CN105837058A - High wearing-resistance and moisture-resistance silver-based low-emissivity coated glass - Google Patents
High wearing-resistance and moisture-resistance silver-based low-emissivity coated glass Download PDFInfo
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- CN105837058A CN105837058A CN201610343471.1A CN201610343471A CN105837058A CN 105837058 A CN105837058 A CN 105837058A CN 201610343471 A CN201610343471 A CN 201610343471A CN 105837058 A CN105837058 A CN 105837058A
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3639—Multilayers containing at least two functional metal layers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3649—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/366—Low-emissivity or solar control coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
- C03C2218/156—Deposition methods from the vapour phase by sputtering by magnetron sputtering
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- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a piece of high wearing-resistance and moisture-resistance silver-based low-emissivity coated glass. A glass substrate (1) is coated with a first zinc oxide aluminum membrane layer (2), a first nickel-chromium membrane layer (3), a silver membrane layer (4), a second nickel-chromium membrane layer (5), a second zinc oxide aluminum membrane layer (6) and a tin silicon oxide membrane layer (7) in sequence. Novel materials are introduced to prepare a cover layer, the structure of the cover layer is optimized, use of a SiAl material in a silver-based coating target is reduced, the cost is lowered, the energy is saved, the wearing resistance and the moisture resistance can be effectively improved under the condition that the low radiation property is not changed, consumption can be reduced, and the service life can be prolonged.
Description
Technical field
The present invention relates to IPC classification B32B and be applied to wear-resisting, the laminar product of moisture-proof plated film, belong to new and high technology material neck
Territory, especially high abrasion moisture-proof Silver-based low emissivity coated glass.
Background technology
Coated glass is at one or more layers metal of glass surface coating, alloy or metal compound film, to change glass
Optical property, meets certain particular requirement.Coated glass can be divided into by the different qualities of product: heat-reflecting glass, Low emissivity
Glass (Low-E), electropane etc..Low-E glass also known as low emissivity glass, be glass surface plate multiple layer metal or
The film system product of other compounds composition.Its film plating layer has the spy reflecting visible ray high transmission and centering far infrared height
Property, there is the effect of heat insulation of excellence and good light transmission.It is 0.3-2.5um that the 97% of solar radiation energy concentrates on wavelength
In the range of, this portion of energy is from outdoor；The emittance of less than 100 DEG C objects concentrates on the long-wave band of more than 2.5um,
This portion of energy is essentially from indoor.
By suitable method and technique, precious metals ag film has relatively while can realizing visible light transmissivity height in varying degrees
Good heat-proof quality, but there is the weatherability problems such as oxidizable and sulfuration in metal Ag film.
Due to SnO2The photoelectric characteristic that the resistivity of base film transmitance low, in visible region is high and excellent so that SnO2And
Its doped compound film is widely used in transparent electrode material, liquid crystal display, solaode, opto-electronic device, heat
The fields such as reflecting mirror.By introducing TiO2-SiO2Composite bed, can reach abatement SnO2: the effect of F (FTO) film interference color,
And Na in stop glass can be played+Ion diffuses into the effect destroying FTO electric property in FTO thin film.
Compared with traditional LOW-E glass, money base LOW-E glass has a more excellent optically and thermally performance: reflectance
Lower, can make outside building, to regard effect more penetrating bright, and effectively reduce glare phenomenon；Radiance and shading coefficient are lower,
There is preferably insulation and heat-insulating capability.In Novel silver-based structure LOW-E glass, AZO film system is used to be effectively improved
Light transmission rate can be added and stop that infrared light enters.
The open a kind of Silver-based low emissivity coated glass of Chinese patent application 201410079111.6, including glass substrate and be formed at
Film layer on glass substrate, described film layer includes first medium layer, the first ag alloy layer of being formed on ground floor dielectric layer,
The first barrier layer of being formed on the first ag alloy layer, it is formed at the top layer dielectric layer on the first barrier layer and is formed at
Protective layer on top layer dielectric layer, described first ag alloy layer is the alloy of at least one in silver and gold, palladium, copper and ruthenium,
Compared to prior art.
In prior art, the green building material that low radiation coated glass is widelyd popularize frequently as a kind of country is taken as constructure screen wall
Glass and door glass use, and can play effect cool in summer and warm in winter, save energy resource consumption.But find in prolonged application, existing
What some Silver-based low emissivity coated glass outermost layers used is all the silicon nitride film layer that hardness is higher, because of wear-resisting in the course of processing
Property difference easily occur scratching and resulting in higher defect rate, additionally, existing Silver-based low emissivity coated glass is the highest because of moisture-proof
Cause the silver film of glass easily occur in hot and humid environment oxidation or with other substance reactions, affect its service life.
Summary of the invention
It is an object of the invention to provide a kind of high abrasion moisture-proof Silver-based low emissivity coated glass, it is possible to constant at low radiance
Under conditions of, it is effectively improved wear-resisting and moisture-proof, reduces loss, overcome defect and the deficiency of prior art, improve and use the longevity
Life.
The purpose of the present invention will be realized by techniques below measure: include glass substrate, the first zinc oxide aluminum membranous layer, first
Nickel chromium triangle film layer, silver film, the second nickel chromium triangle film layer, the second zinc oxide aluminum membranous layer and stannum membranous layer of silicon oxide；Depend on a glass substrate
Secondary it is plated with the first zinc oxide aluminum membranous layer, the first nickel chromium triangle film layer, silver film, the second nickel chromium triangle film layer, the second zinc oxide aluminum membranous layer
With stannum membranous layer of silicon oxide；Specifically comprise the steps of
1. first coating chamber is filled with nitrogen and argon, and target is zinc oxide aluminum AZO target, in the surface of glass substrate deposition the
One zinc oxide aluminum membranous layer, thickness is 30～80nm；
2. second coating chamber is filled with argon, and target is nickel chromium triangle target, deposits the first nickel chromium triangle film layer on the first zinc oxide aluminum membranous layer,
Thickness is 2.0～3.5nm；
3. the 3rd coating chamber is filled with argon, target be silver target, on the first nickel chromium triangle film layer deposit silver film, thickness be 8～
15nm；
4. the 4th coating chamber is filled with argon, and target is nickel chromium triangle target, deposits the second nickel chromium triangle film layer on silver film, and thickness is
2.0～3.5nm；
5. the 5th coating chamber is filled with oxygen and argon, and target is zinc oxide aluminum AZO target, deposition the on the second nickel chromium triangle film layer
Zinc oxide aluminum membranous layer, thickness is 30～80nm；
6. the 6th coating chamber is filled with oxygen and argon, and target is stannum silicon oxide TSO target, heavy on the second zinc oxide aluminum membranous layer
Long-pending stannum membranous layer of silicon oxide, thickness is 2.5～5.0nm；
The backward coating chamber that the most all film layers have all plated is filled with process gas and takes off the low-emission coated glass of finished product Novel silver-based
Glass, then coating chamber evacuation is protected coating chamber.
Especially, the first zinc oxide aluminum membranous layer, the first nickel chromium triangle film layer, silver are plated the most successively at a glass substrate surface
Film layer, the second nickel chromium triangle film layer, the second zinc oxide aluminum membranous layer and stannum membranous layer of silicon oxide, i.e. form six layers on the surface of glass substrate
The structure of film layer, specific embodiment is as follows: select vacuum environment, by magnetron sputtering, deposits six layers at glass substrate surface
Film, is evacuated to 2.0X10 at coating chamber-4Below Pa, is re-filled with process gas, make coating chamber pressure stability 0.2～
1.0Pa, preferably 0.5Pa；By sputtering source power transmission, target starts sputtering, is then fed into glass substrate, and by corresponding target
Atom or its compound are sequentially deposited to glass substrate surface shape film forming layer；It is filled with nitrogen and argon, target at first coating chamber
Material is zinc oxide aluminum AZO target, deposits the first zinc oxide aluminum membranous layer on the surface of glass substrate, and thickness is 50nm；At second
Coating chamber is filled with argon, and target is nickel chromium triangle target, deposits the first nickel chromium triangle film layer on the first zinc oxide aluminum membranous layer, and thickness is 3.0nm；
Being filled with argon at the 3rd coating chamber, target is silver target, deposits silver film on the first nickel chromium triangle film layer, and thickness is 10nm；?
4th coating chamber is filled with argon, and target is nickel chromium triangle target, deposits the second nickel chromium triangle film layer on silver film, and thickness is 3.0nm；
Being filled with oxygen and argon at the 5th coating chamber, target is zinc oxide aluminum AZO target, deposits the second oxygen on the second nickel chromium triangle film layer
Changing zinc-aluminum film layer, thickness is 50nm；Being filled with oxygen and argon at the 6th coating chamber, target is TSO target, in the second oxidation
Depositing stannum membranous layer of silicon oxide on zinc-aluminum film layer, thickness is 3.5nm；After all film layers have all plated, it is filled with in coating chamber
Process gas, takes off finished product Novel silver-based low radiation coated glass, then evacuation protection coating chamber.
Especially, moisture-proof test is that coated glass is placed on 50 DEG C, next week of environmental condition of 95% humidity, observes film
Whether surface aoxidizes and degree of oxidation.
Especially, complete described glass is i.e. generated, wherein when six tunic layers all deposit: ground floor and five layers use oxidation
Zinc-aluminium AZO film is dielectric layer, effectively regulates color and the visible light transmittance rate of glass；Second and four tunic use nickel chromium triangle NiCr
Film is protective layer, is effectively improved the adhesive force of itself and silverskin, ensures that silver film is the most not oxidized, the most also will not be with
Other material reacts, and then makes described glass can also possess film layer invariant color and the indeclinable spy of radiance after tempering
Property；Third layer uses silverskin, makes described glass possess low-down radiance；Layer 6 uses TSO film to be cover layer, aobvious
Write the wear-resisting moisture resistance properties of entirety improving glass substrate surface film layer.
Especially, manufacturing process selects vacuum environment, deposits six tunics by magnetron sputtering at glass substrate surface,
Ask and be evacuated to 2.0X10 at coating chamber-4Below Pa, be re-filled with process gas make coating chamber pressure stability 0.2～1.0Pa,
Preferably 0.5Pa, then to sputtering source power transmission, operation target starts sputtering, successively by corresponding target atom or its compound
Deposit to glass substrate surface and form corresponding film layer.
Advantages of the present invention and effect: introduce new material and prepare cover layer, distribute tectum structure rationally, reduce money base plated film
The use of SiAl material in target, reduces cost and saves the energy, it is possible to effectively carrying under conditions of low radiance is constant
High abrasion and moisture-proof, reduce loss, improves service life.
Accompanying drawing explanation
Fig. 1 is the embodiment of the present invention 1 structural representation.
Reference includes: glass substrate the 1, first zinc oxide aluminum membranous layer the 2, first nickel chromium triangle film layer 3, silver film 4, second
Nickel chromium triangle film layer the 5, second zinc oxide aluminum membranous layer 6, stannum membranous layer of silicon oxide 7；
Detailed description of the invention
The principle of the invention is, prepared by suitable technique and method have high abrasion moisture-proof and do not affect its thermostability and
The Novel silver-based low radiation coated glass of visible light transmissivity.
The present invention includes: glass substrate the 1, first zinc oxide aluminum membranous layer the 2, first nickel chromium triangle film layer 3, silver film the 4, second nickel
Chromium film layer the 5, second zinc oxide aluminum membranous layer 6 and stannum membranous layer of silicon oxide 7.
The present invention, glass substrate 1 is plated with successively first zinc oxide aluminum membranous layer the 2, first nickel chromium triangle film layer 3, silver film 4,
Second nickel chromium triangle film layer the 5, second zinc oxide aluminum membranous layer 6 and stannum membranous layer of silicon oxide 7.
The invention will be further described with embodiment below in conjunction with the accompanying drawings.
Embodiment 1: as shown in Figure 1, plate the most successively on glass substrate 1 surface the first zinc oxide aluminum membranous layer 2,
First nickel chromium triangle film layer 3, silver film the 4, second nickel chromium triangle film layer the 5, second zinc oxide aluminum membranous layer 6 and stannum membranous layer of silicon oxide 7, i.e.
Form the structure of six tunic layers on the surface of glass substrate 1, specific embodiment is as follows:
Select vacuum environment, by magnetron sputtering, deposit six tunics on glass substrate 1 surface, be evacuated to 2.0 at coating chamber
X10-4Below Pa, is re-filled with process gas, make coating chamber pressure stability 0.2～1.0Pa, preferably 0.5Pa；By sputtering source
Power transmission, target starts sputtering, is then fed into glass substrate 1, and corresponding target atom or its compound is sequentially deposited to
Glass substrate surface shape film forming layer；Being filled with nitrogen and argon at first coating chamber, target is zinc oxide aluminum AZO target, at glass
The surface of glass substrate deposits the first zinc oxide aluminum membranous layer 2, and thickness is 50nm；Being filled with argon at second coating chamber, target is
Nickel chromium triangle target, deposits the first nickel chromium triangle film layer 3 on the first zinc oxide aluminum membranous layer 2, and thickness is 3.0nm；At the 3rd coating chamber
Being filled with argon, target is silver target, deposits silver film 4 on the first nickel chromium triangle film layer 3, and thickness is 10nm；At the 4th plated film
Room is filled with argon, and target is nickel chromium triangle target, deposits the second nickel chromium triangle film layer 5 on silver film 4, and thickness is 3.0nm；The 5th
Individual coating chamber is filled with oxygen and argon, and target is zinc oxide aluminum AZO target, deposits the second zinc oxide on the second nickel chromium triangle film layer 5
Aluminum membranous layer 6, thickness is 50nm；Being filled with oxygen and argon at the 6th coating chamber, target is TSO target, at the second zinc oxide
Depositing stannum membranous layer of silicon oxide 7 on aluminum membranous layer 6, thickness is 3.5nm；After all film layers have all plated, fill in coating chamber
Enter process gas, take off finished product Novel silver-based low radiation coated glass, then evacuation protection coating chamber.
In aforementioned, moisture-proof test is that coated glass is placed on 50 DEG C, next week of environmental condition of 95% humidity, sees
Examine whether film surface aoxidizes and degree of oxidation.
In the present embodiment, complete described glass is i.e. generated, wherein: ground floor and five layers when six tunic layers all deposit
Using zinc oxide aluminum AZO film is dielectric layer, effectively regulates color and the visible light transmittance rate of glass；Second and four tunics
Using nickel chromium triangle NiCr film is protective layer, is effectively improved the adhesive force of itself and silverskin, ensures that silver film is not the most by oxygen
Change, also will not react with other material simultaneously, and then it is constant to make described glass can also possess film layer after tempering
The indeclinable characteristic of normal complexion radiance；Third layer uses silverskin, makes described glass possess low-down radiance；6th
Layer uses TSO film to be cover layer, significantly improves the wear-resisting moisture resistance properties of entirety of glass substrate surface film layer.
In aforementioned, TSO is stannum silicon oxide.
In aforementioned, manufacturing process select vacuum environment, deposits six tunics by magnetron sputtering at glass substrate surface,
Require to be evacuated to 2.0X10 at coating chamber-4Below Pa, be re-filled with process gas make coating chamber pressure stability 0.2～
1.0Pa, preferably 0.5Pa, then to sputtering source power transmission, operation target starts sputtering, successively by corresponding target atom
Or its Compound deposition forms corresponding film layer to glass substrate 1 surface.
In the present invention, money base LOW-E film layer structure includes silver layer, underlying dielectric layer, top layer dielectric layer, protective layer
And cover layer, wherein, silver layer gives glass sunshine and thermal property, reflection infrared light, and dielectric layer is at visible ray model
Enclosing interior resistance and penetrate silver layer, as the nucleating layer of silver, dielectric layer has chemistry and mechanical stability, in visible-range
Without absorbing, and environmental friendliness, low cost, avirulence；Protective layer is protected silverskin in sputter procedure, is provided stability
And keep stable when high temperature film forming；Cover layer is the etendue of top layer film, it is provided that extra stability.
In the present invention, the surface of glass substrate 1 AZO layer the most successively, nickel chromium triangle film layer, silver layer, nicr layer, AZO
Layer, TSO layer, film layer structure is TSO/AZO/NiCr/Ag/NiCr/AZO/Glass.
The invention is not limited in above-mentioned embodiment, according to the creative spirit of the present invention, those skilled in the art can also do
Go out other changes, these changes done according to the creative spirit of the present invention, all should be included in present invention model required for protection
Within enclosing.
Claims (5)
1. high abrasion moisture-proof Silver-based low emissivity coated glass, including glass substrate (1), the first zinc oxide aluminum membranous layer (2),
First nickel chromium triangle film layer (3), silver film (4), the second nickel chromium triangle film layer (5), the second zinc oxide aluminum membranous layer (6) and stannum membranous layer of silicon oxide
(7)；It is characterized in that, glass substrate (1) is plated with successively the first zinc oxide aluminum membranous layer (2), the first nickel chromium triangle film layer (3),
Silver film (4), the second nickel chromium triangle film layer (5), the second zinc oxide aluminum membranous layer (6) and stannum membranous layer of silicon oxide (7)；Specifically comprise following
Step:
1. first coating chamber is filled with nitrogen and argon, and target is zinc oxide aluminum AZO target, heavy on the surface of glass substrate (1)
Long-pending first zinc oxide aluminum membranous layer (2), thickness is 30～80nm；
2. second coating chamber is filled with argon, and target is nickel chromium triangle target, at the first zinc oxide aluminum membranous layer (2) upper deposition the first nickel chromium triangle
Film layer (3), thickness is 2.0～3.5nm；
3. the 3rd coating chamber is filled with argon, and target is silver target, deposits silver film (4), thickness on the first nickel chromium triangle film layer (3)
It is 8～15nm；
4. the 4th coating chamber is filled with argon, and target is nickel chromium triangle target, in silver film (4) upper deposition the second nickel chromium triangle film layer (5), thickness
Degree is 2.0～3.5nm；
5. the 5th coating chamber is filled with oxygen and argon, and target is zinc oxide aluminum AZO target, on the second nickel chromium triangle film layer (5)
Depositing the second zinc oxide aluminum membranous layer (6), thickness is 30～80nm；
6. the 6th coating chamber is filled with oxygen and argon, and target is stannum silicon oxide TSO target, at the second zinc oxide aluminum membranous layer (6)
Upper deposition stannum membranous layer of silicon oxide (7), thickness is 2.5～5.0nm；
The backward coating chamber that the most all film layers have all plated is filled with process gas and takes off the low-emission coated glass of finished product Novel silver-based
Glass, then coating chamber evacuation is protected coating chamber.
2. high abrasion moisture-proof Silver-based low emissivity coated glass as claimed in claim 1, it is characterised in that at glass base
The surface of sheet (1) forms the structure of six tunic layers, and specific embodiment is as follows: select vacuum environment, by magnetron sputtering,
Glass substrate (1) surface deposits six tunics, is evacuated to 2.0 X10 at coating chamber-4Below Pa, is re-filled with process gas, makes
Coating chamber pressure stability 0.2～1.0Pa, preferably 0.5Pa；By sputtering source power transmission, target starts sputtering, is then fed into glass
Glass substrate (1), and corresponding target atom or its compound are sequentially deposited to glass substrate surface shape film forming layer；First
Individual coating chamber is filled with nitrogen and argon, and target is zinc oxide aluminum AZO target, in the first oxidation of the surface of glass substrate (1) deposition
Zinc-aluminum film layer (2), thickness is 50nm；Being filled with argon at second coating chamber, target is nickel chromium triangle target, at the first zinc oxide aluminum
Film layer (2) upper deposition the first nickel chromium triangle film layer (3), thickness is 3.0nm；Being filled with argon at the 3rd coating chamber, target is silver
Target, deposits silver film (4) on the first nickel chromium triangle film layer (3), and thickness is 10nm；It is filled with argon, target at the 4th coating chamber
Material is nickel chromium triangle target, and at silver film (4) upper deposition the second nickel chromium triangle film layer (5), thickness is 3.0nm；It is filled with at the 5th coating chamber
Oxygen and argon, target is zinc oxide aluminum AZO target, at the second nickel chromium triangle film layer (5) upper deposition the second zinc oxide aluminum membranous layer (6),
Thickness is 50nm；Being filled with oxygen and argon at the 6th coating chamber, target is TSO target, at the second zinc oxide aluminum membranous layer (6)
Upper deposition stannum membranous layer of silicon oxide (7), thickness is 3.5nm；After all film layers have all plated, in coating chamber, it is filled with process gas
Body, takes off finished product Novel silver-based low radiation coated glass, then evacuation protection coating chamber.
3. high abrasion moisture-proof Silver-based low emissivity coated glass as claimed in claim 1, it is characterised in that moisture-proof is surveyed
Examination is that coated glass is placed on 50 DEG C, next week of environmental condition of 95% humidity, observes whether film surface aoxidizes and aoxidize
Degree.
4. high abrasion moisture-proof Silver-based low emissivity coated glass as claimed in claim 1, it is characterised in that when six tunics
Layer all deposits and complete i.e. generates described glass, wherein: it is dielectric layer that ground floor and five layers use zinc oxide aluminum AZO films, has
The color of effect regulation glass and visible light transmittance rate；Second and four tunic use nickel chromium triangle NiCr film be protective layer, be effectively improved
Its adhesive force with silverskin, ensures that silver film is the most not oxidized, also will not react with other material simultaneously, enter
And make described glass can also possess film layer invariant color and the indeclinable characteristic of radiance after tempering；Third layer uses silverskin,
Described glass is made to possess low-down radiance；Layer 6 uses TSO film to be cover layer, significantly improves glass substrate surface film
The wear-resisting moisture resistance properties of entirety of layer.
5. high abrasion moisture-proof Silver-based low emissivity coated glass as claimed in claim 1, it is characterised in that making
Journey selects vacuum environment, deposits six tunics by magnetron sputtering on glass substrate (1) surface, it is desirable at coating chamber evacuation
To 2.0X10-4Below Pa, be re-filled with process gas make coating chamber pressure stability 0.2～1.0Pa, preferably 0.5Pa, so
Afterwards to sputtering source power transmission, operation target starts sputtering, successively by corresponding target atom or its Compound deposition to glass substrate
(1) surface forms corresponding film layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610343471.1A CN105837058A (en) | 2016-05-23 | 2016-05-23 | High wearing-resistance and moisture-resistance silver-based low-emissivity coated glass |
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| CN201610343471.1A CN105837058A (en) | 2016-05-23 | 2016-05-23 | High wearing-resistance and moisture-resistance silver-based low-emissivity coated glass |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110824137A (en) * | 2019-10-10 | 2020-02-21 | 中国建筑材料科学研究总院有限公司 | Method and device for predicting crystallization order of silver film in low-emissivity glass on substrate |
| CN112679114A (en) * | 2020-11-18 | 2021-04-20 | 邓凯 | Single silver layer HTLE glass |
| CN114620952A (en) * | 2022-03-21 | 2022-06-14 | 新福兴玻璃工业集团有限公司 | Energy-saving low-emissivity coated glass capable of being subjected to heat treatment in different places and preparation method thereof |
| CN115928012A (en) * | 2022-12-29 | 2023-04-07 | 福建阿石创新材料股份有限公司 | Color-changing film and preparation method thereof, color-changing powder and application thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010053412A1 (en) * | 1999-05-03 | 2001-12-20 | Veerasamy Vijayen S. | Method of curing hydrophobic coating with DLC & FAS on substrate, and resulting coated article |
| CN201908045U (en) * | 2010-12-30 | 2011-07-27 | 林嘉宏 | Single-silver-layer low-emissivity coated glass capable of being processed at different places |
| CN202219615U (en) * | 2011-09-02 | 2012-05-16 | 北京物华天宝镀膜科技有限公司 | High-transmission and low-radiation glass |
-
2016
- 2016-05-23 CN CN201610343471.1A patent/CN105837058A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010053412A1 (en) * | 1999-05-03 | 2001-12-20 | Veerasamy Vijayen S. | Method of curing hydrophobic coating with DLC & FAS on substrate, and resulting coated article |
| CN201908045U (en) * | 2010-12-30 | 2011-07-27 | 林嘉宏 | Single-silver-layer low-emissivity coated glass capable of being processed at different places |
| CN202219615U (en) * | 2011-09-02 | 2012-05-16 | 北京物华天宝镀膜科技有限公司 | High-transmission and low-radiation glass |
Non-Patent Citations (1)
| Title |
|---|
| 吴斌: "《提高银基低辐射薄膜材料的抗湿分解性能》", 《2008年中国玻璃行业年会暨技术研讨会论文集》 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110824137A (en) * | 2019-10-10 | 2020-02-21 | 中国建筑材料科学研究总院有限公司 | Method and device for predicting crystallization order of silver film in low-emissivity glass on substrate |
| CN110824137B (en) * | 2019-10-10 | 2022-03-11 | 中国建筑材料科学研究总院有限公司 | Method and device for predicting crystallization order of silver film in low-emissivity glass on substrate |
| CN112679114A (en) * | 2020-11-18 | 2021-04-20 | 邓凯 | Single silver layer HTLE glass |
| CN114620952A (en) * | 2022-03-21 | 2022-06-14 | 新福兴玻璃工业集团有限公司 | Energy-saving low-emissivity coated glass capable of being subjected to heat treatment in different places and preparation method thereof |
| CN115928012A (en) * | 2022-12-29 | 2023-04-07 | 福建阿石创新材料股份有限公司 | Color-changing film and preparation method thereof, color-changing powder and application thereof |
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