CN106052910A - Weak force measurement system based on light interference between micro-nano fiber and substrate - Google Patents
Weak force measurement system based on light interference between micro-nano fiber and substrate Download PDFInfo
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- CN106052910A CN106052910A CN201610248473.2A CN201610248473A CN106052910A CN 106052910 A CN106052910 A CN 106052910A CN 201610248473 A CN201610248473 A CN 201610248473A CN 106052910 A CN106052910 A CN 106052910A
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- nano fiber
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- 239000002121 nanofiber Substances 0.000 title claims abstract description 102
- 239000000758 substrate Substances 0.000 title claims abstract description 55
- 238000005259 measurement Methods 0.000 title abstract description 10
- 239000000919 ceramic Substances 0.000 claims abstract description 18
- 239000000835 fiber Substances 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 12
- 230000002452 interceptive effect Effects 0.000 claims description 8
- 239000003292 glue Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 6
- 230000007704 transition Effects 0.000 claims description 6
- 230000001154 acute effect Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 3
- 238000001764 infiltration Methods 0.000 claims description 3
- 230000008595 infiltration Effects 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims description 3
- 238000007711 solidification Methods 0.000 claims description 3
- 230000008023 solidification Effects 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 abstract description 6
- 238000004806 packaging method and process Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 241000283690 Bos taurus Species 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000000018 DNA microarray Methods 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
Abstract
The invention discloses a weak force measurement system based on light interference between a micro-nano fiber and a substrate, which comprises a camera, a microscope, a laser, a substrate, a piezoelectric ceramic, a light source, a U-shaped frame, a micro-nano fiber, a photoelectric detector and a control system, and is characterized in that the piezoelectric ceramic is connected with the control system; the U-shaped frame is used for packaging the micro-nano fiber; the micro-nano fiber is placed below the light source, one end of the micro-nano fiber is connected with the laser, the other end of the micro-nano fiber is connected with the photoelectric detector, the micro-nano fiber has a weak light force under the action of the laser, the micro-nano fiber is caused to generate deformation by the weak light force, and thus lateral displacement is generated, so that color interference fringes at the surface of the micro-nano fiber are caused to generate movement, and the color interference fringes at the surface of the micro-nano fiber can be observed through the camera and the microscope; the photoelectric detector is used for detecting the light power emitted by the laser; and the substrate is placed below the micro-nano fiber and above the piezoelectric ceramic, and the light source vertically irradiates the micro-nano fiber and the substrate from above.
Description
Technical field
The present invention relates to faint power fields of measurement, be specifically related to a kind of based on the interference of light weak between micro-nano fiber and substrate
Force measuring system.
Background technology
Along with the development of modern science and technology, the Research on Mechanical Properties of minute yardstick lower member in MEMS (MEMS),
Faint power monitoring in the observation of Micro Lub phenomenon, micro sensing Micro-Robot micro assemby, surface tension of liquid analysis, thin film and fiber
Mechanical property research, biochip and organism micro-assembly robot power measurement etc., be required for measuring small force value.High-precision
Degree, high linearity and nondestructive low force measure technology the most important application.
Existing force measurement technology has multiple: the first is that the faint power made based on cantilever beam structure measures sensing
Device, as described in the Chinese invention patent of Application No. 200510023641；The second is with measuring the voltage method faint power of measurement,
As described in the Chinese invention patent of Application No. 200910023227；The third is that the method utilizing the multistage amplification of lever principle is surveyed
Measure faint power, as described in the Chinese invention patent of Application No. 201110212459；Measured by three kinds of methods recited above
Weak forces level is mostly at micro-cattle (10-6N) magnitude.Nowadays nanotechnology and micro-electromechanical technology quickly grow, the survey to faint power
Amount is had higher requirement, and prior art can not meet.
Summary of the invention
Present invention aim to address the bottleneck of prior art, it is provided that a kind of sensitivity that can faint power be measured improves
To flying cattle (10-15The weak force measuring system of magnitude N), the technical scheme of employing is as follows:
A kind of based on the weak force measuring system of the interference of light between micro-nano fiber and substrate, including camera, microscope, laser
Device, substrate, piezoelectric ceramics, light source, U-shaped frame, micro-nano fiber, photodetector and control system, described piezoelectric ceramics and control
System connects, and realizes under control of the control system moving subtly；Described U shape frame is used for encapsulating micro-nano fiber；Described micro-nano
Optical fiber is positioned over the lower section of light source, and one end is connected with laser instrument, and the other end is connected with photodetector, in the effect of laser instrument
Under, micro-nano fiber occurs faint luminous power, faint luminous power can cause micro-nano fiber to be deformed, and then produce lateral displacement, from
And cause the Color Interfering Fringes By Use on micro-nano fiber surface to produce mobile, by camera and microscope it is observed that micro-nano fiber
The Color Interfering Fringes By Use on surface；The luminous power that described photodetector sends for detection laser；Described substrate is positioned over micro-
Below nano fiber above piezoelectric ceramics, described light source irradiates micro-nano fiber and substrate vertically from above.
As preferably, the initial separation between micro-nano fiber and substrate is 0 μm～3 μm.
In the present invention, micro-nano fiber and glass substrate are placed in the lower section with coaxial light source, and regulate the bright of light source
Degree and piezoelectric ceramics voltage, regulation substrate is 0 μm～3 μm with the distance of micro-nano fiber, in order to can observe coloured silk from CCD camera
Color interference fringe.Micro-nano fiber one end is accessed laser instrument, and other end accesses photodetector to detect luminous power in real time.
As preferably, between described micro-nano fiber and the upper surface of substrate, there is an angle theta, the scope of θ be 0 °～
10°。
As preferably, between described micro-nano fiber and substrate, produce a length of 10 μm in effective coverage～1000 μm of interference.
In the present invention, action length refers to that micro-nano fiber and substrate can effectively produce the length of interference fringe.
As preferably, described micro-nano fiber includes five regions, be followed successively by the first common standard single-mode fiber region, first
Tapering transition zone, micro-nano fiber region, the second tapering transition zone, the second common standard single-mode fiber region, wherein, micro-nano
The fibre diameter of fiber area is 0.2 μm～3 μm.
As preferably, described micro-nano fiber is drawn by circular ordinary optic fibre and forms, a length of 1mm～6cm.Can adopt during drawing
Heat with naked light or other thermal source.
As preferably, described substrate is wedge of glass substrate, and its drift angle is acute angle.
As preferably, described piezoelectric ceramics is connected with control system by piezoelectric ceramic actuator.
As preferably, described light source is white light source, and the wave-length coverage of described white light source is at 300nm-1000nm.
As preferably, unsettled in the middle of described U-shaped frame, pendulous tank is 10mm～35mm, to reach to encapsulate micro-nano fiber
Purpose.
As preferably, described U-shaped frame include one piece of common slide and two pieces by common slide from the half of middle point cut
Slide, described two and half slides are fixed on the two ends of described common slide, the long limit of described two and half slides and described common glass
The long limit of sheet becomes 90 degree of right angles, and uses ultraviolet glue infiltration solidification method to be fixed on U-shaped frame by micro-nano fiber.
In the present invention, the U-shaped frame two-arm made is dripped two hemispherical ultraviolet glue, uses after micro-nano fiber is infiltrated
Ultra violet lamp ultraviolet glue makes it solidify.
The ultimate principle of the present invention is: micro-nano fiber can produce deformation under faint External Force Acting, produces lateral displacement,
Thus it is mobile to cause the Color Interfering Fringes By Use on micro-nano fiber surface to produce, and the amount of movement of Color Interfering Fringes By Use is with micro-nano fiber
Linear relationship is there is between lateral displacement.The present invention first measure micro-nano fiber lateral displacement and Color Interfering Fringes By Use amount of movement it
Between linear relationship, may then pass through and measure the amount of movement of color fringe and indirectly measure the horizontal nanometer position of micro-nano fiber
Move, finally measure the size of faint power.
Compared with prior art, beneficial effects of the present invention:
1, the sensitivity measured is greatly improved, and brings up to fly cattle (10 by the sensitivity that faint power is measured-15N) magnitude.
2, use optical interferometry, make the present invention have noncontact, highly sensitive feature.
3, compared with the atomic force microscope conventional with measuring faint power, the cost of the present invention is lower.
Accompanying drawing explanation
Fig. 1 is the system structure schematic diagram of the present invention；
Fig. 2 is the schematic diagram in five regions of the micro-nano fiber of the present invention；
Fig. 3 is the wedge of glass substrate schematic diagram of the present invention；
Fig. 4 is the faint luminous power measurement result schematic diagram of embodiment 1；
Fig. 5 is the faint luminous power measurement result schematic diagram of embodiment 2；
Fig. 6 is the faint luminous power measurement result schematic diagram of embodiment 3.
Detailed description of the invention
With embodiment, the present invention is described in further details below in conjunction with the accompanying drawings.
Embodiment 1:
As it is shown in figure 1, a kind of based on the weak force measuring system of the interference of light between micro-nano fiber and substrate, including camera 1, show
Micro mirror 2, laser instrument 3, substrate 4, piezoelectric ceramics 5, light source 6, U-shaped frame 7, micro-nano fiber 8, photodetector 9 and control system 10,
Described piezoelectric ceramics 5 is connected with control system 10, realizes moving subtly under the control of control system 10；Described U-shaped frame 7 is used
In encapsulation micro-nano fiber 8；Described micro-nano fiber 8 is positioned over the lower section of light source 6, and one end is connected with laser instrument 3, the other end and photoelectricity
Detector 9 connects, and under the effect of laser instrument 3, micro-nano fiber 8 occurs faint luminous power, and faint luminous power can cause micro-nano fiber 8
It is deformed, and then produces lateral displacement, thus it is mobile to cause the Color Interfering Fringes By Use on micro-nano fiber surface to produce, and passes through camera
1 and microscope 2 it is observed that the Color Interfering Fringes By Use on micro-nano fiber surface；Described photodetector 9 detection laser 3
The luminous power gone out；Described substrate 4 is positioned over below micro-nano fiber 8 above piezoelectric ceramics 5, and described light source 6 irradiates vertically from above
Micro-nano fiber 8 and substrate 4.
Initial separation between micro-nano fiber 8 and substrate 4 is 0 μm～3 μm.
In the present invention, micro-nano fiber and glass substrate are placed in the lower section with coaxial light source, and regulate the bright of light source
Degree and piezoelectric ceramics voltage, regulation substrate is 0 μm～3 μm with the distance of micro-nano fiber, in order to can observe coloured silk from CCD camera
Color interference fringe.Micro-nano fiber one end is accessed laser instrument, and other end accesses photodetector to detect luminous power constantly.
There is an angle theta between described micro-nano fiber 8 and the upper surface of substrate 4, the scope of θ is 0 °～10 °.
A length of 10 μm in white light interference effective coverage between described micro-nano fiber 8 and substrate 4～1000 μm.
As in figure 2 it is shown, described micro-nano fiber 8 includes five regions, be followed successively by the first common standard single-mode fiber region 51,
First tapering transition zone 52, the 54, second common standard single-mode fiber region, the 53, second tapering transition zone, micro-nano fiber region
55, wherein, the fibre diameter in micro-nano fiber region 53 is 0.2 μm～3 μm.
Described micro-nano fiber 8 is drawn by circular ordinary optic fibre and forms, a length of 1mm～6cm.
As it is shown on figure 3, described substrate 4 is wedge of glass substrate, its apex angle α is acute angle.
Described piezoelectric ceramics 5 is connected with control system 10 by piezoelectric ceramic actuator.
Described light source 6 is white light source, and the wave-length coverage of described white light source is at 300nm-1000nm.
Described U-shaped frame 7 is middle unsettled, and pendulous tank is 1mm～35mm, to reach to encapsulate the purpose of micro-nano fiber 8.
Described U-shaped frame 7 include one piece of common slide and two pieces by common slide from half slide of middle point cut, described
Two and half slides are fixed on the two ends of described common slide, and the long limit of described two and half slides becomes with the long limit of described common slide
90 degree of right angles, and use ultraviolet glue infiltration solidification method to be fixed in U type frame by micro-nano fiber.
In the present embodiment, the U-shaped frame two-arm made is dripped two hemispherical ultraviolet glue, makes after micro-nano fiber is infiltrated
It is made to solidify by ultra violet lamp ultraviolet glue.
In the present embodiment, a diameter of 0.86 μm in micro-nano fiber region 53, the U-shaped middle pendulous tank of frame 7 is 25mm, micro-nano
Angle between optical fiber and glass substrate is 0.65 °, and the action length between micro-nano fiber and wedge of glass substrate is 60 μm, logical
Cross measurement, the luminous power occurred on micro-nano fiber under different pumping power, its result such as accompanying drawing 4 institute can be measured
Show.From fig. 4, it can be seen that utilize native system can measure the power flying cattle magnitude under different luminous power on micro-nano fiber.
Embodiment 2:
As different from Example 1, a diameter of 1.8 μm in micro-nano fiber region 53, the U-shaped middle pendulous tank of frame 7 is
25mm, micro-nano fiber is 0.84 ° with the angle of glass substrate, and the action length between micro-nano fiber and glass substrate is 60 μm.
The luminous power that the pumping laser that wavelength is 1458nm produces under different luminous powers on micro-nano fiber, its knot is measured by experiment
Fruit is as shown in Figure 5.
Embodiment 3:
As different from Example 1, a diameter of 2.3 μm in micro-nano fiber region 53, in the middle of U-shaped frame, pendulous tank is
25mm, micro-nano fiber is 2.2 ° with the angle of glass substrate, and the action length between micro-nano fiber and glass substrate is 60 μm.Logical
Cross experiment and measure the luminous power that the pumping laser that wavelength is 1458nm produces under different luminous powers on micro-nano fiber, its result
As shown in Figure 6.
Claims (10)
1. one kind based on the weak force measuring system of the interference of light between micro-nano fiber and substrate, it is characterised in that include camera, micro-
Mirror, laser instrument, substrate, piezoelectric ceramics, light source, U-shaped frame, micro-nano fiber, photodetector and control system, described piezoelectric ceramics
It is connected with control system, realizes under control of the control system moving subtly；Described U-shaped frame is used for encapsulating micro-nano fiber；Institute
Stating micro-nano fiber and be positioned over the lower section of light source, one end is connected with laser instrument, and the other end is connected with photodetector, described camera with
And microscope is for observing the Color Interfering Fringes By Use on micro-nano fiber surface；Described photodetector sends for detection laser
Luminous power；Described substrate is positioned over below micro-nano fiber above piezoelectric ceramics, and described light source irradiates micro-nano light vertically from above
Fibre and substrate.
The most according to claim 1 a kind of based on the weak force measuring system of the interference of light between micro-nano fiber and substrate, it is special
Levying and be, the initial separation between micro-nano fiber and substrate is 0 μm～1.71 μm.
The most according to claim 1 a kind of based on the weak force measuring system of the interference of light between micro-nano fiber and substrate, it is special
Levying and be, there is an angle theta between described micro-nano fiber and the upper surface of substrate, the scope of θ is 0 °～10 °.
The most according to claim 1 a kind of based on the weak force measuring system of the interference of light between micro-nano fiber and substrate, it is special
Levying and be, the action length between described micro-nano fiber and substrate is 10 μm～1000 μm.
The most according to claim 1 a kind of based on the weak force measuring system of the interference of light between micro-nano fiber and substrate, it is special
Levying and be, described micro-nano fiber includes five regions, is followed successively by the first common standard single-mode fiber region, the first conical transition zone
Territory, micro-nano fiber region, the second tapering transition zone, the second common standard single-mode fiber region, wherein, micro-nano fiber region
Fibre diameter is 0.4 μm～3 μm.
The most according to claim 1 a kind of based on the weak force measuring system of the interference of light between micro-nano fiber and substrate, it is special
Levying and be, described micro-nano fiber is drawn by circular ordinary optic fibre and forms, a length of 3cm～6cm.
The most according to claim 1 a kind of based on the weak force measuring system of the interference of light between micro-nano fiber and substrate, it is special
Levying and be, described substrate is wedge of glass substrate, and its drift angle is acute angle.
The most according to claim 1 a kind of based on the weak force measuring system of the interference of light between micro-nano fiber and substrate, it is special
Levying and be, described light source is white light source, and the wave-length coverage of described white light source is at 300nm-1000nm.
The most according to claim 1 a kind of based on the weak force measuring system of the interference of light between micro-nano fiber and substrate, it is special
Levying and be, unsettled in the middle of described U-shaped frame, pendulous tank is 1mm～35mm, to reach to encapsulate the purpose of micro-nano fiber.
The most according to claim 1 a kind of based on the weak force measuring system of the interference of light between micro-nano fiber and substrate, it is special
Levy and be, described U-shaped frame include one piece of common slide and two pieces by common slide from half slide of middle point cut, described two
Block half slide is fixed on the two ends of described common slide, and the long limit of described two and half slides becomes 90 with the long limit of described common slide
Degree right angle, and use ultraviolet glue infiltration solidification method to be fixed on U-shaped frame by micro-nano fiber.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610248473.2A CN106052910A (en) | 2016-04-20 | 2016-04-20 | Weak force measurement system based on light interference between micro-nano fiber and substrate |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610248473.2A CN106052910A (en) | 2016-04-20 | 2016-04-20 | Weak force measurement system based on light interference between micro-nano fiber and substrate |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107505735A (en) * | 2017-08-28 | 2017-12-22 | 暨南大学 | A kind of full light optical power control system realized based on evanescent field coupling luminous power |
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|---|---|---|---|---|
| US5426498A (en) * | 1994-04-04 | 1995-06-20 | University Of New Mexico | Method and apparatus for real-time speckle interferometry for strain or displacement of an object surface |
| CN1149715A (en) * | 1995-11-07 | 1997-05-14 | 东南大学 | Weak force sensor |
| CN101957246A (en) * | 2010-07-20 | 2011-01-26 | 清华大学 | Integrated detector for micro-force micro-displacement measurement system |
| CN202522351U (en) * | 2012-02-21 | 2012-11-07 | 徐东升 | Micro force detector |
-
2016
- 2016-04-20 CN CN201610248473.2A patent/CN106052910A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5426498A (en) * | 1994-04-04 | 1995-06-20 | University Of New Mexico | Method and apparatus for real-time speckle interferometry for strain or displacement of an object surface |
| CN1149715A (en) * | 1995-11-07 | 1997-05-14 | 东南大学 | Weak force sensor |
| CN101957246A (en) * | 2010-07-20 | 2011-01-26 | 清华大学 | Integrated detector for micro-force micro-displacement measurement system |
| CN202522351U (en) * | 2012-02-21 | 2012-11-07 | 徐东升 | Micro force detector |
Non-Patent Citations (1)
| Title |
|---|
| WEIQIA QIU.ETL.: "Sensing nanometric displacement of a micro-/nano-fiber induced by optical forces by use of white light interferometry", 《PROC. SPIE 9655, FIFTH ASIA-PACIFIC OPTICAL SENSORS CONFERENCE》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107505735A (en) * | 2017-08-28 | 2017-12-22 | 暨南大学 | A kind of full light optical power control system realized based on evanescent field coupling luminous power |
| CN107505735B (en) * | 2017-08-28 | 2020-02-14 | 暨南大学 | All-optical power control system realized based on evanescent field coupling optical force |
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