is 20～100 nanometers, and the thickness of ZnO nano array (4) is 1
～3 microns.
Quasi-solid flexible self energizing type zno-based ultraviolet based on ionic liquid gel electrolyte the most according to claim 1
Detector, is characterized in that the thickness of described Pt conductive layer (6) is 60～100 nanometers.
Quasi-solid flexible self energizing type zno-based ultraviolet based on ionic liquid gel electrolyte the most according to claim 1
Detector, is characterized in that described ionic liquid gel dielectric substrate is nitrile, 1-methyl-3-propyl group iodate imidazoles, iodate
Potassium, the mixture of polyethylene glycol oxide.
Quasi-solid flexible self energizing type zno-based ultraviolet based on ionic liquid gel electrolyte the most according to claim 1
Detector, is characterized in that described electrically conducting transparent flexible substrate (1) is the PET being coated with ITO conducting film.
7. the preparation based on ionic liquid gel electrolyte quasi-solid flexible self energizing type as described in any one of claim 1-6
The method of zno-based ultraviolet detector, it is characterised in that comprise the following steps:
1) the electrically conducting transparent flexible substrate (1) of cleaned process is put into pulsed laser deposition equipment, with ZnO ceramic target as target
Material, at 20～60 DEG C, O2Under the conditions of pressure is 1～3Pa, growth ZnO inculating crystal layer (2)；It is then placed in hydrothermal reaction kettle, with two
Water zinc acetate and hexamethylenetetramine are source, and the mol ratio of two water zinc acetates and hexamethylenetetramine is 1:1,80～90 DEG C of guarantors
Temperature 4～10h, grows ZnO nano array (4) on ZnO inculating crystal layer；
2) 50mg 1-methyl-3-propyl group iodate imidazoles is dissolved in 2～3mL in nitrile, stirs 10～20min, add afterwards
0.1～0.2g potassium iodide stirring, to dissolving, is eventually adding the polyethylene glycol oxide of 0.5～2g, stirs 12h, be prepared into ionic liquid
Gel electrolyte；
3) flexible substrate (7) of cleaned process is put into electron beam evaporation equipment, with Pt metal as evaporation source, control thin film
The speed of growth is at 0.7～1.1 angstrom of meter per second, in flexible substrate (7) upper growth Pt conductive layer (6)；
4) by step 2) ionic liquid gel electrolyte with Glass rod roller coating equably in step 1) ZnO nano array (4)
On, then growth has flexible substrate (7) upset of Pt conductive layer be covered on ionic liquid gel dielectric substrate, will with fluid sealant
Electrically conducting transparent flexible substrate (1) and the edge adhesive seal of flexible substrate (7), obtain standard based on ionic liquid gel electrolyte
Solid flexible self energizing type zno-based ultraviolet detector.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107402068A (en) * | 2017-07-03 | 2017-11-28 | 南京邮电大学 | A kind of ultraviolet light transducer based on metal nanometer line/nano zinc oxide material |
| CN107527969A (en) * | 2017-07-21 | 2017-12-29 | 中山大学 | A kind of electrolyte Gate oxide semiconductor phototransistors for ultraviolet detector |
| CN108195892A (en) * | 2018-04-20 | 2018-06-22 | 佛山市车品匠汽车用品有限公司 | A kind of self energizing flexible gas sensor |
| CN108649097A (en) * | 2018-04-16 | 2018-10-12 | 复旦大学 | Wearable stretchable spring-like photoelectric detector of one kind and preparation method thereof |
| CN108878581A (en) * | 2018-06-16 | 2018-11-23 | 复旦大学 | Wearable stretchable spring like photoelectric detector of one kind and preparation method thereof |
| CN109872878A (en) * | 2019-03-05 | 2019-06-11 | 湘潭大学 | A kind of novel self-powered flexible optoelectronic detector and preparation method thereof |
| US11525842B2 (en) * | 2018-06-21 | 2022-12-13 | Uchicago Argonne, Llc | Multi-purpose sensors using conductive Iono-elastomers |
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