CN105890878A - Measurement device and method for measuring damage threshold of reflector in real time by using femtosecond laser - Google Patents
Measurement device and method for measuring damage threshold of reflector in real time by using femtosecond laser Download PDFInfo
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Abstract
The invention discloses a measurement device and method for measuring the damage threshold of a reflector in real time by using femtosecond laser. According to the measurement device and method of the invention, after incident laser is split, and one laser beam is adopted as main laser, and the other laser beam is subjected to frequency multiplication, and then is adopted as detection light; the main laser is emitted onto the surface of a reflector sample, if the reflector sample is damaged, plasmas are generated on the surface of the reflector sample; one part of the detection light carries plasma information, and the one part of the detection light which carries the plasma information and a part of the detection light which does not carry plasma information are subjected to interference, so as to generate interference stripes; the delay of the detection light is changed through a delay optical path; and the interference patterns of the main laser at different time points after the main laser is emitted onto the surface of the reflector sample are obtained, and therefore, the evolution process of plasmas generated on the reflector sample after the main laser is emitted onto the reflector sample can be obtained, and the damage situation of the reflector sample can be obtained through inversion. The measurement device and method of the invention can be used for monitoring the damage situation of a 0-degree reflector by femtosecond laser under different energy and different power densities in real time, and can be applied to damage threshold measurement in the optical coating field and are of guiding significance for the improvement of an improving method of a femtosecond reflector damage threshold.
Description
Technical field
The invention belongs to field of optical measurements, be specifically related to one and utilize femtosecond laser to measure speculum damage threshold in real time
Measurement apparatus and method.
Background technology
Femtosecond laser is one of recent study hotspot with the interaction of material, is especially applicable to inertial confinement fusion
(ICF) igniting, laser acceleration particle aspect, nineteen sixty American Maiman has just invented first ruby laser, and 1962
The year appearance of Q-regulating technique makes people obtain the laser pulse of nanosecond (ns) magnitude, and the invention laser mode locking technology in 1963 makes
Pulsewidth enters psec (ps) magnitude, the hereafter development of laser technology is more mild, until D.Strickland in 1985 and
G.Mouro proposes chirped pulse amplification (Chirped-pulse Amplification, CPA) and makes high-power small-sized
The generation of desk-topization laser instrument becomes a reality, but the transmission that thing followed problem is high power laser light needs damage threshold higher
Optical element, especially for the speculum of femtosecond laser, therefore the research for speculum damage threshold is particularly important, no
Being same as general Long Pulse LASER (such as psec, nanosecond etc.) damage, the action time of femtosecond laser is short, and instantaneous damage is different
Act on the thermal diffusion process of speculum damage, mainly laser electric field effect damage in long pulse, measure femtosecond the most in real time
Speculum is damaged ultrafast process and the light of femtosecond magnitude must be used to be used as probe by laser, and femtosecond probe light can detect
Speculum moment is damaged by incident laser, produces surface plasma, and probe light can carry Cathode plasma explosion mistake through later
Journey, Density Distribution information, improve mirror coating layer on this basis according to these information, measures speculum the most in real time
The damage threshold transmission to femtosecond laser afterwards so that the great significance of laser technology.
Detecting plasma density at femtosecond laser as probe, this is based primarily upon the principle of interference of light, and plasma is close
In degree detection, being different from general light path owing to there is the region refractive index of plasma, the small optical path difference of introducing is reflected in dry
Relate in striped.Mitsuo Takeda is at article " Fourier-transform method of fringe-pattern
Analysis for computer-based topography and interferometry " in utilize fourier transform method
Extract the phase information in interference pattern, the intensity I of interference fringe (x, y) distribution:
A (x, y) background of expression striped, B (x, is y) that interference region striped light intensity changes amplitude,WithRepresent empty respectively
Between carrier frequency,
(x y) is the phase distribution of tested wavefront to φ；The intensity distribution of interference fringe is made Fourier transformation:
(x, y) interference fringe is at the distribution and expression formula of frequency domain, a (f in frequency domain for ix,fy) it is fundamental component,WithFor comprising the high frequency item of phase place, alternative one is leached and moves on to base
Frequently position, does inverse Fourier transform, obtains:
C (x, y)=b (x, y) exp (i φ (x, y))=FFT-1(b′(fx,fy))
(x y) is the intermediate conversion item comprising phase information, φ to CmRepresent what probe light introduced through heating region
Phase place changes, then
The phase information utilizing Fourier transformation method to obtain combines Abbe inverse transformation and obtains heating region density and divide
Cloth, the interference pattern that damage moment can pass through to collect obtain judging degree of impairment.
Y.Ping et al. is at article " Dynamics of Relativistic Laser-Plasma Interaction on
Solid Targets " middle discovery is when laser and solid target effect, due to the movement that plasma is honorable, scattered light when generation damages
Spectrum has certain skew, and degree of injury is different, and the side-play amount of spectrum is the most different.
When high power laser light exports, half-wave plate is utilized to change output energy relatively conventional, for ensureing polarization after half-wave plate
Degree add polarization beam splitter again so that output light a certain polarized component completely through or reflection, such combination can ensure that
Output energy is conveniently changed in the case of polarization.
Summary of the invention
Based on current ultrafast detection process, the situation of movement of incident light spectrum in testing according to laser acceleration, the present invention carries
Go out a kind of can monitor the femtosecond laser degree of impairment to general speculum under different-energy different capacity density case in real time
Measurement apparatus and method, can be used for the measurement of damage threshold in optical coating field, and combine interferometry, dry from obtain
Relating to the physical process analyzing its damage in image, the raising method improvement to femtosecond speculum damage threshold has guiding significance.
It is an object of the present invention to propose a kind of measurement utilizing femtosecond laser to measure speculum damage threshold in real time
Device.
The measurement apparatus utilizing femtosecond laser to measure speculum damage threshold in real time of the present invention includes: collimator apparatus,
One beam splitting chip, energy tuner, main laser regulation light path device, the first lens, the second lens, frequency-doubling crystal, the 3rd lens, spy
Light-metering regulation light path device, time delay light path device, the second beam splitting chip, right-angle prism, 0 ° of speculum and reception CCD；Wherein, line is inclined
The collimated device of the laser that shakes collimates, and through the first beam splitting chip, light beam arrives energy tuner as main laser, tunes through energy
Original polarization direction, simultaneously energy change is kept after device；Light path device is regulated, it is ensured that the hot spot of main laser is instead through main laser
Penetrate the invariant position of mirror sample surfaces；The first lens focus being placed on the first translation stage, regulation main laser is incident to instead
Penetrate the spot size on mirror sample；Main laser is incident to speculum sample surfaces with 0 ° of angle；If speculum sample is produced by main laser
Raw damage, then produce plasma on the surface of speculum sample；After the first beam splitting chip, another light beam gathers through the second lens
Burnt on frequency-doubling crystal, the frequency doubled light of outgoing forms directional light after the 3rd collimated, is incident to detection as detection light
Light regulation light path device；Detection light is after detection light regulation light path device regulation, through prolonging of time delay light path device regulation detection light
Time；After time delay light path device outgoing, detection light is incident to speculum sample with 90 ° of angles；The beam diameter of detection light is more than anti-
Penetrate the width of the heating region that mirror sample produces, be reflected the detection light part after mirror sample and carry plasma letter
Breath, another part does not carries plasma information；Detection light is divided into two bundles through the second beam splitting chip, a branch of anti-through right-angle prism
Penetrate, carry plasma information part during this is a branch of and do not carry plasma information part and turn down；Another bundle is through 0 °
Speculum backtracking, two bundles again close bundle, carry plasma information part and do not carry plasma information after closing bundle
Part carries out interfering generation interference fringe；Received, by reception CCD, the interference pattern obtained the most in the same time after the first optical filter；Instead
Drill the degree of injury obtaining speculum sample.
Collimator apparatus uses a pair first and second completely reflecting mirror parallel to each other, it is achieved beam path alignment.
Energy tuner includes rotating slide and two polarizing mirrors, and rotating wave plate can change the polarization side of main laser
To, after the polarizing mirror that two panels is parallel to each other so that main laser is original polarization direction, it is ensured that main laser inclined
Degree of shaking, changes energy simultaneously；The energy of main laser can be automatically adjusted, it is achieved same pulse width, under same spot different laser energy
Measurement to sample damage degree.
Main laser regulation light path device includes a pair first and second part light reflection mirror parallel to each other, by regulation the
One and Part II light reflection mirror ensure the invariant position that the incident hot spot of main laser moves at speculum sample surfaces.First
Arranging energy meter after dichroic reflector, main laser is after Part I light reflection mirror, and a part of light transmission enters energy meter, enters
Row real-time power is monitored.Arranging optical filter and light echo monitoring CCD after Part II light reflection mirror, main laser is through Part II light
After speculum, a part of light transmission enters light echo monitoring CCD after the second optical filter, is received back to optical signal.When main laser is incident
On speculum sample, at backscattered light monitoring, when speculum sample is the most damaged, have fundamental frequency light echo, filter by second
After sheet light echo monitoring CCD on monitor less than；If speculum specimen breakdown, in speculum sample surfaces moment after main laser incidence
Produce plasma, backscattered light is mixed with other frequencies of light, can monitor on light echo monitoring CCD after the second optical filter
To speck.Second optical filter uses fundamental frequency light optical filter.
First lens are placed on the first translation stage, and the first translation stage is one-dimensional along the direction being perpendicular to speculum sample surfaces
Mobile, to regulate the distance between the first lens and speculum sample surfaces, thus regulate main laser and be incident to speculum sample
On spot size, therefore can arbitrarily change the size of hot spot.
Main laser is incident to speculum sample surfaces with 0 ° of angle, and speculum sample is 0 ° of speculum.
Incident linearly polarized laser, after the first beam splitting chip, is divided into two bundles, and light beam is as main laser, and another restraints optical sccond-harmonic generation
Afterwards as detection light, it is to avoid the interference of main laser fundamental frequency light, measure the interference pattern background arrived the lowest.
Frequency-doubling crystal uses the one in barium metaborate bbo crystal, potassium dihydrogen phosphate KDP and three lithium borate LBO, from frequency multiplication
Frequency doubled light after crystal outgoing is as detection light.
Detection light regulation light path device includes mutually perpendicular 4th and the 5th completely reflecting mirror, and detection light is through the 4th and the 5th
It is incident to speculum sample surfaces with 90 ° of angles after completely reflecting mirror collimation.
Time delay light path device includes mutually perpendicular 6th and the 7th completely reflecting mirror, and the mutually perpendicular 6th and the 7th is all-trans
Penetrate mirror to be fixed on the second translation stage, be parallel to optical path direction one-dimensional movement translation stage by edge, thus change prolonging of detection light
Time, detect the plasma produced after main laser incides speculum sample surfaces evolution in certain time yardstick
Journey, in femtosecond, psec and the differential responses after nanosecond, main laser is incident to the probe light the most in the same time after speculum sample surfaces
Process, can obtain interference pattern the most in the same time in receiving CCD.
A kind of survey utilizing femtosecond laser to measure speculum damage threshold in real time of offer is provided
Metering method.
The femtosecond laser that utilizes of the present invention measures the measuring method of speculum damage threshold in real time, comprises the following steps:
1) linearly polarized laser collimated device collimation, through the first beam splitting chip, light beam tunes as main laser to energy
Device, after energy tuner, keeps original polarization direction, simultaneously energy change；
2) light path device is regulated by main laser, it is ensured that the hot spot of main laser is at the invariant position of speculum sample surfaces；
3) by the first lens focus being placed on the first translation stage, regulation main laser is incident on speculum sample
Spot size；
4) main laser is incident to speculum sample surfaces with 0 ° of angle；
5) if main laser produces damage to speculum sample, then plasma is produced on the surface of speculum sample；
6) through the another light beam of the first beam splitting chip on the second lens focus to frequency-doubling crystal, the frequency doubled light of outgoing passes through
Form directional light after 3rd collimated, be incident to detect light regulation light path device as detection light；Detection light is adjusted through detection light
After joint light path device regulation, through the time delay of time delay light path device regulation detection light；
7) after time delay light path device outgoing, detection light is incident to speculum sample with 90 ° of angles；The beam diameter of detection light
More than the width of the heating region that speculum sample produces, the detection light part after speculum sample carries
Gas ions information, another part does not carries plasma information；
8) detection light is divided into two bundles through the second beam splitting chip, a branch of reflects through right-angle prism, carry during this is a branch of etc. from
Daughter message part turns down with not carrying plasma information part；Another bundle is through 0 ° of speculum backtracking, and two bundles are again
Secondary close bundle, close bundle after carry plasma information part with do not carry plasma information part carry out interfere produce interfere bar
Line；
9) after the first optical filter, interference pattern is obtained by reception CCD reception；
10) interference fringe inverting obtains the plasma distribution situation of speculum sample surfaces；
11) changed the time delay of detection light by time delay light path, detection main laser is different after being incident to speculum sample surfaces
The interference pattern in moment, obtains main laser and incides the evolutionary process of the plasma produced after on speculum sample, and inverting obtains
Degree of impairment to speculum sample.
Wherein, in step 5) in, it is determined that whether main laser produces damage to speculum sample specifically includes: main laser regulates
Light path device includes parallel to each other first and second dichroic reflection；Optical filter and light echo are set after Part II light reflection mirror
Monitoring CCD, speculum sample surfaces the light echo reflected, after Part II light reflection mirror passes through, then through the second optical filter
Enter light echo monitoring CCD, be received back to optical signal, when main laser incides on speculum sample, when speculum sample is the most damaged
Have at backscattered light monitoring relatively strong basis frequency light echo, by after optical filter light echo monitoring CCD on monitor less than；If speculum
Specimen breakdown, produces plasma in speculum sample surfaces moment after main laser incidence, is mixed with other frequencies in backscattered light
Light, monitors speck after band resistance optical filter on light echo monitoring CCD.
In step 10) in, interference fringe inverting obtains the degree of injury of speculum sample, specifically includes following steps:
I. determine that phase difference changes
Wherein,Representing the phase difference that detection light introduces through heating region, λ represents detection optical wavelength, and ∈ is
The refractive index of heating region, s represents that path of integration, I (x) are the optical path difference change obtained after integration；
Ii. optical path difference I (x) is obtained according to variations in refractive index value integration on path:
Wherein, the optical path difference that I (x) obtains after representing integration, ∈ (r) represents the refractive index along integration radius, and r is vertically
Do radius during integration, the integration radius of R plasma boundary region；
Iii. optical path difference I (x) is made Abbe inverse transformation, obtains the relation of phase difference and the refractive index of plasma, by etc.
The refractive index of gas ions obtains the density of plasma, and then obtains the degree of injury of speculum sample, it is possible to utilize light
The change of path difference obtains the plasma distribution situation of speculum sample surfaces.
If the interference fringe that can measure bending in interference pattern represents the mirror damage of speculum sample, if only
Parallel striped means that and does not damage, the plasma density distribution measured can directly find out surface be damaged after appearance.
The density size of the plasma formed and main laser form the Bulking Time of plasma after inciding speculum sample surfaces
Relevant.
Advantages of the present invention:
The present invention uses after incident laser beam splitting, and light beam is as conduct detection light after another bundle frequency multiplication of main laser；Main
Laser light incident is to speculum sample surfaces, if damaging, surface produces plasma；A part for detection light carries plasma
Information, carry plasma information part with do not carry plasma information part carry out interfere produce interference fringe, pass through
Time delay light path changes the time delay of detection light, and detection main laser is incident to after speculum sample surfaces interference pattern the most in the same time,
Obtaining main laser and incide the evolutionary process of the plasma produced after on speculum sample, inverting obtains the damage of speculum sample
Condition of the injury condition；The present invention monitors the femtosecond laser degree of impairment to 0 ° of speculum under different-energy different capacity density case in real time,
Can be used for the measurement of damage threshold in optical coating field, and combine interferometry, from the interference image obtained, analyze it damage
The physical process of wound, the raising method improvement to femtosecond speculum damage threshold has guiding significance.
Accompanying drawing explanation
Fig. 1 is that the femtosecond laser that utilizes of the present invention measures the embodiment of measurement apparatus of speculum damage threshold in real time
Schematic diagram；
Fig. 2 is that the detection light utilizing femtosecond laser to measure in the measurement apparatus of speculum damage threshold in real time of the present invention divides
Become the close-up schematic view of two beam interferometers.
Detailed description of the invention
Below in conjunction with the accompanying drawings, by specific embodiment, the present invention is expanded on further.
As it is shown in figure 1, the measurement apparatus utilizing femtosecond laser to measure speculum damage threshold in real time of the present embodiment includes:
First and second completely reflecting mirrors 1 parallel to each other and the 2, first beam splitting chip 3, rotation slide 4 combine the first and second reflection of polarizations
Energy tuner, the first and second part light reflection mirrors 8 parallel to each other and the 9, first lens 10, second that mirror 6 and 7 is constituted are saturating
Mirror 11, frequency-doubling crystal the 12, the 3rd lens 13, mutually perpendicular 4th and the 5th completely reflecting mirror 14 and 15, orthogonal 6th and
7th completely reflecting mirror 16 and the 17, second beam splitting chip 20,21,0 ° of speculum 22 of right-angle prism and reception CCD29；Wherein, linear polarization
The collimator apparatus collimation that laser is constituted through the first and second completely reflecting mirrors 1 and 2 parallel to each other, through the first beam splitting chip 3, reflection
90% energy as main laser, arrive after the 3rd completely reflecting mirror 4 reflection and rotate slide 5, change polarization direction, through mutually
Original polarization direction, energy change simultaneously is kept after the first and second parallel polarizing mirrors 6 and 7；Through parallel to each other
The main laser regulation light path device that first and second part light reflection mirrors 8 and 9 are constituted, it is ensured that main laser focuses on through the first lens 10
After hot spot at the invariant position of speculum sample surfaces；First lens focus 10 is arranged on the first translation stage, and regulation is main to swash
Light is incident to the spot size on speculum sample；Main laser is incident to speculum sample surfaces with 0 ° of angle；Part I light is anti-
Penetrating mirror 8 has the light leak of 5% to carry out pulse width measure in entrance second order correlator 25 after beam splitting chip 24 reflects；Beam splitting chip 24 passes through
The light of 50% enters in energy meter 26, carries out real-time power monitoring；Part II speculum 9 has the light leak of 5%, works as reflection
When mirror sample 19 has damage, the second optical filter 27 and light echo monitoring CCD28 are installed after Part II speculum 9, receive light echo
Signal；Through the first beam splitting chip 3 transmission 10% light focus on frequency-doubling crystal 12 through the second lens 11, the frequency doubled light of outgoing
It is incident to mutually perpendicular 4th and the 5th completely reflecting mirror 14 and 15 structure as detection parallel light after the 3rd lens 13 collimation
The detection light regulation light path device become；Detection light is after detection light regulation light path device collimation, through being fixed on the second translation stage
The time delay of the time delay light path device regulation detection light that orthogonal 6th and the 7th completely reflecting mirror 16 and 17 is constituted；From time delay light path
After device outgoing, detection light is incident to speculum sample 19 with 90 ° of angles, i.e. detection light passes through along speculum sample surfaces；As
Shown in Fig. 2, the width of the heating region that the beam diameter of detection light produces more than speculum sample, a detection light part is taken
With plasma information, another part does not carries plasma information, and the black round dot in Fig. 2 represents plasma information；
Detection light is divided into two bundles through the second beam splitting chip 20, a branch of reflects through right-angle prism 21, and light beam covers right-angle prism 21
Center line, carries plasma information part and does not carries plasma information part and turn down during this is a branch of；Another Shu Jing
0 ° of speculum 22 backtracking closes bundle again to the second beam splitting chip 20, two bundles, carry after closing bundle plasma information part with
Not carrying plasma information part to carry out interfering generation interference fringe, after closing bundle, top half and the latter half can produce
Interfering, reception CCD only receives a part and can be obtained by interference fringe；By receiving CCD29 after the first optical filter 23
To interference pattern the most in the same time；Inverting obtains the degree of injury of speculum sample.
It is finally noted that, publicize and implement the purpose of example and be that help is further appreciated by the present invention, but this area
Those of skill will appreciate that: without departing from the spirit and scope of the invention and the appended claims, various replacements and repairing
It is all possible for changing.Therefore, the present invention should not be limited to embodiment disclosure of that, and the scope of protection of present invention is with power
Profit claim defines in the range of standard.
Claims (10)
1. one kind utilizes the measurement apparatus that femtosecond laser measures speculum damage threshold in real time, it is characterised in that described measurement fills
Put and include: collimator apparatus, the first beam splitting chip, energy tuner, main laser regulation light path device, the first lens, the second lens, times
Frequently crystal, the 3rd lens, detection light regulation light path device, time delay light path device, the second beam splitting chip, right-angle prism, 0 ° of speculum
With reception CCD；Wherein, the collimated device of linearly polarized laser collimate, through the first beam splitting chip, light beam as main laser to Danone
Amount tuner, keeps original polarization direction, energy change simultaneously after energy tuner；Light path device is regulated through main laser,
Ensure the hot spot invariant position at speculum sample surfaces of main laser；The first lens being placed on the first translation stage gather
Jiao, regulation main laser is incident to the spot size on speculum sample；Main laser is incident to speculum sample surfaces with 0 ° of angle；If
Main laser produces damage to speculum sample, then produce plasma on the surface of speculum sample；After the first beam splitting chip
Another light beam is on the second lens focus to frequency-doubling crystal, and the frequency doubled light of outgoing forms directional light after the 3rd collimated,
It is incident to detect light regulation light path device as detection light；Detection light is after detection light regulation light path device regulation, through time delay light
The time delay of road device regulation detection light；After time delay light path device outgoing, detection light is incident to speculum sample with 90 ° of angles；Visit
The width of the heating region that the beam diameter of light-metering produces more than speculum sample, is reflected the detection light one after mirror sample
Part carries plasma information, and another part does not carries plasma information；Detection light is divided into two bundles through the second beam splitting chip,
A branch of reflect through right-angle prism, carry plasma information part during this is a branch of and do not carry plasma information part and send out
Raw turnover；Another bundle is through 0 ° of speculum backtracking, and two bundles close bundle again, carry after closing bundle plasma information part with not
Carry plasma information part to carry out interfering generation interference fringe；Received by reception CCD after the first optical filter and obtain difference
The interference pattern in moment；Inverting obtains the degree of injury of speculum sample.
2. measurement apparatus as claimed in claim 1, it is characterised in that described collimator apparatus uses a pair parallel to each other first
With the second completely reflecting mirror.
3. measurement apparatus as claimed in claim 1, it is characterised in that described energy tuner includes rotating slide and two partially
Shake speculum, and rotating wave plate changes the polarization direction of main laser, after the polarizing mirror that two panels is parallel to each other so that main sharp
Light is original polarization direction, it is ensured that the degree of polarization of main laser, changes energy simultaneously.
4. measurement apparatus as claimed in claim 1, it is characterised in that described main laser regulation light path device include a pair mutual
The first and second parallel part light reflection mirrors.
5. measurement apparatus as claimed in claim 4, it is characterised in that after described Part I light reflection mirror, energy meter is set,
Main laser is after Part I light reflection mirror, and a part of light transmission enters energy meter, carries out real-time power monitoring；Described second
Arranging optical filter and light echo monitoring CCD after part light reflection mirror, main laser is after Part II light reflection mirror, and a part of light is saturating
Cross after the second optical filter, enter light echo monitoring CCD, be received back to optical signal.
6. measurement apparatus as claimed in claim 1, it is characterised in that described first lens are placed on the first translation stage, the
One translation stage is along the direction one-dimensional movement being perpendicular to speculum sample surfaces.
7. measurement apparatus as claimed in claim 1, it is characterised in that described detection light regulation light path device includes orthogonal
The the 4th and the 5th completely reflecting mirror.
8. measurement apparatus as claimed in claim 1, it is characterised in that described time delay light path device includes the mutually perpendicular 6th
With the 7th completely reflecting mirror, mutually perpendicular 6th and the 7th completely reflecting mirror is fixed on the second translation stage, and the second translation stage is along flat
Row is in optical path direction one-dimensional movement.
9. one kind utilizes the measuring method that femtosecond laser measures speculum damage threshold in real time, it is characterised in that described measurement side
Method comprises the following steps:
1) linearly polarized laser collimated device collimation, through the first beam splitting chip, light beam as main laser to energy tuner, warp
After energy tuner, keep original polarization direction, simultaneously energy change；
2) light path device is regulated by main laser, it is ensured that the hot spot of main laser is at the invariant position of speculum sample surfaces；
3) by the first lens focus being placed on the first translation stage, regulation main laser is incident to the hot spot on speculum sample
Size；
4) main laser is incident to speculum sample surfaces with 0 ° of angle；
5) if main laser produces damage to speculum sample, then plasma is produced on the surface of speculum sample；
6) through the another light beam of the first beam splitting chip on the second lens focus to frequency-doubling crystal, the frequency doubled light of outgoing is through the 3rd
Form directional light after collimated, be incident to detect light regulation light path device as detection light；Detection light is through detection light regulation light
After the device regulation of road, through the time delay of time delay light path device regulation detection light；
7) after time delay light path device outgoing, detection light is incident to speculum sample with 90 ° of angles；The beam diameter of detection light is more than
The width of the heating region that speculum sample produces, the detection light part after speculum sample carries plasma
Body information, another part does not carries plasma information；
8) detection light is divided into two bundles through the second beam splitting chip, a branch of through right-angle prism reflection, carries plasma during this is a branch of
Message part turns down with not carrying plasma information part；Another bundle closes again through 0 ° of speculum backtracking, two bundles
Bundle, close bundle after carry plasma information part with do not carry plasma information part carry out interfere produce interference fringe；
9) after the first optical filter, interference pattern is obtained by reception CCD reception；
10) interference fringe inverting obtains the plasma distribution situation of speculum sample surfaces；
11) changed the time delay of detection light by time delay light path, detection main laser is incident to after speculum sample surfaces the most in the same time
Interference pattern, obtain the evolutionary process of the plasma produced after main laser incides on speculum sample, inverting obtains instead
Penetrate the degree of impairment of mirror sample.
10. measuring method as claimed in claim 9, it is characterised in that in step 10) in, interference fringe inverting is reflected
The degree of injury of mirror sample, specifically includes following steps:
I. determine that phase difference changes
Wherein,Representing the detection phase difference that introduces through heating region of light, λ represents detection optical wavelength, ∈ for grade from
The refractive index in daughter region, s represents that path of integration, I (x) are the optical path difference change obtained after integration；
Ii. optical path difference I (x) is obtained according to variations in refractive index value integration on path:
Wherein, the optical path difference that I (x) obtains after representing integration, ∈ (r) represents the refractive index along integration radius, and r does long-pending vertically
The radius of timesharing, the integration radius of R plasma boundary region；
Iii. optical path difference I (x) is made Abbe inverse transformation, obtains the relation of phase difference and the refractive index of plasma, by plasma
The refractive index of body obtains plasma distribution situation.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107084690A (en) * | 2017-05-17 | 2017-08-22 | 孙诗明 | A kind of measuring method that prism of corner cube effective area is carried out using femtosecond laser |
| CN109668906A (en) * | 2019-01-31 | 2019-04-23 | 河南科技大学 | It is a kind of for measuring the measurement method and device of optical film layer laser damage threshold |
| CN111504612A (en) * | 2020-04-30 | 2020-08-07 | 中国科学院空天信息创新研究院 | Testing arrangement of many light sources laser damage threshold value |
| CN112180537A (en) * | 2020-09-28 | 2021-01-05 | 北京大学 | Array mirror frame for measuring ultrafast optical signal |
| CN112362313A (en) * | 2021-01-11 | 2021-02-12 | 深圳市星汉激光科技股份有限公司 | Light path testing system and method for return light resistance of laser chip |
| CN112730262A (en) * | 2020-12-18 | 2021-04-30 | 中国科学院上海光学精密机械研究所 | Device and method for improving femtosecond laser induced damage threshold of KDP (Potassium dihydrogen phosphate) crystal |
| CN113484246A (en) * | 2021-07-06 | 2021-10-08 | 南开大学 | High-energy laser damage vacuum experiment system capable of measuring damage threshold |
| CN116642668A (en) * | 2023-06-05 | 2023-08-25 | 浙江深月医疗技术有限公司 | Device and method for measuring damage threshold of femtosecond laser lens |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107084690A (en) * | 2017-05-17 | 2017-08-22 | 孙诗明 | A kind of measuring method that prism of corner cube effective area is carried out using femtosecond laser |
| CN109668906A (en) * | 2019-01-31 | 2019-04-23 | 河南科技大学 | It is a kind of for measuring the measurement method and device of optical film layer laser damage threshold |
| CN111504612A (en) * | 2020-04-30 | 2020-08-07 | 中国科学院空天信息创新研究院 | Testing arrangement of many light sources laser damage threshold value |
| CN111504612B (en) * | 2020-04-30 | 2022-03-25 | 中国科学院空天信息创新研究院 | Testing arrangement of many light sources laser damage threshold value |
| CN112180537A (en) * | 2020-09-28 | 2021-01-05 | 北京大学 | Array mirror frame for measuring ultrafast optical signal |
| CN112730262A (en) * | 2020-12-18 | 2021-04-30 | 中国科学院上海光学精密机械研究所 | Device and method for improving femtosecond laser induced damage threshold of KDP (Potassium dihydrogen phosphate) crystal |
| CN112362313A (en) * | 2021-01-11 | 2021-02-12 | 深圳市星汉激光科技股份有限公司 | Light path testing system and method for return light resistance of laser chip |
| CN112362313B (en) * | 2021-01-11 | 2021-04-23 | 深圳市星汉激光科技股份有限公司 | Light path testing system and method for return light resistance of laser chip |
| CN113484246A (en) * | 2021-07-06 | 2021-10-08 | 南开大学 | High-energy laser damage vacuum experiment system capable of measuring damage threshold |
| CN116642668A (en) * | 2023-06-05 | 2023-08-25 | 浙江深月医疗技术有限公司 | Device and method for measuring damage threshold of femtosecond laser lens |
| CN116642668B (en) * | 2023-06-05 | 2024-03-05 | 浙江深月医疗技术有限公司 | Device and method for measuring damage threshold of femtosecond laser lens |
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Application publication date: 20160824 Assignee: Beijing Rui de Kang Technology Co., Ltd. Assignor: Peking University Contract record no.: 2018990000194 Denomination of invention: Measurement device and method for measuring damage threshold of reflector in real time by using femtosecond laser Granted publication date: 20180213 License type: Exclusive License Record date: 20180730 |
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