CN105928464B - Automatic measurement system based on image mosaic and measurement method - Google Patents
Automatic measurement system based on image mosaic and measurement method Download PDFInfo
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- CN105928464B CN105928464B CN201610407738.9A CN201610407738A CN105928464B CN 105928464 B CN105928464 B CN 105928464B CN 201610407738 A CN201610407738 A CN 201610407738A CN 105928464 B CN105928464 B CN 105928464B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
- G01B11/12—Measuring arrangements characterised by the use of optical techniques for measuring diameters internal diameters
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- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of automatic measurement system and its measurement method based on image mosaic, wherein, the measuring system include mainly for drive wire-drawing die move twin shaft electric control platform, be carved with regular pattern mask plate, microscope, imaging sensor, for Image Acquisition, processing and control die shift control system, lifting support and pedestal.Measurement method includes the following steps：Suitable stepping is selected to take pictures scheme according to the aperture size of wire-drawing die；Scaling board is put into electric control platform, image capture module is demarcated；It takes scaling board away, mold and mask plate is fixed in electric control platform, control module drives electric control platform to carry out stepping to mold and takes pictures；Measurement process module carries out Corner Detection, registration, fusion and splicing to image data, and the aperture size of mold is obtained by circle fitting operation.Compared with prior art, structure of the invention is simple, at low cost, easy to use, high certainty of measurement, and treatment effeciency is high.
Description
Technical field
The present invention relates to wire-drawing die fields of measurement more particularly to a kind of measuring wire-drawing die using image mosaic technology
On aperture size measuring system and measurement method.
Background technology
Image mosaic be exactly by a series of pictures of Same Scene mutually to overlap be spliced into significantly, wide viewing angle
, it is close with original image and be distorted high-definition picture small, without apparent suture.Image mosaic technology based on angle point
Generally comprise three Corner Detection, image registration and image co-registration parts.The quality of image mosaic depends on matching for image
Quasi- precision, in practical operation, image mosaic needs to detect that enough angle point numbers could meet high-precision image registration
It is required that and existing wire-drawing die measure in angle point there was only a bit of circular arc, it is clear that be not achieved high-precision (1um) splicing want
It asks.
Invention content
It is an object of the invention to overcome the deficiencies of the prior art and provide a kind of measurement angle points that can increase wire-drawing die
And improve the automatic measurement system of measurement accuracy.
Another object of the present invention is to provide a kind of measurement methods based on above-mentioned automatic measurement system.
The purpose of the invention is achieved by the following technical solution：
A kind of automatic measurement system based on image mosaic includes for driving the twin shaft that wire-drawing die moves automatically controlled flat
Platform, the mask plate for being carved with regular pattern, microscope, imaging sensor, for Image Acquisition, processing and control die shift control
System, lifting support and pedestal processed.Wherein, microscope and imaging sensor are co-axially mounted, and optical axis is automatically controlled perpendicular to twin shaft
Platform.
Specifically, wire-drawing die is fixed in the twin shaft electric control platform, the mask plate is arranged above mold, institute
It states twin shaft electric control platform, mold and mask plate three to be relatively fixed, relative displacement is not will produce in moving process, twin shaft is automatically controlled
Platform stepping under the driving of control system takes pictures and measures the dimension information of mold by capturing the angle point in image.It is described
Microscope is located at the top of mask plate, is fixedly connected with one end of lifting support, and described image sensor is arranged on microscope,
The image information of mold is acquired by microscope and sends control system to, and the other end of the lifting support is arranged in pedestal
On, improve the image quality of imaging sensor by adjusting microscopical height.
The control system includes image capture module, control module and measurement process module.Described image acquisition module
It is connect with imaging sensor, the image collected information is converted by accessible image data by imaging sensor.It is described
Control module is connect with twin shaft electric control platform, the step distance of control mold and mask plate on platform.The measurement processing mould
Block carries out Corner Detection, registration and splicing to the image data that image capture module generates, and obtains mould by circle fitting operation
Aperture size on tool.
The automatic measurement system further includes the mark for the corresponding actual size of unit sizes in uncalibrated image before measuring
Fixed board.Before formal measure, image acquisition and processing system is demarcated using the scaling board, determines accurate times magnification
Rate, the scaling board are arranged in twin shaft electric control platform, and scaling board is equipped with regular pattern, is adopted by imaging sensor
Collection, demarcates image, simple to operate, can significantly improve the precision of the measurement of system.
As the preferred embodiment of the present invention, the mask plate is glass material, and use is carved on the surface using laser technology
In the regular pattern for increasing image angle point quantity.The line width of the pattern is about wide 1/10th of mold aperture loop line, convenient
Mold aperture annulus and mask plate pattern are smoothly divided using corrosion expansion algorithm in later image processing.
As the preferred embodiment of the present invention, the twin shaft electric control platform is X-axis and Y-axis electric control platform.The mask plate is adopted
It is carved with laser technology, helps to control line width well, engraving precision is high, effect is good, and will not while engraving
It injures workpiece surface or workpiece is caused to deform.The microscope uses varifocal telecentricity micrometer microscope, can be according to die size
Different enlargement ratios and operating distance are selected, and image quality is high.The microscope is equipped with the tune for focusing
Ring is saved, the regulation ring keeps the image clearly that imaging sensor acquires visible for adjusting microscopical imaging focal length.
A kind of measurement method of the automatic measurement system based on image mosaic, includes the following steps：
Step S1:Suitable stepping is selected to take pictures scheme according to the aperture size of wire-drawing die.Wherein, the step S1
In further include following steps：
Step S11:Mold is fixed on measuring table, mold plane and imaging sensor and microscopical measurement light are made
Axis keeps vertical；
Step S12:Microscope magnifications are adjusted, in the case where meeting required precision so that pixel allowable error is more than 4 pictures
Element, the error generated for reducing later stage circular fit；
Step S13:It adjusts microscopical regulation ring to focus, and selects suitable operating distance, make imaging sensor
The image clearly of acquisition, good imaging quality；
Step S14:According to the pore size on mold, suitable stepped intervals, stepping-in amount and step are selected for measuring table
Into route, stepped intervals are less than the half of picture traverse so that the overlapping region of adjacent two images is larger, it is ensured that the later stage
The accuracy of image mosaic in image procossing, stepping-in amount and stepping route were according to stepped intervals continued circling mold aperture one week.
Step S2:Scaling board is put into electric control platform, image capture module is demarcated.Wherein, the step S2
In further include following steps：
Step S21:Scaling board is placed horizontally on measuring table, image is carried out to scaling board by image capture module
Acquisition；
Step S22:Calibration point pixel coordinate extraction is carried out to captured scaling board image, in measurement process module into
Row camera system is demarcated, and obtains accurate enlargement ratio.
Step S3:It takes scaling board away, mold and mask plate is fixed in electric control platform, control module drives electric control platform
Stepping is carried out to mold to take pictures.Wherein, further include following steps in the step S3：
Step S31:The size that laser lithography mask plate is selected according to mold size, makes mask plate that mould can be completely covered
Tool；
Step S32:Determine that laser lithography is covered according to annulus line width of the aperture on mold under micrometer microscope amplification
The line width of diaphragm plate regular pattern, the line width of mask plate regular pattern are 1/10th of wire-drawing die aperture annulus line width；
Step S33:According to the visual field size of image capture module, the pattern of laser lithography mask plate is drawn, it is ensured that mask
Plate pattern is without repetitions patterns in two visual field sizes, and pattern spacing is moderate, can not be overstocked, and lines spacing is more than ten times of lines
Width prevents mask plate pattern overstocked and the aperture of cover lower section mold；
Step S34:The pattern line of laser lithography mask plate is the lower nontransparent material of reflectivity, the lines of the material
It is more apparent in imaging, contribute to detection and the registration of angle point, the treatment effeciency of image can be significantly improved, reduces work
Amount；
Step S35:Laser lithography mask plate is carved with to a face mold-griping surface of regular pattern, and keep mask plate,
Wire-drawing die and electronic control translation stage objective table three are relatively fixed, and relative displacement is not will produce when stepping is taken pictures, and improve system
Measurement accuracy.
Step S4:Measurement process module carries out Corner Detection, registration, fusion and splicing to image data, and quasi- by circle
Close the aperture size that operation obtains mold.Wherein, further include following steps in the step S4：
Step S41:Corner Detection and registration are carried out to the image that continuous acquisition arrives, obtain the relative coordinate of multiple images,
Then image co-registration is carried out；
Step S42:Gray level threshold segmentation and corrosion dilation operation are carried out to the image that splicing is completed, removal laser lithography is covered
The interference of diaphragm plate pattern on the image, the wire-drawing die aperture circle ring area after being divided；
Step S43:The sub-pixel edge profile of wire-drawing die aperture annulus is extracted, and carries out round fitting operation, is drawn
The aperture diameter of silk mold.
Working process and principle of the invention are：Image Acquisition and place of the present invention first by scaling board to measuring system
Reason module is demarcated, and obtains accurate enlargement ratio；Then mold and mask plate are put on measuring table together, selection is closed
Suitable stepping, which is taken pictures, scheme and stepping circuit and starts measurement of taking pictures；Accessible image is generated finally by image capture module
Data carry out Corner Detection, registration and fusion by image processing module to the image data of generation, image is spliced,
Segmentation and taking-up interference, the aperture size of mold is obtained finally by circle fitting operation, solves and is based in existing measurement scheme
The image mosaic method of angle point measures wire-drawing die aperture hour angle points deficiency and is difficult to reach the technological deficiency of micron order measurement accuracy,
Obtain the higher aperture size of precision.The structure of the present invention is simple, at low cost, easy to use, utilizes covering with regular pattern
Diaphragm plate increases angle point quantity and combines the measurement scheme based on image mosaic technology, can significantly improve the precision of measuring system；
In addition, measurement accuracy is improved an order of magnitude (being increased to 1um from 10um) by the present invention on the basis of not upgrading original platform,
Cost is not only cost saved, but also shortens processing time, is improved work efficiency.
Compared with prior art, the present invention has further the advantage that：
(1) compared with traditional artificial photoelectric image measuring system, the present invention uses the automatically controlled translation of twin shaft of 10um precision
Platform realizes automation control.
(2) present invention increases the quantity of angle point by the mask plate with regular pattern, efficiently solves existing measurement
The very few defect for causing measurement accuracy not high of angle point in technology.
(3) present invention increases angle point by mask plate, and combines image mosaic technology, can significantly improve the spelling of image
Precision is connect, to obtain high-precision aperture size, with the 1 micron accuracy twin shaft electric control platform drive scheme phase using costliness
Than there is extremely low cost advantage, the disposable input of equipment is greatly saved.
Description of the drawings
Fig. 1 is the structural schematic diagram of automatic measurement system provided by the present invention.
Fig. 2 is the flow chart of the measurement method provided by the present invention based on image mosaic technology.
Fig. 3 is the mask plate provided by the present invention with regular pattern.
Fig. 4 is the partial enlarged view of regular pattern provided by the present invention.
Label declaration in above-mentioned attached drawing：1- mask plates, 3- microscopes, 4- imaging sensors, 5- lifting supports, the bottoms 6-
Seat.
Specific implementation mode
To make the objectives, technical solutions, and advantages of the present invention clearer and more explicit, develop simultaneously embodiment pair referring to the drawings
The present invention is described further.
Embodiment 1：
As shown in Figure 1, the invention discloses a kind of wire-drawing die micron order automatic measurement system based on image mosaic technology
System, the system are primarily adapted for use in the precision die fields of measurement of single aperture class, realize that single aperture diameter measurement, measurement accuracy reach
1um.The measuring system includes mainly：Twin shaft electronic control translation stage (not shown), laser lithography mask plate 1, scaling board are (in figure
Be not shown), microscope 3, imaging sensor 4, lifting support 5, pedestal 6, image capturing system (not shown), computer control
System and measurement processing system (not shown).
Wherein, the twin shaft electronic control translation stage of 10um precision is made of twin shaft translation stage and digital control cabinet, is put for level
Wire-drawing die is set, it can be achieved that the single step of X-axis and Y-axis or multistep translation control, realize Automatic survey.
Wherein, as shown in Figure 3 and Figure 4, laser lithography mask plate 1 is carved with custom rule pattern, is covered in wire-drawing die
Surface increases image angle point, is remarkably improved later image Corner Detection, registration and the precision of splicing.
Wherein, image capturing system is made of imaging sensor 4 and varifocal telecentricity micrometer microscope 3, Image Acquisition system
System optical axis and twin shaft electronic control translation stage are orthogonal, and varifocal telecentricity micrometer microscope 3 is equipped with regulation ring (not shown),
Fine-tuning working distance achievees the effect that focusing, can also realize different multiplying powers and working distance.
Wherein, computer control and measurement processing system can carry out the control of twin shaft electronic control translation stage, camera system is demarcated,
Image Corner Detection and the fitting operation result of measurement for being registrated operation, sub-pixel edge contours extract and circle.
As depicted in figs. 1 and 2, the invention also discloses a kind of, and the wire-drawing die micron order based on image mosaic technology is automatic
Measurement method mainly includes the following steps：
S1：It is required to select suitable enlargement ratio according to measurement accuracy, it is suitable to be selected according to the aperture size of wire-drawing die
Translation stage stepping scheme；
S2：The calibration of image capturing system；
S3：Image is acquired in conjunction with laser lithography mask plate 1；
S4：Image is handled and spliced in computer measurement processing system, measures the aperture size of mold.
Preferably, it for step S1, is required to select suitable enlargement ratio according to measurement accuracy, according to wire drawing die
The tool suitable translation stage stepping scheme of size selection includes the following steps：
S1-1：Wire-drawing die is fixed on twin shaft electronic control translation stage objective table, is surveyed with imaging sensor 4 and varifocal telecentricity
The 3 groups of holdings of micro- microscope are vertical；
S1-2：3 enlargement ratio of micrometer microscope is adjusted, in the case where meeting required precision so that pixel allowable error is more than 4
Pixel；
S1-3：It adjusts varifocal 3 regulation ring of telecentricity micrometer microscope to focus, selects proper operation distance；
S1-4：According to wire-drawing die pore size, suitable electronic control translation stage stepped intervals, stepping-in amount and stepping road are selected
Line, stepped intervals should be less than the half of picture traverse, stepping-in amount and stepping route it is ensured that according to stepped intervals continuous loop
Around wire-drawing die aperture one week.
Preferably, for step S2, the calibration of image capturing system includes the following steps：
S2-1：Scaling board is placed horizontally at electronic control translation stage, scaling board Image Acquisition is carried out with image capturing system；
S2-2：Calibration point pixel coordinate extraction is carried out to captured scaling board image, in computer measurement processing system
Middle progress camera system calibration, obtains accurate enlargement ratio.
Preferably, for step S3, include the following steps in conjunction with laser lithography mask plate acquisition image：
S3-1：1 size of laser lithography mask plate is selected according to wire-drawing die size, makes mask plate 1 that wire drawing can be completely covered
Mold；
S3-2：Laser lithography mask is determined according to annulus line width of the wire-drawing die aperture under the amplification of micrometer microscope 3
1 pattern line-width of plate, 1 pattern line-width of mask plate are about 1/10th of wire-drawing die aperture annulus line width；
S3-3：According to image capturing system visual field size, 1 pattern of laser lithography mask plate is drawn, it is desirable that 1 plate pattern of mask
Without repetitions patterns in two visual field sizes, and pattern can not be overstocked, and lines spacing should be greater than ten times of line widths；
S3-4：1 pattern line of laser lithography mask plate should be the lower nontransparent material of reflectivity；
S3-5：It is adjacent to wire-drawing die surface on one side by what laser lithography mask plate 1 was carved with custom rule pattern, keeps covering
Diaphragm plate 1, wire-drawing die and electronic control translation stage objective table are without relative displacement.
Preferably, for step S4, image is handled and is spliced in computer measurement processing system, surveyed
Aperture diameter is measured, is as follows：
S4-1：Corner Detection and registration are carried out to the image that continuous acquisition arrives, obtain the relative coordinate of multiple images, then
Carry out image co-registration；
S4-2：Gray level threshold segmentation, corrosion dilation operation are carried out to the image that splicing is completed, remove laser lithography mask plate
Pattern interferes, and successful division goes out wire-drawing die aperture circle ring area；
S4-3：The sub-pixel edge profile of wire-drawing die aperture annulus is extracted, and carries out round fitting operation, obtains hole straight
Diameter.
Working process and principle of the invention are：Image Acquisition and place of the present invention first by scaling board to measuring system
Reason module is demarcated, and obtains accurate enlargement ratio；Then mold and mask plate 1 are put on measuring table together, are selected
Suitable stepping, which is taken pictures, scheme and stepping circuit and starts measurement of taking pictures；Accessible figure is generated finally by image capture module
As data, Corner Detection, registration and fusion are carried out to the image data of generation by image processing module, image is spelled
Interference is connect, divided and taken out, the aperture size of mold is obtained finally by circle fitting operation, solves base in existing measurement scheme
The insufficient technology for being difficult to reach micron order measurement accuracy of wire-drawing die aperture hour angle points is measured in the image mosaic method of angle point to lack
It falls into, obtains the higher aperture size of precision.The structure of the present invention is simple, at low cost, easy to use, using with regular pattern
Mask plate 1 increases angle point quantity and combines the measurement scheme based on image mosaic technology, can significantly improve the essence of measuring system
Degree；It (is increased to from 10um in addition, measurement accuracy is improved an order of magnitude by the present invention on the basis of not upgrading original platform
1um), cost is not only cost saved, but also shortens processing time, is improved work efficiency.
The above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are not by above-described embodiment
Limitation, it is other it is any without departing from the spirit and principles of the present invention made by changes, modifications, substitutions, combinations, simplifications,
Equivalent substitute mode is should be, is included within the scope of the present invention.
Claims (7)
1. a kind of automatic measurement system based on image mosaic, which is characterized in that include double for driving wire-drawing die to move
Axis electric control platform, microscope, imaging sensor, is used for Image Acquisition, processing and control mold at the mask plate for being carved with regular pattern
Control system, lifting support and the pedestal of displacement；
Wire-drawing die is fixed in the twin shaft electric control platform, and the mask plate is arranged above mold, and the twin shaft is automatically controlled flat
Platform, mold and mask plate three are relatively fixed, under the driving of control system stepping take pictures and by capture image in angle point
To measure the dimension information of mold；The microscope is located at the top of mask plate, is fixedly connected with one end of lifting support, described
Imaging sensor is arranged on microscope, acquires the image information of mold by microscope and sends control system to, the liter
The other end of descending branch seat is set on the base, and the image quality of imaging sensor is improved by adjusting microscopical height；
The control system includes image capture module, control module and measurement process module；Described image acquisition module and figure
As sensor connection, the image collected information is converted by accessible image data by imaging sensor；The control
Module is connect with twin shaft electric control platform, the step distance of control mold and mask plate on platform；The measurement process module pair
The image data that image capture module generates carries out Corner Detection, registration and splicing, and is obtained on mold by circle fitting operation
Aperture size.
2. the automatic measurement system according to claim 1 based on image mosaic, which is characterized in that the automatic measurement system
System further includes the scaling board for the corresponding actual size of unit sizes in uncalibrated image before measuring；The scaling board is arranged double
In axis electric control platform.
3. the automatic measurement system according to claim 1 based on image mosaic, which is characterized in that the mask plate is glass
Glass material carves the regular pattern for measurement using laser technology on the surface.
4. a kind of measurement method of the automatic measurement system based on image mosaic, which is characterized in that include the following steps：
Step S1:Suitable stepping is selected to take pictures scheme according to the aperture size of wire-drawing die；
Step S2:Scaling board is put into electric control platform, image capture module is demarcated；
Step S3:It takes scaling board away, mold and mask plate is fixed in electric control platform, control module drives electric control platform to mould
Tool carries out stepping and takes pictures；
Step S4:Measurement process module carries out Corner Detection, registration, fusion and splicing to image data, and is transported by circle fitting
Calculate the aperture size for obtaining mold；
Further include following steps in the step S1：
Step S11:Mold is fixed on measuring table, it is vertical with imaging sensor and microscope holding；
Step S12:Microscope magnifications are adjusted, in the case where meeting required precision so that pixel allowable error is more than 4 pixels；
Step S13:It adjusts microscopical regulation ring to focus, selects proper operation distance；
Step S14:According to the pore size on mold, suitable stepped intervals, stepping-in amount and stepping road are selected for measuring table
Line, stepped intervals are less than the half of picture traverse, and stepping-in amount and stepping route are according to stepped intervals continued circling die hole
Diameter one week.
5. the measurement method of the automatic measurement system according to claim 4 based on image mosaic, which is characterized in that described
Further include following steps in step S2：
Step S21:Scaling board is placed horizontally on measuring table, carrying out image to scaling board by image capture module adopts
Collection；
Step S22:Calibration point pixel coordinate extraction is carried out to captured scaling board image, is taken the photograph in measurement process module
As head system calibration, accurate enlargement ratio is obtained.
6. the measurement method of the automatic measurement system according to claim 4 based on image mosaic, which is characterized in that described
Further include following steps in step S3：
Step S31:The size that laser lithography mask plate is selected according to mold size, makes mask plate that mold can be completely covered；
Step S32:Laser lithography mask plate is determined according to annulus line width of the aperture on mold under micrometer microscope amplification
The line width of regular pattern, the line width of mask plate regular pattern are 1/10th of wire-drawing die aperture annulus line width；
Step S33:According to the visual field size of image capture module, the pattern of laser lithography mask plate is drawn, it is ensured that mask plate figure
Case is without repetitions patterns in two visual field sizes, and pattern spacing is moderate, and lines spacing is more than ten times of line widths；
Step S34:The pattern line of laser lithography mask plate is the lower nontransparent material of reflectivity；
Step S35:Laser lithography mask plate is carved with to a face mold-griping surface of regular pattern, and keeps mask plate, wire drawing
Mold and electronic control translation stage objective table are without relative displacement.
7. the measurement method of the automatic measurement system according to claim 4 based on image mosaic, which is characterized in that described
Further include following steps in step S4：
Step S41:Corner Detection and registration are carried out to the image that continuous acquisition arrives, obtain the relative coordinate of multiple images, then
Carry out image co-registration；
Step S42:Gray level threshold segmentation and corrosion dilation operation are carried out to the image that splicing is completed, remove laser lithography mask plate
The interference of pattern on the image, the wire-drawing die aperture circle ring area after being divided；
Step S43:The sub-pixel edge profile of wire-drawing die aperture annulus is extracted, and carries out round fitting operation, obtains wire drawing die
The aperture diameter of tool.
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| CN106644858B (en) * | 2016-12-28 | 2019-12-24 | 中国科学院长春光学精密机械与物理研究所 | Laser particle analyzer and particle size distribution testing method |
| CN113375555A (en) * | 2018-07-02 | 2021-09-10 | 广西电网有限责任公司北海供电局 | Power line clamp measuring method and system based on mobile phone image |
| CN112648920B (en) * | 2019-10-12 | 2022-05-24 | 上海微电子装备（集团）股份有限公司 | Mask opening size measuring method, mask plate stretching device and screen expanding machine |
| CN114429423A (en) * | 2022-01-27 | 2022-05-03 | 合肥京东方星宇科技有限公司 | Splicing system and splicing method |
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