CN105700108B - Piezoelectric microactuators device for optical mirror plane vibration control - Google Patents
Piezoelectric microactuators device for optical mirror plane vibration control Download PDFInfo
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- CN105700108B CN105700108B CN201610227613.8A CN201610227613A CN105700108B CN 105700108 B CN105700108 B CN 105700108B CN 201610227613 A CN201610227613 A CN 201610227613A CN 105700108 B CN105700108 B CN 105700108B
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- optical mirror
- mirror plane
- piezoelectric
- sleeve
- vibration control
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
The present invention relates to Active Vibration Control technical field, a kind of piezoelectric microactuators device for optical mirror plane vibration control is provided, points to that active control power consumption is high, baroque technical problem for solving to commonly use existing light beam when actuator carries out optical system control in the prior art.The piezoelectric microactuators device includes protecgulum, for controlling optical mirror plane in the piezoelectric pile of its pitching yaw direction present position and sleeve for accommodating piezoelectric pile.One end of protecgulum is connected on optical mirror plane, and the other end is connected and is contained in sleeve with one end of piezoelectric pile；The other end pretension of piezoelectric pile is contained in sleeve.A kind of piezoelectric microactuators device for optical mirror plane vibration control provided by the invention, the microdrive is easy to use, is easy to adjust, and can directly manipulate optical element and realize that light beam points to active control.
Description
Technical field
The present invention relates to Active Vibration Control technical field, is specifically related to a kind of pressure for optical mirror plane vibration control
Electroceramics microdrive.
Background technology
With the continuous progress of optical technology, the application field of optical system is constantly expanded, the precision of optical system
It is required that also improving constantly.But the application environment of optical system but also become increasingly complex, ambient vibration etc. disturb to optical system
The imaging contexts of system influence increasing.The problem of light beam sensing is unstable caused by ambient vibration is prevalent in all kinds of optics
In system, and significant impact is caused to its performance.
However, existing be preferably imaged under vibration by actuator to realize to optical system more, actuator
Effect is to apply controling power to control object according to the control law of determination.In recent years, in traditional fluid start, gas actuation
On the basis of device and electrical equipment actuator, a variety of intelligent actuator are researched and developed, such as piezoelectric ceramic actuator, piezoelectric membrane
Actuator, electrostriction actuator etc..But the problem of existing these actuator generally existing power consumptions are high, complicated.
The content of the invention
It is an object of the invention to provide a kind of piezoelectric microactuators device for optical mirror plane vibration control, the invention
Solve existing light beam when commonly using actuator progress optical system control in the prior art and point to active control power consumption height, structure
Complicated difficult technical problem.
The present invention provide a kind of piezoelectric microactuators device for optical mirror plane vibration control, including protecgulum, for controlling
Optical mirror plane processed in the piezoelectric pile of its pitching yaw direction present position and sleeve for accommodating piezoelectric pile, support by one end of protecgulum
It is connected on optical mirror plane, the other end is connected and is contained in sleeve with one end of piezoelectric pile；The other end of piezoelectric pile is pre- tightly
It is contained in sleeve.
Further, one end of protecgulum is provided with blunt end, and blunt end is connected on optical mirror plane.
Further, the other end of protecgulum is provided with the groove that falls for being used to insert piezoelectric pile, and groove is arranged at the another of protecgulum
In one end, chamfering is provided with groove.
Further, in addition to linear bearing and inner sleeve, protecgulum and piezoelectric pile are lubricated by linear bearing and connected；Inner sleeve set
On linear bearing, and accommodate and be fixedly connected in sleeve.
Further, in addition to it is used for the bonnet for propping up piezoelectric pile, one section of bonnet is inserted in piezoelectric pile, and the other end is slided
It is dynamic to be arranged in sleeve.
Further, bonnet includes upper cylinder and the lower cylinder being connected, upper cylinder insertion piezoelectric pile
In, lower cylinder is slideably positioned in sleeve.
Further, in addition to it is used for the jackscrew for fixing piezoelectric pile position, one end of jackscrew is connected by screw thread with sleeve
Connect, the other end is stretched out outside sleeve.
Further, segmentation is sequentially provided with the first fixing groove in sleeve, the second sliding groove and the 3rd supports groove, and inner sleeve accommodates
It is connected in the first fixing groove；Bonnet is slidingly accommodated in the second sliding groove；Jackscrew is threadedly connected to the 3rd and supported in groove.
Another aspect of the present invention additionally provides a kind of optical mirror plane micromatic setting, including optical mirror plane device, at least two
Piezoelectric microactuators device, microdrive support and the microscope base body described above for being used for optical mirror plane vibration control, for optics
One end of the piezoelectric microactuators device of minute surface vibration control is installed in microdrive support, and the other end is connected to optical mirror plane
Piezoelectric microactuators device on the optical mirror plane of device for optical mirror plane vibration control is arranged in pairs, and is connected to optics respectively
On the two opposite sides of minute surface bottom.
Further, optical mirror plane device includes microscope base, the microscope base plate being installed on microscope base, the mirror being installed on microscope base plate
Piece and the microscope base body of face microscope base interval installation, the outer lower portion interval of microscope base body is provided with micro- drive for installing microdrive
Dynamic device support.
The technique effect of the present invention：
Provided by the invention a kind of piezoelectric microactuators device for optical mirror plane vibration control, the microdrive make
With convenience, it is easy to adjust, can directly manipulates optical element and realize that light beam points to active control.
Optical mirror plane micromatic setting size provided by the invention is smaller, coordinates existing control method to can be achieved to eyeglass
Accurate control, size are less than existing actuator, can preferably adapt to needs on star.
It is specific to refer to according to each of the piezoelectric microactuators device proposition for optical mirror plane vibration control of the invention
The described below of embodiment is planted, will make it that the above and other aspect of the present invention is apparent.
Brief description of the drawings
Fig. 1 be provided by the present invention for optical mirror plane vibration control piezoelectric microactuators device preferred embodiment it is quick-fried
Fried decomposing schematic representation；
Fig. 2 is the group provided by the present invention for the piezoelectric microactuators device preferred embodiment of optical mirror plane vibration control
Fill schematic diagram；
Fig. 3 is the main view partial schematic sectional view of the protecgulum of the preferred embodiment of the present invention；
Fig. 4 is the sleeve partial schematic sectional view of the preferred embodiment of the present invention；
Fig. 5 is the piezoelectric microactuators device preferred embodiment installation provided by the present invention for optical mirror plane vibration control
View；
Fig. 6 is used for provided by the present invention for the piezoelectric microactuators device preferred embodiment of optical mirror plane vibration control
Adjust Z axis or/and X axis angle installment state close-up schematic view；
Fig. 7 is preferred embodiment of the present invention control effect curve map schematic diagram in the case of 10Hz excitations；
Fig. 8 is total displacement close-up schematic view in Fig. 7
Fig. 9 is preferred embodiment of the present invention control effect curve synoptic diagram in the case of 50Hz excitations；
Figure 10 is total displacement close-up schematic view in Fig. 9；
Figure 11 is preferred embodiment of the present invention control effect curve synoptic diagram in the case of 150Hz excitations；
Figure 12 is total displacement close-up schematic view in Figure 11；
Figure 13 is preferred embodiment of the present invention control effect curve synoptic diagram in the case of arbitrary excitation；
Figure 14 is total displacement close-up schematic view in Figure 13；
Figure 15 is that the vibration control experiment light path of optical adjusting frame used in checking test in the preferred embodiment of the present invention is shown
It is intended to.
Marginal data：
100th, optical mirror plane device；110th, microscope base；120th, microscope base plate；130th, eyeglass；140th, microscope base body；150th, microdrive
Support；210th, protecgulum；211st, blunt end；212nd, fall groove；220th, linear bearing；230th, inner sleeve；240th, piezoelectric pile；250th, bonnet；
260th, sleeve；261st, the first fixing groove；262nd, the second sliding groove；263rd, the 3rd groove is supported；270th, jackscrew.
Embodiment
The accompanying drawing for forming the part of the application is used for providing a further understanding of the present invention, schematic reality of the invention
Apply example and its illustrate to be used to explain the present invention, do not form inappropriate limitation of the present invention.
Referring to Fig. 1~2, the invention provides a kind of piezoelectric microactuators device for optical mirror plane vibration control, bag
Include protecgulum 210, for controlling optical mirror plane in the piezoelectric pile 240 of its pitching yaw direction present position and for accommodating piezoelectric pile
240 sleeve 260, one end of protecgulum 210 are connected on optical mirror plane, and the other end is connected and held with one end of piezoelectric pile 240
It is contained in sleeve 260；The other end pretension of piezoelectric pile 240 is contained in sleeve 260.The microdrive utilizes piezoelectric pile 240
It is possessed to be driven and flexible ability by voltage so that optical mirror plane can rotate on its pitching yaw direction, and then
Realize the adjustment to optical mirror plane.Existing actuator is instead of, size is smaller, using existing control method i.e. achievable pair
The control of optical mirror plane.Control method used herein can be, but not limited to such as fuzzy control method, PID control method etc..Energy
Realize the part of these control algolithms, may be disposed at on part electrical connector part to be controlled.Contain each control algolithm
Part can be replaced mutually.
Further, including protecgulum 210, linear bearing 220, inner sleeve 230, the piezoelectricity for being controlled to optical mirror plane
Heap 240, the bonnet 250 for propping up piezoelectric pile 240, the sleeve 260 for accommodating piezoelectric pile 240 and for fixing piezoelectric pile
The jackscrew 270 of 240 positions.Protecgulum 210 is connected by linear bearing 220 with piezoelectric pile 240.Inner sleeve 230 is sheathed on linear axis
Hold outside 220, and be fixedly connected with sleeve 260.So that the front end of protecgulum 210 is stretched out outside sleeve 260, it is connected with protecgulum 210
Piezoelectric pile 240, inner sleeve 230 and the linear bearing 220 connect is contained in sleeve 260.Bonnet 250 is contained in sleeve 260, its
One end is connected to the bottom surface of piezoelectric pile 240.One end of jackscrew 270 is stretched into sleeve 260, and is connected to the another side of bonnet 250
On, the other end of jackscrew 270 is stretched out outside sleeve 260.Jackscrew 270 can be used for pressure of the regulation entirely for optical mirror plane vibration control
The pretension degree of electroceramics microdrive.
Preferably, referring to Fig. 3, protecgulum 210 includes blunt end 211 and chamfered end, and hemispherical head, energy are set in blunt end 211
Optical mirror plane is effectively avoided to apply shearing force to the top of protecgulum 210.Set groove 212 in chamfered end.Pressure is can be inserted into groove 212
Pile 240.It is furthermore preferred that blunt end 211 is the hemispherical head that radius is 4mm.Using the blunt end 211 of the size, can effectively drop
Low protecgulum 210 produces excessive frictional force when being contacted with minute surface, and then minute surface is caused to wear.It can also realize to accurate simultaneously
Control, is avoided in control process, the generation of overexercise.
Preferably, it is somebody's turn to do the groove 212 that groove 212 is deep 8mm diameters 5mm, chamfering, raising and piezoelectric pile is provided with port
240 degree of being completely embedded.
It is furthermore preferred that protecgulum 210 is cylindrical structure, long 37mm, diameter 8mm, it is process using stainless steel material.This
Shi Gangdu can meet to require.
Linear bearing 220 used can be common linear bearing 220, preferably external diameter 15mm, internal diameter 8mm, long 17mm, adopt
With the linear bearing 220 of the size, when can effectively realize that piezoelectric pile 240 is stretched, it is allowed to push away in the case of lubrication with protecgulum 210
The dynamic guiding movement of protecgulum 210.
Inner sleeve 230 is a tubular structure, it is furthermore preferred that be long 17mm, external diameter 22mm internal diameters 15mm tube structure.For
Linear bearing 220 is fixed on the inwall of sleeve 260.So as to contribute to the realization of the lubrication guide effect of linear bearing 220.More
There is choosing, be process using stainless steel material.
Piezoelectric pile 240 can be commercially available prod.Such as can be general love nanometer displacement technology (Shanghai) Co., Ltd. (PI)
Product P-843.60.Piezoelectric pile 240 can driving voltage effect under, with reference to algorithms most in use control realize predetermined length elongation or
Shorten, so as to realize the accurate control to optical mirror plane to be adjusted.
Preferably, bonnet 250 includes 2 stacked coaxial cylindrical bodies.The two cylinders increase under upper for diameter
Greatly.Using the structure, the pressuring action to piezoelectric pile 240 can be effectively realized.It is furthermore preferred that the lower cylinder of bonnet 250 is grown
15mm, diameter 16mm.Upper cylinder long 6mm, diameter 8mm.It is deep that lower cylinder is provided with long 1.5mm at upper cylinder
1mm groove 212, upper cylinder is screwed with piezoelectric pile 240., can be firm needed for holding using the bonnet 250 of the mechanism
In the case of degree so that microdrive overall dimensions are minimum.
Preferably, the first fixing groove 261, the second sliding groove 262 and the 3rd are sequentially provided with referring to Fig. 4, the interior segmentation of sleeve 260
Groove 263 is supported, the first fixing groove 261 is used to install inner sleeve 230, in order to realize the fixation to inner sleeve 230, the first fixing groove 261
Diameter be close to inner sleeve 230.Second sliding groove 262 is used to accommodate piezoelectric pile 240 and bonnet 250, with stretching for piezoelectric pile 240
Contracting, bonnet 250 can slide in the second sliding groove 262.3rd, which supports groove 263, is used to accommodate jackscrew 270.Preferably, bottom is justified
Cylinder can slide in the second holding tank in sleeve 260.Due to the diameter of the second holding tank, from the 3rd to support groove 263 different,
The motion of bonnet 250 can thus be limited.Preferably, in order to reduce overall dimensions, electric wire installation is opened up on the inwall of sleeve 260
Groove, to set to the live wire of piezoelectric pile 240.Drive voltage signal line isoelectric line can be specifically set.
Preferably, one end of jackscrew 270 is stretched into the 3rd and supported in groove 263, is threadedly coupled therewith, after jackscrew 270 can peak at
On lid 250.The other end of jackscrew 270 is stretched out outside sleeve 260, adjustment of the realization easy to operation to jackscrew 270.For adjusting piezoelectricity
The pretension degree of heap 240, realize quick accurate correction.
Referring to Fig. 5~6, another aspect of the present invention additionally provides a kind of optical mirror plane micromatic setting, optical mirror plane device
100th, at least two is used for piezoelectric microactuators device, microdrive support 150 and the mirror of optical mirror plane vibration control described above
Pedestal 140, one end for the piezoelectric microactuators device of optical mirror plane vibration control are installed in microdrive support 150,
The other end is connected on the optical mirror plane of optical mirror plane device 100,2 micro- drives of piezoelectric ceramics for being used for optical mirror plane vibration control
Dynamic device is connected on the two opposite sides of optical mirror plane bottom respectively.By being set respectively in the two opposite sides of the bottom of eyeglass 130
At least two foregoing microdrives, you can realize the control and adjustment to the pitching yaw direction present position of eyeglass 130.
Optical mirror plane device 100 can be all kinds of conventional optical mirror plane devices 100.Preferably, optical mirror plane device 100
Including microscope base 110, the microscope base plate 120 being installed on microscope base 110, the eyeglass 130 and face microscope base being installed on microscope base plate 120
The microscope base body 140 of 110 interval installations.The side of microscope base body 140 is provided for piezoelectricity of the installation for optical mirror plane vibration control
The microdrive support 150 of ceramic microdrive.One end peace for the piezoelectric microactuators device of optical mirror plane vibration control
Loaded in microdrive support 150, the other end is peaked on microscope base plate 120 through microscope base body 140.It can be realized to mirror using device
Seat board 120 is in pitch orientation (such as being rotated around X-axis) and the angle adjustment of yaw direction (as rotated about the z axis).
In use, the piezoelectric microactuators device provided by the present invention for optical mirror plane vibration control is installed on microscope base
The rear side of body 140, and its protecgulum 210 is withstood on microscope base plate 120, by inserting the depth coarse adjustment microdrive of degree to microscope base
The degree of support of plate 120, i.e., it is as shown in Figure 6, coarse adjustment microscope base plate 120 pitch orientation (turning about the Z axis) and yaw direction (around
X-axis rotate) angle.Jackscrew 270 is tightened after coarse adjustment with the initial position of fixation microdrive provided by the invention, is led to again afterwards
Cross and turn the rear end of jackscrew 270, realize the pretension degree of fine setting piezoelectric pile 240.All kinds of electric wires set groove to connect needed for piezoelectric pile 240
Onto piezoelectric pile 240, input driving voltage, control piezoelectric pile 240 elongation shorten, realize to the pitch orientation of microscope base plate 120 and partially
The pose adjustment in boat direction.
The piezoelectric microactuators provided by the present invention for optical mirror plane vibration control are proved below by way of control experiment
Utensil has preferable control accuracy.Contrast experiment is to be not used in the case of driver provided by the invention, close in the same terms
Control the control result of gained.
On three frequencies using amplitude identical 10Hz, 50Hz, 150Hz harmonic excitation, to being provided with offer of the present invention
Microdrive optical adjusting frame base platform carry out exciting, the laser beam that generating laser is sent is through exciting minute surface
After reflection, laser facula is formed on the screen of optical sensitive detector, microdrive provided by the invention is by controlling microscope base
The pitching yaw-position of plate 120, offset of the control laser facula on optical sensitive detector screen, realizes that laser beam refers to
To control.
Experiment obtains controlling effect to offset of the hot spot after being excited mirror-reflection on optical sensitive detector
Fruit curve is respectively as shown in Fig. 7~14, and the control effect curve under arbitrary excitation is as shown in Figure 13~14, and Fig. 7 is to Figure 14's
Ordinate is offset of the laser facula on light sensor screen, unit mm.
From Fig. 7~14 as can be seen that the offset of laser facula is substantially no more than 0.05mm after vibration control.The optics is adjusted
The index path of the vibration control experiment of whole frame is as shown in figure 15, wherein optical sensitive detector screen and laser eyepiece pointing direction
Vertically, screen center's distance is excited specular optical center L=10m, thus can be calculated beam deflection angle θ and exists with laser facula
The relation between total drift amount a on optical sensitive detector screen is shown below：
It can be calculated by above formula, piezoelectric microactuators device provided by the invention is to the light beam under lens systems vibration environment
Pointing stability control can reach differential of the arc measurement level and (read ordinate, then reflection light light path is illustrated, finally changed
Angle is counted as, obtains differential of the arc measurement level), control can effectively be realized by demonstrating microdrive provided by the invention.Contrast is control
The front and rear displacement of system, after being controlled using piezoelectric microactuators device provided by the invention, the total displacement amount of controlled device
Die-off to no more than 0.05mm, it was demonstrated that the present invention provides device positive effect.
The present invention is simple in construction, control is flexible, and master is pointed in the vibration control and light beam suitable for various optical elements
Dynamic control.
Those skilled in the art will be clear that the scope of the present invention is not restricted to example discussed above, it is possible to which it is carried out
Some changes and modification, the scope of the present invention limited without departing from appended claims.Although oneself is through in accompanying drawing and explanation
Illustrate and describe the present invention in book in detail, but such explanation and description are only explanations or schematical, and it is nonrestrictive.
The present invention is not limited to the disclosed embodiments.
By to accompanying drawing, the research of specification and claims, when implementing of the invention, those skilled in the art can be with
Understand and realize the deformation of the disclosed embodiments.In detail in the claims, term " comprising " is not excluded for other steps or element,
And indefinite article "one" or " one kind " be not excluded for it is multiple.The some measures quoted in mutually different dependent claims
The fact does not mean that the combination of these measures can not be advantageously used.Any reference marker in claims is not formed pair
The limitation of the scope of the present invention.
Claims (7)
1. a kind of piezoelectric microactuators device for optical mirror plane vibration control, it is characterised in that including protecgulum, for controlling
The optical mirror plane in the piezoelectric pile of its pitching yaw direction present position and sleeve for accommodating piezoelectric pile, the protecgulum
One end is connected on the optical mirror plane, and the other end is connected and is contained in the sleeve with one end of the piezoelectric pile；Institute
The other end for stating piezoelectric pile is tightly contained in the sleeve in advance；
One end of the protecgulum is provided with blunt end, and the blunt end is connected on the optical mirror plane；
Also include linear bearing and inner sleeve, the protecgulum and the piezoelectric pile are lubricated by linear bearing to be connected；The inner sleeve set
On the linear bearing, and accommodate and be fixedly connected in the sleeve；
The other end of the protecgulum, which is provided with, is used for the groove that falls for making the piezoelectric pile insertion, and the groove is arranged at the protecgulum
It is described to be provided with chamfering in groove in the other end.
2. the piezoelectric microactuators device according to claim 1 for optical mirror plane vibration control, it is characterised in that also
Including the bonnet for propping up the piezoelectric pile, one section of the bonnet is inserted in the piezoelectric pile, and the other end, which slides, to be set
In in the sleeve.
3. the piezoelectric microactuators device according to claim 2 for optical mirror plane vibration control, it is characterised in that institute
Upper cylinder and lower cylinder that bonnet includes being connected are stated, the upper cylinder is inserted in the piezoelectric pile, described
Lower cylinder is slideably positioned in the sleeve.
4. the piezoelectric microactuators device according to claim 3 for optical mirror plane vibration control, it is characterised in that also
Including the jackscrew for fixing the piezoelectric pile position, one end of the jackscrew is connected by screw thread with the sleeve, another
End is stretched out outside the sleeve.
5. the piezoelectric microactuators device according to claim 4 for optical mirror plane vibration control, it is characterised in that institute
State segmentation in sleeve and sequentially support groove provided with the first fixing groove, the second sliding groove and the 3rd, the inner sleeve receiving is connected in described
In first fixing groove；
The bonnet is slidingly accommodated in second sliding groove；
The jackscrew is threadedly connected to the described 3rd and supported in groove.
6. a kind of optical mirror plane micromatic setting, it is characterised in that including optical mirror plane device, at least two such as Claims 1 to 5
Any one of the piezoelectric microactuators device, microdrive support and microscope base body for optical mirror plane vibration control, institute
The one end for stating the piezoelectric microactuators device for optical mirror plane vibration control is installed in the microdrive support, the other end
It is connected on the optical mirror plane of the optical mirror plane device, the piezoelectric microactuators device for optical mirror plane vibration control
It is arranged in pairs, and is connected to respectively on the two opposite sides of the optical mirror plane bottom.
7. optical mirror plane micromatic setting according to claim 6, it is characterised in that the optical mirror plane device includes mirror
Seat, the microscope base plate being installed on the microscope base, the eyeglass being installed on microscope base plate and the microscope base of microscope base interval installation described in face
Body, the outer lower portion interval of the microscope base body are provided with the microdrive support for installing the microdrive.
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| CN201610227613.8A CN105700108B (en) | 2016-04-13 | 2016-04-13 | Piezoelectric microactuators device for optical mirror plane vibration control |
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| CN201610227613.8A CN105700108B (en) | 2016-04-13 | 2016-04-13 | Piezoelectric microactuators device for optical mirror plane vibration control |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106352815B (en) * | 2016-09-18 | 2018-10-19 | 国防科学技术大学 | Laser beam measures and is directed toward control experimental system |
| CN107692321A (en) * | 2017-10-24 | 2018-02-16 | 谢宏林 | Electronic cigarette |
| CN110703407B (en) * | 2019-10-17 | 2020-10-30 | 中国科学院长春光学精密机械与物理研究所 | High-precision spliced reflector supporting and driving structure |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101504487A (en) * | 2009-03-20 | 2009-08-12 | 中国科学院光电技术研究所 | Large-caliber detachable piezoelectric deformable reflector |
| CN103091834A (en) * | 2013-02-20 | 2013-05-08 | 清华大学 | Deformation mirror |
| CN103257447A (en) * | 2013-06-05 | 2013-08-21 | 清华大学 | Deformable mirror |
| CN103728722A (en) * | 2012-12-28 | 2014-04-16 | 清华大学 | Deformable mirror and actuator assembly thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007003990A (en) * | 2005-06-27 | 2007-01-11 | Konica Minolta Opto Inc | Lens barrel and imaging apparatus |
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2016
- 2016-04-13 CN CN201610227613.8A patent/CN105700108B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101504487A (en) * | 2009-03-20 | 2009-08-12 | 中国科学院光电技术研究所 | Large-caliber detachable piezoelectric deformable reflector |
| CN103728722A (en) * | 2012-12-28 | 2014-04-16 | 清华大学 | Deformable mirror and actuator assembly thereof |
| CN103091834A (en) * | 2013-02-20 | 2013-05-08 | 清华大学 | Deformation mirror |
| CN103257447A (en) * | 2013-06-05 | 2013-08-21 | 清华大学 | Deformable mirror |
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