CN105755293B - A kind of vertical feeding system of vacuum electron beam melting furnace - Google Patents

A kind of vertical feeding system of vacuum electron beam melting furnace Download PDF

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CN105755293B
CN105755293B CN201410794929.6A CN201410794929A CN105755293B CN 105755293 B CN105755293 B CN 105755293B CN 201410794929 A CN201410794929 A CN 201410794929A CN 105755293 B CN105755293 B CN 105755293B
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vertical feeding
material ingot
pull bar
ingot
electron beam
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CN105755293A (en
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宁堃
孙照富
郭文亮
魏中青
陈俊
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GRIMN Engineering Technology Research Institute Co Ltd
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Beijing General Research Institute for Non Ferrous Metals
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Abstract

The invention discloses a kind of vertical feeding system of vacuum electron beam melting furnace, comprising:The vertical feeding room of one through type, stand in above body of heater and fix UNICOM with body of heater;One vertical feeding fixed mount, it is fixedly mounted on vertical feeding fixed mount and the mechanism that material ingot is rotated and fed can be achieved, including:One, by the motor-driven ball screw assembly, of lift servo, is cased with feed screw nut, the feed screw nut is fixedly connected with moving back and forth fixed seat thereon;One is driven the material ingot pull bar of rotation by material ingot electric rotating machine, it is cased with expecting ingot pull bar bearing block on its bar, the material ingot pull bar bearing block mutually connects firmly with the reciprocating motion fixed seat on ball screw assembly, and the lower end of the material ingot pull bar can be stretched into vertical feeding room and with the material ingot dop for binder ingot.Using it vertical feeding system can be used to carry out melting to material ingot, the technological requirement of secondary smelting can be met.

Description

A kind of vertical feeding system of vacuum electron beam melting furnace
Technical field
The present invention relates to a kind of vertical feeding system of vacuum electron beam melting furnace.
Background technology
Electron beam furnace is heated or one kind of melting as thermal source using the energy of high-speed motion electron beam Electric furnace.It is mainly used as the infusibilities such as melting niobium, tantalum and hafnium, high-purity and rare metal at present.It, which mainly forms structure, includes:Electron beam Generator, body of heater, Tuo Ding mechanisms and crystallizer, feed mechanism, vacuum system, water-cooling system, observation device, power supply and control are set It is standby etc..In the presence of feed mechanism, charge bar or material block are sent into line area of bombardment, by high-speed motion electron energy come to thing Material is heated, melting, and is extracted out the gaseous impurity evaporated in fusion process by vacuum system, reaches the purpose of purification. Current vacuum electron beam smelting equipment uses the raceway device of horizontal feed screw rod transmission mostly.Transverse horizontal feeding is conveying It comparative superiority during short charge bar, can one by one push, it is semicontinuous be easy to implement operation, it is also possible to convey block Material.But when transverse horizontal conveys charge bar melting, charge bar end can produce shade, i.e. beam bombardment is molten less than being shielded by charge bar Pond shadow region, so results in that local heating is uneven, influences the melting purification quality of metal.In addition after melting once, The material ingot of corresponding size has been formed by Tuo Ding mechanisms and crystallizer, when needing to carry out secondary remelting under Product Process requirement, Melting to expecting ingot requires higher, that is, avoids beam bombardment area in charge bar fusion process from blind area occur, ensure no melting shade Area, while to ensure that material is not contaminated in conveying and fusion process during the secondary remelting.It is such a secondary molten in order to reach Refining requires, it would be highly desirable to finds out more preferable melting mode and relevant device.
The content of the invention
It is an object of the invention to provide a kind of vertical feeding system of vacuum electron beam melting furnace, and it uses vertical feeding system System carries out melting to material ingot, it is possible to achieve the technological requirement of above-mentioned secondary smelting.
To achieve the above object, the present invention takes following design:
A kind of vertical feeding system of vacuum electron beam melting furnace, it includes:
The vertical feeding room of one through type, stands still for a long while above the body of heater of vacuum electron beam melting furnace and by body of heater connection method It is blue to fix UNICOM with body of heater;
One vertical feeding fixed mount, the top of vertical feeding room is fixedly mounted on, is pacified by upper and lower supporting plate and Der Laengslenker Matrix combination is filled to form;
It is fixedly mounted on vertical feeding fixed mount and the mechanism that material ingot is rotated and fed can be achieved, including:
One, by the motor-driven ball screw assembly, of lift servo, is cased with feed screw nut, the feed screw nut and reciprocal fortune thereon Dynamic fixed seat is fixedly connected;
One is driven the material ingot pull bar of rotation by material ingot electric rotating machine, is cased with expecting ingot pull bar bearing block on its bar, the material ingot is drawn Rod bearing seat is mutually connected firmly with the reciprocating motion fixed seat on the ball screw assembly, and the lower end of the material ingot pull bar can be stretched into be entered vertically Material is indoor and with the material ingot dop for binder ingot.
In the vertical feeding system of the vacuum electron beam melting furnace, the ball screw assembly, is installed on vertical feeding and fixed Between the upper and lower supporting plate of frame, reciprocating motion fixed seat thereon mutually connects firmly with a slide block guide rail moving parts, and slide block guide rail The guide rail of moving parts is fixed in the longitudinal rail installing matrix of vertical feeding fixed mount, is realized and is moved back and forth the perpendicular of fixed seat Straight guide effect.
In the vertical feeding system of the vacuum electron beam melting furnace, expect that upper and lower side end contains respectively in ingot pull bar bearing block There is bearing apolegamy, with the more preferable rotational positioning precision for ensureing to expect ingot pull bar.
In the vertical feeding system of the vacuum electron beam melting furnace, the cyclic water channel with annular inside material ingot pull bar.
In the vertical feeding system of the vacuum electron beam melting furnace, set in material ingot pull bar and the intersection of vertical feeding room There is dynamic sealing assembly, the both ends of the dynamic sealing assembly use double sealing structure, and center section is provided with the quick release flange vacuumized.
In the vertical feeding system of the vacuum electron beam melting furnace, described lift servo motor passes through driving force member Ball screw assembly, is driven, a screw mandrel shaft block is added in driving force member bottom.
In the vertical feeding system of the vacuum electron beam melting furnace, described screw mandrel shaft block and material ingot pull bar bearing block Inside uses self-loopa annular oil-way lubrication.
In the vertical feeding system of the vacuum electron beam melting furnace, before described material ingot dop is using can be achieved in space Afterwards and left and right directions regulation cross universal connected mode, its with material ingot be connected by bearing pin.
In the vertical feeding system of the vacuum electron beam melting furnace, cooling jacket, water jacket are added outside the vertical feeding room It is interior to be laid out using bidirectional screw water channel.
In the vertical feeding system of the vacuum electron beam melting furnace, also at least there is one kind in following technical characteristics:
1) in vertical feeding room, using more interlayer radiation proof structures;
2) cooling water pipe of stainless steel containing socket joint inside ingot pull bar is expected;
3) vertical feeding room sidepiece is provided with observation maintenance window, and the observation maintenance window adds water cooling water jacket.
It is an advantage of the invention that:
1) in integral device running, material ingot is vertical feeding, and be in rotation status, electron gun strafe track and Expect that ingot circumference is tangent, between without any obstruction, avoid the appearance of scanning shade, ensure that material ingot end smelting area is uniform, greatly Improve smelting efficiency and melting purity greatly;
2) ingot is expected by expecting that ingot dop is connected with material ingot pull bar, and all the time in vertical state, therefore in melting, material ingot is not Contact with remaining parts, directly strafed by electron gun high-power electron beam, avoid contact stain during material melting, there can be effect Secondary remelting for material;
3) expect that ingot pull bar is cylindrical bright and clean, be internally formed annular cyclic water channel, be easy to equipment to carry out water cooling;And end uses Rotary connector, ensure that material ingot extension bar cooling water can freely supply in itself rotary course;
4) dynamic sealing assembly both ends use double sealing structure, ensure material ingot dynamic sealing assembly and material in vertical feed motion The vacuum sealing of ingot pull bar outer wall;Center section is provided with and vacuumizes quick release flange, and dynamic sealing assembly is taken out by vavuum pump Vacuum, it can guarantee that the vacuum of dynamic sealing assembly inner space;
5) screw mandrel shaft block uses self-loopa annular oil-way lubrication with expecting inside ingot pull bar bearing block, the bearing inside convenience Lubrication.
Brief description of the drawings
Fig. 1 is the vertical feeding system structure diagram of vacuum electron beam melting furnace of the present invention.
Fig. 2 a are vertical feeding fixed rack structure schematic diagram (front view) of the present invention.
Fig. 2 b are vertical feeding fixed rack structure schematic diagram (side view) of the present invention.
Fig. 3 is vertical feeding room cooling water structural scheme of mechanism of the present invention.
Fig. 4 is dynamic sealing assembly structural representation of the present invention.
In figure:1. lift servo motor;2. motor connecting base;3. driving force member;4. screw mandrel shaft block;5. vertical feeding Fixed mount;501. upper backup pad;502. longitudinal rail installing matrixes;503. lower supporting plate;6. ball screw assembly,;7. slide block guide rail Component;8. material ingot electric rotating machine;9. move back and forth fixed seat;10. material ingot pull bar bearing block;11. material ingot pull bar;12. dynamic sealing Component;1201. seal guide;Guide cylinder .1202;1203. quick release flange;1204. oil-through-hole;13. vertical feeding room; Cylinder in 1301. vertical feeding rooms;1302. vertical feeding room cooling jackets;1303. flange;1304. spiral channel;14. enter vertically Expect room observation window;15. material ingot;16. coolant intake;17. cool back the mouth of a river;18. body of heater adpting flange;19. body of heater;20. electricity Sub- rifle;21. material ingot dop;22. radiation shield.
Below in conjunction with the accompanying drawings and specific embodiment is described in further details to the present invention.
Embodiment
As shown in fig.1, the vertical feeding system of vacuum electron beam melting furnace of the present invention mainly includes:Vertical feeding room 13rd, the mechanism that vertical feeding fixed mount 5 and the achievable material ingot being fixedly mounted thereon are rotated and fed.
Described vertical feeding room 13 is through type, is stood still for a long while above the body of heater 19 of vacuum electron beam melting furnace, and vertically Feed space 13 is fixed on body of heater 19 by body of heater adpting flange 18, in the case where the high-power electron beam of electron gun 20 is strafed, expects ingot 15 End persistently rotates and downward feed motion, remains that material ingot end is in the range of the strafing of electron gun high-power electron beam, Realize continuous smelting.Fig. 3 is vertical feeding room cooling water structural scheme of mechanism, is to be added in vertical feeding room on cylinder 1301 vertically Feed space cooling jacket 1302, the layout of two-way spiral channel 1304 can be used in water jacket, and the water channel is in by under import first Row is then recycled to coolant outlet mode, makes vertical feeding room Nei Ge positions have cooling water equal to vertical feeding room bottom It is even by the way that and water temperature is consistent, and more preferably water-cooled effect is obtained with this.
Described vertical feeding fixed mount 5 is fixedly mounted on the top of vertical feeding room, by upper fagging 501, lower supporting plate 503 and longitudinal rail installing matrix 502 combination form;Vertical feeding fixed mount 5 is that vertical feeding system material ingot rotates and expected ingot The fixed support of feed motion, it is to realize the mechanism body that vertical feeding system material ingot is rotated with vertical feed motion.It is vertical to realize Feed system material ingot rotates specifically to form with the embodiment of mechanism one of vertical feed motion:One by lift servo motor 1 and by Its ball screw assembly, 6 driven, lift servo motor 1 are fixed on motor connecting base 2, and ball is driven by driving force member 3 Screw mandrel kinematic pair 6 rotates;Ball screw assembly, is installed between the upper and lower supporting plate of vertical feeding fixed mount, is cased with screw mandrel spiral shell thereon Mother, the feed screw nut are fixedly connected with moving back and forth fixed seat 9;Movable part and reciprocal fortune in one slide block guide rail moving parts 7 The side seat surface of dynamic fixed seat 9 mutually connects firmly, and is acted on by the guiding slip of slide block guide rail moving parts 7 (in vertical feeding fixed mount Longitudinal rail installing matrix 502 on open up for the reciprocating guide rail vertically of slide block guide rail moving parts 7), realize reciprocal fortune The vertical reciprocating motion of dynamic fixed seat 9.To ensure feed screw nut's assembly kinematic dexterity and feed screw nut pair in rotary course Positional precision, with the addition of screw mandrel shaft block 4 in the bottom of driving force member 3, ensure the installation site precision of feed screw nut's assembly And kinematic accuracy.One is driven the material ingot pull bar 11 of rotation by material ingot electric rotating machine 8, is cased with expecting ingot pull bar bearing block 10 on its bar, The material ingot pull bar bearing block 10 connects firmly with the reciprocating motion fixed seat phase 9 on the ball screw assembly, under the material ingot pull bar 11 End can be stretched into vertical feeding room, and with the material ingot dop for binder ingot.The surface of material ingot pull bar 11 will ensure enough Finish, and expect ingot pull bar bottom by expecting the binder ingot 22 of ingot dop 21;In vertical feeding system work process, the material Ingot pull bar 11 can be connected firmly by expecting ingot pull bar bearing block 10 with moving back and forth fixed seat 9, and move back and forth the past of fixed seat 9 Under multiple motion drives, the vertical feed motion of material ingot is realized.Expect that ingot pull bar top axially connects firmly with material ingot electric rotating machine 8 simultaneously, While vertical feed motion, material ingot pull bar is driven to be rotated around axle center.Expect upper and lower side end in ingot pull bar bearing block Matched respectively containing bearing, and have axial span between bearing, to ensure to expect in accurate rotation and the rotary course of ingot pull bar End positions.Material ingot dop 21 can use cross universal connected mode, it is possible to achieve front and rear and left and right directions regulation in space;Material Ingot free suspension, can be connected by bearing pin with material ingot dop 21, also can be around axis rotation, regulation material ingot, which is in, freely to dangle Vertical state.
In the vertical feeding system of the vacuum electron beam melting furnace, the circulation of annular can be carried inside material ingot pull bar 11 Water channel (is to form following for annular with material ingot pull bar inwall by stainless steel cooling water pipe of the inside containing socket joint in the present embodiment Ring water channel).Expect to be located in vertical feeding room 13 during the 11 lower end work of ingot pull bar, and outdoor is atmospheric condition, interior is vacuum shape State, dynamic sealing assembly 12 are in vacuum with material ingot pull bar 11 in air boundary, can be ensure that in vertical reciprocatory movement In bottom positional precision, in turn ensure that the vacuum sealing of vertical feeding indoor and outdoor.In material ingot pull bar and vertical feeding room Intersection be provided with dynamic sealing assembly 12, the guide cylinder 1202 of inner sleeve one in the middle cavity of the dynamic sealing assembly 12, both ends are using double Sealing structure (is provided with sealing guide 1201, oil-through-hole 1204 is opened up on the sealing guide), and center section is provided with and vacuumized Quick release flange 1203, referring to Fig. 4.
The spy of dynamic sealing assembly 12 employs double sealing structure to realize.Upper and lower position all employs rotary motion lubrication Sealing and guiding wearing piece realize guide-localization and the sealing of material ingot pull bar.Reserve vacuum quick release flange mouth and enter in middle part Row evacuates, to ensure and expect the vacuum sealing of ingot pull bar contact site.The present invention is applied to the length range of setting clamping material ingot Larger, material ingot tie component belongs to major axis series, has to keep vertical in its upper and lower reciprocatory movement;Expect ingot pull bar bearing Top positioner of the reasonable bearing group cooperation for material ingot pull bar is adopted in the internal choosing of seat;The dynamic sealing assembly of lower end is on material ingot pull bar It is lower to have moved back and forth guiding and positioning supporting role.
In the vertical feeding system of the vacuum electron beam melting furnace, described screw mandrel shaft block and material ingot pull bar bearing block Inside uses self-loopa annular oil-way lubrication.
In the vertical feeding system of the vacuum electron beam melting furnace, vertical feeding room 13 communicates with body of heater 19, melting Vacuum state is in journey, lower flange is connected with vertical feeding fixed mount and body of heater thereon all uses vacuum sealing measure.Melting During, it is indoor to produce partial heat because of the radiation effects of high-power electron beam, therefore add water jacket outside vertical feeding room, there is water cooling Measure, cooling water are got in by cooling water inlet 16, and cooling water is backed into through external connection pipeline at self-loopa to coolant outlet Pond.Radiation shield 22 is installed to be protected, passes through anti-spoke in order to reduce X-ray radiation and superheating phenomenon in feed space upper end The blocking reflected effect of cover 22 is penetrated, weakens the harm of X ray significantly, there is provided radiation proof safety guarantee.
The present invention is provided with observation maintenance window in vertical feeding room sidepiece, convenient feed space inside repair simultaneously in time Understand observation vertical feeding chamber interior situation;And observation maintenance window adds water cooling water jacket, avoid producing superheating phenomenon.
During the vertical feeding system equipment installation and debugging of vacuum electron beam melting furnace of the present invention, it is ensured that screw mandrel kinematic pair with Expect the depth of parallelism of ingot pull bar, and the perpendicularity with vertical feeding frame bottom surface.So material ingot rod assembly and screw mandrel kinematic pair group The bolt hole that part and vertical feeding fixed mount are connected at face is designed with regulation surplus, first make during adjusting device material ingot pull bar from By sagging, each moving parts positional precision is adjusted by bolt hole surplus.
The various embodiments described above can be subject to some changes in the case where not departing from protection scope of the present invention, therefore the explanation of the above is wrapped Contain and accompanying drawing shown in structure should be regarded as it is exemplary, and be not used to limit the present patent application patent protection domain.

Claims (3)

1. the vertical feeding system of a kind of vacuum electron beam melting furnace, it is characterised in that include:
The vertical feeding room of one through type, stand still for a long while above the body of heater of vacuum electron beam melting furnace and by body of heater adpting flange with Body of heater fixes UNICOM;
One vertical feeding fixed mount, the top of vertical feeding room is fixedly mounted on, base is installed by upper and lower supporting plate and longitudinal rail Body combination is formed;
Outside the vertical feeding room plus cooling jacket, water jacket are interior using bidirectional screw water channel layout;On vertical feeding fixed mount It is fixedly mounted and the mechanism that material ingot is rotated and fed can be achieved, including:
One, by the motor-driven ball screw assembly, of lift servo, is cased with feed screw nut, the feed screw nut is solid with moving back and forth thereon Reservation is fixedly connected;
One is driven the material ingot pull bar of rotation by material ingot electric rotating machine, is cased with expecting ingot pull bar bearing block, the material ingot pull rod shaft on its bar Bearing mutually connects firmly with the reciprocating motion fixed seat on the ball screw assembly, and the lower end of the material ingot pull bar can stretch into vertical feeding room It is interior and with the material ingot dop for binder ingot, the cyclic water channel with annular inside material ingot pull bar;
Intersection in material ingot pull bar and vertical feeding room is provided with dynamic sealing assembly, inner sleeve one in the middle cavity of the dynamic sealing assembly Guide cylinder, both ends are provided with sealing guide, and oil-through-hole is opened up on sealing guide;
Described lift servo motor drives ball screw assembly, by driving force member, and a silk is added in driving force member bottom Rod bearing seat;
Described screw mandrel shaft block inside material ingot pull bar bearing block with using self-loopa annular oil-way lubrication;
The ball screw assembly, is installed between the upper and lower supporting plate of vertical feeding fixed mount, reciprocating motion fixed seat thereon with One slide block guide rail moving parts mutually connects firmly, and the guide rail of slide block guide rail moving parts is fixed on the longitudinal direction of vertical feeding fixed mount In guide rail installing matrix.
2. the vertical feeding system of vacuum electron beam melting furnace according to claim 1, it is characterised in that:Expect ingot pull rod shaft Upper and lower side end is matched containing bearing respectively in bearing.
3. the vertical feeding system of vacuum electron beam melting furnace according to claim 1, it is characterised in that:Described material ingot Using the cross universal connected mode that front and rear and left and right directions regulation in space can be achieved, it is connected dop with material ingot by bearing pin Connect.
CN201410794929.6A 2014-12-18 2014-12-18 A kind of vertical feeding system of vacuum electron beam melting furnace Active CN105755293B (en)

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CN109405546B (en) * 2018-12-18 2023-12-19 沈阳真空技术研究所有限公司 Pneumatic feeding mechanism with variable clamping range and bottoming protection
CN110564974A (en) * 2019-08-27 2019-12-13 仇凯 Electroslag remelting furnace

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Effective date of registration: 20190111

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