CN105783710B - A kind of method and device of location position - Google Patents

A kind of method and device of location position Download PDF

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CN105783710B
CN105783710B CN201410822825.1A CN201410822825A CN105783710B CN 105783710 B CN105783710 B CN 105783710B CN 201410822825 A CN201410822825 A CN 201410822825A CN 105783710 B CN105783710 B CN 105783710B
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optical system
coordinate
center
preset calibrations
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CN105783710A (en
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李恺
霍杰
刘子阳
***
叶乐志
唐亮
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CETC Beijing Electronic Equipment Co
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CETC Beijing Electronic Equipment Co
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Abstract

The present invention provides a kind of method and device of location position, is applied in loading device, this method includes:Obtain first coordinate difference at the center of the first optical system and the center of preset calibrations plate, wherein the preset calibrations plate is moved to according to predetermined process track in the visual field of first optical system;Obtain second coordinate difference at the center of the second optical system and the center of the preset calibrations plate, wherein the preset calibrations plate is according to the predetermined process track from the field motion to the visual field of second optical system of first optical system;According to first coordinate difference and second coordinate difference, the distance between first optical system and second optical system and angle are determined so that the loading device can realize the calibration of chip position according to the distance and angle.Distance and angle between the optical system of calibration of the embodiment of the present invention provide guarantee for the precision of next step load technique, realize high-precision load.

Description

A kind of method and device of location position
Technical field
The present invention relates to Plant fragment and optical technical field, more particularly to a kind of method and device of location position.
Background technology
With the fast development of global electronic information technology, IC chip is constantly to high density, high-performance and frivolous Short and small direction is developed, and to meet IC package requirement, the salient point quantity on chip will be more and more.With the increasing of salient point quantity It is more, challenge is proposed to existing loading device, one of them main problem is high density, and how high the chip of small spacing salient point is Precision load.It is usually load to be done directly after picking up chip, but this mode is main there are one in load class equipment at present Problem, pick up chip after without collimation be hinged with piece, so little deviation that may be present when pickup can not be eliminated so that dress The precision of piece is difficult to improve.
Invention content
The purpose of the present invention is to provide a kind of method and devices of location position, and core is demarcated before apparatus and process production Piece is directed at position and substrate mounting position, and corrects obtained deviation, meets the requirement of high-precision load.
In order to achieve the above object, the embodiment of the present invention provides a kind of method of location position, is applied in loading device, Including:
Obtain first coordinate difference at the center of the first optical system and the center of preset calibrations plate, wherein the pre- bidding Fixed board is moved to according to predetermined process track in the visual field of first optical system;
Obtain second coordinate difference at the center of the second optical system and the center of the preset calibrations plate, wherein described pre- Fixed board is marked with according to the predetermined process track from the field motion of first optical system to second optical system In visual field;
According to first coordinate difference and second coordinate difference, first optical system and second optics are determined The distance between system and angle so that the loading device can realize the mark of chip position according to the distance and angle It is fixed.
Wherein, first coordinate difference at the center for obtaining the first optical system and the center of preset calibrations plate is specific to wrap It includes:
Obtain first coordinate of the center of first optical system in default three-dimensional system of coordinate;
Obtain second coordinate of the center of the preset calibrations plate in the default three-dimensional system of coordinate, wherein described pre- The center of bidding fixed board is demarcated by first optical system;
According to first coordinate and second coordinate, first coordinate difference is determined.
Wherein, second coordinate difference at the center for obtaining the second optical system and the center of the preset calibrations plate, tool Body includes:
Obtain third coordinate of the center of second optical system in the default three-dimensional system of coordinate;
Obtain 4-coordinate of the center of the preset calibrations plate in the default three-dimensional system of coordinate, wherein described pre- The center of bidding fixed board is demarcated by second optical system;
According to the third coordinate and the 4-coordinate, second coordinate difference is determined.
Wherein, first optical system includes industrial camera, the zoom or determine again that one end is connect with the industrial camera Camera lens and the deflecting prism being connect with the other end of the camera lens;
Second optical system includes industrial camera and the zoom being connect with the industrial camera or fixed times camera lens;Its In,
When in visual field of the preset calibrations plate in first optical system, the center of the preset calibrations plate is by institute The first optical system is stated by adjusting the position of the deflecting prism to be demarcated;
When in visual field of the preset calibrations plate in second optical system, the center of the preset calibrations plate is by institute The second optical system is stated by adjusting the position of the camera lens and industrial camera to be demarcated.
Wherein, a lens are set between second optical system and the preset calibrations plate, by adjusting the lens Calibration of second optical system to the center of the preset calibrations plate is realized in position.
Wherein, described according to first coordinate difference and second coordinate difference, determine first optical system and institute The distance between second optical system and angle are stated, is specifically included:
According to first coordinate difference and second coordinate difference, first optical system and second optics are determined Coordinate difference between system;Wherein,
The coordinate difference includes:First optical system and second optical system are along the default three-dimensional system of coordinate X-direction on distance, second optical system and second optical system along the default three-dimensional system of coordinate Y-axis The Z axis of distance and first optical system and second optical system on direction and the default three-dimensional system of coordinate it Between angle.
The embodiment of the present invention also provides a kind of device of location position, is applied in loading device, including:
First acquisition module, the first coordinate for obtaining the center of the first optical system and the center of preset calibrations plate Difference, wherein the preset calibrations plate is moved to according to predetermined process track in the visual field of first optical system;
Second acquisition module, second for obtaining the center of the second optical system and the center of the preset calibrations plate sits Mark is poor, wherein the preset calibrations plate is according to the predetermined process track from the field motion of first optical system to institute In the visual field for stating the second optical system;
Determining module, for according to first coordinate difference and second coordinate difference, determining first optical system The distance between described second optical system and angle so that the loading device can be realized according to the distance and angle The calibration of chip position.
Wherein, first acquisition module includes:
First acquisition submodule, for obtaining the center of first optical system first in default three-dimensional system of coordinate Coordinate;
Second acquisition submodule, for obtaining the center of the preset calibrations plate in the default three-dimensional system of coordinate Two coordinates, wherein the center of the preset calibrations plate is demarcated by first optical system;
First determination sub-module, for according to first coordinate and second coordinate, determining first coordinate difference.
Wherein, second acquisition module includes:
Third acquisition submodule, for obtaining the center of second optical system in the default three-dimensional system of coordinate Third coordinate;
4th acquisition submodule, for obtaining the center of the preset calibrations plate in the default three-dimensional system of coordinate 4-coordinate, wherein the center of the preset calibrations plate is demarcated by second optical system;
Second determination sub-module, for according to the third coordinate and the 4-coordinate, determining second coordinate difference.
Wherein, first optical system includes industrial camera, the zoom or determine again that one end is connect with the industrial camera Camera lens and the deflecting prism being connect with the other end of the camera lens;
Second optical system includes industrial camera and the zoom being connect with the industrial camera or fixed times camera lens;Its In,
When in visual field of the preset calibrations plate in first optical system, the center of the preset calibrations plate is by institute The first optical system is stated by adjusting the position of the deflecting prism to be demarcated;
When in visual field of the preset calibrations plate in second optical system, the center of the preset calibrations plate is by institute The second optical system is stated by adjusting the position of the camera lens and industrial camera to be demarcated.
Wherein, a lens are set between second optical system and the preset calibrations plate, by adjusting the lens Calibration of second optical system to the center of the preset calibrations plate is realized in position.
Wherein, the determining module includes:
Third determination sub-module, for according to first coordinate difference and second coordinate difference, determining first light Coordinate difference between system and second optical system;Wherein,
The coordinate difference includes:First optical system and second optical system are along the default three-dimensional system of coordinate X-direction on distance, second optical system and second optical system along the default three-dimensional system of coordinate Y-axis The Z axis of distance and first optical system and second optical system on direction and the default three-dimensional system of coordinate it Between angle.
The above-mentioned technical proposal of the present invention at least has the advantages that:
In the method and device of the location position of the embodiment of the present invention, pass through the first coordinate difference before loading device load And second coordinate difference determine accurate distance and angle between the first optical system and the second optical system so that loading device energy Enough calibration that chip position is realized according to the distance and angle eliminate issuable small inclined in chip pick-up process Difference has reached higher load required precision;It solves the problems, such as that two optical system coordinate systems are skimble-scamble simultaneously, significantly carries The precision of high equipment make in art production process can quickly, easy and accurately verification and correcting action.
Description of the drawings
Fig. 1 shows the basic step schematic diagrames of the method for the location position of the embodiment of the present invention;
Fig. 2 indicates processing procedure schematic diagram of the method for the location position of the embodiment of the present invention at the first optical system;
Fig. 3 indicates processing procedure schematic diagram of the method for the location position of the embodiment of the present invention at the second optical system;
The direction schematic diagram of three-dimensional system of coordinate is preset in the method for the location position of Fig. 4 expression embodiment of the present invention;
Fig. 5 indicates the composite structural diagram of the device of the location position of the embodiment of the present invention.
Specific implementation mode
To keep the technical problem to be solved in the present invention, technical solution and advantage clearer, below in conjunction with attached drawing and tool Body embodiment is described in detail.
The present invention is hinged with piece in the pickup chip of loading device in the prior art without collimation, and there are small inclined Difference so that the not high problem of load precision provides a kind of method and device of location position, passes through before loading device load First coordinate difference and the second coordinate difference determine accurate distance and angle between the first optical system and the second optical system so that Loading device can realize the calibration of chip position according to the distance and angle, eliminate in chip pick-up process there may be Little deviation, reached higher load required precision;Solve the problems, such as that two optical system coordinate systems are skimble-scamble simultaneously, Be greatly improved equipment precision make in art production process can quickly, easy and accurately verification and correcting action.
As shown in Figure 1, the embodiment of the present invention provides a kind of method of location position, it is applied in loading device, including:
Step 11, first coordinate difference at the center and the center of preset calibrations plate of the first optical system is obtained, wherein described Preset calibrations plate is moved to according to predetermined process track in the visual field of first optical system;
Step 12, second coordinate difference at the center and the center of the preset calibrations plate of the second optical system is obtained, wherein The preset calibrations plate is according to the predetermined process track from the field motion of first optical system to second optics In the visual field of system;
Step 13, according to first coordinate difference and second coordinate difference, determine first optical system with it is described The distance between second optical system and angle so that the loading device can realize chip position according to the distance and angle The calibration set.
The above embodiment of the present invention utilizes the principle of optical imagery, passes through the first optical system and the second optical system point Not Cai Ji image of the scaling board in its visual field obtain the and using high-precision image algorithm identification scaling board center Accurate distance between one optical system and the second optical system and angle.Then the specific load process of loading device includes:Outside Portion's motor drive ic is moved to according to predetermined process track in the visual field of the first optical system, passes through the figure of the first optical system After demarcating the center of chip as identification technology, external motor driving chip moves the first optical system that the embodiment of the present invention obtains And the second accurate distance and angle between optical system, then chip be in the visual field of the second optical system, and at this time second Coordinate difference is not present in the center of optical system and the center of chip, then the position is the exact position of chip load, realizes height Precision load.
It should be noted that the center of the method for location position provided in an embodiment of the present invention and image recognition scaling board with And motion random error is related, therefore need repeatedly to calculate the distance between the first optical system and the second optical system and angle, Accurate distance and angle are obtained using statistical method;Wherein, statistical method such as average, mean square deviation, Normal distribution analysis etc., is not specifically limited herein.
Meanwhile in order to verify whether primary calibration succeeds, following method can be passed through:Scaling board moves to the first optical system Visual field in, image software calculate the first optical system center and scaling board center the first coordinate difference, be set as (Δ X1a、Δ Y1a、Δθ1a), external motor driving scaling board movement passes through the distance and angle that step 13 obtains, and is set as (Δ X, Δ Y, Δ θ) Afterwards, in scaling board to the visual field of the second optical system, image software calculates the of the second optical system center and scaling board center Two coordinate differences are set as (Δ X2a、ΔY2a、Δθ2a), examine Δ X2a=0, Δ Y2a=0, Δ θ2a=Δ θ, then demarcate success;Otherwise It demarcates unsuccessful, need to be re-scaled.
Specifically, in the above embodiment of the present invention, step 11 specifically includes:
Step 111, first coordinate of the center of first optical system in default three-dimensional system of coordinate is obtained;
Step 112, second coordinate of the center of the preset calibrations plate in the default three-dimensional system of coordinate is obtained, In, the center of the preset calibrations plate is demarcated by first optical system;
Step 113, it according to first coordinate and second coordinate, determines first coordinate difference, is set as (Δ X1、 ΔY1、Δθ1)。
Step 12 specifically includes:
Step 121, third coordinate of the center of second optical system in the default three-dimensional system of coordinate is obtained;
Step 122,4-coordinate of the center of the preset calibrations plate in the default three-dimensional system of coordinate is obtained, In, the center of the preset calibrations plate is demarcated by second optical system;
Step 123, it according to the third coordinate and the 4-coordinate, determines second coordinate difference, is set as (Δ X2、 ΔY2、Δθ2)。
Specifically, according to the first coordinate difference Δ X1、ΔY1、Δθ1) and the second coordinate difference (Δ X2、ΔY2、Δθ2) obtain Fixed the distance between first optical system and second optical system and angle are (Δ X, Δ Y, Δ θ)=(X1+X2、Y1 +Y2、θ12).In practical application, method value (Δ X, Δ Y, Δ θ) obtained by calibrating through the embodiment of the present invention is with parameter Mode preserves in a program, can be to the first optical system after it machined a certain number of products in art production process Precision test is carried out with the distance and angle of the second optical system, makes up issuable deviation in time, to meet high-precision The requirement of load.During the embodiment of the present invention creatively produces calibration process through actual process, production process is realized In easier, quick, accurate validation deviation and correcting action function.
It should be noted that in practical applications, the first optical system is lower optometry system, the second optical system is upper Optometry system;(wherein, institute is described in further detail to the method for the location position of the embodiment of the present invention with reference to Fig. 2 and Fig. 3 It is vector (having positive and negative) to have coordinate, and X is that just, it just, under Z-direction is being just, as shown in Figure 4 to be to the left outside Y-direction):
It first, then will calibration as shown in Fig. 2, the preset calibrations plate 4 of visual identity is mounted on 3 lower end of calibration jig Jig 3 is mounted in external motor driving mechanism, and external motor driving scaling board 4 moves in the visual field of optometry system 2, It is automatically aligned to 4 center of scaling board by image recognition algorithm, the center (i.e. motor position) of optometry system 2 and calibration on record The angle at the center of plate 4 obtains the first coordinate difference (Δ X1、ΔY1、Δθ1);
As shown in figure 3, the calibration jig 3 for installing scaling board 4 is moved to lower optometry system under external motor driving In the visual field of system 1,4 center of scaling board is automatically aligned to by image recognition algorithm, the center for recording optometry system 1 is (i.e. electric Set seat in the plane) obtain the second coordinate difference (Δ X with the angle at the center of scaling board2、ΔY2、Δθ2);
It is then respectively aligned to the distance between system up and down and angle is:
(Δ X, Δ Y, Δ θ)=(X1+X2、Y1+Y2、θ12).Statistical side is recycled specifically, needing repeatedly to measure Method obtains end value, herein not repeated explanation.
Specifically, in the practical application of the present invention, as shown in Figure 2 and Figure 3, first optical system includes industrial camera, The zoom or the deflecting prism determined times camera lens and connect with the other end of the camera lens that one end is connect with the industrial camera;
Second optical system includes industrial camera and the zoom being connect with the industrial camera or fixed times camera lens;Its In,
When in visual field of the preset calibrations plate in first optical system, the center of the preset calibrations plate is by institute The first optical system is stated by adjusting the position of the deflecting prism to be demarcated;
When in visual field of the preset calibrations plate in second optical system, the center of the preset calibrations plate is by institute The second optical system is stated by adjusting the position of the camera lens and industrial camera to be demarcated.I.e. upper optometry system can adopt Zoom or the mode of fixed times camera lens processing industry camera are taken, realizes that optical system is kept flat in front end plus deflecting prism, adjusts prism position Set to obtain clearly image.Lower optometry system can take zoom or the mode of fixed times camera lens processing industry camera, adjust optics System altitude obtains clearly image.
Meanwhile in order to shorten the operating distance between the second optical system and scaling board, realizing sustained height, different location The image (center for determining scaling board) for acquiring scaling board, is arranged between second optical system and the preset calibrations plate One lens realize mark of second optical system to the center of the preset calibrations plate by adjusting the lens position It is fixed.
Preferably, in the above embodiment of the present invention, step 13 specifically includes:
Step 131, according to first coordinate difference and second coordinate difference, determine first optical system with it is described Coordinate difference between second optical system;Wherein,
The coordinate difference includes:First optical system and second optical system are along the default three-dimensional system of coordinate X-direction on distance, second optical system and second optical system along the default three-dimensional system of coordinate Y-axis The Z axis of distance and first optical system and second optical system on direction and the default three-dimensional system of coordinate it Between angle.
Specific embodiments of the present invention on depending on and lower optometry system acquire figure of the scaling board in its visual field respectively Picture, and using the center of high-precision image algorithm identification scaling board, obtain accurate between upper and lower alignment optical system Distance and angle provide guarantee for the precision of next step technique productions;The present invention passes through the upper optometry system pair of addition simultaneously Position after chip pickup is precisely aligned again, eliminates issuable little deviation in chip pick-up process, to Higher load required precision is reached.
In order to preferably realize above-mentioned purpose, as shown in figure 5, the embodiment of the present invention also provides a kind of dress of location position It sets, is applied in loading device, including:
First acquisition module 51, the first coordinate for obtaining the center of the first optical system and the center of preset calibrations plate Difference, wherein the preset calibrations plate is moved to according to predetermined process track in the visual field of first optical system;
Second acquisition module 52, second for obtaining the center of the second optical system and the center of the preset calibrations plate Coordinate difference, wherein the preset calibrations plate according to the predetermined process track from the field motion of first optical system to In the visual field of second optical system;
Determining module 53, for according to first coordinate difference and second coordinate difference, determining first optical system The distance between system and second optical system and angle so that the loading device can be real according to the distance and angle The calibration of existing chip position.
Specifically, in the above embodiment of the present invention, first acquisition module 51 includes:
First acquisition submodule, for obtaining the center of first optical system first in default three-dimensional system of coordinate Coordinate;
Second acquisition submodule, for obtaining the center of the preset calibrations plate in the default three-dimensional system of coordinate Two coordinates, wherein the center of the preset calibrations plate is demarcated by first optical system;
First determination sub-module, for according to first coordinate and second coordinate, determining first coordinate difference.
Specifically, in the above embodiment of the present invention, second acquisition module 52 includes:
Third acquisition submodule, for obtaining the center of second optical system in the default three-dimensional system of coordinate Third coordinate;
4th acquisition submodule, for obtaining the center of the preset calibrations plate in the default three-dimensional system of coordinate 4-coordinate, wherein the center of the preset calibrations plate is demarcated by second optical system;
Second determination sub-module, for according to the third coordinate and the 4-coordinate, determining second coordinate difference.
Specifically, in the above embodiment of the present invention, first optical system includes industrial camera, one end and the work The zoom of industry camera connection or fixed times camera lens and the deflecting prism being connect with the other end of the camera lens;
Second optical system includes industrial camera and the zoom being connect with the industrial camera or fixed times camera lens;Its In,
When in visual field of the preset calibrations plate in first optical system, the center of the preset calibrations plate is by institute The first optical system is stated by adjusting the position of the deflecting prism to be demarcated;
When in visual field of the preset calibrations plate in second optical system, the center of the preset calibrations plate is by institute The second optical system is stated by adjusting the position of the camera lens and industrial camera to be demarcated.
Specifically, in the above embodiment of the present invention, it is arranged one between second optical system and the preset calibrations plate Lens realize calibration of second optical system to the center of the preset calibrations plate by adjusting the lens position.
Specifically, in the above embodiment of the present invention, the determining module 53 includes:
Third determination sub-module, for according to first coordinate difference and second coordinate difference, determining first light Coordinate difference between system and second optical system;Wherein,
The coordinate difference includes:First optical system and second optical system are along the default three-dimensional system of coordinate X-direction on distance, second optical system and second optical system along the default three-dimensional system of coordinate Y-axis The Z axis of distance and first optical system and second optical system on direction and the default three-dimensional system of coordinate it Between angle.
The device of location position in the above embodiment of the present invention is mounted in chip attachment mechanism, is produced in apparatus and process Calibration chip alignment position and substrate mounting position before, and obtained deviation is corrected, meet the requirement of high-precision load.Specifically , after chip is picked up in device realization and substrate mounts the High Resolution identification positioning of the first two different location, and The distance and angle for going out two optical systems by the scaling method Accurate Calibration being related to first pass through high-precision after picking up chip Upper optometry system in the optical system of alignment carries out accurate calibration again to chip, then accurate by lower optometry system It is directed at substrate mounting position, show that distance and angle value complete load by scaling method, to realize high-precision load.
It should be noted that the device of location position provided in an embodiment of the present invention is the method using above-mentioned location position Device, then all embodiments of the above method be suitable for the device, and can reach same or analogous advantageous effect.
The above is the preferred embodiment of the present invention, it is noted that for those skilled in the art For, without departing from the principles of the present invention, several improvements and modifications can also be made, these improvements and modifications It should be regarded as protection scope of the present invention.

Claims (8)

1. a kind of method of location position is applied in loading device, which is characterized in that including:
Obtain first coordinate difference at the center of the first optical system and the center of preset calibrations plate, wherein the preset calibrations plate It is moved to according to predetermined process track in the visual field of first optical system;
Obtain second coordinate difference at the center of the second optical system and the center of the preset calibrations plate, wherein the pre- bidding Visual field of the fixed board according to the predetermined process track from the field motion of first optical system to second optical system In;
According to first coordinate difference and second coordinate difference, first optical system and second optical system are determined The distance between and angle so that the loading device can realize the calibration of chip position according to the distance and angle;
Wherein, first coordinate difference at the center for obtaining the first optical system and the center of preset calibrations plate, specifically includes:
Obtain first coordinate of the center of first optical system in default three-dimensional system of coordinate;
Obtain second coordinate of the center of the preset calibrations plate in the default three-dimensional system of coordinate, wherein the pre- bidding The center of fixed board is demarcated by first optical system;
According to first coordinate and second coordinate, first coordinate difference is determined;
Wherein, second coordinate difference at the center for obtaining the second optical system and the center of the preset calibrations plate is specific to wrap It includes:
Obtain third coordinate of the center of second optical system in the default three-dimensional system of coordinate;
Obtain 4-coordinate of the center of the preset calibrations plate in the default three-dimensional system of coordinate, wherein the pre- bidding The center of fixed board is demarcated by second optical system;
According to the third coordinate and the 4-coordinate, second coordinate difference is determined.
2. the method for location position according to claim 1, which is characterized in that first optical system includes industrial phase Machine, the zoom or the turnover rib determined times camera lens and connect with the other end of the camera lens that one end is connect with the industrial camera Mirror;
Second optical system includes industrial camera and the zoom being connect with the industrial camera or fixed times camera lens;Wherein,
When in visual field of the preset calibrations plate in first optical system, the center of the preset calibrations plate is by described One optical system is demarcated by adjusting the position of the deflecting prism;
When in visual field of the preset calibrations plate in second optical system, the center of the preset calibrations plate is by described Two optical systems are demarcated by adjusting the position of the camera lens and industrial camera.
3. the method for location position according to claim 2, which is characterized in that second optical system is preset with described One lens are set between scaling board, realize second optical system to the preset calibrations by adjusting the lens position The calibration at the center of plate.
4. the method for location position according to claim 1, which is characterized in that described according to first coordinate difference and institute The second coordinate difference is stated, the distance between first optical system and second optical system and angle is determined, specifically includes:
According to first coordinate difference and second coordinate difference, first optical system and second optical system are determined Between coordinate difference;Wherein,
The coordinate difference includes:The X of first optical system and second optical system along the default three-dimensional system of coordinate Distance, second optical system and second optical system in axis direction is along the Y-axis side of the default three-dimensional system of coordinate Between upward distance and first optical system and second optical system and the Z axis of the default three-dimensional system of coordinate Angle.
5. a kind of device of location position is applied in loading device, which is characterized in that including:
First acquisition module, the first coordinate difference for obtaining the center of the first optical system and the center of preset calibrations plate, In, the preset calibrations plate is moved to according to predetermined process track in the visual field of first optical system;
Second acquisition module, the second coordinate for obtaining the center of the second optical system and the center of the preset calibrations plate Difference, wherein the preset calibrations plate is according to the predetermined process track from the field motion of first optical system to described In the visual field of second optical system;
Determining module, for according to first coordinate difference and second coordinate difference, determining first optical system and institute State the distance between second optical system and angle so that the loading device can realize chip according to the distance and angle The calibration of position;
Wherein, first acquisition module includes:
First acquisition submodule, for obtaining first seat of the center of first optical system in default three-dimensional system of coordinate Mark;
Second acquisition submodule, for obtaining second seat of the center of the preset calibrations plate in the default three-dimensional system of coordinate Mark, wherein the center of the preset calibrations plate is demarcated by first optical system;
First determination sub-module, for according to first coordinate and second coordinate, determining first coordinate difference;
Wherein, second acquisition module includes:
Third acquisition submodule, for obtaining third of the center of second optical system in the default three-dimensional system of coordinate Coordinate;
4th acquisition submodule, for obtaining fourth seat of the center of the preset calibrations plate in the default three-dimensional system of coordinate Mark, wherein the center of the preset calibrations plate is demarcated by second optical system;
Second determination sub-module, for according to the third coordinate and the 4-coordinate, determining second coordinate difference.
6. the device of location position according to claim 5, which is characterized in that first optical system includes industrial phase Machine, the zoom or the turnover rib determined times camera lens and connect with the other end of the camera lens that one end is connect with the industrial camera Mirror;
Second optical system includes industrial camera and the zoom being connect with the industrial camera or fixed times camera lens;Wherein,
When in visual field of the preset calibrations plate in first optical system, the center of the preset calibrations plate is by described One optical system is demarcated by adjusting the position of the deflecting prism;
When in visual field of the preset calibrations plate in second optical system, the center of the preset calibrations plate is by described Two optical systems are demarcated by adjusting the position of the camera lens and industrial camera.
7. the device of location position according to claim 6, which is characterized in that second optical system is preset with described One lens are set between scaling board, realize second optical system to the preset calibrations by adjusting the lens position The calibration at the center of plate.
8. the device of location position according to claim 5, which is characterized in that the determining module includes:
Third determination sub-module, for according to first coordinate difference and second coordinate difference, determining first optical system Coordinate difference between system and second optical system;Wherein,
The coordinate difference includes:The X of first optical system and second optical system along the default three-dimensional system of coordinate Distance, second optical system and second optical system in axis direction is along the Y-axis side of the default three-dimensional system of coordinate Between upward distance and first optical system and second optical system and the Z axis of the default three-dimensional system of coordinate Angle.
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