CN105699704A - Imaging automatic adjusting device for white light interference atomic force probe system and control method thereof - Google Patents
Imaging automatic adjusting device for white light interference atomic force probe system and control method thereof Download PDFInfo
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- CN105699704A CN105699704A CN201610145779.5A CN201610145779A CN105699704A CN 105699704 A CN105699704 A CN 105699704A CN 201610145779 A CN201610145779 A CN 201610145779A CN 105699704 A CN105699704 A CN 105699704A
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- 239000000523 sample Substances 0.000 title claims abstract description 119
- 238000003384 imaging method Methods 0.000 title claims abstract description 34
- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000005259 measurement Methods 0.000 claims abstract description 13
- 230000001105 regulatory effect Effects 0.000 claims description 20
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 230000033001 locomotion Effects 0.000 claims description 6
- 230000001276 controlling effect Effects 0.000 claims description 3
- 238000012360 testing method Methods 0.000 claims description 3
- 239000000284 extract Substances 0.000 claims description 2
- 230000007246 mechanism Effects 0.000 abstract description 4
- 230000008901 benefit Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 5
- 230000004044 response Effects 0.000 description 2
- 238000005411 Van der Waals force Methods 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
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- 238000002372 labelling Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000004621 scanning probe microscopy Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
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- General Health & Medical Sciences (AREA)
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses an imaging automatic adjusting device based on a white light interference atomic force probe scanning microscope probe system and a control method thereof. The device mainly comprises a computer, a clamping mechanism, a hinge mechanism, an atomic force probe and a probe assembly, a white light interference microscope system and a plane CCD light path connecting tube. In a condition in which connection of the white light interference atomic force probe microscope is completed, according to a horizontal included angle between imaging of the probe on the surface CCD and a plane CCD coordinate system, an actuator is controlled to deflect for a certain angle through a computer, the included angle between the imaging of the atomic force probe in the plane CCD and the plane CCD coordinate system is in an error range, and thus, the measured result has a small measurement error. Imaging of the probe in the plane CCD is automatically adjusted, the device and the method have the advantages of convenient control, high control precision and simple operation.
Description
Technical field
The invention belongs to ultra-precision surface topography field。More specifically, refer to automaton and the control method thereof of a kind of white light interference atomic force scanning probe scanning microscope probe imaging。
Background technology
White light interference atomic force scanning probe microscopy is the deformation quantifying atomic force scanning probe with the zero order fringe of white light, thus indirectly obtaining the height of surface of the work。And the principle of atomic force scanning probe deformations is interatomic Van der Waals force。When measuring, the needle point of atomic force scanning probe is equivalent to an atom, and an atom on the surface of tested exemplar can interact with atomic force surface sweeping probe tip so that the cantilever of atomic force scanning probe deforms upon。Then can there is corresponding movement in the white-light fringe formed on cantilever, can calculate the deflection of atomic force scanning probe according to the amount of movement of white light interference zero order fringe。
And for the common Processing Algorithm of white-light fringe, such as extremum method, centroid method, envelope method is all take the direction parallel with moving interference fringes direction on detecting probe surface to select data to be calculated, common is select to be calculated with the data in the direction of the horizontal direction parallel in the CCD coordinate system of face, if probe is excessive with the angle of face CCD coordinate system horizontal direction, bring systematic error will to the initial data that white light interference zero order fringe calculates, in order to make the impact that the result measured is caused by this error few as much as possible, it is necessary for the horizontal sextant angle regulating probe and face CCD coordinate system within the scope of one, according to substantial amounts of experiment, the error that the result measured is caused by this error when this scope is at ± 1.5 ° is negligible。
Owing to environment is had very high requirement by white light interference atomic force probe scanning microscope, therefore photoelectric original is required for the sealing of certain condition, after white light interference atomic force probe scanning microscope installation, it is not easy to regular dismounting, but usually need adjustment face CCD to reach the angle with probe in the scope of satisfied requirement when changing probe, but manual adjustments is difficult to angle adjustment in the scope of satisfied requirement, in order to reach conveniently high accuracy adjustment, automatic regulating apparatus and control method thereof。
Summary of the invention
It is an object of the invention to provide in the coordinate system of a kind of face that is imaged on CCD for white light atomic force probe scanning microscope middle probe with the adjustment device of the angle of horizontal direction and control method thereof。The present invention can realize probe angle in the coordinate system of face CCD is carried out free control and fast response time, and precision is high。
A kind of imaging automatic regulating apparatus based on white light interference atomic force probe scanning microscope probe system provided by the invention, it is characterized in that, wherein white light interference atomic force probe scanning microscope probe system includes face CCD measurement system, atomic force scanning probe and probe assembly, white light interference microscopic system and computer；
Described atomic force probe assembly is fixed by frame, motor vertical displacement platform is arranged on described frame for realizing the adjustment of described atomic force probe assembly, described frame side measures system communication by face CCD light path connecting cylinder with described CCD, being connected with steering wheel by face CCD light path connecting cylinder described in a gripper mechanism grips, realizing the adjustment of described CCD light path connecting cylinder thus being adjusted to picture by described steering wheel；
Described white light interference microscopic system receives the white light interference light source controlling to produce test of described computer and is transmitted on the micro-cantilever of described atomic force scanning probe assembly and forms white-light fringe, it comprises the deformation data of the described probe on described atomic force probe assembly, described CCD measures system and receives the image that described white light interference system is formed, and calculates described probe variable angle in described CCD measurement system in real time；
Described computer also includes servos control module and face CCD measures system control module, the instruction of the described servos control module described computer of reception realizes the motion of described steering wheel thus being implemented as the automatic adjustment of picture, and described CCD measurement system control module controls described CCD measurement system and complete the real-time calculating of image collection and imaging angle。
Further, linkage is adopted to be connected between described steering wheel with described clamping device。
Further, the structure of described clamping device (9) is two fixing semicircular structures connected, and is used for clamping described CCD light path connecting cylinder (6)。
The invention also discloses a kind of method utilizing probe imaging automatic regulating apparatus to be implemented as picture adjustment automatically, its feature exists, and the method comprises the steps:
1st step adjusts described atomic force probe assembly by interference fringevisualization on probe by described motor vertical displacement platform, makes whole described probe near the position of zone line on the CCD image of face simultaneously；
2nd step utilizes described CCD to measure the interference image of probe described in system acquisition, and returns to described computer；
Computer described in 3rd step carries out image procossing by the data gathered, and extracts the edge of described probe, calculates the angle of described probe and face CCD coordinate system level whether in given scope, if within the scope of this, then adjusts and terminates；If not forwarding the 4th step within the scope of this to；
Computer described in 4th step is by, after calculating the horizontal sextant angle obtaining described probe and face CCD coordinate system, to the order that described steering wheel rotates, regulating the deflection of described CCD light path connecting cylinder, proceed to the 2nd step。
Further, the 3rd step judging, whether the horizontal sextant angle of described probe and face CCD coordinate system is that the described probe level with face CCD coordinate system is because of in ± 1.5 ° in given scope。
The white light interference atomic force scanning microscope probe imaging automatic regulating apparatus realized according to the present invention and control method thereof, due to:
(1) a kind of effective control device and control method are proposed, steering wheel is used in this adjustment system, and avoid and directly probe assembly or probe are adjusted, but adopt the mode of linkage and clamping device combination to carry out the adjustment of CCD light path light cylinder；
(2) make full use of the characteristic of servo control mechanism, it is closely linked with the white light interference atomic force scan probe microscopic probe system in the present invention, it is achieved that accurate adjustment。
In a word, the angle automatic regulating apparatus response process speed realized according to the present invention is fast, and precision is high, and compact overall structure, operational approach is simple, it is achieved convenient, and the certainty of measurement for improving white light interference atomic force probe scanning microscope has very important significance。
Accompanying drawing explanation
Fig. 1 is the unit construction system schematic diagram of the white light interference atomic force scanning microscope probe imaging device that the present invention realizes；
Fig. 2 is the clamp structure in the white light interference atomic force scanning microscope probe imaging device that the present invention realizes and linkage arrangement schematic diagram；
Fig. 3 be the angle of the white light interference atomic force scanning microscope probe imaging that the present invention realizes control method in device connection diagram；
Fig. 4 is the step block diagram representation of the control method that horizontal sextant angle is bigger than normal in the imaging in the CCD of face of Fig. 1 middle probe and face CCD coordinate system；
Fig. 5 is the imaging in the CCD of face of Fig. 1 middle probe and the horizontal sextant angle not shooting image within normal range in the CCD coordinate system of face；
Fig. 6 is the imaging in the CCD of face of Fig. 1 middle probe and horizontal sextant angle shooting image within normal range in the CCD coordinate system of face。
In all the drawings, identical accompanying drawing labelling is for representing identical element or structure, wherein:
1-atomic force scanning probe, 2-atomic force scanning probe assembly, 3-interference objective, 4-frame, 5-motor vertical displacement platform, 6-face CCD and light path connecting cylinder, 7-clamping device, 8-face CCD imaging system, 9-linkage, 10-steering wheel, 11-white light interference system, 12-computer。
Detailed description of the invention
In order to make the purpose of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated。Should be appreciated that specific embodiment described herein is used only for explaining the present invention, be not intended to limit the present invention。
Fig. 1 is the structural representation of white light interference atomic force scanning microscope probe imaging automatic regulating apparatus in the inventive method, Fig. 2 is control structure and the control method of wherein parts, as shown in Figure 1, scan probe automatic station-keeping system according to the white light interference atomic force of a preferred embodiment of the invention to include: atomic force scanning probe 1, atomic force scanning probe assembly 2, interference objective 3, frame 4, motor vertical displacement platform 5, face CCD and light path connecting cylinder 6, clamping device 7, face CCD imaging system 8, linkage 9, steering wheel 10, white light interference system 11, computer 12, servos control module is included in computer 12, face CCD controls module。White light interference microscopic system, scan in atomic force after internal light path system and interference objective 3 and the micro-cantilever of probe 1 forms white-light fringe, being sent interference image to computer 12 by face CCD imaging system 8 again, computer 12 controls modules acquiring data and display in real time by face CCD。
Atomic force probe assembly 2 is fixed by frame 4, motor vertical displacement platform 5 is arranged on frame 4 for realizing the adjustment of atomic force probe assembly 2, frame 4 side measures system 8 UNICOM by face CCD light path connecting cylinder 6 with face CCD, as shown in Figure 2, it is connected with steering wheel 10 by a clamping device 7 clamping face CCD light path connecting cylinder 6, this clamping device 7 is two and Semicircular encircles structure, wherein steering wheel 10 is fixedly connected by linkage 9 and clamping device 7, and the motion of transmission steering wheel 10 is thus realizing the adjustment of face CCD light path connecting cylinder 6 and then being adjusted to picture；
White light interference microscopic system 11 receives the white light interference light source controlling to produce test of computer 12 and is transmitted on the micro-cantilever of atomic force scanning probe assembly 2 and forms white-light fringe, it comprises the deformation data of the probe 1 on atomic force probe assembly, face CCD measures system 8 and receives the image that white light interference system 11 is formed, and calculates the probe 1 variable angle in face CCD measurement system 8 in real time；
Computer 12 also includes servos control module and face CCD measures system control module, servos control module receives the instruction of computer 12 and realizes the motion of steering wheel 10 thus being implemented as the automatic adjustment of picture, and CCD measurement system control module chain of command CCD in face measures system 8 and completes the real-time calculating of image collection and imaging angle。
Fig. 3 illustrates the control flow chart of white light interference atomic force probe scanning microscope probe imaging automatic regulating apparatus；
Will be detailed below utilizing operates as follows according to automatic regulating apparatus and the control method thereof of the present invention in detail:
The first step, completes the connection of the hardware device of white light interference atomic force scan probe microscopic probe imaging automatic regulating apparatus。
(1.1) completing the connection of computer 12 and servos control module and face CCD controller 14, wherein servos control module is connected with the main frame of computer by pci card, and face CCD is controlled module and is connected with computer 12 by standard network data item；
(1.2) complete after computer 12 is connected with face CCD controller 14 with steering engine controller 13, white light interference atomic force probe scanning microscope probe imaging automatic regulating apparatus hardware has connected, white light interference microscopic system is regulated and puts in place, interference fringe is adjusted to the position of the surface middle part of atomic force probe, probe is adjusted to position suitable in the CCD coordinate system of face, and this suitable position needs the lower edges meeting probe can imaging on the CCD of face；
Second step, uses the white light interference atomic force scan probe microscopic probe imaging automatic regulating apparatus connected to start first time face ccd data collecting work, and is adjusted according to the data collected, adjust control flow chart as shown in Figure 3。
(2.1) on the computer 12 relevant parameter is set by steering engine controller dough-making powder CCD controller, including steering wheel velocity of rotation, amplification ratio, face CCD sample frequency, time of exposure, exposing unit number。
(2.2) white light interference microscopic system 11 is adjusted, including white-light fringe position on probe, probe position in the CCD coordinate system of face；
(2.3) computer 12 chain of command CCD controller gathers data, and face CCD controller returns data to computer 12 after having gathered data；
(2.4) computer 12 is calculated by image, obtain the edge of the probe coordinate position in the CCD of face, pass through coordinate position, calculate the size of probe 1 and face CCD coordinate system horizontal sextant angle, and judge whether to meet the pre-set ± condition of 1.5 °, if meeting and forwarding step (2.6) to, otherwise proceed to step (2.5)；
(2.5) by obtaining the angular dimension that adjust after computer disposal, computer controls steering wheel and rotates the angle needing to turn over, and returns again to step (2.3)；
(2.6) adjustment terminates。
In the automatic regulating apparatus realized according to the present invention and one of them embodiment of method of adjustment thereof, Fig. 4 illustrates probe and became a bigger angle before not adjusting with the coordinate system horizontal plane of face CCD, adopts the imaging captured by CCD measurement system；Fig. 5 illustrates probe and meets the CCD imaging schematic diagram of requirement with the angle of the coordinate system horizontal plane of face CCD after adjusting。
Those skilled in the art will readily understand; the foregoing is only presently preferred embodiments of the present invention; not in order to limit the present invention, all any amendment, equivalent replacement and improvement etc. made within the spirit and principles in the present invention, should be included within protection scope of the present invention。
Claims (5)
1. the imaging automatic regulating apparatus based on white light interference atomic force probe scanning microscope probe system, it is characterized in that, wherein white light interference atomic force probe scanning microscope probe system includes face CCD measurement system (8), atomic force scanning probe (1) and probe assembly (2), white light interference microscopic system (11) and computer (12)；
Described atomic force probe assembly (2) is fixed by frame (4), motor vertical displacement platform (5) is arranged on described frame (4) to be used for realizing the adjustment of described atomic force probe assembly (2), described frame (4) side measures system (8) UNICOM by face CCD light path connecting cylinder (6) with described CCD, clamp described CCD light path connecting cylinder (6) by a clamping device (7) to be connected with steering wheel (10), the adjustment of described CCD light path connecting cylinder (6) is realized thus being adjusted to picture by described steering wheel (10)；
Described white light interference microscopic system (11) receives the white light interference light source controlling to produce test of described computer (12) and is transmitted on the micro-cantilever of described atomic force scanning probe assembly (2) and forms white-light fringe, it comprises the deformation data of the described probe (1) on described atomic force probe assembly, described CCD measures system (8) and receives the image that described white light interference system (11) is formed, and calculates the described probe (1) variable angle in described CCD measurement system (8) in real time；
Described computer (12) also includes servos control module and face CCD measures system control module, the instruction of the described servos control module described computer of reception (12) realizes the motion of described steering wheel (10) thus being implemented as the automatic adjustment of picture, and described CCD measurement system control module controls described CCD measurement system (8) and complete the real-time calculating of image collection and imaging angle。
2. white light interference atomic force probe scanning microscope probe imaging automatic regulating apparatus as claimed in claim 1, it is characterised in that adopt linkage (9) to be connected between described steering wheel (10) with described clamping device (7)。
3. white light interference atomic force probe scanning microscope probe imaging automatic regulating apparatus as described in any one in claim 1 or 2, it is characterized in that, described clamping device (7) is two fixing semicircular structures connected, and is used for clamping described CCD light path connecting cylinder (6)。
4. utilizing probe imaging automatic regulating apparatus as described in any one in described claim 1-3 to be implemented as the method automatically adjusted, its feature exists, and the method comprises the steps:
1st step adjusts described atomic force probe assembly (2) by interference fringevisualization on probe by described motor vertical displacement platform (5), makes whole described probe (1) position near zone line on the CCD image of face simultaneously；
2nd step utilizes described CCD to measure system (8) and gathers the interference image of described probe (1), and returns to described computer (12)；
Computer (12) described in 3rd step carries out image procossing by the data gathered, extract the edge of described probe (1), calculate the angle of described probe (1) and face CCD coordinate system level whether in given scope, if within the scope of this, then adjust and terminate；If not forwarding the 4th step within the scope of this to；
After computer (12) described in 4th step obtains the described probe (1) horizontal sextant angle with face CCD coordinate system by calculating, to the order that described steering wheel (10) rotates, regulate the deflection of described CCD light path connecting cylinder (6), proceed to the 2nd step。
5. control method as claimed in claim 4, its special type is in that, judges that whether the horizontal sextant angle of described probe (1) and face CCD coordinate system is that the described probe (1) level with face CCD coordinate system is because of in ± 1.5 ° in given scope in the 3rd step。
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610145779.5A CN105699704B (en) | 2016-03-15 | 2016-03-15 | The imaging automatic regulating apparatus of a kind of white light interference atomic force probe system and control method thereof |
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| CN201610145779.5A CN105699704B (en) | 2016-03-15 | 2016-03-15 | The imaging automatic regulating apparatus of a kind of white light interference atomic force probe system and control method thereof |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106199079A (en) * | 2016-09-05 | 2016-12-07 | 华中科技大学 | A kind of white light interference atomic force microscope automatic calibration system and automatic calibration method |
| CN110312939A (en) * | 2017-02-22 | 2019-10-08 | 株式会社岛津制作所 | Scanning type probe microscope |
| CN115055958A (en) * | 2022-08-19 | 2022-09-16 | 上海泽丰半导体科技有限公司 | Automatic deviation rectifying system for needle implantation |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107748811B (en) * | 2017-09-20 | 2018-07-03 | 华中科技大学 | A kind of outline to be measured algorithm for reconstructing after tip wear |
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| CN101975559A (en) * | 2010-09-07 | 2011-02-16 | 天津大学 | System and method for testing microstructure based on nano measurement and oblique scanning white-light interferometry |
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| CN104730293A (en) * | 2015-03-27 | 2015-06-24 | 华中科技大学 | Calibration device and calibration method of white light interference atomic-power scanning probe |
| CN105242074A (en) * | 2015-10-26 | 2016-01-13 | 华中科技大学 | Method for traceability white light interference atomic-power probe to automatically position workpiece |
| EP2977720A1 (en) * | 2014-07-25 | 2016-01-27 | Mitutoyo Corporation | A method for measuring a high accuracy height map of a test surface |
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2016
- 2016-03-15 CN CN201610145779.5A patent/CN105699704B/en not_active Expired - Fee Related
Patent Citations (5)
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| CN101975559A (en) * | 2010-09-07 | 2011-02-16 | 天津大学 | System and method for testing microstructure based on nano measurement and oblique scanning white-light interferometry |
| EP2977720A1 (en) * | 2014-07-25 | 2016-01-27 | Mitutoyo Corporation | A method for measuring a high accuracy height map of a test surface |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106199079A (en) * | 2016-09-05 | 2016-12-07 | 华中科技大学 | A kind of white light interference atomic force microscope automatic calibration system and automatic calibration method |
| CN110312939A (en) * | 2017-02-22 | 2019-10-08 | 株式会社岛津制作所 | Scanning type probe microscope |
| CN115055958A (en) * | 2022-08-19 | 2022-09-16 | 上海泽丰半导体科技有限公司 | Automatic deviation rectifying system for needle implantation |
| CN115055958B (en) * | 2022-08-19 | 2022-12-02 | 上海泽丰半导体科技有限公司 | Automatic deviation rectifying system for needle implantation |
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