CN105870315A - Polarization-sensitive efficient superconducting nanowire single photon detector and design method therefor - Google Patents
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Abstract
The invention discloses a polarization-sensitive efficient superconducting nanowire single photon detector and a design method therefor. The detector comprises a silicon substrate, a gold film reflective layer, a silicon dioxide medium cavity, an NbN nanowire and a coupling anti-symmetric split ring resonator, wherein the silicon substrate, the gold film reflective layer, the silicon dioxide medium cavity and the coupling anti-symmetric split ring resonator are arranged from the bottom up in sequence; the NbN nanowire is positioned in the interior of the silicon dioxide medium cavity; the NbN nanowire comprises multiple periodically-arranged unit structures; and the coupling anti-symmetric split ring resonator is periodically arranged. The invention also discloses a design method for the detector. The detector provided by the invention has a simple and creative structure, high width of the adopted superconducting material NbN nanowire, high duty ratio, high detection efficiency on near infrared wave single photons, and high counting speed.
Description
Technical field
The invention belongs to the fields such as quantum communications, remote sensing and bio-imaging, efficiently surpassing particularly to a kind of polarization sensitive
Lead nanowire single photon detector and method for designing thereof.
Background technology
Compared to semiconductor detector, work in the superconducting nano-wire single-photon detector of near infrared band
(Superconducting Nanowire Single Photon Detector is called for short SNSPD) has efficient, quick, low
The advantage such as dark counting and low jitter.This detector, due to the structure of its meander line, presents the polarization selectivity of intrinsic.When
When we need the strength investigation carrying out light, we to reduce this polarization selectivity as far as possible.But when we utilize light
The encryption of polarization characteristic such as quantum key, or measure the polarization characteristic of light, such as polarimetry and the scattering medium of remotely sensed image
In polarization imaging, we need again the detector of a high polarization sensitive.
Generally with SNSPD, to TE ripple (direction of an electric field is parallel to nano wire) and TM ripple, (direction of an electric field is perpendicular to nanometer for we
Line) the ratio of absorbance represent its polarization sensitive, i.e. polarization extinction (Polarization Extinction
Ratio, is called for short PER).PER value this device of the highest explanation has higher polarization selectivity.At present, Shanghai micro-system outstanding
Vertical magnitude people studies SNSPDs, the back surface incident Si-λ/4SiO2-NbN chamber of high PER, by reducing NbN nanowire width and subtracting
It is the highest by 22 that little dutycycle improves PER(), but cause TE absorbance too low (12%).For keeping high PER to improve TE ripple simultaneously
Absorbing, M á ria Csete et al. increases nano-cavity optical grating construction on NbN nano wire wide for 100nm, and during dutycycle 0.13, TE inhales
It is received in less than 45%, but the technology difficulty of this structure is big, as a consequence it is hardly possible to realize, be highly detrimental to the application of device.
Summary of the invention
Goal of the invention: the problem and shortage existed for above-mentioned prior art, it is an object of the invention to provide a kind of polarization
Sensitive high-efficiency superconducting nanowire single photon detector and method for designing, by utilizing metamaterial structure coupling antisymmetry to divide
Slotted ring resonator (Coupling Anti-symmetric Split Ring Resonator, be also called for short CASRR), to TE ripple and
TM wave polarization sensitivity improves the polarization characteristic of NbN meander line itself, is incorporated into the height with cavity resonator structure simultaneously
In effect SNSPD, while obtaining high polarization sensitive characteristic, obtain high absorbance.Present configuration is simple, novel, uses
Superconductor NbN nanowire width big, dutycycle is high, and high to the single photon detection efficiency of near-infrared ripple, counting rate is fast.
Technical scheme:
For achieving the above object, the high-efficiency superconducting nanometer that the first technical scheme is a kind of polarization sensitive that the present invention provides
Line single-photon detector, including silicon base, gold film reflecting layer, silica dioxide medium chamber, NbN nano wire and coupling antisymmetry division
Ring resonator, is followed successively by described silicon base, gold film reflecting layer, silica dioxide medium chamber and coupling antisymmetry the most from the bottom to top
Split-ring resonator, described NbN nano wire is positioned at silica dioxide medium intracavity portion, and described NbN nano wire includes that multiple cycle arranges
The cellular construction of row, described coupling antisymmetry Split-ring resonator is periodic arrangement.
Setting of the high-efficiency superconducting nanowire single photon detector that the second technical scheme is polarization sensitive that the present invention provides
Meter method, uses FDTD solutions simulation software, and method for designing comprises the steps: that (1) designs a coupling antisymmetry
Split-ring resonator, resonant frequency is near 1550nm；(2) described coupling antisymmetry Split-ring resonator is placed in 1/2nd
On the silica dioxide medium chamber of wavelength, the bottom in silica dioxide medium chamber is the golden film reflecting layer that 100nm is thick, gold film reflecting layer
It is positioned on the thick silicon base of 1mm；When incident illumination direction of an electric field is parallel to the axis of symmetry coupling antisymmetry Split-ring resonator,
Finding silica dioxide medium intracavity electric field is the position of zero；(3) it is at zero, to insert a NbN nano wire at electric field, described NbN nanometer
Line includes the cellular construction of multiple periodic arrangement, and is perpendicular to couple the axis of symmetry of antisymmetry Split-ring resonator；(4) mobile
The coupling antisymmetry Split-ring resonator on upper strata, the distance between fine setting coupling antisymmetry Split-ring resonator and NbN nano wire
d；(5) change the two i.e. L of brachium sum L(of coupling antisymmetry Split-ring resonator simultaneously1+L2), it is ensured that symmetry is constant, i.e. L1/
L=0.58, absorption when the incident optical electric field of record is oriented parallel to NbN nano wire incidence and when being perpendicular to NbN nano wire incidence
Rate；(6) repeat step (4) and (5), obtain the detector absorbance to the incident illumination of two kinds of polarised directions about coupling antisymmetry
Split-ring resonator and the distance of NbN nano wire, the two-dimentional equal pitch contour of the two brachium sums coupling antisymmetry Split-ring resonator
Figure；(7) image that comparison step (6) obtains, finds absorbance and the optimal parameter of polarization extinction；(8) last in level side
To the position of mobile NbN nano wire, optimum structural parameter.The concrete grammar of optimum structural parameter is, optimal at NbN nano wire
Measure Electric Field Distribution in the x-y plane of z coordinate value place, NbN nano wire be placed on the position that x-y plane internal electric field is the strongest,
Increase the polarization extinction that absorbance keeps bigger simultaneously.
Beneficial effect: the most than ever, simple in construction is novel for the detector of the polarization sensitive of this structure, is improving the same of PER
Time maintain high absorbance, nano wire has the advantage that width value is big and dutycycle is high so that this detector has preparation
Simply, the advantage that detection efficient is high and response speed is fast.
Accompanying drawing explanation
Fig. 1 is the structural representation of the high-efficiency superconducting nanowire single photon detector of polarization sensitive；
Fig. 2 is the structural representation of coupling antisymmetry Split-ring resonator；
Fig. 3 is that cellular construction by silica dioxide medium intracavity Electric Field Distribution when TM ripple or TE ripple incidence and regulates showing of parameter
It is intended to；
Fig. 4 is coupling antisymmetry Split-ring resonator transmission spectral line under two kinds of polarized light incidence；
Fig. 5 is the TE absorbance distance about d(metamaterial structure Yu nano wire of detector), two brachiums of L(Meta Materials it
With) contour map；
Fig. 6 is the PER distance about d(metamaterial structure Yu nano wire of detector), two brachium sums of L(Meta Materials) etc.
High line chart；
The image that Fig. 7 is the TE absorbance of detector and PER changes with the change of nano wire x coordinate value；
Fig. 8 is detector absorption line under two kinds of polarized light incidence.
Detailed description of the invention
Below in conjunction with the accompanying drawings and specific embodiment, it is further elucidated with the present invention, it should be understood that these embodiments are merely to illustrate
The present invention rather than the range of the restriction present invention, after having read the present invention, those skilled in the art are to the present invention
The amendment of the various equivalent form of values all fall within the application claims limited range.
One, the high-detectivity detector of novel polarization sensitive is designed
For designing the structure of the high-detectivity detector of novel polarization sensitive, have studied the detector of a lot of polarization sensitive.But before
Structure otherwise simple in construction but absorbance is too low, PER is the highest, otherwise absorbance and PER the most highly desirable, but structure is multiple
Miscellaneous, it is difficult to preparation.It is known that the absorbance of NbN nano wire is determined by its internal electric field size, then by the definition of PER
(SNSPD ratio to the absorbance of TE ripple and TM ripple), it can be seen that reduce the absorption to TM ripple of the NbN Nano-structure, i.e. weakens TM
NbN nano wire internal electric intensity during ripple incidence, is the key improving PER, and for this, we devise a kind of coupling antisymmetry and divide
Slotted ring resonator structure, this structure has different transmission characteristics to TE ripple and TM ripple, weakens the nano wire absorption to TM ripple, increases
Its absorption to TE ripple strong, thus obtain the highest PER.Accordingly, we devise what a kind of simple metamaterial structure loaded
Metal-dielectric-metal cavity resonator structure, schematic diagram is as it is shown in figure 1, the overall structure of this detector is Si-Au-SiO2-NbN-
CASRR, wherein NbN nano wire is embedded in SiO2In medium, being period profile in x-axis, the cycle is that the dotted line frame in 600nm(Fig. 1 is
It is a cycle), the dutycycle ratio of x direction cycle (nanowire width with) is 0.2.Metamaterial structure CASRR thereon is in x-axis
With y-axis direction all in period profile, the cycle is, as in figure 2 it is shown, b=335nm, L1=145nm, L2=
105nm, s=80nm, w=50nm.This detector is up to 85.5%, to 1550nm to the TE absorbing incident light rate of 1550nm wavelength
The TM absorbing incident light rate of wavelength is almost nil, and PER is 585.This NbN structure is by the rivulose Nano-structure of periodic arrangement
Composition, selects this structure to main reason is that the area that can increase search coverage, it is achieved single-mode fiber and search coverage
Direct-coupling, is greatly improved the detection efficient of period.Additionally, this structure directly can be write by the electron beam of rectangular patterns
Enter, it is simple to experiment.The metamaterial structure of the superiors uses and couples antisymmetric Split-ring resonator structure, and this structure exists
Resonance near 1550nm wavelength, converges energy, can regulate surrounding electric field distribution, TE ripple and TM ripple be had natural passing through simultaneously
Selectivity, and structure easily makes.
For determining the most optimized parameter of this structure, first enter with FDTD solutions software based on finite time-domain calculus of finite differences
The a large amount of analog simulations of row, z direction is set to PML border, x Yu y direction is disposed as cycle boundary, electromagnetic field transmit direction along
Z direction.Thickness d=the 1mm of silicon base in Fig. 1, the thickness in gold film reflecting layer is 100nm, gold film reflecting layer and NbN nano wire it
Between the thickness that silicon dioxide thickness is 510nm, NbN nano wire be 6nm, width 120nm, each cellular construction interval 480nm,
The thickness of metamaterial structure (i.e. coupling antisymmetry Split-ring resonator) is between 100nm, NbN nano wire and metamaterial structure
Silicon dioxide thickness is to be in the cycle of 45nm, NbN nano wire and metamaterial structure。
Two, the method for designing of the high-detectivity detector of polarization sensitive
The method that design this new detector is described below:
(1) design polarization selectivity structure Coupling antisymmetry Split-ring resonator, its resonance wavelength is at 1550nm.Such as Fig. 3
Shown in, for TE ripple, its transmitted spectrum has resonance peak at 1550nm, and for TM ripple, transmission coefficient is at us
1 it is almost in frequency range interested；
(2) dielectric thickness presetting the silica dioxide medium chamber that metamaterial structure loads is 555nm, and look for
The electric field null of the TM ripple in medium, i.e. the coordinate position in z direction, as shown in Figure 4, during TM ripple incidence, electric field is the z seat of zero
It is designated as 510nm, and now TE ripple electric field at z=510nm being not zero, it is ensured that certain TE absorbance and higher
PER;
(3) according to the parameter in the structure of Fig. 1 and step (1) and (2), detector cells structural model, wherein 120nm width are built
The NbN nano wire of 600nm length is placed in the electric field null in (2), and the boundary condition in x direction and y direction is disposed as periodic condition；
(3) the coupling antisymmetry Split-ring resonator of the superiors, fine setting coupling antisymmetry Split-ring resonator and NbN nanometer are moved
Shown in distance d(between line cellular construction as lowermost in Fig. 4 parameter)；
(4) change two brachium sums L(such as Fig. 4 lowermost cellular construction parameter of coupling antisymmetry Split-ring resonator simultaneously
Shown in), absorbance when the incident optical electric field of record is oriented parallel to nano wire incidence and when being perpendicular to nano wire incidence；
(5) repeat step (3) and (4), obtain detector and the absorbance of the incident illumination of two kinds of polarised directions is opposed about coupling
Claim distance d of Split-ring resonator and NbN nano wire, couple the two dimension etc. of two brachium sums L of antisymmetry Split-ring resonator
High line chart, as it is shown in figure 5, calculate the PER X-Y scheme about d and L, as shown in Figure 6 simultaneously；
(6) image that comparison step (5) obtains, finds absorbance and optimal parameter .d=45nm of PER, and during L=305nm, TE inhales
Yield is 84.3%, and PER is up to 522；
(7) finally moving in the horizontal direction the position of NbN nano wire, optimize structure. the method for optimum structural parameter is, at NbN
Measure Electric Field Distribution in the optimal z coordinate value place x-y plane of nano wire, NbN nano wire is placed on x-y plane internal electric field the strongest
Position, the polarization extinction that the absorbance to TE ripple keeps bigger simultaneously can be increased.As it is shown in fig. 7, nano wire x-axis coordinate
When value is for 20nm, i.e., during NbN nano wire deviation metamaterial structure space center 20nm, absorbance is 85.5% to the maximum, and PER is permissible
Bring up to 585, as shown in Figure 8.
Three, the tolerance analysis of the high-detectivity detector of polarization sensitive
Considering from technological angle, we have also carried out the analysis of tolerance. and simulation result shows, the z coordinate deviation of NbN nano wire
On absorbance impact less than 4.3% within optimum 10nm, and bigger on PER impact.For ensureing that the PER, NbN of more than 400 receive
The z coordinate off-target point of rice noodle should control within 5nm；And as can be seen from Figure 7 NbN x coordinate value deviation 20nm with
In, the error of absorbance is less than 4%, and PER is more than 500.
Four, the high-detectivity detector experimental result of polarization sensitive and discussion
The topmost application aspect of efficient single-photon detector of the polarization sensitive of present invention design is quantum communications, remote sensing and life
The fields such as thing imaging, they require that this detector possesses the highest polarization extinction and preferable absorptivity.As it can be observed in the picture that
The detector of our design of Simulation is up to 85.5% to the absorbance of the incident illumination that 1550nm direction of an electric field is parallel to nano wire, right
1550nm direction of an electric field is perpendicular to the incident illumination of nano wire and hardly picks up, and PER is up to 585, fully meets the needs of application.
It addition, the high-detectivity detector of the polarization sensitive of the present invention, the polarization sensitive of the optical grating construction of relative document report is visited
Survey device, simple in construction, reduce technology difficulty, and front incidence can improve the coupling efficiency of incident illumination.
In a word, we utilize the polarization sensitive high-detectivity detector that metamaterial structure designs, and are mainly reflected in novel structure, former
Reason uniqueness, the advantages such as the selection of material is superior, and preparation method is convenient, and absorbance is high, PER is big.In being actually needed, according to this patent
In method for designing, change structure parameter, the detector of other resonant frequencies can be obtained.Therefore, will in superconduction and
Other type single-photon detector is used widely.
Claims (10)
1. the high-efficiency superconducting nanowire single photon detector of a polarization sensitive, it is characterised in that include silicon base, gold film reflection
Layer, silica dioxide medium chamber, NbN nano wire and coupling antisymmetry Split-ring resonator, be followed successively by described silicon the most from the bottom to top
Substrate, gold film reflecting layer, silica dioxide medium chamber and coupling antisymmetry Split-ring resonator, described NbN nano wire is positioned at two
Silica medium intracavity portion, described NbN nano wire includes the cellular construction of multiple periodic arrangement, described coupling antisymmetry splitting ring
Resonator is periodic arrangement.
The high-efficiency superconducting nanowire single photon detector of polarization sensitive the most according to claim 1, it is characterised in that described coupling
The thickness closing antisymmetry Split-ring resonator is 100nm.
The high-efficiency superconducting nanowire single photon detector of polarization sensitive the most according to claim 1, it is characterised in that described
NbN is superconduction NbN, and the thickness of described NbN nano wire is 6nm, and width is 120nm, each described cellular construction interval 480nm.
The high-efficiency superconducting nanowire single photon detector of polarization sensitive the most according to claim 1, it is characterised in that described gold
The thickness in silica dioxide medium chamber filled between film reflecting layer and NbN nano wire is 510nm, NbN nano wire and couple opposition
The thickness in the silica dioxide medium chamber filled between Split-ring resonator is called 45nm.
The high-efficiency superconducting nanowire single photon detector of polarization sensitive the most according to claim 1, it is characterised in that described gold
The thickness in film reflecting layer is 100nm.
The high-efficiency superconducting nanowire single photon detector of polarization sensitive the most according to claim 1, it is characterised in that described coupling
Closing antisymmetry Split-ring resonator distribution period both horizontally and vertically is, described NbN nanometer
Line distribution period in the horizontal direction is 600nm.
7. the method for designing of the high-efficiency superconducting nanowire single photon detector of a polarization sensitive, it is characterised in that use FDTD
Solutions simulation software, method for designing comprises the steps: that (1) designs a coupling antisymmetry Split-ring resonator, resonance
Frequency is near 1550nm；(2) silicon dioxide that described coupling antisymmetry Split-ring resonator is placed in 1/2nd wavelength is situated between
On matter chamber, the bottom in silica dioxide medium chamber is the golden film reflecting layer that 100nm is thick, and described gold film reflecting layer is positioned at 1mm thickness
On silicon base；When incident illumination direction of an electric field is parallel to the axis of symmetry coupling antisymmetry Split-ring resonator, find titanium dioxide
Silicon dielectric cavity internal electric field is the position of zero；(3) being to insert a NbN nano wire at zero at electric field, described NbN nano wire includes multiple
The cellular construction of periodic arrangement, and it is perpendicular to couple the axis of symmetry of antisymmetry Split-ring resonator；(4) coupling of the superiors is moved
Antisymmetry Split-ring resonator, distance d between fine setting coupling antisymmetry Split-ring resonator and NbN nano wire；(5) change simultaneously
Becoming two brachium sums L of coupling antisymmetry Split-ring resonator, it is ensured that symmetry is constant, the incident optical electric field of record is oriented parallel to
Absorbance during NbN nano wire incidence and when being perpendicular to NbN nano wire incidence；(6) repeat step (4) and (5), obtain detector
To the absorbance of the incident illumination of two kinds of polarised directions about coupling antisymmetry Split-ring resonator and the distance of NbN nano wire, coupling
Close the two-dimentional contour map of two brachium sums of antisymmetry Split-ring resonator；(7) image that comparison step (6) obtains, finds
Absorbance and the optimal parameter of polarization extinction；(8) finally move in the horizontal direction the position of NbN nano wire, optimize structure ginseng
Number.
The method for designing of the high-efficiency superconducting nanowire single photon detector of polarization sensitive, its feature the most according to claim 7
Being, in described step (8), the method for optimum structural parameter is, in the optimal z coordinate value place x-y plane of NbN nano wire
Measure Electric Field Distribution, NbN nano wire is placed on the position that x-y plane internal electric field is the strongest.
The method for designing of the high-efficiency superconducting nanowire single photon detector of polarization sensitive, its feature the most according to claim 7
Being, in described step (1), the thickness of coupling antisymmetry Split-ring resonator is 100nm.
The method for designing of the high-efficiency superconducting nanowire single photon detector of polarization sensitive, its feature the most according to claim 7
It is, in described step (2) and step (3), at 1550nm wavelength, Si, SiO2, the refractive index of Au, NbN is respectively 3.628,
1.444,0.559+9.81i and 5.23+5.82i；Au and NbN refractive index at other frequencies uses Lorenz-Drude mould
Type matching.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107589091A (en) * | 2017-08-17 | 2018-01-16 | 南京理工大学 | A kind of near infrared band Meta Materials index sensor |
| CN108872151A (en) * | 2017-09-29 | 2018-11-23 | 郑州大学 | It is a kind of based on T shape to and nano wire pair optical sensor |
| CN110702220A (en) * | 2019-09-19 | 2020-01-17 | 天津大学 | Superconducting nanowire single photon detection system in mid-infrared band |
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