CN105666287B - Robot grinding and polishing system based on CMP and used for machining metal components in aviation field - Google Patents
Robot grinding and polishing system based on CMP and used for machining metal components in aviation field Download PDFInfo
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- CN105666287B CN105666287B CN201610098377.4A CN201610098377A CN105666287B CN 105666287 B CN105666287 B CN 105666287B CN 201610098377 A CN201610098377 A CN 201610098377A CN 105666287 B CN105666287 B CN 105666287B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
- B24B19/14—Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding turbine blades, propeller blades or the like
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a robot grinding and polishing system based on CMP and used for machining metal components in aviation field. The robot grinding and polishing system comprises a six-axis robot, a workpiece clamp used for placing workpieces, a contour detection unit used for detecting the workpieces needing to be polished and conducting three-dimensional reconstruction, a grinding wheel with a polishing pad, a base provided with the grinding wheel and a master controller. The free end of the six-axis robot is provided with an electric spindle provided with servo motors. A polishing liquid jetting device capable of jetting CMP polishing liquid to the workpieces is arranged above the workpiece clamp. The workpiece clamp is installed on the electric spindle. The master controller controls the contour detection unit, the six-axis robot, the electric spindle and all the servo motors. The workpiece clamp and the grinding wheel with the polishing pad can also be exchanged in position so as to adapt to polishing of different sizes of workpieces. The robot grinding and polishing system is high in efficiency and good in machining consistency, harmful effects such as mechanical damage and burns which may be caused by common grinding cannot be caused on the workpieces, damage to surfaces or sub surfaces cannot occur, and perfect surfaces can be machined.
Description
Technical field
The present invention relates to a kind of workpiece polishing system, and in particular to one kind is based on CMP（Chemically mechanical polishing）Robot
Polishing system, for the ultraprecise rubbing down of complex curved surface parts such as blade of aviation engine, turbine blade.After can guarantee that grinding
There is good surface quality, surface residual stress is low.
Background technology
The grinding of workpiece is the operation of one key, and the tool marks that it can eliminate workpiece car, Milling Machining is stayed eliminate work
The surface defect of part, obtains the surface of the work that surface quality is higher, residual stress is little, and these are to improving the workpiece life-span, especially
There is great raising to act on the part of the easy fatigue failure such as blade of aviation engine.
The surface of blade of aviation engine, turbine blade etc. is free form surface, and difficulty of processing is big, at present domestic grinding
Technology is mainly artificial to be ground, is cut based on emery wheel, the robot grinding system in abrasive band and numerical control machine tool grinding.The inferior position of artificial grinding
Substantially, the surface quality of workpieces that processes is poor, working (machining) efficiency is low, to the homogeneity of product that processes it is difficult to ensure that, working environment
Difference, has an impact to workers ' health.Digit Control Machine Tool grinding is expensive.The grinding of traditional robot grinding system based on emery wheel
Precision is relatively low, and the surface quality of workpieces for processing is poor, the blade to being operated in high temperature, at a high speed lower aero-engine, easy to be tired
Labor fails.Compared to digital control system, six-joint robot has higher motility（The processing of different size part can be suitable for）, more
High versatility and adaptability（By updating software module, robot can be made to be efficiently completed mill in complicated working environment
Cut task）, therefore development has very big meaning based on the superfine grinding system of robot platform.
The Chinese invention of Publication No. CN103722474A（Robot polishing system based on complex surface machining）Patent
Proposing a kind of robot carries out complex-curved robot polishing system concept, and by force-feedback control high-accuracy grinding is realized
Cut processing.For the grinding accuracy of the system of raising, the Chinese invention patent of Publication No. CN10246255A（A kind of grinding process
The method and system of position-stance error adjust automatically）, by the automatic detection device on-line real-time measuremen location of workpiece and appearance
State information, feeds back to control system, and by actuator pose correction is carried out.The Chinese invention of Publication No. CN103056759A
Patent（A kind of robot grinding system based on sensor feedback）, workpiece profile is detected by binocular camera, carry out three-dimensional
Reconstructing, and outline data is passed to control system carries out error correction, while also emery wheel detector unit detection abrasion of grinding wheel, enters
Row error compensation.
To make CMP（Chemically mechanical polishing）Technique preferably be adapted to blade grinding, need control technological parameter.Paper
（Jianfeng Luo, David A. Dornfeld, Material Removal Mechanism in
ChemicalMechanical Polishing: Theory and Modeling）Point out, in the CMP of semi-conductor industry（Chemistry
Mechanical polishing）, affect wafer rubbing down speed, the factor of surface uniformity and surface quality mainly have Grinding Contact area pressure,
The size of nanoscale abrasive particle, the change of polishing fluid in polishing velocity, the flow velocity of polishing fluid, the macromolecular structure of polishing pad and polishing fluid
Study grade it is relevant.Equally, the technique ginseng by testing optimum selecting CMP planarization blade is also required in accurate grinding blade
Number.
These researchs are placed on the precise controlling of grinding action, real time dynamic measurement focus carries out error compensation, not
There is the limitation for changing traditional wheel grinding in Ultra-precision Turning, cannot both obtain that surface microstructure is good, residual stress is low
Surface.
The content of the invention
To solve the problems, such as superfine grinding surface quality of workpieces, the CMP by semi-conductor industry of the invention is ground
Technique is incorporated into the grinding field of metal, and the grinding of free form surface is implemented in combination with six-joint robot platform, with
Complete the processing of blade of aviation engine.
CMP technique combines the advantage of chemical grinding and polishing and Mechanical polishing, can damage it is low, integrity is good, occur without surface/
On the basis of sub-surface damage, higher surface removal efficiency is obtained, correct the type face precision on surface, process more perfect table
Face.CMP technique is incorporated into the present invention grinding and polishing of aerial blade, and devises corresponding machine with the operation principle of CMP technique
Structure.
In order to solve above-mentioned technical problem, the present invention is based on CMP principle design Liao Liangzhong mechanism implementation, adapts to respectively
In the polishing of small size blade and large-scale blades, concrete scheme is：
Scheme one
A kind of robot polishing system of processing aviation field hardware based on CMP, including six-joint robot, placement work
The workpiece clamp of part, carry out detecting and the contour detecting unit of three-dimensionalreconstruction, the emery wheel with polishing pad, install to needing to polish workpiece
The pedestal and master controller of emery wheel, the six-joint robot free end is provided with the electro spindle with servomotor, and its feature exists
In：The workpiece clamp top is provided with the polishing liquid jetting device that CMP planarization liquid can be sprayed to workpiece, and the workpiece clamp is arranged on described
On electro spindle, the main controller controls contour detecting unit, six-joint robot, electro spindle and all servomotors are described
Polishing pad and work piece contact zone constitute local polishing area, complete CMP in the presence of polishing liquid jetting device sprays polishing fluid and throw
Light, polished workpiece is moved under six-joint robot drive, completes the polishing of whole workpiece, and the polishing pad is by poromerics system
Into, it can store part polishing fluid, so that chemical reaction can be carried out fully, when free curve surface work pieces are polished, and the polishing
Pad curvature is more than free curve surface work pieces maximum curvature, and the shower nozzle of the polishing liquid jetting device is provided with two direction of rotation of increase certainly
By the controller spent, the injection direction of polishing fluid is made under the control of the controller for the tangential side of polishing contact area part workpiece
To, and control the flow velocity of polishing fluid.
Used as improvement, magnetic components are added in the polishing fluid that the polishing liquid jetting device sprays, and to become magnetic controllable,
The workpiece clamp is provided with the magnetic control means that control polishes the flow velocity of magnetic polishing liquid and flow direction on workpiece.
Used as improvement, the robot polishing system also includes polishing fluid retracting device, effectively filters polished workpiece
Polishing residual particles are so as to polishing fluid chemical redemption dress after being sufficiently reserved the polishing fluid defecator of polishing particles and reclaiming
Put.
Used as improvement, polishing fluid defecator is that the magnetic polishing liquid that may filter that polished material residues metallic particles is filtered
Device.
As improvement, the outline surface of polished workpiece in the contour detecting unit dynamic monitoring workpiece clamp, and handle
The outline data of workpiece is delivered to master controller, and main controller controls six-joint robot carries out dynamic pose correction.
Used as improvement, the sensor of the contour detecting unit can be three-dimensional laser diastimeter, based on femtosecond laser
Three-dimensional range finder, or binocular camera, between the six-joint robot end and electro spindle force transducer is provided with.
As improvement, when the robot polishing system based on CMP carries out grinding and polishing to workpiece, the grinding and polishing polishing fluid
Chemical composition and acid-base value are selected according to the high-temperature alloy material species of polished workpiece material, are polished in the grinding and polishing polishing fluid
The surface topography and hardness mechanical property of physical dimension D of granule, hardness and particle surface pattern according to polished workpiece material
Select.
Scheme two
A kind of robot polishing system of processing aviation field hardware based on CMP, including six-joint robot, placement work
The workpiece clamp of part, detected and the contour detecting unit of three-dimensionalreconstruction, the emery wheel with polishing pad, carried to needing to polish workpiece
The pedestal and master controller of servomotor, the six-joint robot free end is provided with the electro spindle with servomotor, and it is special
Levy and be：The workpiece clamp is connected with the servo motor shaft on pedestal, and the workpiece clamp top is provided with and can spray CMP planarization to workpiece
The polishing liquid jetting device of liquid, the emery wheel with polishing pad is arranged on the electro spindle, the main controller controls profile
Detector unit, six-joint robot, electro spindle and all servomotors, the polishing pad and work piece contact zone constitute local and throw
Light area, in the presence of polishing liquid jetting device sprays polishing fluid CMP planarization is completed, and polished workpiece drives in six-joint robot
Lower movement, completes the polishing of whole workpiece.
The design agentses of scheme two are the rubbing heads that six-joint robot drives（By motor, emery wheel and ring set on emery wheel
Polishing pad）, pedestal is with polishing workpiece and polishing fluid fixed in a rotary shaft, the polishing principles of three composition CMP.Polishing
From polishing pad and absorption surface row into localized contact zone from the beginning of, the corrosion and the dual work that is ground of nanoscale abrasive particle in polishing fluid
With under carry out.Under six-joint robot drives rubbing head, workpiece itself to have the spinfunction of auxiliary, two kinds of motions to coordinate, complete whole
The polishing of individual workpiece.Characterized in that, six-joint robot drives rubbing head movement, workpiece to fix an asessory shaft in polishing process
Upper rotatable, both routing motions, knot and the polishing structure design based on CMP principles, complete the polishing of free curve surface work pieces.Should
Scheme is suitable to the polishing of the big blade of large scale, weight.
CMP structural implementations affect on the process parameter control of CMP planarization metal material and the path planning of robot
Less, thus not separated detailed description.
The invention has the beneficial effects as follows：Robot polishing system first, the efficiency high of grinding, the concordance of grinding work piece
It is good, the blade of hand grinding complicated shape is compared, can significantly shorten man-hour；Next to that this rubbing down system, using CMP principles,
Under chemical attack and nano-scale particle dual function, grinding quality is high, and the surface of the work high precision after grinding has no mechanical damage,
For the blade of aviation engine of work under bad environment, using this technique, can improve the fatigue life of blade, extend blade
Working time.In a word, the robot grinding system based on CMP principles, efficiency high, processing concordance is good, and workpiece will not be made
Into the unfavorable effect that the plain grindings such as mechanical damage, burn can be produced, occur without the damage of surface/sub-surface, can process compared with
Perfect surface.
Description of the drawings
Robot polishing system structure one schematic diagrams of the Fig. 1 based on CMP；
Robot polishing system structure two schematic diagrams of the Fig. 2 based on CMP；
The grinding and polishing process of Fig. 3 CMPs；
Fig. 4 robot path planning's processes.
Reference, wherein, 1 six-joint robot, 2 electro spindles, 3 workpiece clamps, 4 contour detecting units, 5 polishing fluids injection dress
Put, 6 polishing pads, 7 emery wheels, 8 pedestals.
Specific embodiment
To make the object, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to attached
Figure, the present invention will be further described.
The embodiment of technical scheme one
Fig. 1 is a kind of structure design of the processing aviation field hardware of the present invention based on the robot polishing system of CMP
The schematic diagram of scheme one.As shown in figure 1, the system is by the emery wheel 7 with polishing pad 6, polishes liquid jetting device 5 and the work of workpiece is installed
Part folder 3 constitutes the grinding and polishing principle of CMP；Emery wheel 7 rotates at a high speed under the drive of electro spindle 2, and six-joint robot 1 drives workpiece clamp
3 motions, carry out the grinding and polishing of surface of the work free form surface in workpiece clamp 3.The main points of CMP grinding and polishings are polishing pad 6 and surface of the work shape
Into rubbing down region, polishing fluid can occur chemical reaction, reach the purpose of chemical attack, and there is nanometer in polishing fluid with workpiece
Level abrasive particle, therefore there is also mechanical grinding effect.The presence of polishing pad 6, can store and transport polishing fluid, make polishing fluid and workpiece table
Face contact is abundant, beneficial to the generation of chemical attack, the workpiece debris for grinding away can be taken away in addition, serves cleaning action.Its
His some auxiliary device, such as polishing fluid reclaim defecator, polishing fluid regulation device and help out, and can save polishing
Liquid, make polishing fluid at the appropriate speed, direction injection rubbing down region.Six-joint robot 1 drives workpiece movement, in contour detecting list
Under the feedback of unit, workpiece redundance is ground away, complete the rubbing down of whole workpiece.
Fig. 3 is the canonical process of CMP in the present invention.Before the CMP planarization for carrying out blade, need to carry out corase grind removal
Most of material to be ground, then carries out fine grinding and removes subsurface defect and Crack Damage etc., and final step technique is that CMP throws
Light, under the chemical attack effect of polishing fluid and the dual function of nanoscale abrasive particle, obtain that surface quality is good, microdefect is few and
The high surface of the uniformity.Blade after the technique processing, microstructure is good, and with good anti-fatigue performance, its is potential
Application be improve blade of aviation engine service life.
Workpiece profile detector unit 4 is used to detect the surface profile of blade that generation outline data is sent to control system to be carried out
Control.Workpiece profile detector unit 4 can be three-dimensional laser diastimeter, the three-dimensional range finder based on femtosecond laser（Have higher
Positional accuracy measurement）, or binocular camera, the present invention preferentially from three-dimensional laser diastimeter, take turns by the three-dimensional for directly obtaining workpiece
Wide data, and dynamic error correction is carried out based on this data.
The shower nozzle of the polishing liquid jetting device 5 is provided with the controller for increasing by two direction of rotation degree of freedom, in controller
Control under make the injection direction of polishing fluid for polishing contact area part workpiece tangential direction, and control the flow velocity of polishing fluid.
Adding magnetic components in the polishing fluid that the polishing liquid jetting device 5 sprays, to become magnetic controllable, in the workpiece
Folder 3 is provided with the magnetic control means that control polishes the flow velocity of magnetic polishing liquid and flow direction on workpiece.
The polishing pad 6 is made up of poromerics, and it can store part polishing fluid, so that chemical reaction can fully enter
OK, when free curve surface work pieces are polished, the curvature of the polishing pad 6 is more than free curve surface work pieces maximum curvature.
A kind of robot polishing system of the processing aviation field hardware based on CMP also includes that polishing fluid reclaims dress
The polishing residual particles of polished workpiece are put, effectively filtered so as to being sufficiently reserved the polishing fluid defecator of polishing particles and returning
Polishing fluid chemical redemption device after receipts.
Polishing fluid defecator is the magnetic polishing liquid defecator that may filter that polished material residues metallic particles.
The outline surface of polished workpiece in the dynamic monitoring workpiece clamp 3 of the contour detecting unit 4, and the wheel of workpiece
To master controller, master controller controls again six-joint robot and carries out dynamic pose correction wide data transfer.
Force transducer is provided between the end of the six-joint robot 1 and electro spindle, by the indirect control control of six-joint robot 1
The pressure in Grinding Contact area processed.
The chemical composition based on CMP chemistry grinding and polishing polishing fluids, acid-base value, polishing particles thing physical dimension and pattern,
It is optimized according to polished workpiece material, the chemical machinery grinding and polishing efficiency being optimal and surface quality；Scheme one, according to quilt
Polishing workpiece material is high-temperature alloy material（Being usually used in the material category of turbo blade has wrought superalloy, axialite casting high
Temperature alloy, to solidification high temperature alloy, single crystal super alloy etc.）, titanium alloy etc., select the chemical composition polishing fluid for adapting to；Scheme
Two, according to the surface topography of polished workpiece material, hardness etc. mechanical property, select polishing particles in chemical mechanical polishing liquid
Physical dimension D, hardness and particle surface pattern etc., to reach optimal chemical attack reaction and mechanically polish effect, subtract
Less so that avoiding rubbing down granule for the secondary damage of polished surface.
Workpiece（Mainly blade of aviation engine）Grinding and polishing process be generally, set up work in off-line programming software first
The threedimensional model of part blade simultaneously plans machining path；Secondly, it is processed the school of front vane position using three-dimensional laser diastimeter
Just；It is last to move according to machining path control six-joint robot 1, and enter Mobile state under the real-time measurement of three-dimensional laser diastimeter
Error compensation, completes the polishing processing of blade part.Six-joint robot 1 movement path planning process as shown in figure 4, according to
The outline data of workpiece, using off-line programming software the path of six-joint robot 1 is planned, and generates corresponding six-joint robot 1
Movement directive；During CMP planarization is processed, in real time the profile of detection workpiece, calculates machining deviation, is generated according to deviation
The correction value in the path of six-joint robot 1, and the six axle machines as next step are superimposed with the offline path of six-joint robot 1 for generating
The path of people 1.Dynamic position and attitude updating are carried out in process, to ensure the precision of CMP planarization process.
The embodiment of technical scheme two
Fig. 2 is the schematic diagram of structural design scheme two of the robot polishing system based on CMP of the present invention.As shown in Fig. 2
The system is polished liquid jetting device 5 and workpiece clamp 3 is constituted the grinding and polishing principle of CMP by the emery wheel 7 with polishing pad 6；Emery wheel 7 exists
Rotate at a high speed under the drive of electro spindle, emery wheel is fixed on the end electro spindle of six-joint robot 1, driven by six-joint robot 1；
And workpiece clamp 3 is fixed on a servo motor shaft（Not shown in Fig. 2）, can rotate, both motions are combined, and are carried out
The polishing of blade surface free form surface.
CMP process, the polishing process of workpiece in the present embodiment etc. and the embodiment of technical scheme one are close, no longer in detail
Thin narration.
Particular embodiments described above, is only described in further details to technical scheme, is not intended to limit
The present invention, all any modification, equivalent substitution and improvements within the spirit and principles in the present invention, done etc., should be included in this
Within the protection domain of invention.
Claims (7)
1. a kind of robot polishing system of processing aviation field hardware based on CMP, including six-joint robot（1）, place
The workpiece clamp of workpiece（3）, to need polish workpiece carry out detecting and three-dimensionalreconstruction contour detecting unit（4）, band polishing pad（6）
Emery wheel（7）, install emery wheel（7）Pedestal（8）And master controller, the six-joint robot（1）Free end is provided with band and watches
Take the electro spindle of motor（2）, it is characterised in that：The workpiece clamp（3）Top is provided with the polishing fluid that CMP planarization liquid can be sprayed to workpiece
Injection apparatus（5）, the workpiece clamp（3）Installed in the electro spindle（2）On, the main controller controls contour detecting unit
（4）, six-joint robot（1）, electro spindle（2）And all servomotors, the polishing pad（6）With work piece contact zone composition office
Portion polishing area, in polishing liquid jetting device（5）Spray and complete CMP planarization in the presence of polishing fluid, polished workpiece is in six axle machines
Device people（1）Lower movement is driven, the polishing of whole workpiece, the polishing pad is completed（6）It is made up of poromerics, it being capable of storage part
Divide polishing fluid, so that chemical reaction can be carried out fully, when free curve surface work pieces are polished, the polishing pad（6）Curvature is more than certainly
By curve surface work pieces maximum curvature, the polishing liquid jetting device（5）Shower nozzle be provided with increase by two direction of rotation degree of freedom control
Device processed, makes under the control of the controller the injection direction of polishing fluid for the tangential direction of polishing contact area part workpiece, and controls
The flow velocity of polishing fluid.
2. as claimed in claim 1 a kind of processing aviation field hardware is based on the robot polishing system of CMP, and its feature exists
In：In the polishing liquid jetting device（5）Adding magnetic components in the polishing fluid of ejection, to become magnetic controllable, in the workpiece clamp
（3）It is provided with the magnetic control means that control polishes the flow velocity of magnetic polishing liquid and flow direction on workpiece.
3. as claimed in claim 1 a kind of processing aviation field hardware is based on the robot polishing system of CMP, and its feature exists
In：Also include polishing fluid retracting device, effectively filter the polishing residual particles of polished workpiece so as to be sufficiently reserved polishing particles
Polishing fluid defecator and reclaim after polishing fluid chemical redemption device.
4. as claimed in claim 3 a kind of processing aviation field hardware is based on the robot polishing system of CMP, and its feature exists
In：Polishing fluid defecator is the magnetic polishing liquid defecator that may filter that polished material residues metallic particles.
5. as claimed in claim 1 a kind of processing aviation field hardware is based on the robot polishing system of CMP, and its feature exists
In：The contour detecting unit（4）Dynamic monitoring workpiece clamp（3）The outline surface of upper polished workpiece, and the wheel of workpiece
Wide data transfer is to master controller, main controller controls six-joint robot（1）Carry out dynamic pose correction.
6. as claimed in claim 1 a kind of processing aviation field hardware is based on the robot polishing system of CMP, and its feature exists
In：The contour detecting unit（4）Sensor be three-dimensional laser diastimeter or binocular camera, the six-joint robot（1）
End and electro spindle（2）Between be provided with force transducer.
7. as claimed in claim 1 a kind of processing aviation field hardware is based on the robot polishing system of CMP, and its feature exists
In：When the robot polishing system based on CMP carries out grinding and polishing to workpiece, the chemical composition and soda acid of the grinding and polishing polishing fluid
Degree is selected according to the high-temperature alloy material species of polished workpiece material, the physical dimension of polishing particles in the grinding and polishing polishing fluid
D, hardness and particle surface pattern are selected according to the surface topography and hardness mechanical property of polished workpiece material.
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| CN201610098377.4A CN105666287B (en) | 2016-02-23 | 2016-02-23 | Robot grinding and polishing system based on CMP and used for machining metal components in aviation field |
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| CN201610098377.4A CN105666287B (en) | 2016-02-23 | 2016-02-23 | Robot grinding and polishing system based on CMP and used for machining metal components in aviation field |
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| CN105666287B true CN105666287B (en) | 2017-04-26 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109015242A (en) * | 2018-08-29 | 2018-12-18 | 无锡航亚科技股份有限公司 | The rubbing down equipment and rubbing down method of trailing edge profile before a kind of aviation precision forged blade |
| CN109015242B (en) * | 2018-08-29 | 2020-05-22 | 无锡航亚科技股份有限公司 | Polishing and grinding equipment and polishing and grinding method for profile of front edge and tail edge of aviation precision-forged blade |
| WO2022142163A1 (en) * | 2020-12-29 | 2022-07-07 | 华侨大学 | Robot polishing system for stone polishing |
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