CN105668998B - A kind of P5000 board BPSG technique improves equipment - Google Patents
A kind of P5000 board BPSG technique improves equipment Download PDFInfo
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- CN105668998B CN105668998B CN201610016005.2A CN201610016005A CN105668998B CN 105668998 B CN105668998 B CN 105668998B CN 201610016005 A CN201610016005 A CN 201610016005A CN 105668998 B CN105668998 B CN 105668998B
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- pipeline
- liquid source
- cabinet
- cabinet body
- steel cylinder
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Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1415—Reactant delivery systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
- C03B2201/10—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with boron
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
- C03B2201/28—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with phosphorus
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Pipe Accessories (AREA)
Abstract
The invention discloses a kind of improving equipment for P5000 board BPSG technique, including P5000 platform body and two independent cabinet bodies, TEOS pipeline is installed above P5000 platform body, the inside of cabinet body is equipped with small set cabinet, small set cabinet is in upper and lower double-layer structure, the steel cylinder that storage has liquid source is placed by the lower layer of small set cabinet, upper layer is equipped with liquid source output pipe system, liquid source output pipe system is connected to steel cylinder, it further include that a liquid source draws pipeline, liquid source draws the top that pipeline is mounted on cabinet body, one end that liquid source draws pipeline is connect with liquid source output pipe system, the other end and TEOS pipeline joint, having heaters is installed by the lower layer of small set cabinet, steel cylinder is placed in the heater, liquid source fairlead road is enclosed with heating tape, controller is installed in cabinet body, controller with The communication connection of P5000 platform body, controller control the running of heater and heating tape.Save the cost while equipment improvement can be realized BPSG technique, and can be simple, reliably, efficiently replace liquid source.
Description
Technical field
The present invention relates to a kind of improvement of the equipment of BPSG technique more particularly to a kind of improvement of P5000 board BPSG technique
Equipment.
Background technique
BPSG technique has become a kind of universal technique both at home and abroad at present, and the full name of BPSG is boron-phosphorosilicate glass, that is, is adulterated
The silica of boron and phosphorus.It has in ic manufacturing as dielectric medium before first layer metal and metal interlevel dielectric medium
It is widely applied.BPSG film has brilliant porefilling capability, and can be improved the planarization of entire silicon chip surface, to be
Photoetching and postchannel process provide bigger processing range.BPSG technique is in the industry cycle mainly realized with PECVD board, wherein comparing
Typically there is the P5000 board of Applied Materials's early stage production, this board is due to being designed at the eighties, board hot tank
(HOTBOX) narrow space, and the ampoule (Ampule) for being used to store liquid source is expensive, supplement stoste is inconvenient.
BPSG technique is the doping process realized based on TEOS technique P5000 board.And the P5000 of genuine adulterates aaq work
Skill board end is configured to inside hot tank (HOTBOX) equipped with 6 ampoules (Ampule), wherein 4 are used for TEOS, in addition two
It is a to be used for doped source TMP and TMB.The certain temperature of maintenance is in entire hot tank (HOTBOX) to prevent liquid source in pipeline and valve
Crystallization in component.TEOSAmpule has a long-range liquid supply device interface, and the of no help liquid interface of Ampule for being used to adulterate TMB/TMP,
It needs to split out Ampule when liquid source runs out of and sends U.S.'s genuine supplement liquid source outside.
Because P5000 (TEOSbase) board is developed in the eighties, disadvantage is as follows:
1. manufacturer has stopped production, for many years, TEOS doping relevant configuration spare and accessory parts have also stopped service support to the model board；
2. the design space of original HOTBOX is smaller, internal pipe valve replacement is difficult in maintenance；
3. the liquid source Ampule replacement work of doping is time-consuming and laborious.
In view of the above shortcomings, the designer, is actively subject to research and innovation, to found a kind of P5000 board BPSG
Technique improves equipment, and makes it with more the utility value in industry.
Summary of the invention
In order to solve the above technical problems, saved while can be realized BPSG technique the object of the present invention is to provide one kind at
This, and can be simple, reliably, the equipment of the efficient P5000 board BPSG technique for replacing liquid source is improved.
The present invention proposes a kind of improving equipment for P5000 board BPSG technique, it is characterised in that: including P5000 board sheet
Body and two independent cabinet bodies are equipped with TEOS pipeline above the P5000 platform body, and the inside of the cabinet body is equipped with
Small set cabinet, the small set cabinet are in upper and lower double-layer structure, and the steel cylinder that storage has liquid source, upper layer peace are placed by the lower layer of the small set cabinet
Equipped with liquid source output pipe system, the liquid source output pipe system is connected to the steel cylinder, further includes that a liquid source draws
Pipeline out, the liquid source draw the top that pipeline is mounted on the cabinet body, the liquid source draw one end of pipeline with it is described
Having heaters is installed by the lower layer of the connection of liquid source output pipe system, the other end and the TEOS pipeline joint, the small set cabinet,
The steel cylinder is placed in the heater, and the liquid source fairlead road is enclosed with heating tape, is equipped in the cabinet body
Controller, the controller and the P5000 platform body communicate to connect, the controller control the heater and it is described plus
The running in the torrid zone.
As a further improvement of the present invention, the cabinet body is sealed around, is equipped with exhaust port above the cabinet body, institute
Exhaust port is stated to be connected to the interior of the cabinet.
As a further improvement of the present invention, TMB and TMP liquid is stored respectively in the steel cylinder of described two independent cabinet bodies
Source.
As a further improvement of the present invention, the liquid source output pipe system is blown including an air inlet pipeline, a nitrogen
Pipeline, an air pressure signal piping and outlet pipe, the air inlet pipeline is swept to connect with the steel cylinder, the nitrogen sparge tube road,
Air pressure signal piping and outlet pipe are connected in parallel on the air inlet pipeline.
As a further improvement of the present invention, the air inlet pipeline, nitrogen sparge tube road, air pressure signal piping and escape pipe
Road is respectively mounted proficiency valve, is equipped with pressure gauge on the air pressure signal piping.
As a further improvement of the present invention, the outlet pipe includes the first pipeline, the second pipeline, third pipeline, institute
State the first pipeline, the second pipeline, third pipeline be connected in parallel and the hand valve of the outlet pipe connect, first pipeline go out
Port is equipped with plug, is respectively mounted on second pipeline, third pipeline there are two air valve and a flow controller, the stream
Between described two air valves, the air valve and the flow controller are communicated to connect with the controller amount controller.
As a further improvement of the present invention, the front of the cabinet body is equipped with a control panel, the control panel and institute
Controller communication connection is stated, the control panel is equipped with several display fields and several manipulation buttons.
As a further improvement of the present invention, the cabinet body side wall removable seal is equipped with side capping.
As a further improvement of the present invention, the heating and thermal insulation temperature that the heater is set is 45 degree Celsius.
According to the above aspect of the present invention, the present invention has at least the following advantages: P5000 board BPSG technique proposed by the present invention is set
Standby improve is to refer to the design principle of original-pack P5000 board and optimize, save the cost while realizing BPSG technique.Pass through
Two individual cabinet bodies are designed, one small set cabinet is installed in inside, for installing hand valve, air valve, flow controller and liquid source
Steel cylinder etc., and a specific temperature is maintained, pipeline and original TEOS pipeline joint are drawn by liquid source, and wrap up heating
Band, set temperature, to guarantee that liquid source will not crystallize.Liquid source using it is complete when only need replacing the steel cylinder of liquid source.
To provide the doped source of BPSG technique to P5000 board, improve to form one by the equipment of the P5000 board BPSG technique
Kind is simple, reliably, efficient liquid source supply device.
The above description is only an overview of the technical scheme of the present invention, in order to better understand the technical means of the present invention,
And can be implemented in accordance with the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention and the accompanying drawings.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of P5000 board BPSG technique to improve equipment of the present invention；
Fig. 2 is the schematic diagram of liquid source output pipe system in the present invention；
Fig. 3 is the side schematic diagram of cabinet body in the present invention；
Wherein: 1-P5000 platform body；2- cabinet body；3-TEOS pipeline；The small set cabinet of 4-；5- steel cylinder；6- liquid source efferent duct
Road system；7- liquid source draws pipeline；8- heater；The heating tape 9-；10- controller；11- exhaust port；12- hand valve；13- pressure
Power table；14- plug；15- air valve；16- flow controller；17- control panel；18- display field；19- manipulates button；20-
Side；Side sealing cover 61- air inlet pipeline；62- nitrogen sparge tube road；63- air pressure signal piping；64- outlet pipe；641- first is managed
Road；The second pipeline of 642-；643- third pipeline.
Embodiment
With reference to the accompanying drawings and examples, specific embodiments of the present invention will be described in further detail.Implement below
Example is not intended to limit the scope of the invention for illustrating the present invention.
Embodiment: a kind of P5000 board BPSG technique improves equipment, including P5000 platform body 1 and two it is independent
Cabinet body 2 is equipped with TEOS pipeline 3 above the P5000 platform body, and the inside of the cabinet body is equipped with small set cabinet 4, described
Small set cabinet is in upper and lower double-layer structure, and the steel cylinder 5 that storage has liquid source is placed by the lower layer of the small set cabinet, and upper layer is equipped with liquid source
Output pipe system 6, the liquid source output pipe system are connected to the steel cylinder, further include that a liquid source draws pipeline 7, institute
It states liquid source and draws the top that pipeline is mounted on the cabinet body, the liquid source draws one end of pipeline and the liquid source exports
Having heaters 8, the steel cylinder are installed by the lower layer of pipe-line system connection, the other end and the TEOS pipeline joint, the small set cabinet
It is placed in the heater, the liquid source fairlead road is enclosed with heating tape 9, is equipped with controller in the cabinet body
10, the controller and the P5000 platform body communicate to connect, and the controller controls the heater and the heating tape
Running.
The cabinet body is sealed around, and exhaust port 11, the exhaust port and the cabinet body are equipped with above the cabinet body
Inside connection.So that entire interior of the cabinet is maintained a negative pressure by exhaust port, prevents the leakage of liquid source.
TMB and TMP liquid source is stored respectively in the steel cylinder of described two independent cabinet bodies.
The liquid source output pipe system includes an air inlet pipeline 61, a nitrogen sparge tube road 62, an air pressure detection pipe
Road 63 and outlet pipe 64, the air inlet pipeline are connect with the steel cylinder, the nitrogen sparge tube road, air pressure signal piping and go out
Air pipe is connected in parallel on the air inlet pipeline.
Proficiency valve 12 is respectively mounted on the air inlet pipeline, nitrogen sparge tube road, air pressure signal piping and outlet pipe, it is described
Pressure gauge 13 is installed on air pressure signal piping.
The outlet pipe includes the first pipeline 641, the second pipeline 642, third pipeline 643, first pipeline, second
Pipeline, third pipeline are connected in parallel and the hand valve of the outlet pipe is connected, and the gas outlet of first pipeline is equipped with plug
14, it is respectively mounted that there are two air valve 15 and a flow controller 16, the flow controllers on second pipeline, third pipeline
Between described two air valves, the air valve and the flow controller (MFC) are communicated to connect with the controller.
The front of the cabinet body is equipped with a control panel 17, and the control panel and the controller communicate to connect, described
Control panel is equipped with several display fields 18 and several manipulation buttons 19.
The cabinet body side wall removable seal is equipped with side capping 20.
The heating and thermal insulation temperature that the heater is set is 45 degree Celsius.
The improved principle of equipment of the P5000 board BPSG technique is: going forward side by side with reference to the design principle of original-pack P5000 board
Row optimization, save the cost while realizing BPSG technique.By designing two individual cabinet bodies, one small set cabinet is installed in inside,
For installing hand valve, air valve, flow controller and liquid source steel cylinder etc., and a specific temperature is maintained, is drawn by liquid source
Pipeline and original TEOS pipeline joint out, and heating tape is wrapped up, set temperature, to guarantee that liquid source will not crystallize.In liquid
Source using it is complete when only need replacing the steel cylinder of liquid source.To provide the doped source of BPSG technique to P5000 board, lead to
The equipment for crossing the P5000 board BPSG technique is improved to form one kind simply, reliably, efficient liquid source supply device.
The above is only a preferred embodiment of the present invention, it is not intended to restrict the invention, it is noted that for this skill
For the those of ordinary skill in art field, without departing from the technical principles of the invention, can also make it is several improvement and
Modification, these improvements and modifications also should be regarded as protection scope of the present invention.
Claims (1)
1. a kind of P5000 board BPSG technique improves equipment, it is characterised in that: including P5000 platform body and two independences
Cabinet body, TEOS pipeline is installed above the P5000 platform body, the inside of the cabinet body is equipped with small set cabinet, described
Small set cabinet is in upper and lower double-layer structure, and the steel cylinder that storage has liquid source is placed by the lower layer of the small set cabinet, and upper layer is equipped with liquid source
Output pipe system, the liquid source output pipe system are connected to the steel cylinder, further include that a liquid source draws pipeline, described
Liquid source draws the top that pipeline is mounted on the cabinet body, one end of the liquid source extraction pipeline and the liquid source efferent duct
Having heaters is installed by the connection of road system, the other end and the TEOS pipeline joint, the lower layer of the small set cabinet, and the steel cylinder is placed
In the heater, the liquid source fairlead road is enclosed with heating tape, and controller, the control are equipped in the cabinet body
Device processed and the P5000 platform body communicate to connect, and the controller controls the running of the heater and the heating tape；
The cabinet body is sealed around, and exhaust port is equipped with above the cabinet body, and the exhaust port and the interior of the cabinet connect
It is logical；
TMB and TMP liquid source is stored respectively in the steel cylinder of described two independent cabinet bodies；
The liquid source output pipe system includes an air inlet pipeline, a nitrogen sparge tube road, an air pressure signal piping and outlet
Pipeline, the air inlet pipeline are connect with the steel cylinder, and the nitrogen sparge tube road, air pressure signal piping and outlet pipe parallel connection connect
It connects on the air inlet pipeline；
Proficiency valve, the air pressure inspection are respectively mounted on the air inlet pipeline, nitrogen sparge tube road, air pressure signal piping and outlet pipe
Test tube road is equipped with pressure gauge；
The outlet pipe includes the first pipeline, the second pipeline, third pipeline, first pipeline, the second pipeline, third pipeline
It is connected in parallel and connects with the hand valve of the outlet pipe, the gas outlet of first pipeline is equipped with plug, second pipe
It is respectively mounted on road, third pipeline there are two air valve and a flow controller, the flow controller is located at described two air valves
Between, the air valve and the flow controller are communicated to connect with the controller；
The front of the cabinet body is equipped with a control panel, and the control panel and the controller communicate to connect, the operation control surface
Plate is equipped with several display fields and several manipulation buttons；
The cabinet body side wall removable seal is equipped with side capping；
The heating and thermal insulation temperature that the heater is set is 45 degree Celsius.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610016005.2A CN105668998B (en) | 2016-01-11 | 2016-01-11 | A kind of P5000 board BPSG technique improves equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610016005.2A CN105668998B (en) | 2016-01-11 | 2016-01-11 | A kind of P5000 board BPSG technique improves equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105668998A CN105668998A (en) | 2016-06-15 |
| CN105668998B true CN105668998B (en) | 2019-11-05 |
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| CN201610016005.2A Active CN105668998B (en) | 2016-01-11 | 2016-01-11 | A kind of P5000 board BPSG technique improves equipment |
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Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7638161B2 (en) * | 2001-07-20 | 2009-12-29 | Applied Materials, Inc. | Method and apparatus for controlling dopant concentration during BPSG film deposition to reduce nitride consumption |
| JP2005079141A (en) * | 2003-08-28 | 2005-03-24 | Asm Japan Kk | Plasma cvd system |
| CN103938185B (en) * | 2013-01-21 | 2016-09-14 | 中国兵器工业第五九研究所 | A kind of preparation method of tubular member internal coating |
| CN204918758U (en) * | 2015-07-06 | 2015-12-30 | 麦斯克电子材料有限公司 | Low pressure chemical vapor deposition is ethyl orthosilicate replenishment system for stove |
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| CN105668998A (en) | 2016-06-15 |
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