CN109781649A - A kind of overstepping one's bounds light type infrared gas sensor suitable for multiple gases detection - Google Patents

A kind of overstepping one's bounds light type infrared gas sensor suitable for multiple gases detection Download PDF

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Publication number
CN109781649A
CN109781649A CN201811635878.7A CN201811635878A CN109781649A CN 109781649 A CN109781649 A CN 109781649A CN 201811635878 A CN201811635878 A CN 201811635878A CN 109781649 A CN109781649 A CN 109781649A
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detector
terrace
overstepping
plate
gas sensor
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CN201811635878.7A
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施云波
刘合欢
冯侨华
唐博伦
葛佳欣
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Harbin University of Science and Technology
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Harbin University of Science and Technology
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Abstract

A kind of overstepping one's bounds light type infrared gas sensor suitable for multiple gases detection, it is related to based on overstepping one's bounds light type infrared gas sensor field, luminous flux unevenness, detection error are big in the overstepping one's bounds light type infrared gas sensor in order to solve the problems, such as to be currently used for multiple gases detection.Upper wall air permeable plate, six terrace with edge gas chamber side walls and detector bottom plate enclose six terrace with edge gas chamber, are equipped with air hole on upper wall air permeable plate and hexagonal pyramid shape reflecting plate;The center of detector bottom plate is equipped with infrared light supply, 6 detectors are uniformly distributed around infrared light supply, the 6 road light that the collimation infrared light of infrared light supply transmitting is successively formed after the reflection of the inner wall of the bottom surface of hexagonal pyramid shape reflecting plate and six terrace with edge gas chamber side walls are incident to 6 collector lenses respectively, it is filtered again by optical filter after collector lens focuses, is finally incident to corresponding detector.Suitable for detecting multiple gases, detection accuracy of the invention is high, small in size.

Description

A kind of overstepping one's bounds light type infrared gas sensor suitable for multiple gases detection
Technical field
The present invention relates to be based on overstepping one's bounds light type infrared gas sensor field.
Background technique
With social modernization, industrialized development, people gradually propose the requirement of gas detection in production and living Height, gas sensor is therefore towards multi-functional, high-precision, miniaturization.Infrared gas sensor is that a kind of precision is high, reliable Property it is good, be not easy the gas sensor being poisoned, testing principle is Infrared spectra adsorption principle, i.e. opposed polarity molecule can be to specific The infrared ray of wavelength carries out selective absorbing and then causes intramolecule energy level transition, and different polar molecules has different red Outer absorption peak, and according to langbobier law, the infrared light of specific frequency can be generated after the absorption of the gas of various concentration Different degrees of energy attenuation can detect gaseous species and concentration according to this principle infrared gas sensor.It is infrared Gas sensor is divided into light splitting type infrared gas sensor and overstepping one's bounds light type infrared gas sensor, light splitting type infrared-gas sensing Device is the infrared light that particular spectral lines are isolated using light-splitting methods such as prism, grating and interferometers, and then to specific gas molecule It is detected, overall dimensions are big, are not easy to carry out mobile detection, stability is poor;Overstepping one's bounds light type infrared gas sensor then exists Infrared detector front end loads narrow band filter, carries out optical filtering processing to the infrared light for having already passed through gas absorption, then detects Its infrared luminous energy, overstepping one's bounds light type infrared gas sensor integrated level is high, small in size and stability is good, is suitable for carrying out more gas biographies Sensor designs, langbobier law application expression formula in overstepping one's bounds light type infrared gas sensor are as follows:
Wherein, I0For infrared light incident intensity, I is that infrared light is emitted intensity, and K is absorption coefficient, and L is infrared light suction Effective light path is received, C is to absorb infrared light gas concentration;Absorption coefficient K value is constant, the infrared gas sensor known to formula The gas concentration value detected and infrared light incidence outgoing intensity rate, infrared Absorption effective path length are in functional dependence, To prevent the random factors such as noise of detector from bringing adverse effect to testing result, wherein infrared incident intensity I0Value by Reference channel detects to obtain in overstepping one's bounds light type infrared gas sensor, and reference channel is identical as detector used in sense channel, only It is that filter transmission frequency is different, reference channel optical filtering set of frequency is other suitable frequencies in addition to object gas absorption frequency Rate, infrared light outgoing intensity I value are detected to obtain by overstepping one's bounds light type infrared gas sensor object gas detection channels, filter used Mating plate is the narrow band filter that can pass through object gas absorption frequency light, and the introduction of reference channel can effectively eliminate noise, light The brings errors such as source is unstable, thus principle it is found that reference channel introduction on condition that infrared detector reference channel with The luminous flux received in detection channels is consistent, and the detection result of such reference channel just has reference value, this limitation Factor but also overstepping one's bounds light type infrared gas sensor is centainly hindered on the way in the way for development of probe gas wide variety, Because infrared light supply is in not fully uniform to the projection luminous flux of detector plane after infrared-gas Chamber return, increase Probe gas type means increase detection channels test surface, and the degree of irregularity for receiving luminous flux is increase accordingly, with reference to logical Road and the received luminous flux difference of detection channels test surface increase, so that sensor error increases, precision reduces.Therefore a kind of energy The overstepping one's bounds light type infrared gas sensor of high-precision that is enough while detecting multiple types gas is urgently studied.
Summary of the invention
The purpose of the present invention is to solve be currently used in the overstepping one's bounds light type infrared gas sensor of multiple gases detection The problem that luminous flux is uneven, detection error is big, so that it is infrared to provide a kind of overstepping one's bounds light type suitable for multiple gases detection Gas sensor.
A kind of overstepping one's bounds light type infrared gas sensor suitable for multiple gases detection of the present invention, including upper wall are saturating Gas plate 1, hexagonal pyramid shape reflecting plate 3, six terrace with edge gas chamber side walls 4, collector lens 5, optical filter 6, detector 7, infrared light supply 8 With detector bottom plate 9;
The top of six terrace with edge gas chamber side walls 4 is equipped with hexagonal pyramid shape reflecting plate 3, and 3 upper cover of hexagonal pyramid shape reflecting plate is closed The bottom of wall air permeable plate 1, six terrace with edge gas chamber side walls 4 is equipped with detector bottom plate 9, upper wall air permeable plate 1, six terrace with edge gas chamber Side wall 4 and detector bottom plate 9 enclose six terrace with edge gas chamber, the bottom surface of hexagonal pyramid shape reflecting plate 3 and six terrace with edge gas chamber The inner wall of side wall 4 is coated with reflectorized material, is equipped with air hole on upper wall air permeable plate 1 and hexagonal pyramid shape reflecting plate 3;
The center of detector bottom plate 9 is equipped with infrared light supply 8, is uniformly distributed 6 detectors 7,6 around infrared light supply 8 The receiving plane of detector 7 is equipped with optical filter 6, and the collimation infrared light that infrared light supply 8 emits is successively through hexagonal pyramid shape reflecting plate 3 The 6 road light formed after the reflection of the inner wall of bottom surface and six terrace with edge gas chamber side walls 4 are incident to 6 collector lenses 5 respectively, through optically focused Lens 5 are filtered by optical filter 6 again after focusing, and are finally incident to corresponding detector 7.
It preferably, further include ventilative drainage layer 2;
Ventilative drainage layer 2 is arranged between upper wall air permeable plate 1 and hexagonal pyramid shape reflecting plate 3.
Preferably, 6 square demarcation plate 4-1, the height of demarcation plate 4-1 are additionally provided in six terrace with edge gas chamber side walls 4 Spend, the rib kiss of the bevel edge of demarcation plate 4-1 and six terrace with edge gas chamber side walls 4 suitable with the height of six terrace with edge gas chamber side walls 4 Merging is fixedly connected.
It preferably, further include 6 lens holders 10;
Lens holder 10 and detector 7 correspond;
6 lens holders 10 are arranged on detector bottom plate 9, and detector 7 is located in respective lens support frame 10, are gathered Optical lens 5 is secured within 10 top of lens holder.
Preferably, lens holder 10 is hollow tetragonous rod structure.
Preferably, detector 7 is pyroelectric detector.
Preferably, infrared light supply 8 is wide spectrum infrared light supply.
The infrared light that infrared light supply of the invention is launched passes through hexagonal pyramid shape reflecting plate and six terrace with edge gas chamber side walls After two secondary reflections, project on the detector that detector bottom plate is equipped with collector lens and optical filter.The present invention is by setting Six terrace with edge gas chamber are counted, project infrared light more uniformly on multiple detectors, increase infrared gas sensor one The gaseous species of secondary detection, and the detection accuracy of overstepping one's bounds light type infrared gas sensor is improved, reduce detection error, Er Qieben The gas sensor of invention it is small in size.
Detailed description of the invention
Fig. 1 is a kind of overstepping one's bounds light type infrared-gas sensing suitable for multiple gases detection described in specific embodiment one The structural schematic diagram of device;In order to facilitate observation of, each section is discrete opens;
Fig. 2 is the structural schematic diagram of six terrace with edge gas chamber side walls in specific embodiment three;
Fig. 3 is the overstepping one's bounds light type infrared gas sensor that one of specific embodiment five is suitable for multiple gases detection Optical path analogous diagram;
Fig. 4 is the whole optical path irradiation level analysis chart of the detector base plate plane in specific embodiment five;
Fig. 5 to Figure 10 is the corresponding irradiation level analysis chart of 6 detectors in specific embodiment five respectively.
Specific embodiment
Specific embodiment 1: illustrating present embodiment in conjunction with Fig. 1, one kind described in present embodiment is suitable for more The overstepping one's bounds light type infrared gas sensor of kind gas detection, including upper wall air permeable plate 1, hexagonal pyramid shape reflecting plate 3, six terrace with edge gases Chamber sidewall 4, collector lens 5, optical filter 6, detector 7, infrared light supply 8 and detector bottom plate 9;
The top of six terrace with edge gas chamber side walls 4 is equipped with hexagonal pyramid shape reflecting plate 3, and 3 upper cover of hexagonal pyramid shape reflecting plate is closed The bottom of wall air permeable plate 1, six terrace with edge gas chamber side walls 4 is equipped with detector bottom plate 9, upper wall air permeable plate 1, six terrace with edge gas chamber Side wall 4 and detector bottom plate 9 enclose six terrace with edge gas chamber, the bottom surface of hexagonal pyramid shape reflecting plate 3 and six terrace with edge gas chamber The inner wall of side wall 4 is coated with reflectorized material, is equipped with air hole on upper wall air permeable plate 1 and hexagonal pyramid shape reflecting plate 3;
The center of detector bottom plate 9 is equipped with infrared light supply 8, is uniformly distributed 6 detectors 7,6 around infrared light supply 8 The receiving plane of detector 7 is equipped with optical filter 6, and the collimation infrared light that infrared light supply 8 emits is successively through hexagonal pyramid shape reflecting plate 3 The 6 road light formed after the reflection of the inner wall of bottom surface and six terrace with edge gas chamber side walls 4 are incident to 6 collector lenses 5 respectively, through optically focused Lens 5 are filtered by optical filter 6 again after focusing, and are finally incident to corresponding detector 7.
The gas sensor of present embodiment is placed in environment to be measured, the bottom surface of hexagonal pyramid shape reflecting plate 3 and six terrace with edge gas The inner wall of fluid chamber side wall 4 is reflective surface, to guarantee the reflecting effect of infrared light supply;Upper wall air permeable plate 1 and hexagonal pyramid shape are anti- It penetrates on plate 3 and is equipped with air hole, to facilitate gas Liquid penetrant testing.Detector bottom plate 9 is with certain thickness regular hexagon bottom Plate.It is arranged in 6,6 detectors of optical filter of different filter wavelengths above 6 detectors 7, chooses one of them as reference channel Detector, remaining 5 detectors for detectable 5 kinds of gas with various.
Infrared light supply 8 used in present embodiment is the broad-spectrum light source with collimating effect, the infrared light launched It is similar to parallel rays, the collimation parallel rays launched by infrared light supply 8 occurs to divide equally for the first time through hexagonal pyramid shape reflecting plate 3 Reflection, then it is divided into 6 road light after the second secondary reflection occurs for six terrace with edge gas chamber side walls, 4 inner wall, through collector lens 5 and filter It is projected on 6 independent pyroelectric detectors after the optically focused of piece 6, optical filtering, wherein detector is set as reference channel all the way, His No. five detectors select optical filter according to institute's probe gas type.
Present embodiment is adjusted by the design to gas chamber and detector distribution, solves more gas infrared sensors The problems such as middle luminous flux is uneven, error is big makes the overstepping one's bounds light type infrared optical sensor of institute's present embodiment have detection The advantages that type is more, small in size, precision is high.
Specific embodiment 2: present embodiment is to examine to one kind described in specific embodiment one suitable for multiple gases The overstepping one's bounds light type infrared gas sensor surveyed is described further, and further includes ventilative drainage layer 2 in present embodiment;
Ventilative drainage layer 2 is arranged between upper wall air permeable plate 1 and hexagonal pyramid shape reflecting plate 3.
Both pre- anti-steam brings interference to testing result to ventilative drainage layer 2, also prevents sensor element to a certain extent Aging.
Specific embodiment 3: illustrating present embodiment in conjunction with Fig. 2, present embodiment is to specific embodiment one A kind of overstepping one's bounds light type infrared gas sensor suitable for multiple gases detection is described further, present embodiment In, 6 square demarcation plate 4-1, the height of demarcation plate 4-1 and six terrace with edge gases are additionally provided in six terrace with edge gas chamber side walls 4 The height of chamber sidewall 4 is suitable, and the bevel edge of demarcation plate 4-1 coincide and is fixedly connected with the rib of six terrace with edge gas chamber side walls 4.
Demarcation plate 4-1 provides support to gas sensor overall structure, but also it is more preferable that light can be made to divide equally effect.
Specific embodiment 4: present embodiment is to examine to one kind described in specific embodiment one suitable for multiple gases The overstepping one's bounds light type infrared gas sensor surveyed is described further, and further includes 6 lens holders 10 in present embodiment;
Lens holder 10 and detector 7 correspond;
6 lens holders 10 are arranged on detector bottom plate 9, and detector 7 is located in respective lens support frame 10, are gathered Optical lens 5 is secured on lens holder 10.
Optical filter 6 is bonded with infrared detector 7, and collector lens 5 is by detector backplanes support.
Specific embodiment 5: illustrating present embodiment in conjunction with Fig. 3 to Figure 10, present embodiment is to specific implementation Described in mode one it is a kind of suitable for multiple gases detection overstepping one's bounds light type infrared gas sensor be described further, this implementation In mode, terrace with edge lower surface constructed by six terrace with edge gas chamber is the regular hexagon that circumscribed radius of circle is 21mm, and upper surface face is Circumscribed radius of circle be 11mm regular hexagon, six terrace with edge gas chamber thickness of the shells be 1mm, 3 height of hexagonal pyramid shape reflecting plate be 7mm, six Pyramid reflects plate thickness 1mm, and the air hole of diameter 1mm, two plates are equipped on upper wall air permeable plate 1 and hexagonal pyramid shape reflecting plate 3 Gap location places ventilative drainage layer, and the regular hexagon that detector bottom plate 9 is thickness 1mm, section is circumscribed radius of circle 21mm gathers saturating Mirror support frame 10 is the hollow quadrangular of outer side length 4mm, wall thickness 0.5mm, high 1mm, and the side length of optical filter used is 2mm, thickness is 0.5mm, lens used are the collector lens of radius 2mm.
The diameter for emulating mid-infrared light source is 5mm, a height of 5mm, and gas sensor carries out simulating, verifying in the present invention When, the purpose of whether sensor can reach uniform light splitting, extension optical path is mainly probed into, is intuitive expression in optical path, detector The effect of surface incident irradiance degree simulation aspect, omits surface air hole in sensor integrally emulates, simulation building model is simultaneously Optical path emulation is carried out, as shown in figure 3, the infrared light that collimation infrared light supply is launched is provided parallel to light, gas chamber's inner wall It is set as reflecting layer, detector upper surface is set as absorbed layer, and it is 1w that infrared light supply, which emits total optical power, and total light number is 500 Item carries out the collection (as shown in Figure 4) of whole optical path irradiation level to detector base plate plane in sensor on this basis, and to 6 A detector receiving plane carries out irradiation level collection respectively (shown in Fig. 5 to Figure 10).
It can (shown in Fig. 3) as a kind of optical path emulation of overstepping one's bounds light type infrared gas sensor detected suitable for multiple gases See, in six terrace with edge gas chamber, the infrared light that collimated infrared light supply is launched projects 6 after two secondary reflection of reflecting surface In a separate detectors, collector lens is arranged by detector backplanes support above detector, collector lens improves infrared light Convergence effect.Whole infrared light irradiance is carried out to detector bottom plate and collects (shown in Fig. 4) it is found that infrared light supply was launched Infrared light uniformly projects detector present position, light received by detector backplate surface under gas chamber's reflex Power is 0.93442w, and receiving light sum is 537, compared with infrared light supply transmission power, there is ideal light source to utilize Rate.
The collection of surface irradiation degree (shown in Fig. 5 to Figure 10) is carried out to 6 separate detectors, can be obtained in six terrace with edge gas chamber Optical path reflex under, optical power received by 6 separate detectors and amount of light are respectively as follows: 0.12973w, 71 (shown in Fig. 5);0.14984w, 82 (shown in Fig. 6);0.14255w, 78 (shown in Fig. 7);0.15713w, 86 (Fig. 8 institutes Show);0.146w, 73 (shown in Fig. 9);0.15719w, 86 (shown in Figure 10), it is seen that 6 separate detectors have relatively Even infrared light irradiation level, based on by langbobier law carry out infrared gas detection when, need to guarantee reference channel with Tested channel has similar luminous flux, and reference channel just has reference value on this basis, and in more gas infrared optics In sensor, the dispersion of test surface makes the infrared light irradiance error of reference channel Yu tested interchannel with the increase for detecting the gross area Value increases, and further increases the detection error of gas sensor, and to solve this problem, the present invention passes through design six terrace with edges point Every formation gases chamber, projects infrared light more uniformly on multiple test surfaces, it is primary to increase infrared gas sensor The gaseous species of detection, and the detection accuracy of overstepping one's bounds light type infrared gas sensor is improved, and reduce its detection error.
The present invention can be by adjusting six terrace with edge gas chamber chamber sizes, hexagonal pyramid shape reflector height, detector bottom plate Size and collector lens size are adjusted the overstepping one's bounds light type infrared optics gas sensor for being suitable for more gas detections, Design the overstepping one's bounds light type infrared gas sensor suitable for more gas detections that size is controllable, optical path is controllable.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims Variation is included within the present invention.

Claims (7)

1. a kind of overstepping one's bounds light type infrared gas sensor suitable for multiple gases detection, which is characterized in that ventilative including upper wall Plate (1), hexagonal pyramid shape reflecting plate (3), six terrace with edge gas chamber side walls (4), collector lens (5), optical filter (6), detector (7), infrared light supply (8) and detector bottom plate (9);
The top of six terrace with edge gas chamber side walls (4) is equipped with hexagonal pyramid shape reflecting plate (3), and hexagonal pyramid shape reflecting plate (3) upper cover is closed The bottom of upper wall air permeable plate (1), six terrace with edge gas chamber side walls (4) is equipped with detector bottom plate (9), upper wall air permeable plate (1), six ribs Platform gas chamber side wall (4) and detector bottom plate (9) enclose six terrace with edge gas chamber, the bottom surface of hexagonal pyramid shape reflecting plate (3) Reflectorized material, upper wall air permeable plate (1) and hexagonal pyramid shape reflecting plate (3) are coated with the inner wall of six terrace with edge gas chamber side walls (4) On be equipped with air hole;
The center of detector bottom plate (9) is equipped with infrared light supply (8), is uniformly distributed 6 detectors (7) around infrared light supply (8), The receiving plane of 6 detectors (7) is equipped with optical filter (6), and the collimation infrared light of infrared light supply (8) transmitting is successively through hexagonal pyramid shape The 6 road light formed after the reflection of the inner wall of the bottom surface of reflecting plate (3) and six terrace with edge gas chamber side walls (4) are incident to 6 respectively and gather Optical lens (5) is filtered again by optical filter (6) after collector lens (5) focus, is finally incident to corresponding detector (7).
2. a kind of overstepping one's bounds light type infrared gas sensor suitable for multiple gases detection according to claim 1, special Sign is, further includes ventilative drainage layer (2);
Ventilative drainage layer (2) are arranged between upper wall air permeable plate (1) and hexagonal pyramid shape reflecting plate (3).
3. a kind of overstepping one's bounds light type infrared gas sensor suitable for multiple gases detection according to claim 1, special Sign is, is additionally provided with 6 square demarcation plates (4-1), the height of demarcation plate (4-1) in six terrace with edge gas chamber side wall (4) Spend, the bevel edge of demarcation plate (4-1) and six terrace with edge gas chamber side walls (4) suitable with the height of six terrace with edge gas chamber side walls (4) Rib coincide and be fixedly connected.
4. a kind of overstepping one's bounds light type infrared gas sensor suitable for multiple gases detection according to claim 1, special Sign is, further includes 6 lens holders (10);
Lens holder (10) and detector (7) correspond;
6 lens holders (10) are arranged on detector bottom plate (9), and detector (7) is located at respective lens support frame (10) Interior, collector lens (5) is secured at the top of lens holder (10).
5. a kind of overstepping one's bounds light type infrared gas sensor suitable for multiple gases detection according to claim 4, special Sign is that the lens holder (10) is hollow tetragonous rod structure.
6. a kind of overstepping one's bounds light type infrared gas sensor suitable for multiple gases detection according to claim 1, special Sign is that the detector (7) is pyroelectric detector.
7. a kind of overstepping one's bounds light type infrared gas sensor suitable for multiple gases detection according to claim 1, special Sign is that the infrared light supply (8) is wide spectrum infrared light supply.
CN201811635878.7A 2018-12-29 2018-12-29 A kind of overstepping one's bounds light type infrared gas sensor suitable for multiple gases detection Pending CN109781649A (en)

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CN113008823A (en) * 2019-12-20 2021-06-22 有研工程技术研究院有限公司 Full-integrated infrared gas sensor
CN113777069A (en) * 2021-09-30 2021-12-10 华南师范大学 Airspace light splitting infrared sensing chip and gas detection device
CN116818699A (en) * 2023-06-07 2023-09-29 南京信息工程大学 Non-spectroscopic infrared gas sensor and calibration measurement method thereof
CN116879215A (en) * 2023-07-18 2023-10-13 上海苏萨电子科技有限公司 Non-dispersive infrared gas sensor

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113008823A (en) * 2019-12-20 2021-06-22 有研工程技术研究院有限公司 Full-integrated infrared gas sensor
CN113008823B (en) * 2019-12-20 2023-02-21 有研工程技术研究院有限公司 Full-integrated infrared gas sensor
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CN116818699B (en) * 2023-06-07 2024-03-12 南京信息工程大学 Non-spectroscopic infrared gas sensor and calibration measurement method thereof
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Application publication date: 20190521