CN105651730A - Organic gas detection device based on guided-mode resonance principle - Google Patents
Organic gas detection device based on guided-mode resonance principle Download PDFInfo
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- CN105651730A CN105651730A CN201610143293.8A CN201610143293A CN105651730A CN 105651730 A CN105651730 A CN 105651730A CN 201610143293 A CN201610143293 A CN 201610143293A CN 105651730 A CN105651730 A CN 105651730A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
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Abstract
The invention discloses an organic gas detection device based on a guided-mode resonance principle. A miniature gas cavity and a guided-mode resonance light filter are combined for organic gas detection. The organic gas detection device comprises a light source, a polarizer, the miniature gas cavity, the guided-mode resonance light filter, a spectro-grating and a CCD (charge coupled device), and the miniature gas cavity is formed on the upper surface of the guided-mode resonance light filter. Light generated by the light source passes through the polarizer, then is vertically emitted to the guided-mode resonance light filter with the miniature gas cavity from top to bottom and is finally received by the CCD through a spectrum of the spectro-grating after emergence from the bottom of the guided-mode resonance light filter, so that organic gas detection is realized. The organic gas detection device based on the guided-mode resonance principle is simple in structure, accurate in distinguishing of organic gases less in refractive index difference and beneficial to realization of miniaturization.
Description
Technical field
The present invention relates to a kind of optical detection apparatus, particularly to one based on guide mode resonance effect organic gas detecting device.
Background technology
In recent years, air pollution ratio is more serious, how gas is carried out detection quickly and easily and becomes popular research at present. Organic gas is mostly fuel gas, chemically detects troublesome poeration, and there is certain danger. Optical detecting method utilizes the spectral characteristic of material or the measurement of physical optics characteristic, has that detection speed is fast, sensitivity advantages of higher, and need not use reagent in operation, and environmental pollution is little, measuring accuracy is high. Such as, in first technology, utilize the device of optical detection gas (referring to Chinese invention patent " optical gas-detecting device ", number of patent application: 200710005194.4), this installation method is the tested gas of the ultraviolet radiation utilizing light source to send, by detecting that the absorbance of gas is in order to measure the concentration of gas, there is suitable advantage, but it is not enough to yet suffer from some essence, mainly can not detect the frequency wavelength feature of gas, the concentration of same gas can only be detected.
Summary of the invention
1. goal of the invention:
In order to overcome the deficiency in first technology, the present invention provides a kind of organic gas detecting device based on guide mode resonance principle, utilizes guide mode resonance device that the difference of different organic gas refractive index spectra responses is realized the detection of different organic gas.
2. technical scheme:
Organic gas detecting device disclosed by the invention, based on guide mode resonance effect, is constructed above a minitype gas chamber at three layers anti-reflection filter, and thickness, in micron number magnitude, makes a kind of novel gas-detecting device. This device spectro-grating spectral resolution is high, therefore when the refractive index of two kinds of organic gas is little, remains to tell the change of the resonance peak of two kinds of gases.
The technical scheme is that a kind of organic gas detecting device based on guide mode resonance effect, including light source, polaroid, minitype gas chamber, guide mode resonance light filter, spectro-grating, charge coupled cell (CCD), described minitype gas chamber is located on the upper surface of guide mode resonance light filter, the light that light source produces is after polaroid, impinge perpendicularly on the guide mode resonance light filter being provided with minitype gas chamber from top to bottom, light, through this structure, is received by charge coupled cell (CCD) through the spectrum of grating beam splitting after guide mode resonance light filter bottom outlet.Described minitype gas chamber is by microguide and extraneous UNICOM, the organic gas that convenient injection is different.
Described device utilizes guide mode resonance light filter that the difference of different organic gas refractive index spectra responses is realized the detection of different organic gas.
Described guide mode resonance light filter is the guide mode resonance light filter with ducting layer, grating layer and base infrastructure.
Described minitype gas chamber thickness is micron number magnitude.
3. beneficial effect:
Prior art is compared, this device is based on guide mode resonance effect, when air chamber passes into different organic gas, change due to gas refracting index, received by charge coupled cell (CCD) through the spectrum of grating beam splitting after bottom device outgoing, thus drawing the relation of gas with various and resonant positions. The present invention is simple to operate, and detection is precisely, microminiaturized in realizing.
Accompanying drawing explanation
Fig. 1 is provided with the guide mode resonance structure of the light filter figure in minitype gas chamber. In figure numerical reference 1 be top glass layer, 2 be minitype gas chamber, 3 be grating layer, 4 be hafnium oxide ducting layer, 5 be niobium pentaoxide ducting layer, 6 for glass substrate layers.
Fig. 2 is the detecting device figure of this present invention. In figure numerical reference 7 be light source, 8 be polaroid, 9 be there is the guide mode resonance light filter in minitype gas chamber, 10 be spectro-grating, 11 for charge coupled cell (CCD).
Fig. 3 is the spectral response curve of gas with various.
Detailed description of the invention
Below in conjunction with embodiment and accompanying drawing, the invention will be further described.
A kind of organic gas detecting device based on guide mode resonance effect, as shown in Figure 2, including light source 7, polaroid 8, it is provided with the guide mode resonance light filter 9 in minitype gas chamber, spectro-grating 10, charge coupled cell (CCD) 11, described minitype gas chamber builds on the upper surface of guide mode resonance light filter, described minitype gas chamber thickness is micron number magnitude, described minitype gas chamber is by microguide and extraneous UNICOM, the organic gas that convenient injection is different. The light that light source 7 produces is after polaroid 8, impinge perpendicularly on the guide mode resonance light filter 9 being provided with minitype gas chamber from top to bottom, light is through this structure, received by charge coupled cell (CCD) 11 through the spectrum of grating beam splitting 10 after guide mode resonance light filter bottom outlet, record the resonant positions that gas with various is corresponding, it is achieved the detection of organic gas.
Fig. 1 is the guide mode resonance structure of the light filter figure being provided with minitype gas chamber, and this detecting device is made up of top glass layer 1, minitype gas chamber 2, guide mode resonance light filter (comprising grating layer 3, hafnium oxide ducting layer 4, niobium pentaoxide ducting layer 5, basal layer 6).
Test seven kinds of organic gas in the present invention, be respectively as follows: propane, monochloro methane, ethylene, formaldehyde, n-butene, Pentamethylene., chloromethanes. Pass into different gas successively to the minitype gas chamber 2 of detecting device, light is through this structure, through the spectrum of grating beam splitting by the resonant positions data of charge coupled cell (CCD) 11 receiving record gas with various after guide mode resonance light filter 9 bottom outlet, result is as shown in Figure 3, the resonant positions data analyzing each gas can be seen that, along with the rising of organic gas refractive index, the position of formant is also moving right constantly, and reflection efficiency is declining simultaneously. Found out by analysis and substantially exist linear relationship between refractive index and resonance peak wavelength, so utilizing this device can detect different organic gas accurately.
The present invention provides a kind of organic gas detecting device based on guide mode resonance effect, and particularly when the gas that measurement variations in refractive index is small, it is possible to obtain more accurate numerical value, easy to operate, detection is simple, and is easily achieved microminiaturization.
Embodiment described above only have expressed the preferred embodiment of the present invention, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the scope of the claims of the present invention. It should be pointed out that, for the person of ordinary skill of the art, without departing from the inventive concept of the premise, it is also possible to making some deformation, improvement and replacement, these broadly fall into protection scope of the present invention. Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (3)
1. the organic gas detecting device based on guide mode resonance effect, including light source, polaroid, minitype gas chamber, guide mode resonance light filter, spectro-grating, charge coupled cell (CCD), described minitype gas chamber is located on the upper surface of guide mode resonance light filter, described minitype gas chamber is by microguide and extraneous UNICOM, the light that light source produces is after polaroid, impinge perpendicularly on the guide mode resonance light filter being provided with minitype gas chamber from top to bottom, received by charge coupled cell (CCD) through the spectrum of grating beam splitting after guide mode resonance light filter bottom outlet.
2. a kind of organic gas detecting device based on guide mode resonance effect as claimed in claim 1, it is characterised in that described guide mode resonance light filter is the guide mode resonance light filter with ducting layer, grating layer and base infrastructure.
3. a kind of organic gas detecting device based on guide mode resonance effect as claimed in claim 1, it is characterised in that described minitype gas chamber thickness is micron number magnitude.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201610143293.8A CN105651730A (en) | 2016-03-14 | 2016-03-14 | Organic gas detection device based on guided-mode resonance principle |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610143293.8A CN105651730A (en) | 2016-03-14 | 2016-03-14 | Organic gas detection device based on guided-mode resonance principle |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107748455A (en) * | 2017-11-16 | 2018-03-02 | 安徽大学 | Mid-infrared tunable narrow-band-pass filter |
| CN108387551A (en) * | 2018-01-08 | 2018-08-10 | 上海理工大学 | A kind of sensor based on guide mode resonance effect |
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Cited By (3)
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|---|---|---|---|---|
| CN107748455A (en) * | 2017-11-16 | 2018-03-02 | 安徽大学 | Mid-infrared tunable narrow-band-pass filter |
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| CN108387551B (en) * | 2018-01-08 | 2021-07-16 | 上海理工大学 | Sensor based on guided mode resonance effect |
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Application publication date: 20160608 |