CN101504487A - Large-diameter detachable piezoelectric deforming reflection mirror - Google Patents
Large-diameter detachable piezoelectric deforming reflection mirror Download PDFInfo
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- CN101504487A CN101504487A CNA2009100805758A CN200910080575A CN101504487A CN 101504487 A CN101504487 A CN 101504487A CN A2009100805758 A CNA2009100805758 A CN A2009100805758A CN 200910080575 A CN200910080575 A CN 200910080575A CN 101504487 A CN101504487 A CN 101504487A
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Abstract
The invention relates to a large-caliber demountable piezoelectric deformable mirror, which comprises a mirror surface, a pedestal and a piezoelectric actuator, and is characterized in that an elastic sheet is clamped between the mirror surface and the piezoelectric actuator, and the piezoelectric actuator is tightly supported against the elastic sheet without mechanical and gluing connections. The mirror also comprises a precise screw thread adjusting structure for adjusting the pretightening force or the distorting lens surface shape between the elastic sheet and the piezoelectric actuator. The piezoelectric actuator is not connected with the mirror surface directly, the piezoelectric actuator is easy to replace, and the deformable mirror is convenient to maintain; the optical processing of the mirror surface and membrane plating can be performed when the actuator is processed to shorten the manufacturing cycle of the deformable mirror; and the piezoelectric actuator is applicable to the deformable mirrors with large calibers, large die opening and high requirement on maintainability.
Description
Technical field
The invention belongs to the wave-front corrector technical field of ADAPTIVE OPTICS SYSTEMS, relate to a kind of large-diameter detachable piezoelectric deforming reflection mirror, be derived from separate type piezoelectric pile deformation reflection mirror, be applicable to heavy caliber, big die opening, maintainable demanding deformation reflection mirror.
Background technology
Deformation reflection mirror is one of core devices of ADAPTIVE OPTICS SYSTEMS, and main effect is required shape of generation system controllably in real time, with correcting distorted wavefront.Accompanying drawing 1 is classical separate type piezoelectric pile deformation reflection mirror structural representation, its minute surface 1, driver 2, base 3 gluing being integral, and compact conformation, rigidity height, good stability are applicable to the deformation reflection mirror that the actuator unit number density is big.Because its integrative-structure, caused this kind deformation reflection mirror to process at optics, during optical coating, technical difficulty is big, manufacturing cycle is long, especially because of being subjected to Curie point, limits piezoelectric actuator, optical coating can only carry out at low temperatures, strict to coating technique, simultaneously, deformation reflection mirror for the batch purposes, as laser inertial confinement nuclear fusion system, use deformation reflection mirror to reach more than 100 at most, require the deformation reflection mirror structure to be suitable for High-efficient Production, maintain easily, when the deformation reflection mirror of said structure is used for this type systematic, its manufacturing cycle, coating technique, maintainability all will be tested, and it is short to seek a kind of manufacturing cycle, the deformation reflection mirror structure that maintainability performance is high seems extremely important.
The patent No. be US5917644 U.S. Patent Publication a kind of monoblock type high energy pulse distorting lens, adopt metal transfer spare between its minute surface and the driver, minute surface is with transition piece mechanical connection, driver and transition piece is gluing is connected, and its fundamental purpose solves the influence of high-energy radiation to adhesive layer.The heavy caliber deformation reflection mirror that is used for national portfire of U.S.'s livermore laboratory development mainly solves minute surface and driver interface problem, and its driver can be changed, but its complex structure, performance difficulty.Publication number is that the integrated multielement piezoelectric deforming reflector by Photoelectric Technology Inst., Chinese Academy of Sciences invention of CN1258854A is characterized in that minute surface, driver, base form a high rigidity integral body, its stable performance, compact conformation, but technical difficulty is big, minute surface plated film limiting factor is many, the manufacturing cycle is long, and is maintainable poor.In laser inertial confinement nuclear fusion system, used deformation reflection mirror is had specific (special) requirements: the one, realize driver, the parallel processing of minute surface for the heavy caliber deformation reflection mirror of mass, shorten the manufacturing cycle; The 2nd, for the heavy caliber deformation reflection mirror that involves great expense, accomplish that driver is changed easily, maintainability is good; The 3rd, realize that heavy caliber deformation reflection mirror minute surface original face shape is adjustable; The 4th, for the separate design of big die opening deformation reflection mirror realization commissure value and deflection, to improve deformation reflection mirror wavefront fitting ability.These requirements, be existing piezoelectric deforming reflection mirror can't satisfy.
Summary of the invention
The technical problem to be solved in the present invention is: overcome the deficiencies in the prior art; A kind of large-diameter detachable piezoelectric deforming reflection mirror is provided, and it can satisfy: driver is changed convenient, and is maintainable good; Original face shape is adjustable; Commissure value index and the separable design of deflection index; The independent plated film of minute surface can not be subjected to the restriction of piezoelectric ceramics Curie point; Driver can be processed with minute surface is parallel, shortens requirements such as manufacturing cycle.
The technical solution adopted for the present invention to solve the technical problems is: a kind of large-diameter detachable piezoelectric deforming reflection mirror includes minute surface, base, piezoelectric actuator; It is characterized in that: accompany a flexure strip between minute surface and piezoelectric actuator, piezoelectric actuator holds out against with flexure strip but does not have machinery or gluing the connection, and piezoelectric actuator is dismountable.
Large-diameter detachable piezoelectric deforming reflection mirror of the present invention also includes an accurate thread adjustment structure, is used to regulate pretightning force size or distoring mirror shape between flexure strip and the piezoelectric actuator.
The end binding metal bulb that described piezoelectric actuator and flexure strip hold out against.
Can also can gluingly be connected by mechanical connection between described minute surface and the flexure strip.
Described flexure strip has adjustable lateral stiffness and axial rigidity.
Described flexure strip lateral stiffness is by regulating the thin neck diameter phi of flexible hinge, realizing the needed commissure value of deformation reflection mirror.
The advantage that the present invention is compared with prior art had:
1, piezoelectric actuator of the present invention directly is not connected with minute surface, and piezoelectric actuator is changed easily, deformation reflection mirror is easy to maintenance;
2, minute surface of the present invention, piezoelectric actuator directly do not connect, and the processing of minute surface optics, plated film can walk abreast with the processing of driver, can shorten the manufacturing cycle of deformation reflection mirror;
3, the axial and lateral stiffness independent regulation of flexure strip of the present invention can realize deformation reflection mirror deflection and commissure value separate design;
4, minute surface plated film of the present invention is to finish before assembling with piezoelectric actuator, not limited by the piezoelectric actuator Curie point, can at high temperature realize being coated with of some special film systems.
Description of drawings
Fig. 1 is the connection diagram of classical separate type piezoelectric pile deformation reflection mirror;
Fig. 2 is a connection diagram of the present invention;
Fig. 3 is the structural representation of flexure strip;
Among the figure: the 1st, specular layer, the 2nd, flexure strip, the 3rd, base, the 4th, piezoelectric actuator, the 5th, accurate thread governor motion.
Embodiment
Introduce the present invention in detail below in conjunction with the drawings and the specific embodiments.
A kind of large-diameter detachable piezoelectric deforming reflection mirror structural drawing of present embodiment as shown in Figure 2; Between minute surface 1 and piezoelectric actuator 4, accompany the flexure strip 2 of a band pretightning force, can also can gluingly be connected by mechanical connection between minute surface 1 and the flexure strip 2; Flexure strip 2 is connected with base 3 usefulness screws; Piezoelectric actuator 4 one end binding metal bulbs are dome shape, and the other end is the plane, plane one end and accurate thread governor motion 5 bondings, and sphere one end contacts but does not have machinery with flexure strip 2 and is connected or gluing connection; Accurate thread adjustment structure 5, be used to regulate the pretightning force size between flexure strip 2 and the piezoelectric actuator 4, and be connected with base 3 usefulness screws, having constituted one like this is support with the base, is that driving mechanism, minute surface are the detachable piezoelectric deforming reflection mirror of reflecting surface with the piezoelectric actuator.
The metal bulb of piezoelectric actuator 4 bondings is processed separately, and processing back and piezoelectric actuator bonding use the metal bulb can eliminate the shearing force that mechanism produces piezoelectric actuator 4; Accurate thread governor motion 5 is made up of a double thread width of cloth, and wherein screw rod and piezoelectric actuator bond, and nut is connected on the base 3 with screw machinery; Base 3 is support members of whole deformation reflection mirror, and material can be selected metal or silit for use, but needs to guarantee rigidity, to keep deformation reflection mirror face shape stable.
The structure of described flexure strip 2 as shown in Figure 3; Head and minute surface bonding, the bottom is connected with screw with 3 of bases, has lateral stiffness and axial rigidity; Its axial rigidity is regulated by thickness ξ, needs to guarantee in principle that according to the minute surface rigidity Design flexure strip axial rigidity must be greater than minute surface rigidity, less than the driver axial rigidity; Lateral stiffness is realized the design of the needed commissure value of deformation reflection mirror by regulating the thin neck diameter phi of flexible hinge.It just is being out of shape deformation reflection mirror structure of the present invention by driver and is promoting, the elastic force that overcomes flexure strip impels surface deformation, and negative distortion relies on the reset force of flexure strip and realizes, therefore, assembling back flexure strip has certain pretightning force, and it neglects driver rigidity greatly and minute surface rigidity is determined.
Here select for use minute surface to be of a size of 17 element deformable mirror of 284mm x 284mm, the deformation reflection mirror die opening is 76mm, specular material is a K4 glass, rigidity is 4.5kg/ μ m, the flexure strip axial rigidity is 5.6kg/ μ m, and the thin neck diameter phi of flexible hinge is 3mm, and the maximum deformation quantity after the piezoelectric actuator assembling is ± 8 μ m, the maximum deformation quantity that obtains deformation reflection mirror at last is ± 6 μ m, and the commissure value reaches 15%.
Large-diameter detachable piezoelectric deforming reflection mirror of the present invention as from the foregoing, flexure strip and minute surface carry out unstressed bonding to guarantee minute surface face shape, the tensile strength when guaranteeing work simultaneously; Contact between flexure strip and the piezoelectric actuator but be not connected, the negative distortion of the minute surface flexure strip after by pretension realizes, because piezoelectric actuator directly is not connected with minute surface, so driver can change, and deformation reflection mirror is safeguarded easily; And the processing that can walk abreast of piezoelectric actuator and minute surface, can shorten the deformation reflection mirror manufacturing cycle, the minute surface plated film independently carries out, and has reduced deformation reflection mirror plated film difficulty; Described accurate thread governor motion and piezoelectric actuator are bonded as one, and by threaded adjusting, can realize that the wavelength level precision of heavy caliber deformation reflection mirror original face shape is regulated.Described piezoelectric actuator is protected by the flexure strip pretightning force, and the processing problems that can not consider its lateral stiffness and brought can realize aximal deformation value (more than ± 20 microns), thereby improves the deflection of deformation reflection mirror; The lateral stiffness of flexure strip is adjustable, and its lateral stiffness is regulated the minimum place of flexible hinge diameter according to deformation reflection mirror commissure value needs, so not only can guarantee that big die opening deformation reflection mirror had the moderate finite deformation amount but also can guarantee satisfactory commissure value.
Claims (6)
1, a kind of large-diameter detachable piezoelectric deforming reflection mirror includes minute surface (1), base (3), piezoelectric actuator (4); It is characterized in that: accompany a flexure strip (2) between minute surface (1) and piezoelectric actuator (4), piezoelectric actuator (4) holds out against with flexure strip (2) but does not have machinery or gluing the connection, and piezoelectric actuator (4) is dismountable.
2, a kind of large-diameter detachable piezoelectric deforming reflection mirror according to claim 1, it is characterized in that: also include an accurate thread adjustment structure (5), be used to regulate pretightning force size or distoring mirror shape between flexure strip (2) and the piezoelectric actuator (4).
3, a kind of large-diameter detachable piezoelectric deforming reflection mirror according to claim 1 is characterized in that: the end binding metal bulb that described piezoelectric actuator (4) and flexure strip (2) hold out against.
4, a kind of large-diameter detachable piezoelectric deforming reflection mirror according to claim 1 is characterized in that: can also can gluingly be connected by mechanical connection between described minute surface (1) and the flexure strip (2).
5, a kind of large-diameter detachable piezoelectric deforming reflection mirror according to claim 1 is characterized in that: described flexure strip (2) has adjustable lateral stiffness and axial rigidity.
6, flexure strip according to claim 5 (2) is characterized in that: flexure strip (2) lateral stiffness is by the thin neck diameter phi of adjusting flexible hinge, thereby realizes the adjusting of deformation reflection mirror commissure value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CNA2009100805758A CN101504487A (en) | 2009-03-20 | 2009-03-20 | Large-diameter detachable piezoelectric deforming reflection mirror |
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| Application Number | Priority Date | Filing Date | Title |
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| CNA2009100805758A CN101504487A (en) | 2009-03-20 | 2009-03-20 | Large-diameter detachable piezoelectric deforming reflection mirror |
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| CN101504487A true CN101504487A (en) | 2009-08-12 |
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Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101923214A (en) * | 2010-08-04 | 2010-12-22 | 中国科学院光电技术研究所 | Deformed secondary mirror based on piezoelectric driver |
| CN102684055A (en) * | 2012-05-15 | 2012-09-19 | 清华大学 | Device for adjusting curvature radius of reflector |
| CN103246060A (en) * | 2012-12-28 | 2013-08-14 | 清华大学 | Deformation mirror |
| CN103246058A (en) * | 2012-12-28 | 2013-08-14 | 清华大学 | Deformation mirror |
| CN103257447A (en) * | 2013-06-05 | 2013-08-21 | 清华大学 | Deformable mirror |
| CN103268013A (en) * | 2013-06-06 | 2013-08-28 | 清华大学 | Deformable mirror |
| CN103268012A (en) * | 2012-12-28 | 2013-08-28 | 清华大学 | Driving device for deformable mirror and deformable mirror |
| CN103293664A (en) * | 2012-12-28 | 2013-09-11 | 清华大学 | Deformable mirror and edge aberration debugging and correcting device thereof |
| CN103645558A (en) * | 2012-12-28 | 2014-03-19 | 清华大学 | Deformable mirror |
| CN103645556A (en) * | 2012-12-28 | 2014-03-19 | 清华大学 | Deformable mirror |
| CN103676138A (en) * | 2012-12-28 | 2014-03-26 | 清华大学 | Multi-layer combined thin deformable mirror body structure |
| CN103744177A (en) * | 2014-01-09 | 2014-04-23 | 中国科学院光电技术研究所 | Combined wavefront corrector |
| CN104516212A (en) * | 2013-09-30 | 2015-04-15 | 佳能株式会社 | Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article |
| CN104539188A (en) * | 2015-01-04 | 2015-04-22 | 中国科学院光电技术研究所 | High-precision pressure driving device |
| CN105045044A (en) * | 2014-05-02 | 2015-11-11 | 佳能株式会社 | Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article |
| CN105700108A (en) * | 2016-04-13 | 2016-06-22 | 中国人民解放军国防科学技术大学 | Piezoelectric ceramic micro actuator for controlling vibration of optical mirror |
| CN106646856A (en) * | 2016-12-19 | 2017-05-10 | 中国科学院长春光学精密机械与物理研究所 | Deformable mirror for EUV (extreme ultra-violet) photoetching and production method thereof |
| CN110764211A (en) * | 2019-10-21 | 2020-02-07 | 中国科学院国家天文台南京天文光学技术研究所 | Thread adjusting and clamping mechanism with dense dot matrix distribution |
-
2009
- 2009-03-20 CN CNA2009100805758A patent/CN101504487A/en active Pending
Cited By (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101923214A (en) * | 2010-08-04 | 2010-12-22 | 中国科学院光电技术研究所 | Deformed secondary mirror based on piezoelectric driver |
| CN102684055A (en) * | 2012-05-15 | 2012-09-19 | 清华大学 | Device for adjusting curvature radius of reflector |
| CN103293664B (en) * | 2012-12-28 | 2015-06-24 | 清华大学 | Deformable mirror and edge aberration debugging and correcting device thereof |
| CN103246058A (en) * | 2012-12-28 | 2013-08-14 | 清华大学 | Deformation mirror |
| CN103246058B (en) * | 2012-12-28 | 2015-07-29 | 清华大学 | Distorting lens |
| CN103246060A (en) * | 2012-12-28 | 2013-08-14 | 清华大学 | Deformation mirror |
| CN103268012A (en) * | 2012-12-28 | 2013-08-28 | 清华大学 | Driving device for deformable mirror and deformable mirror |
| CN103293664A (en) * | 2012-12-28 | 2013-09-11 | 清华大学 | Deformable mirror and edge aberration debugging and correcting device thereof |
| CN103645558A (en) * | 2012-12-28 | 2014-03-19 | 清华大学 | Deformable mirror |
| CN103645556A (en) * | 2012-12-28 | 2014-03-19 | 清华大学 | Deformable mirror |
| CN103676138A (en) * | 2012-12-28 | 2014-03-26 | 清华大学 | Multi-layer combined thin deformable mirror body structure |
| CN103645558B (en) * | 2012-12-28 | 2016-08-17 | 清华大学 | Distorting lens |
| CN103645556B (en) * | 2012-12-28 | 2016-06-08 | 清华大学 | Distorting lens |
| CN103257447A (en) * | 2013-06-05 | 2013-08-21 | 清华大学 | Deformable mirror |
| CN103257447B (en) * | 2013-06-05 | 2015-12-02 | 清华大学 | Distorting lens |
| CN103268013A (en) * | 2013-06-06 | 2013-08-28 | 清华大学 | Deformable mirror |
| CN104516212A (en) * | 2013-09-30 | 2015-04-15 | 佳能株式会社 | Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article |
| US9568729B2 (en) | 2013-09-30 | 2017-02-14 | Canon Kabushiki Kaisha | Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article |
| CN103744177A (en) * | 2014-01-09 | 2014-04-23 | 中国科学院光电技术研究所 | Combined wavefront corrector |
| US9678444B2 (en) | 2014-05-02 | 2017-06-13 | Canon Kabushiki Kaisha | Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article |
| CN105045044B (en) * | 2014-05-02 | 2018-04-03 | 佳能株式会社 | Optical devices, projection optical system, the manufacture method of exposure device and article |
| CN105045044A (en) * | 2014-05-02 | 2015-11-11 | 佳能株式会社 | Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article |
| CN104539188A (en) * | 2015-01-04 | 2015-04-22 | 中国科学院光电技术研究所 | High-precision pressure driving device |
| CN105700108A (en) * | 2016-04-13 | 2016-06-22 | 中国人民解放军国防科学技术大学 | Piezoelectric ceramic micro actuator for controlling vibration of optical mirror |
| CN105700108B (en) * | 2016-04-13 | 2018-02-09 | 中国人民解放军国防科学技术大学 | Piezoelectric microactuators device for optical mirror plane vibration control |
| CN106646856A (en) * | 2016-12-19 | 2017-05-10 | 中国科学院长春光学精密机械与物理研究所 | Deformable mirror for EUV (extreme ultra-violet) photoetching and production method thereof |
| CN110764211B (en) * | 2019-10-21 | 2021-06-22 | 中国科学院国家天文台南京天文光学技术研究所 | Thread adjusting and clamping mechanism with dense dot matrix distribution |
| CN110764211A (en) * | 2019-10-21 | 2020-02-07 | 中国科学院国家天文台南京天文光学技术研究所 | Thread adjusting and clamping mechanism with dense dot matrix distribution |
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