CN105845596B - A kind of test equipment and test method - Google Patents
A kind of test equipment and test method Download PDFInfo
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- CN105845596B CN105845596B CN201610251453.0A CN201610251453A CN105845596B CN 105845596 B CN105845596 B CN 105845596B CN 201610251453 A CN201610251453 A CN 201610251453A CN 105845596 B CN105845596 B CN 105845596B
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Abstract
The present invention provides a kind of test equipment, for measuring the position of telltale mark on display base plate, comprising: for measuring the figure layer elevation carrection device of telltale mark region figure layer elevation information on display base plate to be measured；For determining the location determination means of telltale mark location information based on the elevation information.The present invention also provides a kind of test methods.Test equipment and test method provided by the invention determine telltale mark location information based on telltale mark region figure layer elevation information on display base plate, can accurately confirm the location information of telltale mark, to solve the problems, such as that telltale mark is accidentally grabbed.
Description
Technical field
The present invention relates to field of display technology, more particularly to a kind of test equipment and test method.
Background technique
In display fabrication process process, telltale mark (Mask) had after completing overall dimensional accuracy (TP:
Total Pitch) detection and crucial line width (CD) detect.It is above-mentioned to be typically based on TPCD equipment (board) realization.In TP and CD
In detection process, need establish very accurately coordinate system and navigate to the desired amount survey each position.
The measurement platform of existing TP and CD mostly be by camera lens take pictures in the way of carry out Mark crawl i.e. location information determination
And establish coordinate system.And it is this there are certain technological deficiencies by way of taking pictures and obtaining Mask location information, even currently
Layer is light non-transmittable layers, then is just easy to accidentally be grabbed by the Mark that current layer covers.Such as if Mark is made in light shield layer (LS), and
When needing to carry out CD after preparing polysilicon figure layer (Poly) on light shield layer or figure layer repeatability (Overlay) measures, need
The position shape information of Mask is obtained by way of taking pictures, then since polysilicon figure layer is opaque, causes camera lens to Mask
Light of taking pictures is reflected back, so that being difficult to determine the profile of Mask, the case where Mark is accidentally grabbed is occurred, is led to the seat established
Mark system is not accurate, so that the position of the desired amount survey cannot be measured well.
Summary of the invention
The present invention provides a kind of test equipment and test method, solves the problems, such as that telltale mark is accidentally grabbed.
It is as follows that the present invention provides scheme: a kind of test equipment, for measuring the position of telltale mark on display base plate, wraps
It includes:
For measuring the figure layer elevation carrection device of telltale mark region figure layer elevation information on display base plate to be measured；
For determining the location determination means of telltale mark location information based on the elevation information.
Further, the figure layer elevation carrection device includes:
Transmitter for the first measuring signal of telltale mark region transmitting on the display base plate；
It is generated after telltale mark region reflection on the display base plate for receiving first measuring signal
The receiver of second measuring signal；
For the transmission time based on measuring signal on the display base plate at the different location of telltale mark region,
The signal processor of the figure layer elevation information on display base plate at the different location of telltale mark region is determined, when the transmission
Between when emitting first time of first measuring signal for transmitter and receiving the second of second measuring signal with receiver
Between between difference；
The location determination means is true based on the height difference on display base plate at the different location of telltale mark region
Determine the location information of telltale mark.
Further, the measuring signal is at least one of lightwave signal, acoustic signals.
Further, the measuring signal is laser.
Further, the location determination means is based on the height on display base plate at the different location of telltale mark region
Degree difference determines the boundary information of telltale mark；
The location determination means is based on the boundary information, determines the central point information of telltale mark, the positioning mark
The central point information of note is the location information of the telltale mark.
Further, test equipment further include:
Moving parts for driving the figure layer elevation carrection device to move above the display base plate to be measured, it is described
Figure layer elevation carrection device is fixedly connected with the moving parts.
Further, test equipment further include:
For carrying the board of display base plate to be measured.
Further, test equipment further include:
Telltale mark location information for being determined based on the location determination means is constructed with display base plate center to be measured
Coordinate for the coordinate system of origin constructs device.
Further, the test equipment is TPCD equipment.
The present invention also provides a kind of test methods, comprising:
Measure telltale mark region figure layer elevation information on display base plate to be measured；
Telltale mark location information is determined based on the elevation information.
Further, telltale mark region figure layer elevation information includes: on the measurement display base plate to be measured
Telltale mark region emits the first measuring signal on the display base plate；
Receive first measuring signal generates after telltale mark region reflection on the display base plate second
Measuring signal；
Transmission time based on measuring signal on the display base plate at the different location of telltale mark region determines
The signal processor of figure layer elevation information on display base plate at the different location of telltale mark region, the transmission time are
Emit the difference between the first time of first measuring signal and the second time of reception second measuring signal.
Further, described to determine that telltale mark location information includes: based on the elevation information
The position of telltale mark is determined based on the height difference on display base plate at the different location of telltale mark region
Information.
Further, the height difference based on display base plate at the different location of telltale mark region determines fixed
Position label location information include:
The boundary of telltale mark is determined based on the height difference on display base plate at the different location of telltale mark region
Information；
Based on the boundary information, determine that the central point information of telltale mark, the central point information of the telltale mark are
The location information of the telltale mark.
Further, the height difference based on display base plate at the different location of telltale mark region determines fixed
The boundary information of position label specifically includes:
The first boundary that true display base plate recognizes telltale mark is scanned along first direction；
Along the second boundary of the second direction scanning display base plate confirmation telltale mark with the first direction with angle.
Further, described to be based on the boundary information, determine the central point information of telltale mark, the telltale mark
Central point information is that the location information of the telltale mark specifically includes:
Telltale mark is obtained in the first center line of the first direction according to first boundary；
Telltale mark is obtained in the second center line of the second direction according to the second boundary；
The central point information of the telltale mark is determined based on first center line and second center line, it is described fixed
The central point information of position label is the location information of the intersection point of first center line and second center line.
Further, test method further include:
It is constructed based on the telltale mark location information using display base plate center to be measured as the coordinate system of origin.
From the above as can be seen that test equipment and test method provided by the invention are based on positioning mark on display base plate
Note region figure layer elevation information determines telltale mark location information, can accurately confirm the location information of telltale mark, with
Solve the problems, such as that telltale mark is accidentally grabbed.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention without any creative labor, may be used also for those of ordinary skill in the art
To obtain other drawings based on these drawings.
Fig. 1 shows telltale mark location information schematic illustration is determined in the embodiment of the present invention；
Fig. 2 indicates test equipment structural schematic diagram in the embodiment of the present invention；
Fig. 3 indicates that telltale mark central point confirms schematic illustration in the embodiment of the present invention.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
Attached drawing, the technical solution of the embodiment of the present invention is clearly and completely described.Obviously, described embodiment is this hair
Bright a part of the embodiment, instead of all the embodiments.Based on described the embodiment of the present invention, ordinary skill
Personnel's every other embodiment obtained, shall fall within the protection scope of the present invention.
Unless otherwise defined, the technical term or scientific term used herein should be in fields of the present invention and has
The ordinary meaning that the personage of general technical ability is understood.Used in present patent application specification and claims " the
One ", " second " and similar word are not offered as any sequence, quantity or importance, and are used only to distinguish different
Component part.Equally, the similar word such as "one" or " one " does not indicate that quantity limits yet, but indicates that there are at least one.
" connection " either the similar word such as " connected " is not limited to physics or mechanical connection, but may include electrical
Connection, it is either direct or indirect."upper", "lower", "left", "right" etc. are only used for indicating relative positional relationship, work as quilt
After the absolute position of description object changes, then the relative positional relationship also correspondingly changes.
In order to solve the problems, such as that telltale mark is accidentally grabbed, the present embodiment provides a kind of test equipments, for measuring display base
The position of telltale mark on plate, comprising:
For measuring the figure layer elevation carrection device of telltale mark region figure layer elevation information on display base plate to be measured；
For determining the location determination means of telltale mark location information based on the elevation information.
Since the position film layer corresponding with the position of Mark not set on display base plate of setting Mark on display base plate is
Different, thickness is different, and therefore, figure layer elevation carrection device and location determination means match, based on display base plate
Upper telltale mark region figure layer elevation information determines telltale mark location information, confirms telltale mark in this manner
Location information, even if current layer be light non-transmittable layers, by current layer cover Mark can also be accurately detected, avoid positioning
Label is accidentally grabbed.
The specific constructive form of the figure layer elevation carrection device can there are many, measure display base plate to be measured as long as realizing
Upper telltale mark region figure layer elevation information, in the present embodiment, the figure layer elevation carrection device includes:
Transmitter for the first measuring signal of telltale mark region transmitting on the display base plate；
It is generated after telltale mark region reflection on the display base plate for receiving first measuring signal
The receiver of second measuring signal；
For the transmission time based on measuring signal on the display base plate at the different location of telltale mark region,
The signal processor of the figure layer elevation information on display base plate at the different location of telltale mark region is determined, when the transmission
Between when emitting first time of first measuring signal for transmitter and receiving the second of second measuring signal with receiver
Between between difference；
The location determination means is true based on the height difference on display base plate at the different location of telltale mark region
Determine the location information of telltale mark.
Further, the measuring signal is at least one of lightwave signal, acoustic signals.
Preferably, the measuring signal is laser.
As shown in Figure 1, telltale mark 3 is made in light shield layer (LS) 2, and polysilicon figure layer is prepared on light shield layer 2
(Poly) 1, when needing to carry out CD or figure layer repeatability (Overlay) measurement later, transmitter is fixed on the display base plate
Position 3 region of label emits the first measuring signal, and arrow indicates the first measuring signal in Fig. 1, and receiver receives described first
The second measuring signal that measuring signal generates after 3 region of telltale mark reflection on the display base plate, signal processor
According to the transmission time of measuring signal, i.e. transmitter emits described in first time and the receiver reception of first measuring signal
Difference between second time of the second measuring signal determines on display base plate at 3 region different location of telltale mark
Figure layer height difference, the location determination means is based on the height on display base plate at 3 region different location of telltale mark
Difference determines the location information of telltale mark 3.
The specific constructive form of the location determination means can there are many, as long as realize telltale mark location information really
Fixed, in the present embodiment, the location determination means includes: telltale mark boundary information determination unit, for based on display
Height difference on substrate at the different location of telltale mark region determines the boundary information of telltale mark；
Telltale mark central point information determination unit determines the central point of telltale mark for being based on the boundary information
Information, the central point information of the telltale mark are the location information of the telltale mark.
In the present embodiment, for the ease of the telltale mark being quickly detected on display base plate to be measured, test equipment is also wrapped
It includes:
Moving parts for driving the figure layer elevation carrection device to move above the display base plate to be measured, it is described
Figure layer elevation carrection device is fixedly connected with the moving parts.
Further, test equipment further include:
For carrying the board of display base plate to be measured.
Preferably, test equipment further include:
Telltale mark location information for being determined based on the location determination means is constructed with display base plate center to be measured
Coordinate for the coordinate system of origin constructs device.
Further, the test equipment is TPCD equipment.
The process of telltale mark measurement is introduced in detail below.
As shown in Fig. 2, there are four telltale mark 3 on display base plate 20 to be measured, by figure layer elevation carrection device 4 and carrying to
The board 10 for surveying display base plate 20 is bound, and using the intrinsic mechanical coordinate of board 10, moving parts drives figure layer height measuring gauge
Part 4 is moved to a marker region in four telltale marks 3 to be detected on display base plate 20 to be measured, passes through transmitting
The laser of device transmitting is scanned the region Mark.
Transmitter emits in laser (the first measuring signal) to display base plate 20 to be measured, some laser is reflected back toward
Come, due to thicknesses of layers difference, first measuring signal is received through positioning on the display base plate 20 to be measured by receiver
The second measuring signal generated after the reflection of 3 region of label, signal processor emit according to the transmission time of measuring signal
Device emits the first time of first measuring signal and receiver received between the second time of second measuring signal
Difference determines the figure layer height difference on display base plate 20 to be measured at 3 region different location of telltale mark.
As shown in figure 3, telltale mark boundary information determination unit passes through laser transversal scanning and vertical scanning confirmation Mark
Vertical and lateral boundary (side AF, BE, CH, DG), moving parts drive 4 transverse shifting of figure layer elevation carrection device, positioning
Mark boundaries information determination unit determines the of telltale mark 3 according to the figure layer height difference that figure layer elevation carrection device 4 obtains
One boundary 31 (i.e. the side AF, BE), moving parts drive figure layer elevation carrection device 4 vertically movable, and telltale mark boundary information is true
Order member determines the second boundary of telltale mark 3 according to the figure layer height difference determination unit that figure layer elevation carrection device 4 obtains
32 (i.e. the sides CH, DG), telltale mark central point information determination unit calculates cross central line (b line) by the side AF&BE, and position
Determine that the telltale mark central point information determination unit in device 5 calculates vertical centerline (a line) by the side CH, DG, in transverse direction
Heart line and vertical centerline intersection point (O point) are the Mark central point a certain value of 10 mechanical coordinate of board (this central point corresponding),
And so on, define the central point of the other three telltale mark on display base plate 20 to be measured, coordinate construct device by this four
A respective central point information of telltale mark establishes one using display base plate central point to be measured as the coordinate system of origin, to carry out
Display base plate each position to be measured accurately measures.
Test equipment provided in an embodiment of the present invention is by utilizing telltale mark region figure layer height on display base plate
Information determines telltale mark location information, reach reduction after telltale mark (Mask) completes overall dimensional accuracy (TP:
Total Pitch) there is the purpose accidentally surveyed in detection and crucial line width (CD) detection process, to solve as caused by accidentally surveying
The problem of being unable to accurate feedback Product Process situation, meanwhile, subsequent product cannot accurately be done by accidentally surveying by also solving
The problem of Feedback (feedback).
The present invention also provides a kind of test methods, comprising:
Measure telltale mark region figure layer elevation information on display base plate to be measured；
Telltale mark location information is determined based on the elevation information.
Further, telltale mark region figure layer elevation information includes: on the measurement display base plate to be measured
Telltale mark region emits the first measuring signal on the display base plate；
Receive first measuring signal generates after telltale mark region reflection on the display base plate second
Measuring signal；
Transmission time based on measuring signal on the display base plate at the different location of telltale mark region determines
The signal processor of figure layer elevation information on display base plate at the different location of telltale mark region, the transmission time are
Emit the difference between the first time of first measuring signal and the second time of reception second measuring signal.
Further, described to determine that telltale mark location information includes: based on the elevation information
The position of telltale mark is determined based on the height difference on display base plate at the different location of telltale mark region
Information.
Further, the height difference based on display base plate at the different location of telltale mark region determines fixed
Position label location information include:
The boundary of telltale mark is determined based on the height difference on display base plate at the different location of telltale mark region
Information；
Based on the boundary information, determine that the central point information of telltale mark, the central point information of the telltale mark are
The location information of the telltale mark.
Further, described " to be determined based on the height difference on display base plate at the different location of telltale mark region
The boundary information of telltale mark " specifically includes:
The first boundary that true display base plate recognizes telltale mark is scanned along first direction；
Along the second boundary of the second direction scanning display base plate confirmation telltale mark with the first direction with angle.
Preferably, the angle between the first direction and the second direction is 90 degree.
As shown in figure 3, the first direction be diagram the direction parallel with the transverse direction of display base plate, described second
The direction parallel with the vertical direction of display base plate in direction and diagram.
Further, described " to be based on the boundary information, determine the central point information of telltale mark, the telltale mark
Central point information be the telltale mark location information " specifically include:
Telltale mark is obtained in the first center line of the first direction according to first boundary；
Telltale mark is obtained in the second center line of the second direction according to the second boundary；
The central point information of the telltale mark is determined based on first center line and second center line, it is described fixed
The central point information of position label is the location information of the intersection point of first center line and second center line.
Further, test method further include:
It is constructed based on the telltale mark location information using display base plate center to be measured as the coordinate system of origin.
Specifically, as shown in figure 3, telltale mark boundary information determination unit is true by laser transversal scanning and vertical scanning
Recognize the vertical and lateral boundary (side AF, BE, CH, DG) of Mark, moving parts drives figure layer elevation carrection device 4 laterally to move
Dynamic, telltale mark boundary information determination unit determines positioning mark according to the figure layer height difference that figure layer elevation carrection device 4 obtains
First boundary 31 (i.e. the side AF, BE) of note 3, moving parts drive figure layer elevation carrection device 4 vertically movable, telltale mark boundary
Information determination unit determines the of telltale mark 3 according to the figure layer height difference determination unit that figure layer elevation carrection device 4 obtains
Two boundaries 32 (i.e. the side CH, DG), telltale mark central point information determination unit calculate cross central line (b line) by the side AF&BE,
And the telltale mark central point information determination unit in location determination means 5 calculates vertical centerline (a line) by the side CH, DG,
Cross central line and vertical centerline intersection point (O point) are Mark central point (certain of corresponding 10 mechanical coordinate of board of this central point
One value), and so on, the central point of the other three telltale mark on display base plate 20 to be measured is defined, it is logical that coordinate constructs device
It crosses this four respective central point informations of telltale mark and establishes one using display base plate central point to be measured as the coordinate system of origin,
It is accurately measured to carry out display base plate each position to be measured.
Test equipment provided in an embodiment of the present invention is by utilizing telltale mark region figure layer height on display base plate
Information determines telltale mark location information, reach reduction after telltale mark (Mask) completes overall dimensional accuracy (TP:
Total Pitch) there is the purpose accidentally surveyed in detection and crucial line width (CD) detection process, to solve as caused by accidentally surveying
The problem of being unable to accurate feedback Product Process situation, meanwhile, subsequent product cannot accurately be done by accidentally surveying by also solving
The problem of Feedback (feedback).
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, several improvement and replacement can also be made, these are improved and replacement
Also it should be regarded as protection scope of the present invention.
Claims (9)
1. a kind of test equipment, for measuring the position of telltale mark on display base plate characterized by comprising
For measuring the figure layer elevation carrection device of telltale mark region figure layer elevation information on display base plate to be measured；
For determining the location determination means of telltale mark location information based on the elevation information；
It is fixed that the location determination means is determined based on the height difference on display base plate at the different location of telltale mark region
The boundary information of position label；
The location determination means is based on the boundary information, determines the central point information of telltale mark, the telltale mark
Central point information is the location information of the telltale mark；
Wherein, the location determination means includes the first boundary determination unit, is recognized for scanning true display base plate along first direction
First boundary of telltale mark；
The second boundary determination unit, it is fixed for confirming along the second direction scanning display base plate with the first direction with angle
The second boundary of position label.
2. test equipment as described in claim 1, which is characterized in that the figure layer elevation carrection device includes:
Transmitter for the first measuring signal of telltale mark region transmitting on the display base plate；
Second generated after telltale mark region reflection on the display base plate for receiving first measuring signal
The receiver of measuring signal；
For the transmission time based on measuring signal on the display base plate at the different location of telltale mark region, determine
The signal processor of figure layer elevation information on display base plate at the different location of telltale mark region, the transmission time are
Transmitter emit first time of first measuring signal and receiver receive second measuring signal the second time it
Between difference；
It is fixed that the location determination means is determined based on the height difference on display base plate at the different location of telltale mark region
The location information of position label.
3. test equipment as described in claim 1, which is characterized in that further include:
Moving parts for driving the figure layer elevation carrection device to move above the display base plate to be measured, the figure layer
Elevation carrection device is fixedly connected with the moving parts；
For carrying the board of display base plate to be measured.
4. test equipment as described in claim 1, which is characterized in that further include:
Telltale mark location information and telltale mark and display base plate to be measured for being determined based on the location determination means
The relative positional relationship building at center constructs device by the coordinate of the coordinate system of origin of display base plate center to be measured.
5. a kind of test method characterized by comprising
Measure telltale mark region figure layer elevation information on display base plate to be measured；
Telltale mark location information is determined based on the elevation information；
Wherein, determine that telltale mark location information includes based on the elevation information, based on where telltale mark on display base plate
Height difference at the different location of region determines the location information of telltale mark；
The height difference based on display base plate at the different location of telltale mark region determines the position of telltale mark
Information includes:
The boundary information of telltale mark is determined based on the height difference on display base plate at the different location of telltale mark region；
Based on the boundary information, determine that the central point information of telltale mark, the central point information of the telltale mark are described
The location information of telltale mark.
6. method as claimed in claim 5, which is characterized in that telltale mark region on the measurement display base plate to be measured
Figure layer elevation information includes:
Telltale mark region emits the first measuring signal on the display base plate；
Receive the second measurement that first measuring signal generates after telltale mark region reflection on the display base plate
Signal；
Transmission time based on measuring signal on the display base plate at the different location of telltale mark region determines display
The signal processor of figure layer elevation information on substrate at the different location of telltale mark region, the transmission time are transmitting
Difference between the first time of first measuring signal and the second time for receiving second measuring signal.
7. method as claimed in claim 5, which is characterized in that described different based on telltale mark region on display base plate
Height difference at position determines that the boundary information of telltale mark specifically includes:
The first boundary that true display base plate recognizes telltale mark is scanned along first direction；
Along the second boundary of the second direction scanning display base plate confirmation telltale mark with the first direction with angle.
8. the method for claim 7, which is characterized in that it is described to be based on the boundary information, it determines in telltale mark
Heart point information, the central point information of the telltale mark are that the location information of the telltale mark specifically includes:
Telltale mark is obtained in the first center line of the first direction according to first boundary；
Telltale mark is obtained in the second center line of the second direction according to the second boundary；
The central point information of the telltale mark, the positioning mark are determined based on first center line and second center line
The central point information of note is the location information of the intersection point of first center line and second center line.
9. method as claimed in claim 5, which is characterized in that further include:
The telltale mark location information and telltale mark that are determined based on the location determination means and display base plate center to be measured
Relative positional relationship construct using display base plate center to be measured as the coordinate system of origin.
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1797213A (en) * | 2004-12-27 | 2006-07-05 | Asml荷兰有限公司 | Level sensor, lithographic apparatus and device manufacturing method |
| CN104885014A (en) * | 2012-10-26 | 2015-09-02 | 迈普尔平版印刷Ip有限公司 | Determining a position of a substrate in lithography |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI236723B (en) * | 2002-10-02 | 2005-07-21 | Renesas Tech Corp | Probe sheet, probe card, semiconductor inspection device, and manufacturing method for semiconductor device |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1797213A (en) * | 2004-12-27 | 2006-07-05 | Asml荷兰有限公司 | Level sensor, lithographic apparatus and device manufacturing method |
| CN104885014A (en) * | 2012-10-26 | 2015-09-02 | 迈普尔平版印刷Ip有限公司 | Determining a position of a substrate in lithography |
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Granted publication date: 20181204 |