CN105834919B - A kind of turbine rotary muti-phase electrical stream polishes automation equipment - Google Patents
A kind of turbine rotary muti-phase electrical stream polishes automation equipment Download PDFInfo
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- CN105834919B CN105834919B CN201610279129.XA CN201610279129A CN105834919B CN 105834919 B CN105834919 B CN 105834919B CN 201610279129 A CN201610279129 A CN 201610279129A CN 105834919 B CN105834919 B CN 105834919B
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- module
- fixed
- polishing
- muti
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- 238000005498 polishing Methods 0.000 claims abstract description 109
- 238000012544 monitoring process Methods 0.000 claims abstract description 21
- 239000012530 fluid Substances 0.000 claims description 31
- 239000007788 liquid Substances 0.000 claims description 19
- 238000010521 absorption reaction Methods 0.000 claims description 18
- 239000002699 waste material Substances 0.000 claims description 15
- 238000012856 packing Methods 0.000 claims description 14
- 238000009434 installation Methods 0.000 claims description 12
- 230000008878 coupling Effects 0.000 claims description 10
- 238000010168 coupling process Methods 0.000 claims description 10
- 238000005859 coupling reaction Methods 0.000 claims description 10
- 210000004907 gland Anatomy 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 5
- 230000001360 synchronised effect Effects 0.000 claims description 4
- 230000003028 elevating effect Effects 0.000 claims description 3
- 241000208340 Araliaceae Species 0.000 claims 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 claims 1
- 235000003140 Panax quinquefolius Nutrition 0.000 claims 1
- 235000008434 ginseng Nutrition 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 208000002925 dental caries Diseases 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C3/00—Abrasive blasting machines or devices; Plants
- B24C3/32—Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
- B24B31/116—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using plastically deformable grinding compound, moved relatively to the workpiece under the influence of pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/12—Accessories; Protective equipment or safety devices; Installations for exhaustion of dust or for sound absorption specially adapted for machines covered by group B24B31/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C9/00—Appurtenances of abrasive blasting machines or devices, e.g. working chambers, arrangements for handling used abrasive material
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention discloses a kind of turbine rotary muti-phase electrical stream to polish automation equipment, including workpiece stuck-module, parameter monitoring and control module, turbine rotary muti-phase electrical stream polishes module, supporting module and lifting module, workpiece stuck-module is used for clamping workpieces processing, supporting module is used for support parameters monitoring and control module, turbine rotary muti-phase electrical stream polishes module and lifting module, Lift Part drives turbine rotary muti-phase electrical stream polishing module to reach specified location and workpieces processing fixed on workpiece stuck-module is polished, parameter monitoring is used for parameter monitoring and the control of whole equipment with control module；The present invention is simple and compact for structure, production cost is low, high speed rotating turbulence can be efficiently formed by turbine rotary muti-phase electrical stream polishing module polishing workpiece is polished, machined parameters are monitored with monitoring in real time and accurate control, automaticity is high, improves crudy and processing efficiency.
Description
Technical field
The present invention relates to Ultraprecision Machining field, and in particular, more particularly to a kind of turbine rotary muti-phase electrical stream is thrown
Light automation equipment.
Background technology
At present, as the continuous development of semiconductor industry and optical industry is, it is necessary to the precision such as silicon chip surface and optical mirror plane
Workpiece surface quality it is good, it is necessary to amount it is also increasing, it is therefore desirable to it is a kind of quick, efficiently set with automation multiphase flow polishing
It is standby.Present fluid polishing equipment processing efficiency is low, it is impossible to being polished to silicon chip surface and optical mirror plane rapidly and efficiently, no
The eddy flow turbulent flow that high speed can be efficiently formed is polished to workpiece.Machined parameters can not be monitored well simultaneously,
It can not realize that automation, unitized industrial standard are processed, repeatability is poor, it is impossible to adapt to the need of industrialized production
Ask.
The content of the invention
It is an object of the invention to solve in multiphase flow polissoir can not high efficiency form the rotating turbulence of high speed to work
Part is polished, machined parameters can not accurately be detected and controlled, and the problem of automaticity difference, there is provided a kind of whirlpool
Take turns rotary muti-phase electrical stream polishing automation equipment.
The present invention is achieved through the following technical solutions above-mentioned purpose：A kind of turbine rotary muti-phase electrical stream polishing automation is set
It is standby, including workpiece stuck-module, parameter monitoring and control module, turbine rotary muti-phase electrical stream polishing module, supporting module and lifting
Module, workpiece stuck-module are used for clamping workpieces processing, and supporting module is used for support parameters monitoring and rotated with control module, turbine
Multiphase flow polishes module and lifting module, and Lift Part drives turbine rotary muti-phase electrical stream polishing module to reach specified location to workpiece
Fixed workpieces processing is polished on stuck-module, and parameter monitoring is used for parameter monitoring and the control of whole equipment with control module
System；
The workpiece stuck-module includes polishing Work piece fixing platform, inlet suction port and vacuum adapter, polishes Work piece fixing platform
On be provided with the workpiece installation slot of circle and the waste liquid outlet that connect with workpiece installation slot, be provided with gas inside polishing Work piece fixing platform
Chamber, be provided with the inlet suction port mouth and vacuum adapter mouth connect with the air cavity on the polishing Work piece fixing platform, inlet suction port with
Vacuum adapter is separately mounted at inlet suction port mouth and vacuum adapter mouth；The uniform multiple and gas in the workpiece installation slot bottom
The absorption stomata that chamber is connected；The inlet suction port connects air intake pump and vacuum source by pipeline respectively with vacuum adapter；
The turbine rotary muti-phase electrical stream polishing module includes the first motor, first shaft coupling, the first motor support frame, polishing
Liquid feed pipe, turbine swivelling chute, closure, band shaft turbine, O-ring seal, lip-type packing and lip-type packing gland, it is described
Turbine swivelling chute is in the hollow tubular being vertically arranged, and closure is fixed on the upper end of the turbine swivelling chute, closure and turbine
Sealed between swivelling chute by O-ring seal；The turbine end with shaft turbine is located inside the turbine swivelling chute, tape spool whirlpool
The shaft end of wheel connects the first motor through the closure and by first shaft coupling, and first motor passes through the first motor branch
Support is fixed on the closure；The band shaft turbine is sealed with closure by lip-type packing；Polishing fluid feed pipe is consolidated
It is scheduled on closure and with being connected inside the turbine swivelling chute, the first motor passes through first shaft coupling band movable band axis turbine rotation
When, drive the multiphase flow polishing fluid in turbine swivelling chute to form rotating turbulence；
The supporting module includes top fixing support rack, vertical fixing support rack, the first L-type contiguous block, the second L-type and connected
Block is connect, top fixing support rack is fixed at the top of two vertical fixing support racks, and lifting module is fixed on vertical fixing support rack
On, lifting module connects the second L-type contiguous block by the first L-type contiguous block, and the second L-type contiguous block is fixed on the first motor support
On frame；Lowering or hoisting gear drives turbine rotary muti-phase electrical stream to polish module along vertically by the first L-type contiguous block and the second L-type contiguous block
Make elevating movement in direction；
The parameter monitoring and control module include rate of discharge tachymeter, outlet temperature monitor, temperature sensor, away from
From sensor, turbine flowmeter and motor speed sensor, the rate of discharge tachymeter and outlet temperature monitor are fixed on
The surface of the waste liquid outlet, the rate of discharge tachymeter are fixed on polishing workpiece by rate of discharge tachymeter fixed mount
On fixed station, the outlet temperature monitor is fixed on polishing Work piece fixing platform by outlet temperature monitor fixed mount；Institute
State range sensor to be fixed on the second L-type contiguous block, range sensor is used to detect turbine rotary muti-phase electrical stream polishing module
Dropping distance；The turbine flowmeter is fixed on the polishing fluid feed pipe and for detecting multiphase in the polishing fluid feed pipe
Flow the flow of polishing fluid, viscosity and mutually contain ratio；The motor speed sensor is fixed on the inwall of the first motor support frame,
The sensing chip of motor speed sensor is in contact with the shaft end with shaft turbine, and motor speed sensor is used to detect described the
The velocity of rotation of one motor；The temperature sensor is fixed in the side wall of the turbine swivelling chute, and temperature sensor is used to examine
Survey the temperature of multiphase flow polishing fluid in turbine swivelling chute.
Further, the lowering or hoisting gear includes driving wheel, driven pulley, tensioning wheel, tensioning wheel fixing axle, the second motor branch
Support, the second motor, timing belt, ball-screw, feed screw nut, feed screw nut fixed seat, line slide rail and ball-screw bearing
Seat, the second motor are fixed on the top fixing support rack by the second motor support frame, and the driving wheel is fixed on described
On the motor head of second motor, the driving wheel is tensioned by synchronous band connection driven pulley by tensioning wheel, described
Bearing up pulley fixes fixed support at the top of axis connection by tensioning wheel；The driven pulley is fixed on the one of the ball-screw being vertically arranged
End, the other end of ball-screw are fixed on vertical fixing support rack by ball-screw bearing block, and line slide rail is vertically-mounted
On vertical fixing support rack, feed screw nut is sleeved on the ball-screw, the feed screw nut and feed screw nut fixed seat
It is fixedly connected, feed screw nut fixed seat is provided with the sliding block being engaged with the line slideway, and the second motor passes through master when rotating
Driving wheel drives the driven pulley synchronous axial system being fixed at the top of ball-screw, so as to drive the feed screw nut and feed screw nut to fix
Seat is vertically movable along the line slideway, and the feed screw nut fixed seat is fixedly connected with the first L-type contiguous block, and feed screw nut is fixed
The first L-type contiguous block, the second L-type contiguous block and the polishing of turbine rotary muti-phase electrical stream are driven when seat is along the line slideway vertical motion
The entirety of module composition is vertically movable along the line slideway.
Further, the band shaft turbine includes turbine wheel shaft；It is and continuously distributed upper successively from top to bottom along turbine wheel shaft
Portion's prismatic blade, helical blade, the oblique blade in top and bottom prismatic blade.
Further, vertical fixing support rack, the first L-type contiguous block, the second L-type contiguous block, driven pulley, the tensioning
Wheel, tensioning wheel fixing axle, ball-screw, feed screw nut, feed screw nut fixed seat, line slide rail and ball-screw bearing block are all provided with
Have symmetrical a pair.
Further, the waste liquid outlet is provided with four, and four waste liquid outlets are evenly distributed on the workpiece installation slot
Surrounding.
Further, the absorption stomata is provided with 12, and every 6 absorption stomata is arranged to one group, and every group of absorption stomata is equal
Cloth is on same circumference.
Further, the polishing fluid feed pipe is provided with three, and three polishing fluid feed pipes are distributed on the closure
On same circumference.
Further, the range sensor is fixed on the second L-type contiguous block by range sensor fixed mount.
The beneficial effects of the present invention are：
1st, the present invention is simple and compact for structure, and production cost is low, can polish module efficiently by turbine rotary muti-phase electrical stream
Form high speed rotating turbulence to be polished polishing workpiece, machined parameters are monitored with monitoring in real time and accurate control, automates journey
Degree is high, improves crudy and processing efficiency.
2nd, the present invention accurately controls spacing of the turbine rotary muti-phase electrical stream polishing module with polishing workpiece by range sensor,
So as to ensure that specifically polishing workpiece is being polished apart from interior, the efficiency of polishing is improved.
3rd, the present invention accurately controls the rotation speed of the first motor of drive belt shaft turbine rotation by motor speed sensor
Degree, so as to obtain the actual speed of the first motor in real time, so as to which the rotating speed of more accurate first motor is rapid to obtain preferably rotation
Stream.
4th, the present invention carries out speed and temperature by rate of discharge tachymeter and outlet temperature monitor to polishing waste liquid
Monitoring in real time, while temperature sensor is also monitored in real time to rotating turbulence, and feed back in time, so as to correct the first motor
Rotating speed, to ensure to be polished workpiece with suitable eddy flow turbulent flow.
5th, present invention clamping and release workpiece by the way of vacuum suction, effectively can carry out absorption clamping to workpiece
With hold out against, facilitate clamping and the discharging of workpiece, avoid the injury that mechanical grip is brought to workpiece.
6th, the present invention's is straight using the top prismatic blade, the oblique blade in top, bottom being distributed according to certain position with shaft turbine
Blade and helical blade form efficient rotating turbulence, can quickly obtain stable high speed rotating turbulence, improve the effect of polishing
Rate.
7th, the present invention is effectively sealed by O-ring seal to being formed between closure and turbine swivelling chute, and passes through lip
Sealing ring and lip-type packing gland form sealing when turbine wheel shaft is rotated, and ensure that turbine wheel shaft will not be thrown when rotated
The leakage of light liquid.
Brief description of the drawings
Fig. 1 is a kind of shaft side figure of turbine rotary muti-phase electrical stream polishing automation equipment of the present invention.
Fig. 2 is a kind of top view of turbine rotary muti-phase electrical stream polishing automation equipment of the present invention.
Fig. 3 is a kind of right view of turbine rotary muti-phase electrical stream polishing automation equipment of the present invention.
Fig. 4 is the top view of workpiece stuck-module of the present invention.
Fig. 5 is the front view of workpiece stuck-module of the present invention.
Fig. 6 is the sectional view of workpiece stuck-module of the present invention.
Fig. 7 is the structural representation of turbine rotary muti-phase electrical stream polishing module of the present invention.
Fig. 8 is the sectional view of turbine rotary muti-phase electrical stream polishing module of the present invention.
Fig. 9 is a kind of sectional view of turbine rotary muti-phase electrical stream polishing automation equipment of the present invention.
Figure 10 is the structural representation of the invention with shaft turbine.
Figure 11 is the front view of the invention with shaft turbine.
Figure 12 is the right view that the present invention takes away turbine.
In figure, 1- workpiece stuck-module, 101- vacuum adapters, 102- polish Work piece fixing platform, 103- polishes workpiece,
1031- waste liquid outlets, 1032- absorption stomata, 1033- inlet suction ports mouth, 1034- air cavitys, 1035- vacuum adapters mouth, 104- enter
Gas joint, 2- parameter monitorings and control module, 201- rate of discharge tachymeters fixed mount, 202- rates of discharge tachymeter, 203-
Outlet temperature monitor, 204- range sensors fixed mount, 205- range sensors, 206- turbine flowmeters, 207- motors speed
Spend sensor, 208- sensing chips, 209- temperature sensors, 210- outlet temperature monitors fixed mount, 3- turbine rotary muti-phase electrical streams
Polish module, the motors of 301- first, the motor support frames of 302- first, 303- closures, 304- turbines swivelling chute, 305- first
Axle device, 306- polishing fluids feed pipe, 307- bands shaft turbine, 3071- tops prismatic blade, the oblique blade in 3072- tops, 3073- bottoms
Prismatic blade, 3074- helical blades, 3075- turbine wheel shafts, 308-O types sealing ring, 309- lip-type packings, 310- lip-type packings
Gland, 4- supporting modules, the vertical fixing support racks of 401-, 402- tops fixing support rack, the first L-types of 403- contiguous block, 404-
Second L-type contiguous block, 5- lifting module, 501- driven pulleys, 502- timing belts, 503- tensioning wheels fixing axle, the motors of 504- second,
The motor support frames of 505- second, 506- tensioning wheels, 507- ball-screws, 508- feed screw nuts, 509- feed screw nuts fixed seat,
510- line slide rails, 511- ball-screws bearing block, 512- driving wheels.
Embodiment
The invention will be further described below in conjunction with the accompanying drawings：
As shown in Fig. 1~12, a kind of turbine rotary muti-phase electrical stream polishes automation equipment, including workpiece stuck-module 1, parameter
Monitoring is used with control module 2, turbine rotary muti-phase electrical stream polishing module 3, supporting module 4 and lifting module 5, workpiece stuck-module 1
In clamping workpieces processing, supporting module 4 be used for support parameters monitoring and control module 2, turbine rotary muti-phase electrical stream polishing module 3 and
Module 5 is lifted, Lift Part drives turbine rotary muti-phase electrical stream polishing module 3 to reach specified location to solid on workpiece stuck-module 1
Fixed workpieces processing is polished, and parameter monitoring is used for parameter monitoring and the control of whole equipment with control module 2.
The workpiece stuck-module 1 includes polishing Work piece fixing platform 102, inlet suction port 104 and vacuum adapter 101, polishing
The waste liquid outlet 1031 that the workpiece installation slot of circle is provided with Work piece fixing platform 102 and is connected with workpiece installation slot, polish workpiece
Air cavity 1034 is provided with inside fixed station 102, the air inlet connected with the air cavity 1034 is provided with the polishing Work piece fixing platform 102
Connection port 1033 and vacuum adapter mouth 1035, inlet suction port 104 and vacuum adapter 101 are separately mounted to the He of inlet suction port mouth 1033
At vacuum adapter mouth 1035；The uniform multiple absorption stomatas being connected with the air cavity 1034 in the workpiece installation slot bottom
1032；The inlet suction port 104 connects air intake pump and vacuum source by pipeline respectively with vacuum adapter 101；The waste liquid goes out
Mouth 1031 is provided with four, and four waste liquid outlets 1031 are evenly distributed on the surrounding of the workpiece installation slot.The absorption stomata
1032 are provided with 12, and every 6 absorption stomata 1032 is arranged to one group, and every group of absorption stomata 1032 is distributed on same circumference.12
Individual absorption stomata 1032 effectively can be clamped and jack up to polishing workpiece 103.
The turbine rotary muti-phase electrical stream polishing module 3 includes the first motor 301, first shaft coupling 305, the first motor support
Frame 302, polishing fluid feed pipe 306, turbine swivelling chute 304, closure 303, band shaft turbine 307, O-ring seal 308, lip are close
Seal 309 and lip-type packing gland 310, the turbine swivelling chute 304 are in the hollow tubular being vertically arranged, and closure 303 is solid
The upper end of the turbine swivelling chute 304 is scheduled on, is sealed between closure 303 and turbine swivelling chute 304 by O-ring seal 308；
The turbine end with shaft turbine 307 is located inside the turbine swivelling chute 304, and the shaft end with shaft turbine 307 passes through described close
Capping 303 simultaneously connects the first motor 301 by first shaft coupling 305, and first motor 301 passes through the first motor support frame
302 are fixed on the closure 303；The band shaft turbine 307 is sealed with closure 303 by lip-type packing 309；Polishing
Liquid feed pipe 306 is fixed on closure 303 and connected with the inside of turbine swivelling chute 304, the polishing fluid feed pipe 306
Provided with three, three polishing fluid feed pipes 306 are distributed on the same circumference of the closure 303；First motor 301 passes through
When one shaft coupling 305 rotates with movable band axis turbine 307, the multiphase flow polishing fluid in turbine swivelling chute 304 is driven to form rotation rapid
Stream.
O-ring seal 308 seals to being formed between closure 303 and turbine swivelling chute 304, so as to prevent the multiphase of high speed
Stream polishing fluid leaks, and lip-type packing 309 ensures to form good sealing when high speed rotates with shaft turbine 307, so as to
Make the leakage that multiphase flow polishing fluid will not also occur while rotation with shaft turbine 307.It is further fixed in lip-type packing 309
Lip-type packing gland 310.
The supporting module 4 includes top fixing support rack 402, vertical fixing support rack 401, the first L-type contiguous block
403rd, the second L-type contiguous block 404, top fixing support rack 402 are fixed on two vertical tops of fixing support rack 401, lift mould
Block 5 is fixed on vertical fixing support rack 401, and lifting module 5 connects the second L-type contiguous block by the first L-type contiguous block 403
404, the second L-type contiguous block 404 is fixed on the first motor support frame 302；Lowering or hoisting gear passes through the He of the first L-type contiguous block 403
Second L-type contiguous block 404 drives turbine rotary muti-phase electrical stream polishing module 3 vertically to make elevating movement.
The parameter monitoring includes rate of discharge tachymeter 202, outlet temperature monitor 203, temperature with control module 2 and passed
Sensor 209, range sensor 205, the motor speed sensor 207 of turbine flowmeter 206 and first, the rate of discharge tachymeter
202 and outlet temperature monitor 203 be fixed on the surface of the waste liquid outlet 1031, the rate of discharge tachymeter 202 is logical
Cross rate of discharge tachymeter fixed mount 201 to be fixed on polishing Work piece fixing platform 102, the outlet temperature monitor 203 passes through
Outlet temperature monitor fixed mount 210 is fixed on polishing Work piece fixing platform 102；The range sensor 205 is fixed on the 2nd L
On type contiguous block 404, the range sensor 205 is fixed on the second L-type contiguous block 404 by range sensor fixed mount 204
On, range sensor 205 is used for the dropping distance for detecting turbine rotary muti-phase electrical stream polishing module 3；The turbine flowmeter 206 is solid
It is scheduled on the polishing fluid feed pipe 306 and for detecting the flow of multiphase flow polishing fluid, viscosity in the polishing fluid feed pipe 306
Mutually contain ratio；First motor speed sensor 207 is fixed on the inwall of the first motor support frame 302, the first motor
The sensing chip 208 of velocity sensor 207 is in contact with the shaft end with shaft turbine 307, and the first motor speed sensor 207 is used
In the velocity of rotation for detecting first motor 301；The temperature sensor 209 is fixed on the side of the turbine swivelling chute 304
On wall, temperature sensor 209 is used for the temperature for detecting multiphase flow polishing fluid in turbine swivelling chute 304.
The lowering or hoisting gear includes driving wheel 512, driven pulley 501, tensioning wheel 506, the electricity of tensioning wheel fixing axle 503, second
Machine support frame 505, the second motor 504, timing belt 502, ball-screw 507, feed screw nut 508, feed screw nut fixed seat 509,
Line slide rail 510 and ball-screw bearing block 511, the second motor 504 are fixed on the top by the second motor support frame 505
On fixing support rack 402, the driving wheel 512 is fixed on the motor head of second motor 504, and the driving wheel 512 is logical
Cross timing belt 502 and connect driven pulley 501, and be tensioned by tensioning wheel 506, the tensioning wheel 506 is fixed by tensioning wheel
The connection of axle 503 top fixed support；The driven pulley 501 is fixed on the one end for the ball-screw 507 being vertically arranged, ball-screw
507 other end is fixed on vertical fixing support rack 401 by ball-screw bearing block 511, and line slide rail 510 is vertically-mounted
On vertical fixing support rack 401, feed screw nut 508 is sleeved on the ball-screw 507, the feed screw nut 508 and silk
Thick stick nut fixed seat 509 is fixedly connected, and feed screw nut fixed seat 509 is provided with the sliding block being engaged with the line slideway, the
The synchronous axial system of driven pulley 501 for being fixed on the top of ball-screw 507 is driven when two motors 504 rotate by driving wheel 512, so as to
Drive the feed screw nut 508 and feed screw nut fixed seat 509 vertically movable along the line slideway, the feed screw nut is fixed
Seat 509 is fixedly connected with the first L-type contiguous block 403, and the is driven when feed screw nut fixed seat 509 is along the line slideway vertical motion
One L-type contiguous block 403, the second L-type contiguous block 404 and turbine rotary muti-phase electrical stream polishing module 3 form overall along the straight line
Guide rail is vertically movable.
The vertical fixing support rack 401, the first L-type contiguous block 403, the second L-type contiguous block 404, driven pulley 501,
Bearing up pulley 506, tensioning wheel fixing axle 503, ball-screw 507, feed screw nut 508, feed screw nut fixed seat 509, line slide rail 510
It is equipped with symmetrical a pair with ball-screw bearing block 511.
The band shaft turbine 307 includes turbine wheel shaft 3075；It is and continuously distributed successively from top to bottom along turbine wheel shaft 3075
Top prismatic blade 3071, helical blade 3074, the oblique blade 3072 in top and bottom prismatic blade 3073.
Specific workflow is as follows：First, according to the data feedback that range sensor 205 detects to the second motor 504,
Second motor 504 is driven driven simultaneously by driving driving wheel 512 to drive timing belt 202 to rotate in the presence of tensioning wheel 506
Wheel 501 and the ball-screw 507 of both sides move according to same rotation direction, so as to drive feed screw nut 508 and feed screw nut fixed seat
509 510 slips along line slideway, turbine rotation is driven eventually through the first L-type contiguous block 403 and the second L-type contiguous block 404
Multiphase flow polishing module 3 is moved integrally, and is facilitated the polishing workpiece 103 on workpiece stuck-module 1 to be placed on polishing workpiece and is consolidated
Determine on platform 102；After polishing the placement of workpiece 103, vacuum adapter 101 is by polishing the air cavity inside Work piece fixing platform 102
1034 carry out absorption clamping with absorption stomata 1032 to polishing workpiece 103；After absorption clamps polishing workpiece 103, passed according to distance
The data that sensor 205 feeds back are controlled to the second motor 504, turbine rotary muti-phase electrical stream polishing module 3 is carried out entire lowering,
So as to accurately control turbine rotary muti-phase electrical stream polishing module 3 and polish the spacing between workpiece 103；Turbine rotary muti-phase electrical stream polishes
After module 3 reaches specified location, the first motor 301 is by first shaft coupling 305 with movable band axis turbine 307 according to certain speed
Curve carries out high speed rotation, while controls the multiphase flow polishing fluid inputted in polishing fluid feed pipe 306 by turbine flowmeter 206
Flow, multiphase flow polishing fluid enter turbine swivelling chute 304 in forms rotating turbulence, to polishing workpiece 103 be polished.
During polishing, rate of discharge tachymeter 203, outlet temperature monitor 203 are to the temperature at waste liquid outlet 1031
Degree and flow are monitored in real time, and motor speed sensor 207 is monitored in real time to the velocity of rotation of the first motor 301, and
Above-mentioned detection data are fed back and corrected, it is ensured that specific rotating turbulence are formed, in order to what is industrialized, unitized
High quality of products.
After the completion of polishing, the second motor 504 rotates backward, and drives turbine rotary muti-phase electrical stream polishing module 3 to be raised to and specifies height
Degree, gas is passed through into air cavity 1034 by inlet suction port 1033, the gas in air cavity 1031 will be thrown by adsorbing stomata 1032
Light workpiece 103 is jacked up, so as to the blanking of convenient polishing workpiece.
Above-described embodiment is presently preferred embodiments of the present invention, is not the limitation to technical solution of the present invention, as long as
The technical scheme that can be realized on the basis of above-described embodiment without creative work, it is regarded as falling into patent of the present invention
Rights protection scope in.
Claims (8)
1. a kind of turbine rotary muti-phase electrical stream polishes automation equipment, it is characterised in that：Supervised including workpiece stuck-module (1), parameter
Survey and control module (2), turbine rotary muti-phase electrical stream polishing module (3), supporting module (4) and lifting module (5), workpiece stent
Block (1) is used for clamping workpieces processing, and supporting module (4) is used for support parameters monitoring and control module (2), turbine rotary muti-phase electrical stream
Module (3) and lifting module (5) are polished, Lift Part drives turbine rotary muti-phase electrical stream polishing module (3) to reach specified location pair
Fixed workpieces processing is polished on workpiece stuck-module (1), and parameter monitoring is used for the ginseng of whole equipment with control module (2)
Number is monitored and controlled；
The workpiece stuck-module (1) includes polishing Work piece fixing platform (102), inlet suction port (104) and vacuum adapter (101),
The waste liquid outlet (1031) that the workpiece installation slot of circle is provided with polishing Work piece fixing platform (102) and is connected with workpiece installation slot,
Air cavity (1034) is provided with inside polishing Work piece fixing platform (102), is provided with and the air cavity on the polishing Work piece fixing platform (102)
(1034) the inlet suction port mouth (1033) and vacuum adapter mouth (1035) of connection, inlet suction port (104) and vacuum adapter (101) point
An Zhuan not inlet suction port mouth (1033) and vacuum adapter mouth (1035) place；The workpiece installation slot bottom it is uniform it is multiple with it is described
The absorption stomata (1032) that air cavity (1034) is connected；The inlet suction port (104) and vacuum adapter (101) pass through pipeline respectively
Connect air intake pump and vacuum source；
The turbine rotary muti-phase electrical stream polishing module (3) includes the first motor (301), first shaft coupling (305), the first motor branch
Support (302), polishing fluid feed pipe (306), turbine swivelling chute (304), closure (303), band shaft turbine (307), O-shaped sealing
(308), lip-type packing (309) and lip-type packing gland (310) are enclosed, the turbine swivelling chute (304) is in what is be vertically arranged
Hollow tubular, closure (303) are fixed on the upper end of the turbine swivelling chute (304), closure (303) and turbine swivelling chute
(304) sealed between by O-ring seal (308)；The turbine end of the band shaft turbine (307) is located at the turbine swivelling chute
(304) internal, the shaft end with shaft turbine (307) connects first through the closure (303) and by first shaft coupling (305)
Motor (301), first motor (301) are fixed on the closure (303) by the first motor support frame (302)；Institute
Band shaft turbine (307) is stated to seal by lip-type packing (309) with closure (303)；Polishing fluid feed pipe (306) is fixed on close
In capping (303) and with being connected inside the turbine swivelling chute (304), the first motor (301) passes through first shaft coupling (305) band
When movable band axis turbine (307) rotates, the multiphase flow polishing fluid in turbine swivelling chute (304) is driven to form rotating turbulence；
The supporting module (4) includes top fixing support rack (402), vertical fixing support rack (401), the first L-type contiguous block
(403), the second L-type contiguous block (404), top fixing support rack (402) are fixed on two vertical fixing support rack (401) tops
Portion, lifting module (5) are fixed on vertical fixing support rack (401), and lifting module (5) is connected by the first L-type contiguous block (403)
The second L-type contiguous block (404) is connect, the second L-type contiguous block (404) is fixed on the first motor support frame (302)；Lowering or hoisting gear leads to
Cross the first L-type contiguous block (403) and the second L-type contiguous block (404) drives turbine rotary muti-phase electrical stream polishing module (3) along vertical side
To making elevating movement；
The parameter monitoring includes rate of discharge tachymeter (202), outlet temperature monitor (203), temperature with control module (2)
Sensor (209), range sensor (205), turbine flowmeter (206) and the first motor speed sensor (207), the outlet
Flow speed measuring instrument (202) and outlet temperature monitor (203) are fixed on the surface of the waste liquid outlet (1031), the outlet
Flow speed measuring instrument (202) is fixed on polishing Work piece fixing platform (102) by rate of discharge tachymeter fixed mount (201), described
Outlet temperature monitor (203) is fixed on polishing Work piece fixing platform (102) by outlet temperature monitor fixed mount (210)；
The range sensor (205) is fixed on the second L-type contiguous block (404), and range sensor (205) is used to detect turbine rotation
The dropping distance of multiphase flow polishing module (3)；The turbine flowmeter (206) is fixed on the polishing fluid feed pipe (306) simultaneously
For detecting the flow of multiphase flow polishing fluid, viscosity in the polishing fluid feed pipe (306) and mutually containing ratio；First motor
Velocity sensor (207) is fixed on the inwall of the first motor support frame (302), the sense of the first motor speed sensor (207)
Piece (208) and the shaft end of the band shaft turbine (307) is answered to be in contact, the first motor speed sensor (207) is described for detecting
The velocity of rotation of first motor (301)；The temperature sensor (209) is fixed in the side wall of the turbine swivelling chute (304),
Temperature sensor (209) is used for the temperature for detecting the interior multiphase flow polishing fluid of turbine swivelling chute (304).
A kind of 2. turbine rotary muti-phase electrical stream polishing automation equipment according to claim 1, it is characterised in that：The lifting
Device includes driving wheel (512), driven pulley (501), tensioning wheel (506), tensioning wheel fixing axle (503), the second motor support frame
(505), the second motor (504), timing belt (502), ball-screw (507), feed screw nut (508), feed screw nut fixed seat
(509), line slide rail (510) and ball-screw bearing block (511), the second motor (504) pass through the second motor support frame (505)
It is fixed on the top fixing support rack (402), the driving wheel (512) is fixed on the motor of second motor (504)
On head, the driving wheel (512) connects driven pulley (501) by timing belt (502), and is tensioned by tensioning wheel (506),
The tensioning wheel (506) connects top fixed support by tensioning wheel fixing axle (503)；The driven pulley (501) is fixed on perpendicular
One end of the ball-screw (507) directly set, the other end of ball-screw (507) are fixed by ball-screw bearing block (511)
On vertical fixing support rack (401), line slide rail (510) is vertically installed on vertical fixing support rack (401), feed screw nut
(508) it is sleeved on the ball-screw (507), the feed screw nut (508) and the fixed company of feed screw nut fixed seat (509)
Connect, feed screw nut fixed seat (509) is provided with the sliding block being engaged with the line slideway, and the second motor (504) leads to when rotating
Cross driving wheel (512) and drive driven pulley (501) synchronous axial system being fixed at the top of ball-screw (507), so as to drive the silk
Thick stick nut (508) and feed screw nut fixed seat (509) are vertically movable along the line slideway, the feed screw nut fixed seat
(509) it is fixedly connected with the first L-type contiguous block (403), feed screw nut fixed seat (509) is along band during the line slideway vertical motion
The entirety of dynamic first L-type contiguous block (403), the second L-type contiguous block (404) and turbine rotary muti-phase electrical stream polishing module (3) composition
It is vertically movable along the line slideway.
A kind of 3. turbine rotary muti-phase electrical stream polishing automation equipment according to claim 2, it is characterised in that：It is described vertical
Fixing support rack (401), the first L-type contiguous block (403), the second L-type contiguous block (404), driven pulley (501), tensioning wheel
(506), tensioning wheel fixing axle (503), ball-screw (507), feed screw nut (508), feed screw nut fixed seat (509), straight line
Slide rail (510) and ball-screw bearing block (511) are equipped with symmetrical a pair.
A kind of 4. turbine rotary muti-phase electrical stream polishing automation equipment according to claim 1, it is characterised in that：The tape spool
Turbine (307) includes turbine wheel shaft (3075)；And along turbine wheel shaft (3075) continuously distributed top prismatic blade successively from top to bottom
(3071), helical blade (3074), the oblique blade in top (3072) and bottom prismatic blade (3073).
A kind of 5. turbine rotary muti-phase electrical stream polishing automation equipment according to claim 1, it is characterised in that：The waste liquid
Export (1031) and be provided with four, four waste liquid outlets (1031) are evenly distributed on the surrounding of the workpiece installation slot.
A kind of 6. turbine rotary muti-phase electrical stream polishing automation equipment according to claim 1, it is characterised in that：The absorption
Stomata (1032) is provided with 12, and every 6 absorption stomatas (1032) are arranged to one group, and every group of absorption stomata (1032) is distributed on same
On circumference.
A kind of 7. turbine rotary muti-phase electrical stream polishing automation equipment according to claim 1, it is characterised in that：The polishing
Liquid feed pipe (306) is provided with three, and three polishing fluid feed pipes (306) are distributed on the same circumference of the closure (303).
A kind of 8. turbine rotary muti-phase electrical stream polishing automation equipment according to claim 1, it is characterised in that：The distance
Sensor (205) is fixed on the second L-type contiguous block (404) by range sensor fixed mount (204).
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| CN201610279129.XA CN105834919B (en) | 2016-04-28 | 2016-04-28 | A kind of turbine rotary muti-phase electrical stream polishes automation equipment |
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| CN105834919B true CN105834919B (en) | 2018-01-05 |
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| CN106180909B (en) * | 2016-08-26 | 2018-03-16 | 廊坊市北方天宇机电技术有限公司 | A kind of synchronizer gear sleeve class part spiral-flow type centrifugal barrel finishing fitting device and method |
| CN107322458B (en) * | 2017-07-06 | 2019-03-08 | 浙江艾领创矿业科技有限公司 | A kind of large size sand mill |
| CN107717757B (en) * | 2017-11-17 | 2024-01-23 | 苏州市信谊金属制品有限公司 | Circulating suspension speed self-control polishing machine |
| CN108890503B (en) * | 2018-07-23 | 2019-09-13 | 上海雷祥压铸有限公司 | A kind of motor housing medial surface roughing pre-processing device |
| KR102032208B1 (en) * | 2018-12-16 | 2019-10-15 | (주)케이엠티 | Apparatus for manufactruing grid for battery |
| CN111300798A (en) * | 2019-12-06 | 2020-06-19 | 吴达浩 | Blow molding equipment for blow molding container |
| CN112792722A (en) * | 2020-12-31 | 2021-05-14 | 重庆西山科技股份有限公司 | Abrasive polishing device |
| CN112706083A (en) * | 2020-12-31 | 2021-04-27 | 重庆西山科技股份有限公司 | Pipe fitting clamping workbench |
| CN112605801A (en) * | 2021-01-19 | 2021-04-06 | 北京景兴恒通商贸有限公司 | Device capable of grinding and milling part surface and indirectly blasting sand |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6736024B1 (en) * | 2000-01-25 | 2004-05-18 | Ford Global Technologies, Llc | Method and apparatus for determining the position of a shift rail |
| CN104786157A (en) * | 2015-02-03 | 2015-07-22 | 浙江工业大学 | Ultrasonic polishing processing device using gas-liquid-solid three-phase abrasive particle flow |
| CN104786160A (en) * | 2015-02-03 | 2015-07-22 | 浙江工业大学 | Gas-liquid-solid three-phase-flow based multi-process automatic polishing equipment |
| CN204525122U (en) * | 2015-02-03 | 2015-08-05 | 浙江工业大学 | A kind of super-smooth surface fluid polishing device based on gas-liquid-solid three-phase abrasive Flow |
| CN205734506U (en) * | 2016-04-28 | 2016-11-30 | 浙江工业大学 | A kind of high-efficiency turbine rotary muti-phase electrical stream polishing automation equipment |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004079611A (en) * | 2002-08-12 | 2004-03-11 | Hitachi Zosen Corp | Device and method for plasma treatment |
-
2016
- 2016-04-28 CN CN201610279129.XA patent/CN105834919B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6736024B1 (en) * | 2000-01-25 | 2004-05-18 | Ford Global Technologies, Llc | Method and apparatus for determining the position of a shift rail |
| CN104786157A (en) * | 2015-02-03 | 2015-07-22 | 浙江工业大学 | Ultrasonic polishing processing device using gas-liquid-solid three-phase abrasive particle flow |
| CN104786160A (en) * | 2015-02-03 | 2015-07-22 | 浙江工业大学 | Gas-liquid-solid three-phase-flow based multi-process automatic polishing equipment |
| CN204525122U (en) * | 2015-02-03 | 2015-08-05 | 浙江工业大学 | A kind of super-smooth surface fluid polishing device based on gas-liquid-solid three-phase abrasive Flow |
| CN205734506U (en) * | 2016-04-28 | 2016-11-30 | 浙江工业大学 | A kind of high-efficiency turbine rotary muti-phase electrical stream polishing automation equipment |
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