CN105698928A - CoCr/Ti extreme ultraviolet multilayer film intraocular crystal monochromator prepared through nitrogen reactive sputtering and manufacturing method thereof - Google Patents
CoCr/Ti extreme ultraviolet multilayer film intraocular crystal monochromator prepared through nitrogen reactive sputtering and manufacturing method thereof Download PDFInfo
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- CN105698928A CN105698928A CN201610111137.3A CN201610111137A CN105698928A CN 105698928 A CN105698928 A CN 105698928A CN 201610111137 A CN201610111137 A CN 201610111137A CN 105698928 A CN105698928 A CN 105698928A
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- Prior art keywords
- cocr
- intraocular lenses
- multilayer film
- artificial intraocular
- monochromator
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- 229910000684 Cobalt-chrome Inorganic materials 0.000 title claims abstract description 72
- 239000010952 cobalt-chrome Substances 0.000 title claims abstract description 72
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title abstract description 22
- 229910052757 nitrogen Inorganic materials 0.000 title abstract description 11
- 238000005546 reactive sputtering Methods 0.000 title abstract description 9
- 239000013078 crystal Substances 0.000 title abstract description 5
- 239000010410 layer Substances 0.000 claims abstract description 15
- 239000011241 protective layer Substances 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 12
- 239000011521 glass Substances 0.000 claims abstract description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract 3
- 229910052710 silicon Inorganic materials 0.000 claims abstract 3
- 239000010703 silicon Substances 0.000 claims abstract 3
- 230000000737 periodic effect Effects 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 8
- 239000007789 gas Substances 0.000 abstract description 2
- 238000003745 diagnosis Methods 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000001917 fluorescence detection Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 39
- 238000010521 absorption reaction Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000012472 biological sample Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- -1 prime coat Substances 0.000 description 1
- 210000001082 somatic cell Anatomy 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
Abstract
The present invention relates to a CoCr/Ti extreme ultraviolet multilayer film intraocular crystal monochromator prepared through nitrogen reactive sputtering and a manufacturing method thereof. A bond coat is plated on an extra smooth silicon wafer or a glass substrate, CoCr/Ti film layers are alternately plated to form a CoCr/Ti periodical multilayer film intraocular lens, and then the periodical multilayer film intraocular lens is plated with C or B4 to be taken as a protective layer. The optical constants of the CoCr/Ti materials in the extreme ultraviolet band are appropriate, and the CoCr/Ti multilayer film intraocular lens monochromator has excellent optical performances; and moreover, the CoCr/Ti multilayer film intraocular lens monochromator is able to accurately control the thickness ratio of the CoCr/Ti film layers and reduce the roughness of the interface of the multilayer film intraocular lens through addition of nitrogen in the working gas so as to avoid the mutual diffusion between the film layers. The CoCr/Ti extreme ultraviolet multilayer film intraocular lens monochromator prepared through nitrogen reactive sputtering is suitable for application of the extreme ultraviolet band such as fluorescence detection, plasma diagnosis and the like.
Description
Technical field
The invention belongs to precison optical component make field, especially relate to a kind of be applied to extreme ultraviolet waveband with Ti for wall, CoCr is multilayer film artificial intraocular lenses's monochromator in reflecting layer and preparation method thereof。
Background technology
In electromagnetic spectrum, extreme ultraviolet waveband is between VUV and grenz ray, and wavelength is between the special wave band of several nanometers to tens nanometers。At extreme ultraviolet waveband, the refractive index of all material is all close to 1, and this just means that refraction effect occurs light in media as well hardly。And there is strong absorption so that the normal incidence reflectance of single thin film is very low, 10-4Magnitude, it is impossible to meet functional need。This is the main difficulty place traditional optical system being advanced to extreme ultraviolet waveband。Lack high performance optical element, thus also seriously prevent the development of extreme ultraviolet optics。
At water window (λ=2.3～4.4nm) wave band, water (oxygen therein) is substantially transparent, and carbon (in living matter major part component) has very strong absorption。With this wave band as information carrier, it is possible to when good contrast degree to biological sample hologram, to active somatic cell micro-imaging, it is possible to as the light source of plasma diagnostics。At water window wave band, the normal incidence reflectance of any monofilm is all non-normally low, can only adopt multilayer film artificial intraocular lenses's reflecting element。It is chosen at this wave band and absorbs less material, be alternately coated with by high index of refraction and low-index material, improve rete logarithm, can effectively improve reflectance。The L ABSORPTION EDGE of Ti, at 2.74nm, carries out material selection around this wavelength, and CoCr and Ti is at this desirable combination of materials in wavelength place。But, in thin film growth process, between rete, there is mutual scattering and permeating, therefore add the roughness between rete, multilayer film artificial intraocular lenses's interface roughness is most important on optical property impact, and roughness relatively conference increases scattering of light, reduces reflectance。Finding in research before, CoCr and Ti bi-material quality of forming film is poor。Therefore in this patent, by nitrogen reactive sputtering, thin-film-coating process is added reacting gas nitrogen, it is possible to improve quality of forming film。Therefore, the X ray multilayer film artificial intraocular lenses of the water window wave band that interface requirements is higher or even high energy, introduce nitrogen reactive sputtering process significant。
Summary of the invention
The defects such as the purpose of the present invention is contemplated to overcome above-mentioned existing multilayer film artificial intraocular lenses's quality of forming film poor and the one that proposes adopts nitrogen reactive sputtering process to prepare multilayer film artificial intraocular lenses, using metal CoCr as absorbed layer, Ti is as wall and accurately controls CoCr and Ti thickness than multilayer film artificial intraocular lenses's monochromator improving its quality of forming film and reflectance and preparation method thereof。
The purpose of the present invention can be achieved through the following technical solutions:
CoCr/Ti multiplayer films in EUV artificial intraocular lenses's monochromator, this monochromator is made up of substrate, prime coat, CoCr/Ti periodic multilayer film artificial intraocular lenses and protective layer。
Described substrate is ultra-smooth monocrystalline silicon piece (crystal orientation is (100)) or glass。
Described prime coat is coated in substrate, and material is metal Cr, and thickness is 5-10 nanometer。
Described CoCr/Ti periodic multilayer film artificial intraocular lenses is coated on prime coat, and gross thickness is 200-400 nanometer, and periodicity is 50-100, CoCr layer thickness and the ratio of Ti layer thickness is 1:1。
Described protective layer is coated on CoCr/Ti periodic multilayer film artificial intraocular lenses, and material is C or B4C, thickness is 2-5 nanometer。
The manufacture method of CoCr/Ti multiplayer films in EUV artificial intraocular lenses, the method comprises the following steps:
1) on ultra-smooth monocrystalline silicon piece (crystal orientation is (100)) or substrate of glass, Cr rete that thickness is 5-10 nanometer it is coated with as prime coat；
2) being coated with the CoCr/Ti periodic multilayer film artificial intraocular lenses that periodicity is 50-100 on prime coat, gross thickness is 200-400 nanometer, and the ground floor being coated with is CoCr rete, thickness 1-5nm；Last layer is Ti film, thickness 1-5nm。The thickness ratio of CoCr layer and Ti layer controls at 1:1。
3) on CoCr/Ti periodic multilayer film artificial intraocular lenses, it is coated with C or B of 2-5 nanometer thickness4C rete can obtain CoCr/Ti multilayer film artificial intraocular lenses's monochromator as protective layer；
Step 1)-step 3) described in be coated with prime coat, CoCr/Ti periodic multilayer film artificial intraocular lenses and protective layer all adopt DC magnetron sputtering method, pattern be invariable power sputtering, operating air pressure is 2 millitorrs。
Step 1)-3) described in be coated with prime coat, target purity that CoCr/Ti periodic multilayer film artificial intraocular lenses and protective layer adopt is CoCr (99.5%), Ti (99.5%), B4C (99.5%)。
Step 2) described in be coated with prime coat before background vacuum be 8E-5 Pascal。
Compared with existing CoCr/Ti multilayer film artificial intraocular lenses, CoCr/Ti multiplayer films in EUV artificial intraocular lenses prepared by nitrogen reactive sputtering reduces monochromator interface roughness and effectively prevents the phase counterdiffusion between rete, improves multilayer film artificial intraocular lenses's reflectance。
Accompanying drawing explanation
Fig. 1 is the structural representation including CoCr/Ti multiplayer films in EUV artificial intraocular lenses's monochromator；
Fig. 2 is the operating diagram of CoCr/Ti multiplayer films in EUV artificial intraocular lenses's monochromator。
1 being substrate in figure, 2 be Cr prime coat, 3 be CoCr rete in CoCr/Ti periodic multilayer film artificial intraocular lenses, 4 be Ti rete in CoCr/Ti periodic multilayer film artificial intraocular lenses, 5 be CoCr/Ti periodic multilayer film artificial intraocular lenses, 6 is C or B4C protective layer, 7 is incident illumination, and 8 is reflection light。
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the present invention is described in detail。
The manufacture method of CoCr/Ti multiplayer films in EUV artificial intraocular lenses's monochromator, as it is shown in figure 1, first select monocrystalline silicon piece (crystal orientation is (100)) or glass as the substrate 1 of monochromator, roughness of the substrate is 0.2-0.5 nanometer。Then in substrate, Cr rete that thickness is 5-10 nanometer it is coated with as prime coat 2。Alternately it is coated with CoCr rete 3 and Ti rete 4 to form CoCr/Ti periodic multilayer film artificial intraocular lenses 5 again on prime coat 2, periodicity is 50-100, the ratio of the thickness of CoCr and Ti thickness is 1:1, the ground floor being coated with in periodic multilayer film artificial intraocular lenses 5 is CoCr layer, thickness is about 1-5nm, last layer is Ti layer, and thickness is about 1-5nm。Finally on periodic multilayer film artificial intraocular lenses, it is coated with C or B that thickness is 2-5 nanometer4C layer, as protective layer 6, can obtain CoCr/Ti multiplayer films in EUV artificial intraocular lenses's monochromator of excellent performance。Being coated with of rete all adopts direct current magnetron sputtering process; pattern is constant power type; operating air pressure is 2 millitorrs; rete is coated with front base vacuum and is better than 8E-5 Pascal; the purity being coated with the target that prime coat, periodic multilayer film artificial intraocular lenses and protective layer adopt is CoCr (99.5%); Ti (99.5%), B4C (99.5%)。
Fig. 2 is the schematic diagram in CoCr/Ti multiplayer films in EUV artificial intraocular lenses work, and incident illumination 7, by protective layer 6, CoCr/Ti periodic multilayer film artificial intraocular lenses 5, prime coat 2, all reflects on each interface, outgoing reflection light 8。The optical constant of CoCr and Ti is suitable, simultaneously protective layer C or B4The absorption of C is smaller, and monochromator can obtain higher reflectance, shows excellent optical property。On the other hand, nitrogen reactive sputtering prevents the phase counterdiffusion of Ti and CoCr rete, reduces interface roughness, reduces incident illumination scattering between rete, improves reflectance。
The application is not limited to the embodiment that the present invention records in detail, and this can be made various deformation or amendment by those skilled in the art。But these deform or revise the spirit without departing from the present invention and intention, still within protection scope of the present invention。
Claims (10)
1. CoCr/Ti multiplayer films in EUV artificial intraocular lenses's monochromator, it is characterised in that:
This monochromator includes substrate (1), is sequentially laminated with prime coat (2), CoCr/Ti periodic multilayer film artificial intraocular lenses (5) and protective layer (6) above it。Wherein CoCr/Ti periodic multilayer film artificial intraocular lenses (5) is periodically made up of CoCr film (3) and Ti film (4)。
2. CoCr/Ti multiplayer films in EUV artificial intraocular lenses's monochromator according to claim 1, it is characterised in that the material of described substrate (1) can be silicon chip or glass。
3. CoCr/Ti multiplayer films in EUV artificial intraocular lenses's monochromator according to claim 1, it is characterised in that described prime coat (2) is coated in substrate (1), and material is metal Cr, and thickness is 5-10 nanometer。
4. CoCr/Ti multiplayer films in EUV artificial intraocular lenses's monochromator according to claim 1, it is characterized in that, described CoCr/Ti periodic multilayer film artificial intraocular lenses (5) is coated on prime coat (2), the ground floor being coated with is CoCr film (3), thickness is about 1-5nm, and last layer is Ti film (4), and thickness is about 1-5nm, periodicity is 50-100, and gross thickness is 200-400 nanometer。
5. CoCr/Ti multiplayer films in EUV artificial intraocular lenses's monochromator according to claim 1, it is characterised in that described protective layer (6) is coated on CoCr/Ti periodic multilayer film artificial intraocular lenses (5), and material is C or B4C, thickness is 2-5 nanometer。
6. the manufacture method of CoCr/Ti multiplayer films in EUV artificial intraocular lenses's monochromator, it is characterised in that the method comprises the following steps:
1) on silicon chip or substrate of glass (1), it is coated with Cr prime coat (2)；
2) on Cr prime coat (2), CoCr/Ti periodic multilayer film artificial intraocular lenses (5) it is coated with；
3) on CoCr/Ti periodic multilayer film artificial intraocular lenses (5), it is coated with C or B4C protective layer can obtain CoCr/Ti multiplayer films in EUV artificial intraocular lenses's monochromator。
7. the manufacture method of CoCr/Ti multiplayer films in EUV artificial intraocular lenses's monochromator according to claim 6, it is characterized in that, step 1)-step 3) described in be coated with prime coat (2), CoCr/Ti periodic multilayer film artificial intraocular lenses (5) and all adopt magnetically controlled sputter method。
8. the manufacture method of CoCr/Ti multiplayer films in EUV artificial intraocular lenses's monochromator according to claim 6, it is characterized in that, step 2) described in be coated with in CoCr/Ti periodic multilayer film artificial intraocular lenses (5) thickness of CoCr film (3) and Ti film (4) than for 1:1。
9. the manufacture method of CoCr/Ti multiplayer films in EUV artificial intraocular lenses's monochromator according to claim 6; it is characterized in that; step 1)-step 3) described in be coated with CoCr target, Ti target and the B that prime coat (2), CoCr/Ti periodic multilayer film artificial intraocular lenses (5) and protective layer (6) adopt4The purity of C target is all more than 99.5%。
10. the manufacture method of CoCr/Ti multiplayer films in EUV artificial intraocular lenses's monochromator according to claim 6, it is characterised in that step 1) described in bottoming (2) the front base vacuum that is coated be better than 8E-5 Pascal。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610111137.3A CN105698928B (en) | 2016-02-29 | 2016-02-29 | Nitrogen reactive sputtering prepares CoCr/Ti multiplayer films in EUV artificial lens monochromators and production method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610111137.3A CN105698928B (en) | 2016-02-29 | 2016-02-29 | Nitrogen reactive sputtering prepares CoCr/Ti multiplayer films in EUV artificial lens monochromators and production method |
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| Publication Number | Publication Date |
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| CN105698928A true CN105698928A (en) | 2016-06-22 |
| CN105698928B CN105698928B (en) | 2018-04-17 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5993956A (en) * | 1997-04-22 | 1999-11-30 | Carnegie Mellon University | Manganese containing layer for magnetic recording media |
| CN1624771A (en) * | 2003-12-03 | 2005-06-08 | 日立环球储存科技荷兰有限公司 | Patterned multilevel perpendicular magnetic recording media |
| CN1779789A (en) * | 2004-11-26 | 2006-05-31 | 鸿富锦精密工业（深圳）有限公司 | Magnetic recording medium and production thereof |
| CN205562039U (en) * | 2016-02-29 | 2016-09-07 | 苏州宏策光电科技有限公司 | Nitrogen gas reactive sputtering preparation coCrTi extreme ultraviolet multi -film intraocular lens monochromator |
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2016
- 2016-02-29 CN CN201610111137.3A patent/CN105698928B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5993956A (en) * | 1997-04-22 | 1999-11-30 | Carnegie Mellon University | Manganese containing layer for magnetic recording media |
| CN1624771A (en) * | 2003-12-03 | 2005-06-08 | 日立环球储存科技荷兰有限公司 | Patterned multilevel perpendicular magnetic recording media |
| CN1779789A (en) * | 2004-11-26 | 2006-05-31 | 鸿富锦精密工业（深圳）有限公司 | Magnetic recording medium and production thereof |
| CN205562039U (en) * | 2016-02-29 | 2016-09-07 | 苏州宏策光电科技有限公司 | Nitrogen gas reactive sputtering preparation coCrTi extreme ultraviolet multi -film intraocular lens monochromator |
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| CN105698928B (en) | 2018-04-17 |
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