CN105789103A - Rotary plate system and semiconductor processing equipment - Google Patents
Rotary plate system and semiconductor processing equipment Download PDFInfo
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- CN105789103A CN105789103A CN201410788977.4A CN201410788977A CN105789103A CN 105789103 A CN105789103 A CN 105789103A CN 201410788977 A CN201410788977 A CN 201410788977A CN 105789103 A CN105789103 A CN 105789103A
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Abstract
The invention provides a rotary plate system and semiconductor processing equipment. The rotary plate system comprises a rotary plate, a rotary driver, a positioning ring and an original point detector, wherein the rotary plate is provided with a plurality of bearing positions used for bearing substrates at intervals along the circumference of the rotary plate; the rotary plate is connected with the spindle of the rotary driver for driving the rotary plate to rotate; the diameter of the positioning ring is smaller than the diameter of the rotary plate; the positioning ring is fixedly sheathed on the outer side of the side wall of the spindle; the positioning ring is provided with an original point positioning part; the detection position of the original detector is positioned on the circumstance of the positioning ring where the original positioning part is positioned; the original point detector is used for detecting whether the original point positioning part rotates to a detection position or not in real time in a rotation process of the positioning ring; and if the original point positioning part rotates to the detection position in real time, the current position where the rotary plate is positioned is determined as the original point position of the rotary plate so as to realize the original point positioning of the rotary plate. The rotary plate system provided by the invention guarantees that the rotary plate system accurately, safely and efficiently operates at stable performance.
Description
Technical field
The invention belongs to microelectronic processing technique field, be specifically related to a kind of rotating table system and semiconductor processing equipment.
Background technology
Semiconductor processing equipment is widely used in semiconductor device manufacture.Fig. 1 is the structural representation of typical semiconductor processing equipment.Refer to Fig. 1, this semiconductor processing equipment generally include transmission chamber 10 and along transmission chamber 10 circumferentially disposed by the coupled logical loading and unloading chamber 12 of the family of power and influence 11, degassing chamber 13, pre-cleaning cavity 14 and processing chamber 15.Wherein, being provided with rotary machine hands 101 in transmission chamber 10, this rotary machine hands 101 is for transmitting substrate between each chamber；Loading and unloading chamber 12 is within it placing non-technique and having completed the substrate of technique；Degassing chamber 13 and pre-cleaning cavity 14 are respectively used to substrate is carried out degassing step and prerinse step；Processing chamber 15 is for carrying out the technique such as sputtering sedimentation or etching to the substrate completing degassing step and/or prerinse step.
As it is shown in figure 1, be provided with turntable rotation mechanism in processing chamber 15, this turntable rotation mechanism includes rotating disk 151 and rotating driver (not shown), and rotating disk 151 is circumferentially provided with multiple carrying position 1～8 for carrying substrates along it；Rotating driver is used for driving rotating disk 151 to rotate, so that each carrying position rotates to presetting loading position, this default loading position is positioned close to the family of power and influence 11 position between processing chamber 15 and transmission chamber 10, carries position 1 present position in Fig. 1.Rotating exactly to default loading and unloading position (that is, turntable rotation is to specifying position) for realizing each carrying position, it is necessary to realize rotating disk is accurately positioned, specifically, rotating disk is carried out original point position by first-selection, then makes turntable rotation to specifying position.nullFor this，Prior art has a kind of rotating table system，As shown in Figure 2，This rotating table system includes transparency window 157、Laser diffusion sensor 158 and protuberance 159，Transparency window 157 is arranged on the sidewall of processing chamber 15 and the position corresponding with the sidewall of rotating disk 151，Laser diffusion sensor 158 is arranged on the outside of transparency window 157，Protuberance 159 is arranged on certain position on rotating disk 151 sidewall，Protuberance 159 position is set to rotating disk origin position，Laser diffusion sensor 158 is for detecting whether protruding 159 rotate to laser diffusion sensor 158 correspondence detection position on rotating disk 151 sidewall，Detecting position is set to the detection track of laser diffusion sensor and is positioned at the position on rotating disk sidewall，If，Then can realize rotating disk 151 original point position，Now，Rotating disk 151 position or the origin position that rotating driver 152 place state is rotating disk 151，Laser diffusion sensor 151 is referred to as origin sensor.After original point position, rotating disk rotates to specifying position again, and judges whether rotating disk rotates to specifying position by obtaining the current location of rotating driver 152, if so, then judges rotating disk accurate positioning, if it is not, then judge that rotating disk positions unsuccessfully.
But, adopt existing rotating table system can find problems with in actual applications: to be susceptible to after used a period of time position inaccurate problem, thus it cannot be guaranteed that rotating table system is precisely safe and efficient and the operation of stable performance.
Summary of the invention
It is contemplated that at least solve one of technical problem of existence in prior art, it is proposed that a kind of rotating table system and semiconductor processing equipment, it can ensure that the rotating table system precisely safe and efficient operation with stable performance.
For solving one of the problems referred to above, the invention provides a kind of rotating table system, including rotating disk, rotating driver, locating ring and origin detector, described rotating disk is provided at circumferentially spaced multiple carrying position for carrying substrates along it, described rotating disk is connected with the rotating shaft of described rotating driver, in order to drive described turntable rotation, the diameter of described locating ring is less than the diameter of described rotating disk, and the side-wall outer side being nested with in described rotating shaft fixed by described locating ring；And on described locating ring, it is provided with original point position portion, on the detecting position of the described origin detector locating ring circumference setting in place, described original point position portion, described origin detector for detecting whether described original point position portion rotates to described detection position in real time in the process that described locating ring rotates, if, then determine the origin position that presently described rotating disk position is described rotating disk, thus realizing described rotating disk original point position.
Wherein, multiple described carrying positions along the circumferentially-spaced of described rotating disk and are uniformly arranged, described rotating table system also includes first to bit detector and the first auxiliary positioning portion, the quantity in described first auxiliary positioning portion is consistent with the quantity of described carrying position, and multiple described first auxiliary positioning portions along the circumferentially-spaced of described locating ring and are uniformly arranged；Described first to locating ring circumference setting in multiple described first places, auxiliary positioning portion of the detecting position of bit detector, and described first to the set-up mode of bit detector is: its detecting position accurately rotates to specifying one described first position place of auxiliary positioning portion of former meaning, position setting in described rotating disk；Described first arrives bit detector for after the described rotating disk continuation rotation appointment time after original point position, detect whether described first auxiliary positioning portion rotates to its detection position, if so, then judge described rotating disk accurate positioning, if it is not, then judge that described rotating disk positions unsuccessfully；The described appointment time refers to that described rotating disk rotated to the time needed for described appointment position after original point position.
Wherein, the plurality of carrying position along the circumferentially-spaced of described rotating disk and is uniformly arranged, described rotating table system also includes the second auxiliary positioning portion and second and arrives bit detector, the quantity in described second auxiliary positioning portion is consistent with the quantity of described carrying position, and multiple described second auxiliary positioning portions along the circumferentially-spaced of described rotating disk and are uniformly arranged；Described second to disk peripheral setting in multiple described second places, auxiliary positioning portion of the detecting position of bit detector, and described second to the set-up mode of bit detector is: its detecting position setting at described turntable rotation to specifying one described second position place of auxiliary positioning portion of former meaning, position；Described second arrives bit detector for after the described rotating disk continuation rotation appointment time after original point position, detect whether described second auxiliary positioning portion rotates to its detection position, if so, then judge described rotating disk accurate positioning, if it is not, then judge that described rotating disk positions unsuccessfully；Described Preset Time refers to that described rotating disk rotated to the time needed for described appointment position after original point position.
Wherein, there is difference in height with the surface of described locating ring in described original point position portion；Described origin detector is range sensor.
Wherein, described original point position portion is the breach arranged on the surface of described locating ring, and described origin detector is emission sensor.
Wherein, there is difference in height with the surface of described locating ring in described first auxiliary positioning portion；Described first is range sensor to bit detector.
Wherein, described first auxiliary positioning portion is the breach arranged on the surface of described locating ring, and described first is emission sensor to bit detector.
Wherein, there is difference in height with the surface of described rotating disk in described second auxiliary positioning portion；Described second is range sensor to bit detector.
Wherein, the quantity in described original point position portion is one or more, multiple described original point position portions being provided at circumferentially spaced along described locating ring.
As another one technical scheme, the present invention also provides for a kind of semiconductor processing equipment, including processing chamber, is provided with rotating table system in processing chamber, and described rotating table system adopts above-mentioned rotating table system provided by the invention.
The method have the advantages that
Rotating table system provided by the invention, it is for driving the side-wall outer side of the rotating shaft of the rotating driver of turntable rotation to be provided with locating ring, the diameter of locating ring is less than the diameter of rotating disk, locating ring is provided with original point position portion, on the detecting position of the origin detector locating ring circumference setting in place, original point position portion, origin detector is for detecting when locating ring rotates whether original point position portion rotates to detecting position in real time, if, then determine the origin position that current dial position is rotating disk, thus realizing rotating disk original point position.Rotating table system provided by the invention, the diameter of its locating ring is less than the diameter of rotating disk, and, the diameter of locating ring can arrange less as far as possible, compared with this is set directly on the sidewall of the very big rotating disk of diameter with the projection as original point position portion of existing rotating table system, can so that the distance between original point position portion and rotating shaft be less, thus the amplification of position error can be reduced, position error is controlled within the scope of certain error, thereby may be ensured that the rotating table system precisely safe and efficient operation with stable performance.
Semiconductor processing equipment provided by the invention, it includes the rotating table system that another kind technical scheme of the present invention provides, and thereby may be ensured that the operation of the safe and efficient of semiconductor processing equipment and stable performance.
Accompanying drawing explanation
Fig. 1 is the structural representation of typical semiconductor processing equipment；
Fig. 2 applies the structural representation of existing rotating table system in processing chamber；
The structural representation of the Fig. 3 rotating table system for providing in the process cavity indoor application embodiment of the present invention；
Fig. 4 is the top view of locating ring in Fig. 3；
Fig. 5 is the top view of the processing chamber shown in Fig. 3；
The structural representation of the processing chamber of the semiconductor processing equipment that Fig. 6 provides for the embodiment of the present invention；And
Fig. 7 is the top view of the processing chamber shown in Fig. 6.
Detailed description of the invention
For making those skilled in the art be more fully understood that technical scheme, below in conjunction with accompanying drawing, rotating table system provided by the invention and semiconductor processing equipment are described in detail.
The structural representation of the Fig. 3 rotating table system for providing in the process cavity indoor application embodiment of the present invention；Fig. 4 is the top view of locating ring in Fig. 3；Fig. 5 is the top view of the processing chamber shown in Fig. 3.Seeing also Fig. 3～Fig. 5, the rotating table system that the present embodiment provides is applied in processing chamber 15, and it includes rotating disk 20, rotating driver 21, locating ring 22 and origin detector 23.Wherein, rotating disk 20 being provided at circumferentially spaced multiple carrying position 1～8 for carrying substrates along it, each carrying position is the structures such as through hole.Rotating disk 20 is connected with the rotating shaft 211 of rotating driver 21, in order to drive rotating disk 20 to rotate.Locating ring 22 is fixing is nested with the side-wall outer side in rotating shaft 211, and to realize locating ring 22 and rotating disk 2 all along with rotating shaft 211 synchronous rotary, the diameter of locating ring 22 is less than the diameter of rotating disk 20.Locating ring 22 is provided with original point position portion 221, the detecting position of origin detector 23 is setting on the locating ring circumference S1 at place, original point position portion 221, this locating ring circumference S1 is the rotational trajectory that original point position portion 221 rotates along with rotating shaft 211, and detecting position is set to the position of the detection path arrival locating ring of origin detector 23.For real-time in the process that locating ring rotates, origin detector 23 detects whether original point position portion 221 rotates to detection position 231, if, it is determined that current dial 20 position is the origin position of rotating disk 20, thus realizing rotating disk 20 original point position.
As from the foregoing, the rotating table system that the present embodiment provides, it is provided with the diameter locating ring 22 less than rotating disk 20 diameter at the side-wall outer side of rotating shaft 211, the diameter of locating ring 22 can arrange less relative to the diameter of rotating disk 20 as much as possible, compared with this is set directly on the lateral wall of the very big rotating disk of diameter with the projection as original point position portion of existing rotating table system, can so that original point position portion 221 be less apart from the distance of rotating shaft 211, thus the amplification of position error can be reduced, position error is controlled within the scope of certain error, thereby may be ensured that the rotating table system precisely safe and efficient operation with stable performance.
Specifically, in the present embodiment, there is difference in height in original point position portion 221 and locating ring 22 surface, more specifically, original point position portion 221 can be breach, projection or groove, origin detector 23 is range sensor.Origin detector 23 detects the operation principle that original point position portion 221 rotates to its detection position: owing to original point position portion 221 and locating ring 22 surface exist difference in height, make distance respectively the first distance and second distance that origin detector 23 detects when rotating respectively to its detection position in original point position portion 221 and locating ring 22 surface, first distance is not equal to second distance, therefore, origin detector 23 detects the distance between itself and detection position in real time in the rotary course of locating ring 22, and according to whether this Distance Judgment is the first distance, if, then original point position portion 221 rotates to detecting position, thus realizing rotating disk original point position.
Preferably, referring to Fig. 3 and Fig. 4, original point position portion 221 is the breach arranged on the surface of locating ring 22, and origin detector 23 is emission sensor.Emission sensor includes being arranged on the transmitting terminal 231 above and below locating ring 22 and receiving terminal 232, original point position portion 221 is arranged on the edge of locating ring 22, emission sensor has groove structure, the edge of locating ring 22 is positioned at the groove of groove structure, in the process that locating ring 22 rotates, transmitting terminal 231 is constantly being directed towards receiving terminal 232 and sends signal, receiving terminal 232 is for receiving the signal that transmitting terminal 231 sends, if receiving terminal 232 receives the signal that transmitting terminal 231 sends, then original point position portion 221 is (namely, breach) rotate to detecting position, thus realizing rotating disk original point position.
It is appreciated that, realize rotating disk original point position by emission sensor and breach, this with in prior art by laser diffusion sensor and rotating disk sidewall arrange projection compared with, it is possible not only to solve the wider problem affecting its accuracy of detection difference of detecting distance of laser diffusion sensor, but also can solve due to detected material (namely, protruding) surface cause diffuse-reflectance sensor to make erroneous judgement, the problem that can not correctly find initial point, such that it is able to improve the accuracy of rotating disk original point position further, and then the accuracy of rotating disk location can be improved further；Furthermore it is possible to reduce the requirement of the machining accuracy in original point position portion 221, and the electric adjustment time can be reduced.
In the present embodiment, multiple carrying positions 1～8 along the circumferentially-spaced of rotating disk 20 and are uniformly arranged, rotating table system also includes first to bit detector 24 and the first auxiliary positioning portion 222, the quantity in the first auxiliary positioning portion 22 is consistent with the quantity of carrying position 1～8, and multiple first auxiliary positioning portions 222 along the circumferentially-spaced of locating ring 22 and are uniformly arranged.On first to locating ring circumference S2 setting in multiple first places, auxiliary positioning portion 222 of the detecting position of bit detector 24, this locating ring circumference S2 is the rotational trajectory that multiple first auxiliary positioning portion 222 rotates along with rotating shaft 211, and detecting position is set to the first detection path arriving bit detector 24 and arrives the position of locating ring.First to the set-up mode of bit detector 24 is: its detecting position accurately rotates setting in rotating disk 20 to specifying one the first position place of auxiliary positioning portion 222 of former meaning, position.In the present embodiment, specify position to include rotating disk 20 to rotate to location when making each carrying position rotate to predeterminated position, predeterminated position includes loading position and process station etc., in this case, adjacent twice turntable rotation location needs rotating disk 20 to rotate one or more station, so that turntable rotation positions to specifying position every time.Therefore, in the present embodiment, first to bit detector 24 detecting position setting in rotating disk 20 accurately rotate to make any one carrying position rotate to predeterminated position time any one first position place of auxiliary positioning portion 222.
First arrives bit detector 24 for after the rotating disk 20 continuation rotation appointment time after original point position, the appointment time refers to that rotating disk rotated to the time specified needed for position after original point position, whether the first auxiliary positioning portion 222 of detecting rotates to its detection position, if, rotating disk 20 rotates to specifying position, then judge rotating disk 20 accurate positioning, if not, rotating disk 20 does not rotate to specifying position, then judge that rotating disk 20 positions failure.
Therefore, as from the foregoing, can obtain whether rotating disk 20 rotates to the feedback signal specifying position by the first auxiliary positioning portion 222 and first to bit detector 24, such that it is able to whether monitoring rotating disk location is accurate, and then may further ensure that the rotating table system precisely safe and efficient operation with stable performance.
Specifically, there is difference in height in the surface of the first auxiliary positioning portion 222 and locating ring 22, more specifically, the first auxiliary positioning portion 222 be breach, projection or groove, first to arrive bit detector 24 be range sensor.First detects, to bit detector 24, the operation principle that the first auxiliary positioning portion 222 rotates to its detection position is: owing to the surface in the first auxiliary positioning portion 222 with locating ring 22 exists difference in height, make the first distance respectively the 3rd distance and the 4th distance detected when rotating respectively to its detection position in the first auxiliary positioning portion 222 and locating ring 22 surface to bit detector 24, 3rd distance is not equal to the 4th distance, therefore, first to after the bit detector 24 rotating disk 20 after original point position continues to rotate the appointment time, detect the distance between itself and detection position, and according to whether this Distance Judgment is the 3rd distance, if, rotating disk 20 rotates to specifying position, then judge rotating disk 20 accurate positioning, if not, rotating disk 20 does not rotate to specifying position, then judge that rotating disk 20 positions failure.
In the present embodiment, refer to Fig. 3 and Fig. 4, preferably, first auxiliary positioning portion 222 is the breach arranged on locating ring 22 surface, first to bit detector 24 be emission sensor, emission sensor includes being separately positioned on the transmitting terminal 241 above and below locating ring 22 and receiving terminal 242, after rotating disk 20 after original point position continues to rotate the appointment time, transmitting terminal 241 sends signal towards receiving terminal 242, receiving terminal 242 is for receiving the signal that transmitting terminal 241 sends, if receiving terminal 242 receives the signal that transmitting terminal 241 sends, then the first auxiliary positioning portion 222 is (namely, breach) rotate to detecting position, thus judging rotating disk accurate positioning；If receiving terminal 242 does not receive the signal that transmitting terminal 241 sends, then judging that rotating disk positions unsuccessfully, sends alarm signal, with teaching process, personnel overhaul.
Additionally, in the present embodiment, rotating table system also includes the second auxiliary positioning portion 201 and second and arrives bit detector 25, and the quantity in the second auxiliary positioning portion 201 is consistent with the quantity of carrying position 1～8, and multiple second auxiliary positioning portions 201 along the circumferentially-spaced of rotating disk 20 and are uniformly arranged；Second to disk peripheral setting in multiple second places, auxiliary positioning portion 201 of the detecting position of bit detector 25, this disk peripheral is the movement locus in multiple second auxiliary positioning portion 201, and detecting position is set to the second detection path arriving bit detector 25 and arrives the position of rotating disk 20.Second to the set-up mode of bit detector 25 is: its detecting position accurately rotates to specifying one the second position place of auxiliary positioning portion 201 of former meaning, position setting at rotating disk.In the present embodiment, specify position to include rotating disk 20 to rotate to location when making each carrying position rotate to predeterminated position, predeterminated position includes loading position and process station etc., in this case, adjacent twice turntable rotation location needs rotating disk 20 to rotate one or more station, so that turntable rotation positions to specifying position every time.Therefore, in the present embodiment, second to bit detector 25 detecting position setting in rotating disk 20 accurately rotate to make any one carrying position rotate to predeterminated position time any one second position place of auxiliary positioning portion 201.
Second arrives bit detector 25 for after the rotating disk 20 continuation rotation appointment time after original point position, the appointment time refers to that rotating disk 20 rotated to the time specified needed for position after original point position, whether the second auxiliary positioning portion 201 of detecting rotates to its detection position, if, rotating disk 20 rotates to specifying position, then judge rotating disk accurate positioning, if not, rotating disk 20 does not rotate to specifying position, then judge that rotating disk positions unsuccessfully.
Therefore, from the foregoing, it will be observed that by the second auxiliary positioning portion 201 and second to whether the equally possible acquisition rotating disk 20 of bit detector 25 rotates to the feedback signal specifying position, such that it is able to whether monitoring rotating disk location is accurate further.
It is appreciated that, in the present embodiment, not only by the first auxiliary positioning portion 222 and first to bit detector 24 with the use of, also by the second auxiliary positioning portion 201 and second to whether bit detector 25 is accurate with the use of realizing monitoring rotating disk location, it is capable of monitoring the two any one equally by another one when can break down, thus the effect of interlocking can be played, such that it is able to it is further ensured that rotating table system is precisely safe and efficient and the operation of stable performance.
Specifically, there is difference in height in the surface of the second auxiliary positioning portion 201 and rotating disk 20, more specifically, second auxiliary positioning portion 201 is breach or protruding or groove, in the present embodiment, as it is shown in figure 5, the second auxiliary positioning portion 201 be on the sidewall of rotating disk 20 arrange projection, second to bit detector 25 be range sensor.Due to second to bit detector 25 detect the second auxiliary positioning portion 201 rotate to its detection position operation principle with first to bit detector 24 detect the first auxiliary positioning portion 222 rotate to its detect position operation principle similar, do not repeat them here.
In the present embodiment, for improving second to whether bit detector 25 (range sensor) detection projection rotates the accuracy of detection to detection position, it is preferable that in the following way: one, reduce protruding dimension D in rotating disk circumference as far as possible；Its two, owing to rotating disk 20 its surface in the process of its rotation would be likely to occur the small error that fluctuates, therefore, arrange protruding at rotating disk 20 thickness L1 axially be more than or equal to rotating disk 20 self along its axial thickness L2；Its three, range sensor adopt laser class range sensor.
Although it should be noted that the quantity in the original point position portion 221 in the present embodiment is one；But, the invention is not limited in this, in actual applications, the quantity in original point position portion 221 can also be multiple, multiple original point position portions 221 being provided at circumferentially spaced along locating ring 22, multiple original point position portions 221 are positioned on the same circumference of locating ring 22, it is to say, the rotational trajectory in multiple original point position portions 221 is identical, origin detector 23 detects whether that in the process that locating ring 22 rotates any one original point position portion 221 rotates to detecting position in real time, if so, rotating disk original point position is then realized.It is appreciated that, it is provided at circumferentially spaced multiple original point position portion 221 compared with an original point position portion 221 is only set by along locating ring 22, locating ring 22 only needs to rotate smaller angle just can so that one of them original point position portion 221 rotates to detecting position, thus original point position can be realized rapidly, namely improve original point position speed.
Although also, it should be noted in the present embodiment not only by the first auxiliary positioning portion 221 and first to bit detector 24 with the use of, also by the second auxiliary positioning portion 201 and second to bit detector 25 with the use of monitor rotating disk position whether accurate；But, the invention is not limited in this, in actual applications, it is also possible to the first auxiliary positioning portion 221 and first that only arranges according to practical situation arrives bit detector 24, or, the second auxiliary positioning portion 201 and second that only arranges arrives bit detector 25.
It also should be noted that, in actual applications, it is also possible to using the first auxiliary positioning portion 222 as original point position portion 221, and detection 24 devices that put in place first are as origin detector 23, and this is possible not only to the structure of simplification rotating table system；But also cost can be reduced.
Although additionally it should be noted that the present embodiment is all the principle by detecting distance with according to this Distance Judgment realizes judging that original point position portion the 221, first auxiliary positioning 222 and the second auxiliary positioning portion 201 rotate the detection position to corresponding detector；But, the invention is not limited in this, in actual applications, it is also possible to realize above-mentioned functions based on other principles, for instance, it is also possible to realize above-mentioned functions by detecting image identification and the principle judged according to this image.
As another one technical scheme, the present invention also provides for a kind of semiconductor processing equipment, including processing chamber, is provided with rotating table system in processing chamber, and this rotating table system adopts the rotating table system that the present invention is mentioned above.The structural representation of the processing chamber of the semiconductor processing equipment that Fig. 6 provides for the embodiment of the present invention；Fig. 7 is the top view of the processing chamber shown in Fig. 6.Refer to Fig. 6 and Fig. 7, owing to rotating table system is all described in detail in the above-described embodiments, do not repeat them here.
It addition, be additionally provided with pedestal jacking system and thimble jacking system in processing chamber 15.Wherein, pedestal jacking system includes pedestal 30 and pedestal lift actuator 31.The quantity of pedestal 30 and position are corresponding with the quantity of the target position 32 arranged in processing chamber 15 and position, and multiple pedestals 30 or target position 32 are circumferentially-spaced along it and be uniformly arranged in processing chamber 15, and target position 32 refers to the position for placing target；And, corresponding each target position 32 or pedestal 30 are provided with a process station, as shown in Figure 7, the quantity of pedestal 30 and target position 32 is four, and each target is different, so that same substrate is completed different process, or, each target is identical, and so that different substrates to complete identical technique, carrying position, position 2,4,6 and 8 corresponds to the process station of four pedestals 30 or target position 32.Pedestal lift actuator 31 rises to process station rear drive pedestal 30 for really rotating in carrying level, so that pedestal 30 will be located in the substrate jack-up on the carrying position of process station to predeterminated position, at this predeterminated position, substrate is carried out technique；Pedestal lift actuator 31 is additionally operable to complete rear drive pedestal 30 in technique and drops to the lower section of rotating disk 20, so that substrate falls within carrying position.
Thimble elevating mechanism is positioned close to the position of the family of power and influence 50 and is positioned at the lower section of rotating disk 20, and the family of power and influence 50 position is being provided with loading position, carries position 1 present position in Fig. 7.This thimble elevating mechanism includes thimble 40 and thimble lift actuator 41.Wherein, thimble 40 is for carrying substrates；Thimble lift actuator 41 rises for the rear drive thimble 40 really rotated to loading position in carrying level, and will be located in substrate jack-up on carrying position to the position carrying out passing sheet with mechanical hand, or the thimble of zero load rises to and carries out passing the position of sheet with mechanical hand；Thimble lift actuator 41 is additionally operable to mechanical hand and thimble 40 and passes the rear drive thimble 40 of sheet and drop to the lower section of rotating disk 20, to realize falling within carrying position the substrate loaded on thimble 40.
In the present embodiment, realize pallet by rotating table system to be accurately positioned, so that carrying level really rotates to process station and loading position, thus ensureing dial turning motion, pedestal and thimble elevating movement cooperating like clockwork, thereby may be ensured that the operation of the safe and efficient of semiconductor processing equipment and stable performance.
Shown in sum up, the semiconductor processing equipment that the present embodiment provides, the rotating table system adopting another kind technical scheme of the present invention to provide in its processing chamber, thereby may be ensured that the operation of the safe and efficient of semiconductor processing equipment and stable performance.
It is understood that the principle that is intended to be merely illustrative of the present of embodiment of above and the illustrative embodiments that adopts, but the invention is not limited in this.For those skilled in the art, without departing from the spirit and substance in the present invention, it is possible to make various modification and improvement, these modification and improvement are also considered as protection scope of the present invention.
Claims (10)
1. a rotating table system, including rotating disk and rotating driver, described rotating disk is provided at circumferentially spaced multiple carrying position for carrying substrates along it, described rotating disk is connected with the rotating shaft of described rotating driver, in order to drive described turntable rotation, it is characterised in that also include locating ring and origin detector, the diameter of described locating ring is less than the diameter of described rotating disk, and the side-wall outer side being nested with in described rotating shaft fixed by described locating ring；And
Described locating ring is provided with original point position portion, on the detecting position of the described origin detector locating ring circumference setting in place, described original point position portion, described origin detector for detecting whether described original point position portion rotates to described detection position in real time in the process that described locating ring rotates, if, then determine the origin position that presently described rotating disk position is described rotating disk, thus realizing described rotating disk original point position.
2. rotating table system according to claim 1, it is characterized in that, multiple described carrying positions along the circumferentially-spaced of described rotating disk and are uniformly arranged, described rotating table system also includes first to bit detector and the first auxiliary positioning portion, the quantity in described first auxiliary positioning portion is consistent with the quantity of described carrying position, and multiple described first auxiliary positioning portions along the circumferentially-spaced of described locating ring and are uniformly arranged；
Described first to locating ring circumference setting in multiple described first places, auxiliary positioning portion of the detecting position of bit detector, and described first to the set-up mode of bit detector is: its detecting position accurately rotates to specifying one described first position place of auxiliary positioning portion of former meaning, position setting in described rotating disk；
Described first arrives bit detector for after the described rotating disk continuation rotation appointment time after original point position, detect whether described first auxiliary positioning portion rotates to its detection position, if so, then judge described rotating disk accurate positioning, if it is not, then judge that described rotating disk positions unsuccessfully；
The described appointment time refers to that described rotating disk rotated to the time needed for described appointment position after original point position.
3. rotating table system according to claim 1 and 2, it is characterized in that, the plurality of carrying position along the circumferentially-spaced of described rotating disk and is uniformly arranged, described rotating table system also includes the second auxiliary positioning portion and second and arrives bit detector, the quantity in described second auxiliary positioning portion is consistent with the quantity of described carrying position, and multiple described second auxiliary positioning portions along the circumferentially-spaced of described rotating disk and are uniformly arranged；
Described second to disk peripheral setting in multiple described second places, auxiliary positioning portion of the detecting position of bit detector, and described second to the set-up mode of bit detector is: its detecting position setting at described turntable rotation to specifying one described second position place of auxiliary positioning portion of former meaning, position；
Described second arrives bit detector for after the described rotating disk continuation rotation appointment time after original point position, detect whether described second auxiliary positioning portion rotates to its detection position, if so, then judge described rotating disk accurate positioning, if it is not, then judge that described rotating disk positions unsuccessfully；
Described Preset Time refers to that described rotating disk rotated to the time needed for described appointment position after original point position.
4. rotating table system according to claim 1, it is characterised in that the surface of described original point position portion and described locating ring exists difference in height；Described origin detector is range sensor.
5. rotating table system according to claim 4, it is characterised in that described original point position portion is the breach arranged on the surface of described locating ring, and described origin detector is emission sensor.
6. rotating table system according to claim 2, it is characterised in that the surface of described first auxiliary positioning portion and described locating ring exists difference in height；Described first is range sensor to bit detector.
7. rotating table system according to claim 6, it is characterised in that described first auxiliary positioning portion is the breach arranged on the surface of described locating ring, and described first is emission sensor to bit detector.
8. rotating table system according to claim 3, it is characterised in that the surface of described second auxiliary positioning portion and described rotating disk exists difference in height；Described second is range sensor to bit detector.
9. rotating table system according to claim 1, it is characterised in that the quantity in described original point position portion is one or more, multiple described original point position portions being provided at circumferentially spaced along described locating ring.
10. a semiconductor processing equipment, including processing chamber, is provided with rotating table system in processing chamber, it is characterised in that described rotating table system adopts the rotating table system described in claim 1-9 any one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410788977.4A CN105789103B (en) | 2014-12-17 | 2014-12-17 | Rotating table system and semiconductor processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410788977.4A CN105789103B (en) | 2014-12-17 | 2014-12-17 | Rotating table system and semiconductor processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105789103A true CN105789103A (en) | 2016-07-20 |
| CN105789103B CN105789103B (en) | 2019-02-19 |
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| CN113137942A (en) * | 2021-04-15 | 2021-07-20 | 珠海格力智能装备有限公司 | Positioning system and positioning method |
| CN113135209A (en) * | 2021-03-10 | 2021-07-20 | 拓荆科技股份有限公司 | Multi-silicon-chip transportation and taking-off vehicle |
| CN113322449A (en) * | 2021-05-26 | 2021-08-31 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and bearing device thereof |
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| CN113135209A (en) * | 2021-03-10 | 2021-07-20 | 拓荆科技股份有限公司 | Multi-silicon-chip transportation and taking-off vehicle |
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| CN113137942A (en) * | 2021-04-15 | 2021-07-20 | 珠海格力智能装备有限公司 | Positioning system and positioning method |
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| CN113322449A (en) * | 2021-05-26 | 2021-08-31 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and bearing device thereof |
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| CN105789103B (en) | 2019-02-19 |
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