CN105668998A - Equipment improvement for P5000 machine BPSG process - Google Patents
Equipment improvement for P5000 machine BPSG process Download PDFInfo
- Publication number
- CN105668998A CN105668998A CN201610016005.2A CN201610016005A CN105668998A CN 105668998 A CN105668998 A CN 105668998A CN 201610016005 A CN201610016005 A CN 201610016005A CN 105668998 A CN105668998 A CN 105668998A
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- Prior art keywords
- liquid source
- pipeline
- cabinet
- bpsg
- board
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1415—Reactant delivery systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
- C03B2201/10—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with boron
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
- C03B2201/28—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with phosphorus
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Pipe Accessories (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
The invention discloses equipment improvement for a P5000 machine BPSG process. The invention involves a P5000 machine body and two independent cabinets. A TEOS pipeline is installed above the P5000 machine body, the cabinets are internally equipped with a cabinet set having a vertical two-layer structure respectively, a liquid source stored steel cylinder is placed at the lower layer, the upper layer is equipped with a liquid source output pipeline system, and the liquid source output pipeline system is communicated with the steel cylinder. The invention also involves liquid source extraction pipelines mounted above the cabinets, one ends of the liquid source extraction pipelines are connected to the liquid source output pipeline system and the other ends are in butt joint with the TEOS pipeline, a heater is mounted at the lower layer of each cabinet set, the steel cylinder is placed in the heater, the liquid source extraction pipelines are wrapped by a heating tape, the cabinets are internally provided with a controller respectively, the controllers are in communication connection with the P5000 machine body, and the controllers control the operation of the heaters and the heating tapes. The equipment improvement can realize the BPSG process, also saves cost, and can achieve simple, reliable and efficient replacement of liquid sources.
Description
Technical field
The present invention relates to the equipment of a kind of BPSG technique to improve, the equipment particularly relating to a kind of P5000 board BPSG technique improves.
Background technology
BPSG technique has become as a kind of general technique both at home and abroad at present, and the full name of BPSG is boron-phosphorosilicate glass, is namely doped with the silicon dioxide of boron and phosphorus. It, as dielectric medium before first layer metal and metal interlevel dielectric medium, has a wide range of applications in ic manufacturing. BPSG thin film has the porefilling capability of brilliance, and can improve the planarization of whole silicon chip surface, thus providing bigger processing range for photoetching and postchannel process. BPSG technique in the industry cycle mainly realizes with PECVD board, the wherein more typical P5000 board having Applied Materials to produce early stage of ratio, this board is owing to being designed at the eighties, board hot tank (HOTBOX) narrow space, and ampoule (Ampule) stock solution expensive, supplementary for depositing liquid source is inconvenient.
BPSG technique is based on the doping process that TEOS technique P5000 board realizes. And the P5000 doping aaq technique board end of genuine is configured to hot tank (HOTBOX) inside equipped with 6 ampoules (Ampule), wherein 4 are used for TEOS, and two other is used for doped source TMP and TMB. The temperature that in whole hot tank (HOTBOX), maintenance is certain is to prevent liquid source at pipeline and valve module intercrystalline. TEOSAmpule has long-range liquid supply device interface, and for the of no help liquid interface of Ampule of the TMB/TMP that adulterates, needs to split out Ampule when liquid source runs out of and send the supplementary liquid source of U.S.'s genuine outside.
Because P5000 (TEOSbase) board is developed in the eighties, its shortcoming is as follows:
1. manufacturer has stopped production this model board for many years, and TEOS doping relevant configuration spare and accessory parts have also stopped service support;
2. the design space of former HOTBOX is less, and its internal pipe valve is changed difficult in maintenance;
3. the liquid source Ampule of doping changes work wastes time and energy.
Because above-mentioned defect, the design people, actively in addition research and innovation, the equipment to founding a kind of P5000 board BPSG technique improves so that it is have more the value in industry.
Summary of the invention
For solving above-mentioned technical problem, it is an object of the invention to provide and a kind of be capable of while BPSG technique to save cost, and can be simple and easy, reliably, the equipment of the efficient P5000 board BPSG technique changing liquid source improves.
The present invention proposes the equipment of a kind of P5000 board BPSG technique and improves, it is characterized in that: include P5000 platform body and two independent cabinets, described P5000 platform body be arranged above TEOS pipeline, the internally installed of described cabinet has little set cabinet, described little set cabinet is upper and lower double-layer structure, the steel cylinder depositing liquid source is placed by the lower floor of described little set cabinet, upper strata is provided with liquid source output pipe system, described liquid source output pipe system connects with described steel cylinder, also include a liquid source and draw pipeline, described liquid source is drawn pipeline and is arranged on the top of described cabinet, described liquid source is drawn one end of pipeline and is connected with described liquid source output pipe system, the other end and described TEOS pipeline joint, the lower floor of described little set cabinet is provided with heater, described steel cylinder is placed in described heater, described liquid source is drawn and is enclosed with heating tape on pipeline, described cabinet is provided with controller, described controller and the communication connection of described P5000 platform body, described controller controls the running of described heater and described heating tape.
As a further improvement on the present invention, described cabinet surrounding seals, and described cabinet is arranged above exhaust port, and described exhaust port is internal with described cabinet to be connected.
As a further improvement on the present invention, TMB and TMP liquid source deposited respectively by the steel cylinder of the cabinet of said two independence.
As a further improvement on the present invention, described liquid source output pipe system includes an air inlet pipeline, a nitrogen sparge tube road, air pressure signal piping and an outlet pipe, described air inlet pipeline is connected with described steel cylinder, and described nitrogen sparge tube road, air pressure signal piping and outlet pipe are connected in parallel on described air inlet pipeline.
As a further improvement on the present invention, described air inlet pipeline, nitrogen sparge tube road, air pressure signal piping and outlet pipe are respectively mounted valve on the other hand, described air pressure signal piping is provided with Pressure gauge.
As a further improvement on the present invention, described outlet pipe includes first, second and third pipeline, described first, second and third pipeline is connected in parallel and the hands valve of described outlet pipe is connected, the gas outlet of described first pipeline is provided with plug, second and third pipeline described is mounted on two air valves and a flow controller, described flow controller is between said two air valve, and described air valve and described flow controller all communicate to connect with described controller.
As a further improvement on the present invention, the front of described cabinet is provided with a control panel, described control panel and the communication connection of described controller, and described control panel is provided with some display fields and some manipulation buttons.
As a further improvement on the present invention, described cabinet sidewall removable seal is provided with side capping.
As a further improvement on the present invention, the heating and thermal insulation temperature that described heater sets is as 45 degree.
By such scheme, the present invention at least has the advantage that the equipment of the P5000 board BPSG technique that the present invention proposes improves and is the design principle with reference to original-pack P5000 board and is optimized, it is achieved save cost while BPSG technique.By designing two independent cabinets, an internally installed little set cabinet, for installing hands valve, air valve, flow controller and liquid source steel cylinder etc., and maintain a specified temp, drawn pipeline and original TEOS pipeline joint by liquid source, and wrap up heating tape, design temperature, to ensure that liquid source will not crystallization. Have only to change the steel cylinder of liquid source when liquid source makes to be finished. Thus to provide the doped source of BPSG technique to P5000 board, improve formation by the equipment of this P5000 board BPSG technique a kind of simple and easy, reliably, efficient liquid source feeding mechanism.
Described above is only the general introduction of technical solution of the present invention, in order to better understand the technological means of the present invention, and can be practiced according to the content of description, below with presently preferred embodiments of the present invention and coordinate accompanying drawing describe in detail as after.
Accompanying drawing explanation
Fig. 1 is the structural representation of the equipment improvement of the present invention a kind of P5000 board BPSG technique;
Fig. 2 is the schematic diagram of liquid source output pipe system in the present invention;
Fig. 3 is the side schematic diagram of cabinet in the present invention;
Wherein: 1-P5000 platform body; 2-cabinet; 3-TEOS pipeline; The little set cabinet of 4-; 5-steel cylinder; 6-liquid source output pipe system; 7-liquid source draws pipeline; 8-heater; 9-heating tape; 10-controller; 11-exhaust port; 12-hands valve; 13-Pressure gauge; 14-plug; 15-air valve; 16-flow controller; 17-control panel; 18-display field; 19-manipulates button; 20-side; Side sealing cover 61-air inlet pipeline; 62-nitrogen sparge tube road; 63-air pressure signal piping; 64-outlet pipe; 641-the first pipeline; 642-the second pipeline; 643-the 3rd pipeline.
Detailed description of the invention
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail. Following example are used for illustrating the present invention, but are not limited to the scope of the present invention.
Embodiment: the equipment of a kind of P5000 board BPSG technique improves, including the cabinet 2 that P5000 platform body 1 and two are independent, described P5000 platform body be arranged above TEOS pipeline 3, the internally installed of described cabinet has little set cabinet 4, described little set cabinet is upper and lower double-layer structure, the steel cylinder 5 depositing liquid source is placed by the lower floor of described little set cabinet, upper strata is provided with liquid source output pipe system 6, described liquid source output pipe system connects with described steel cylinder, also include a liquid source and draw pipeline 7, described liquid source is drawn pipeline and is arranged on the top of described cabinet, described liquid source is drawn one end of pipeline and is connected with described liquid source output pipe system, the other end and described TEOS pipeline joint, the lower floor of described little set cabinet is provided with heater 8, described steel cylinder is placed in described heater, described liquid source is drawn and is enclosed with heating tape 9 on pipeline, described cabinet is provided with controller 10, described controller and the communication connection of described P5000 platform body, described controller controls the running of described heater and described heating tape.
Described cabinet surrounding seals, and described cabinet is arranged above exhaust port 11, and described exhaust port is internal with described cabinet to be connected. Whole cabinet one negative pressure of internal maintenance is made, it is prevented that the leakage of liquid source by exhaust port.
The steel cylinder of the cabinet of said two independence is deposited TMB and TMP liquid source respectively.
Described liquid source output pipe system includes air inlet pipeline 61, nitrogen sparge tube road 62, air pressure signal piping 63 and an outlet pipe 64, described air inlet pipeline is connected with described steel cylinder, and described nitrogen sparge tube road, air pressure signal piping and outlet pipe are connected in parallel on described air inlet pipeline.
Described air inlet pipeline, nitrogen sparge tube road, air pressure signal piping and outlet pipe are respectively mounted valve 12 on the other hand, described air pressure signal piping is provided with Pressure gauge 13.
Described outlet pipe includes first, second and third pipeline 641,642,643, described first, second and third pipeline is connected in parallel and the hands valve of described outlet pipe is connected, the gas outlet of described first pipeline is provided with plug 14, second and third pipeline described is mounted on two air valves 15 and a flow controller 16, described flow controller is between said two air valve, and described air valve and described flow controller (MFC) all communicate to connect with described controller.
The front of described cabinet is provided with a control panel 17, described control panel and the communication connection of described controller, and described control panel is provided with some display fields 18 and some manipulation buttons 19.
Described cabinet sidewall removable seal is provided with side capping 20.
The heating and thermal insulation temperature that described heater sets is as 45 degree.
The principle that the equipment of this P5000 board BPSG technique improves is: with reference to the design principle of original-pack P5000 board and be optimized, it is achieved save cost while BPSG technique. By designing two independent cabinets, an internally installed little set cabinet, for installing hands valve, air valve, flow controller and liquid source steel cylinder etc., and maintain a specified temp, drawn pipeline and original TEOS pipeline joint by liquid source, and wrap up heating tape, design temperature, to ensure that liquid source will not crystallization. Have only to change the steel cylinder of liquid source when liquid source makes to be finished. Thus to provide the doped source of BPSG technique to P5000 board, improve formation by the equipment of this P5000 board BPSG technique a kind of simple and easy, reliably, efficient liquid source feeding mechanism.
The above is only the preferred embodiment of the present invention; it is not limited to the present invention; should be understood that; for those skilled in the art; under the premise without departing from the technology of the present invention principle; can also making some improvement and modification, these improve and modification also should be regarded as protection scope of the present invention.
Claims (9)
1. the equipment of a P5000 board BPSG technique improves, it is characterized in that: include P5000 platform body and two independent cabinets, described P5000 platform body be arranged above TEOS pipeline, the internally installed of described cabinet has little set cabinet, described little set cabinet is upper and lower double-layer structure, the steel cylinder depositing liquid source is placed by the lower floor of described little set cabinet, upper strata is provided with liquid source output pipe system, described liquid source output pipe system connects with described steel cylinder, also include a liquid source and draw pipeline, described liquid source is drawn pipeline and is arranged on the top of described cabinet, described liquid source is drawn one end of pipeline and is connected with described liquid source output pipe system, the other end and described TEOS pipeline joint, the lower floor of described little set cabinet is provided with heater, described steel cylinder is placed in described heater, described liquid source is drawn and is enclosed with heating tape on pipeline, described cabinet is provided with controller, described controller and the communication connection of described P5000 platform body, described controller controls the running of described heater and described heating tape.
2. the equipment of a kind of P5000 board BPSG technique according to claim 1 improves, it is characterised in that: described cabinet surrounding seals, and described cabinet is arranged above exhaust port, and described exhaust port is internal with described cabinet to be connected.
3. the equipment of a kind of P5000 board BPSG technique according to claim 2 improves, it is characterised in that: the steel cylinder of the cabinet of said two independence is deposited TMB and TMP liquid source respectively.
4. the equipment of a kind of P5000 board BPSG technique according to claim 3 improves, it is characterized in that: described liquid source output pipe system includes an air inlet pipeline, a nitrogen sparge tube road, air pressure signal piping and an outlet pipe, described air inlet pipeline is connected with described steel cylinder, and described nitrogen sparge tube road, air pressure signal piping and outlet pipe are connected in parallel on described air inlet pipeline.
5. the equipment of a kind of P5000 board BPSG technique according to claim 4 improves, it is characterized in that: described air inlet pipeline, nitrogen sparge tube road, air pressure signal piping and outlet pipe are respectively mounted valve on the other hand, described air pressure signal piping is provided with Pressure gauge.
6. the equipment of a kind of P5000 board BPSG technique according to claim 5 improves, it is characterized in that: described outlet pipe includes first, second and third pipeline, described first, second and third pipeline is connected in parallel and the hands valve of described outlet pipe is connected, the gas outlet of described first pipeline is provided with plug, second and third pipeline described is mounted on two air valves and a flow controller (MFC), described flow controller is between said two air valve, and described air valve and described flow controller all communicate to connect with described controller.
7. the equipment of a kind of P5000 board BPSG technique according to claim 6 improves, it is characterized in that: the front of described cabinet is provided with a control panel, described control panel and the communication connection of described controller, described control panel is provided with some display fields and some manipulation buttons.
8. the equipment of a kind of P5000 board BPSG technique according to claim 7 improves, it is characterised in that: described cabinet sidewall removable seal is provided with side capping.
9. the equipment of a kind of P5000 board BPSG technique according to claim 7 improves, it is characterised in that: the heating and thermal insulation temperature that described heater sets is as 45 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610016005.2A CN105668998B (en) | 2016-01-11 | 2016-01-11 | A kind of P5000 board BPSG technique improves equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610016005.2A CN105668998B (en) | 2016-01-11 | 2016-01-11 | A kind of P5000 board BPSG technique improves equipment |
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| Publication Number | Publication Date |
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| CN105668998A true CN105668998A (en) | 2016-06-15 |
| CN105668998B CN105668998B (en) | 2019-11-05 |
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| CN201610016005.2A Active CN105668998B (en) | 2016-01-11 | 2016-01-11 | A kind of P5000 board BPSG technique improves equipment |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1553968A (en) * | 2001-07-20 | 2004-12-08 | Ӧ�ò��Ϲ�˾ | Method and apparatus for deposition of boron-phosphorus silicate glass |
| US20050098906A1 (en) * | 2003-08-28 | 2005-05-12 | Asm Japan K.K. | Source gas flow control and CVD using same |
| CN103938185A (en) * | 2013-01-21 | 2014-07-23 | 中国兵器工业第五九研究所 | Preparation method for inner hole coating of tubular part |
| CN204918758U (en) * | 2015-07-06 | 2015-12-30 | 麦斯克电子材料有限公司 | Low pressure chemical vapor deposition is ethyl orthosilicate replenishment system for stove |
-
2016
- 2016-01-11 CN CN201610016005.2A patent/CN105668998B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1553968A (en) * | 2001-07-20 | 2004-12-08 | Ӧ�ò��Ϲ�˾ | Method and apparatus for deposition of boron-phosphorus silicate glass |
| US20050098906A1 (en) * | 2003-08-28 | 2005-05-12 | Asm Japan K.K. | Source gas flow control and CVD using same |
| CN103938185A (en) * | 2013-01-21 | 2014-07-23 | 中国兵器工业第五九研究所 | Preparation method for inner hole coating of tubular part |
| CN204918758U (en) * | 2015-07-06 | 2015-12-30 | 麦斯克电子材料有限公司 | Low pressure chemical vapor deposition is ethyl orthosilicate replenishment system for stove |
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| Publication number | Publication date |
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| CN105668998B (en) | 2019-11-05 |
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