CN105752968A - Reel-to-reel continuous graphene film growth equipment - Google Patents
Reel-to-reel continuous graphene film growth equipment Download PDFInfo
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- CN105752968A CN105752968A CN201610076741.7A CN201610076741A CN105752968A CN 105752968 A CN105752968 A CN 105752968A CN 201610076741 A CN201610076741 A CN 201610076741A CN 105752968 A CN105752968 A CN 105752968A
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Abstract
The invention discloses reel-to-reel continuous graphene film growth equipment which comprises a body, wherein two ends of a workbench are respectively provided with a vacuum cavity; the vacuum cavities are connected with vacuum pipes; one side of each vacuum cavity is sequentially provided with a radio-frequency plasma generator, a heating furnance, a liquid nitrogen trap. The vacuum cavities are internally provided with roll-shaped copper foils, so that reel-to-reel continuous preparation is performed on graphene so as to obtain large-area and high-quality graphene. By virtue of adopting the equipment to prepare graphene, compared with the existing method, the equipment has the advantages of high speed and continuity, and can be used for performing large-scale growth of large-area and high-quality graphene.
Description
Technical field
The present invention relates to graphene growth equipment, be specifically related to a kind of quickly cooling plasma enhanced CVD volume to volume continuous graphite alkene growth apparatus.
Background technology
Large-scale CVD equipment has prepared the graphene film of 30 inches (diagonal is about 76cm), but the restriction by equipment, preparation technology is still preparation terminate once after more again dress sample prepare next time, also cannot realize large area, high-quality graphene continuous, quickly prepare.Large-scale volume to volume CVD equipment has prepared the length graphene film more than 100 meters, but owing to CVD growth high-quality graphene technological temperature is close to Copper Foil fusing point, in volume to volume CVD growth Graphene equipment, Copper Foil self almost cannot bear any tension force, and the material of conventional drive mechanism such as metal mesh bag, graphite and quartz roller bearing is had the tendency of very strong infiltration, welding and adhesion, slightly deal with improperly and may result in tearing and fold of the Graphene that is grown in copper foil surface.Above characteristic proposes huge challenge to the unwinding and rewinding control of Copper Foil in the equipment of volume to volume CVD growth Graphene and the drive mechanism under vacuum condition.Simultaneously because the operation pressure of volume to volume CVD growth belongs to low pressure chemical vapor deposition, grow complete Copper Foil, quickly cooling is needed when rolling, and conduction of heat is almost completely by heat radiation under vacuum, existing volume to volume CVD growth equipment cooling effectiveness is caused lowly to be difficult in adapt to the demand of the large batch of growth of high speed.
Summary of the invention
The invention aims to make up the deficiency of prior art, it is provided that a kind of quickly cooling plasma enhanced CVD volume to volume continuous graphite alkene growth apparatus.Adopt this equipment to prepare Graphene, relative to existing method, there is advantage rapidly, continuously, it is possible to carry out the scale growth of large area, high-quality graphene.
In order to solve above-mentioned existing technical problem, the present invention is by the following technical solutions: a kind of quickly cooling plasma enhanced CVD volume to volume continuous graphite alkene growth apparatus, it includes body, described body is provided with workbench, workbench is respectively arranged at two ends with vacuum chamber a and vacuum chamber b, described vacuum chamber a and vacuum chamber b is communicated with vacuum pump set, described vacuum chamber a is provided with air inlet, and the vacuum chamber b of the other end is provided with gas outlet, it is equipped with in described vacuum chamber a and vacuum chamber b and unreels cylinder, unreel cylinder simultaneously and be provided with electric rotating machine, it is connected to vacuum tube between described vacuum chamber a and vacuum chamber b, described vacuum chamber a side is sequentially provided with RF plasma reactor, heating furnace, liquid nitrogen cold trap.
Preferably, described RF plasma reactor is PE coil, and described PE coil is wrapped on vacuum tube.
Preferably, described body lower end is provided with air supply system, radio-frequency power supply, switch board.
Preferably, described workbench is provided with touch screen.
Preferably, described vacuum chamber a and vacuum chamber b is provided with visual window.
The operation principle of the present invention is as follows: be respectively mounted two openable metal vacuum chambers at the two ends of vacuum tube, one of them is charging inlet plenum, and another is discharging exhaust chamber.Air inlet charging chamber is for passing into the carbon-source gas and hydrogen and inert carrier gas growing Graphene, and built-in one unreels roller for filling extension web-like Copper Foil simultaneously.Discharging cavity of bleeding connects vacuum pump set evacuation, holds vacuum rotating driven by motor rolling roller for rewinding simultaneously.Radio-frequency (RF) plasma generator is installed additional between charging air inlet cavity and body of heater, the plasma glow of uniformly equivalence can be produced in pipe, strengthen the decomposition of carbon source and the growth rate of Graphene, thus effectively reducing the growth temperature of Graphene, also reducing Copper Foil and being at high temperature easily stretched the risk that even ruptures of deformation.Bleed at body of heater and discharging and liquid nitrogen cold trap is installed between cavity, it is possible to greatly improve the cooling effectiveness of Copper Foil.Production efficiency can be improved.
Beneficial effects of the present invention is, Graphene is carried out volume to volume prepares the equipment of large area, high-quality graphene continuously by being provided with web-like Copper Foil in vacuum chamber.Adopt this equipment to prepare Graphene, relative to existing method, there is advantage rapidly, continuously, it is possible to carry out the scale growth of large area, high-quality graphene.
Accompanying drawing illustrates:
Below by way of the drawings and specific embodiments, the invention will be further described.
Fig. 1 is assembly of the invention structural representation.
Wherein, 1, body；2, workbench；3, vacuum chamber a；4, vacuum chamber b；5, air inlet；6, gas outlet；7, cylinder is unreeled；8, electric rotating machine；9, vacuum tube；10, RF plasma reactor；11, heating furnace；12, liquid nitrogen cold trap；13, air supply system；14, radio-frequency power supply；15, switch board；16, touch screen；17, vacuum subassembly.
Detailed description of the invention:
Referring to accompanying drawing, a kind of quickly cooling plasma enhanced CVD volume to volume continuous graphite alkene growth apparatus, it includes body, described body is provided with workbench, workbench is respectively arranged at two ends with vacuum chamber a and vacuum chamber b, described vacuum chamber a and vacuum chamber b is communicated with vacuum pump set, described vacuum chamber a is provided with air inlet, and the vacuum chamber b of the other end is provided with gas outlet, it is equipped with in described vacuum chamber a and vacuum chamber b and unreels cylinder, unreel cylinder simultaneously and be provided with electric rotating machine, it is connected to vacuum tube between described vacuum chamber a and vacuum chamber b, described vacuum chamber a side is sequentially provided with RF plasma reactor, heating furnace, liquid nitrogen cold trap.
Preferably, described RF plasma reactor is PE coil, and described PE coil is wrapped on vacuum tube.
Preferably, described body lower end is provided with air supply system, radio-frequency power supply, switch board.
Preferably, described workbench is provided with touch screen.
Preferably, described vacuum chamber a and vacuum chamber b is provided with visual window.
Web-like nickel foil is loaded on the blowing roller in charging inlet chamber body, and is connected with the rolling roller in discharging discharge chamber body through boiler tube.Close charging air inlet cavity hatch door, open vacuum pump set, whole equipment internal gas pressure is evacuated to below 0.3Pa.Open heating furnace body, in-furnace temperature is increased to growth temperature 500 DEG C, then pass to the hydrogen of 50SCCM flow, open radio-frequency (RF) plasma generator and regulate radio-frequency power to 300 watts.Start the motor being connected with rewinding roller.Then Copper Foil will pass sequentially through the body of heater thermal treatment zone with 5 centimetres of speed per minute, complete the annealing of Copper Foil.Then start the motor being connected with blowing roller and will complete the Copper Foil reversely quick rollback of annealing.Reduce radio-frequency power to 30 watts, pass into the hydrogen of 15SCCM flow and the methane of 5SCCM flow, and then start rewinding roller motor with 15 centimeters per second speed by the body of heater thermal treatment zone, to complete the growth of Graphene.After entire volume nickel foil completes growth, pass into argon and be inflated to atmospheric pressure by system, then open discharging aerofluxus cavity hatch door and the nickel foil rolling grown is drawn off.
Metallic catalyst paper tinsel is in 10cm width, and growth time can grow about 0.9 square meter Graphene per hour, and the growth time that the tube furnace system of generally same bore is identical is only capable of growing the Graphene about about 0.05 square meter.
Claims (5)
1. a volume to volume continuous graphite alkene film growth apparatus, it includes body, it is characterized in that: described body is provided with workbench, workbench is respectively arranged at two ends with vacuum chamber a and vacuum chamber b, described vacuum chamber a and vacuum chamber b is communicated with vacuum pump set, described vacuum chamber a is provided with air inlet, and the vacuum chamber b of the other end is provided with gas outlet, it is equipped with in described vacuum chamber a and vacuum chamber b and unreels cylinder, unreel cylinder simultaneously and be provided with electric rotating machine, it is connected to vacuum tube between described vacuum chamber a and vacuum chamber b, described vacuum chamber a side is sequentially provided with RF plasma reactor, heating furnace, liquid nitrogen cold trap.
2. a kind of volume to volume continuous graphite alkene film growth apparatus according to claim 1, it is characterised in that: described RF plasma reactor is PE coil, and described PE coil is wrapped on vacuum tube.
3. a kind of volume to volume continuous graphite alkene film growth apparatus according to claim 1, it is characterised in that: described body lower end is provided with air supply system, radio-frequency power supply, switch board.
4. a kind of volume to volume continuous graphite alkene film growth apparatus according to claim 1, it is characterised in that: described workbench is provided with touch screen.
5. a kind of volume to volume continuous graphite alkene film growth apparatus according to claim 1, it is characterised in that: described vacuum chamber a and vacuum chamber b is provided with visual window.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610076741.7A CN105752968A (en) | 2016-01-31 | 2016-01-31 | Reel-to-reel continuous graphene film growth equipment |
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| CN201610076741.7A CN105752968A (en) | 2016-01-31 | 2016-01-31 | Reel-to-reel continuous graphene film growth equipment |
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| CN201610076741.7A Pending CN105752968A (en) | 2016-01-31 | 2016-01-31 | Reel-to-reel continuous graphene film growth equipment |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106086822A (en) * | 2016-07-28 | 2016-11-09 | 河北大学 | Be suitable to the volume to volume vacuum coating reaction unit of batch processing |
| CN106477567A (en) * | 2016-10-12 | 2017-03-08 | 安徽贝意克设备技术有限公司 | A kind of continuous growth apparatus of Graphene volume to volume |
| CN106829935A (en) * | 2017-03-27 | 2017-06-13 | 重庆墨希科技有限公司 | The continuous growth apparatus of multi-chamber Graphene of lateral arrangement |
| CN109536929A (en) * | 2019-01-14 | 2019-03-29 | 合肥百思新材料研究院有限公司 | A kind of device and method of the roll-to-roll equipment equivalent ionic strength of declining |
| CN109536930A (en) * | 2018-12-27 | 2019-03-29 | 合肥百思新材料研究院有限公司 | A kind of the multi-source two-dimensional material Preparation equipment and its working method of PE enhancing |
| CN109850876A (en) * | 2019-02-18 | 2019-06-07 | 合肥百思新材料研究院有限公司 | A kind of continuous Automatic Control graphene powder baggage systems |
| CN110079792A (en) * | 2019-05-29 | 2019-08-02 | 无锡盈芯半导体科技有限公司 | Bilateral symmetry formula CVD system |
| CN111826633A (en) * | 2020-06-10 | 2020-10-27 | 合肥百思新材料研究院有限公司 | Continuous carbon fiber composite graphene preparation equipment |
| CN111874893A (en) * | 2020-01-20 | 2020-11-03 | 烯旺新材料科技股份有限公司 | Graphene flexible composite layer and preparation method and application thereof |
| CN115124032A (en) * | 2021-03-25 | 2022-09-30 | 电子科技大学 | Multilayer roll-to-roll manufacturing system and multilayer roll-to-roll manufacturing method |
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| CN105624640A (en) * | 2016-01-31 | 2016-06-01 | 安徽贝意克设备技术有限公司 | Roll-to-roll continuous grapheme film growth device and technique |
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| US20110042687A1 (en) * | 2009-08-24 | 2011-02-24 | International Business Machines Corporation | Graphene growth on a carbon-containing semiconductor layer |
| CN102976317A (en) * | 2012-12-21 | 2013-03-20 | 重庆绿色智能技术研究院 | Large-scale graphene preparation process |
| JP2014193804A (en) * | 2013-03-11 | 2014-10-09 | Samsung Electronics Co Ltd | Method for preparing graphene |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106086822B (en) * | 2016-07-28 | 2018-06-08 | 河北大学 | Suitable for the roll-to-roll vacuum coating reaction unit of batch processing |
| CN106086822A (en) * | 2016-07-28 | 2016-11-09 | 河北大学 | Be suitable to the volume to volume vacuum coating reaction unit of batch processing |
| CN106477567A (en) * | 2016-10-12 | 2017-03-08 | 安徽贝意克设备技术有限公司 | A kind of continuous growth apparatus of Graphene volume to volume |
| CN106829935B (en) * | 2017-03-27 | 2023-03-24 | 重庆墨希科技有限公司 | Multi-cavity graphene continuous growth equipment arranged transversely |
| CN106829935A (en) * | 2017-03-27 | 2017-06-13 | 重庆墨希科技有限公司 | The continuous growth apparatus of multi-chamber Graphene of lateral arrangement |
| CN109536930A (en) * | 2018-12-27 | 2019-03-29 | 合肥百思新材料研究院有限公司 | A kind of the multi-source two-dimensional material Preparation equipment and its working method of PE enhancing |
| CN109536930B (en) * | 2018-12-27 | 2023-07-18 | 安徽贝意克设备技术有限公司 | Plasma enhanced multi-source two-dimensional material preparation equipment and working method thereof |
| CN109536929A (en) * | 2019-01-14 | 2019-03-29 | 合肥百思新材料研究院有限公司 | A kind of device and method of the roll-to-roll equipment equivalent ionic strength of declining |
| CN109850876A (en) * | 2019-02-18 | 2019-06-07 | 合肥百思新材料研究院有限公司 | A kind of continuous Automatic Control graphene powder baggage systems |
| CN110079792A (en) * | 2019-05-29 | 2019-08-02 | 无锡盈芯半导体科技有限公司 | Bilateral symmetry formula CVD system |
| CN111874893A (en) * | 2020-01-20 | 2020-11-03 | 烯旺新材料科技股份有限公司 | Graphene flexible composite layer and preparation method and application thereof |
| CN111826633A (en) * | 2020-06-10 | 2020-10-27 | 合肥百思新材料研究院有限公司 | Continuous carbon fiber composite graphene preparation equipment |
| CN115124032A (en) * | 2021-03-25 | 2022-09-30 | 电子科技大学 | Multilayer roll-to-roll manufacturing system and multilayer roll-to-roll manufacturing method |
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Application publication date: 20160713 |