CN105645107A - Sample transfer system and method applied to ultra-high vacuum environment - Google Patents
Sample transfer system and method applied to ultra-high vacuum environment Download PDFInfo
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- CN105645107A CN105645107A CN201410635930.4A CN201410635930A CN105645107A CN 105645107 A CN105645107 A CN 105645107A CN 201410635930 A CN201410635930 A CN 201410635930A CN 105645107 A CN105645107 A CN 105645107A
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Abstract
The invention discloses a sample transfer system and method applied to an ultra-high vacuum environment. The transfer system comprises a reversing transfer chamber distributed in the selected position, having reversing requirements on a sample trolley, in a vacuum inter-linkage system. The reversing transfer chamber is internally provided with a rotary track used for bearing the sample trolley. The rotary track can be driven by a drive mechanism to rotate around the axis of the transfer chamber by any angle and reach different working positions to be matched with different sample trolley fixing tracks in the vacuum inter-linkage system. Furthermore, the selected position includes the junction of two selected vacuum pipelines of the vacuum inter-linkage system and/or a crossing node of vacuum pipelines having reversing requirements on the sample trolley. By arranging the reversing transfer chamber in the vacuum inter-linkage system, the joining and reversing functions of the sample trolley in the vacuum pipelines in the vacuum environment can be effectively completed.
Description
Technical field
The present invention relates to a kind of ultra-high vacuum system, in particular to a kind of sample transfer system and method for ultra-high vacuum system.
Background technology
Nano-device is the forward position in nanosecond science and technology and core research field, developing rapidly and the most at last the production of the mankind and mode of life being produced great effect of other nano science branches such as nano material, nanometer processing, nanometer detection, nanometer physics can be promoted effectively, promote transformation and the upgrading of conventional industries. The interconnected system of vacuum is the breakthrough of boosting nano-device study frontier, but one of important engineering problem that sample transporting and changing in the interconnected system of vacuum is the interconnected system of nano vacuum to be faced. The interconnected system of existing vacuum forms primarily of Sample Room, sample transfer pipeline, transmission rig, sample dolly, sample magnetic force transmission lever, pumping system, chamber etc.
The interconnected system of existing vacuum many employings linear placement, sample passes through transmission rig from Sample Room, sample is sent in transmission pipeline, then the magnetic force driving sample dolly arranged in transmission pipeline by sample delivery to each chamber junction, can use magnetic force transmission lever that sample is delivered in chamber. Above-mentioned vacuum interconnected system sample transmission scheme is adopted to have following significant drawback:
(1) for the interconnected system of linear placement's vacuum of longer dimension, the utilising efficiency that multiple stage sample transfer dolly is beneficial to improve the interconnected system of vacuum can be set usually, but Multi-example trolley travelling cannot complete " overtaking other vehicles " (sample dolly above crossed by sample dolly below) and " meeting car " (the other side's sample dolly crossed by the sample dolly run in opposite directions) of sample dolly in linear vacuum pipe;
(2) for the interconnected system of vacuum of non-linear layout, usually there is the problem that sample dolly cannot turn in vacuum pipe.
Summary of the invention
It is an object of the invention to provide a kind of sample transfer system and method being applied to ultra-high vacuum environment, to overcome deficiency of the prior art.
For realizing aforementioned invention object, the technical solution used in the present invention comprises:
A kind of sample transfer system being applied to ultra-high vacuum environment, comprise the commutation transporting room being distributed in and in the interconnected system of vacuum, sample dolly being had the select location place turning to requirement, described commutation transporting room inside is provided with the rotatable track for carrying sample dolly, and described rotatable track around transporting room axis any rotation under driving mechanism drives, and can arrive different operating position and the fixing track of different sample dollies in system interconnected from vacuum coordinates.
Further, described select location comprises two selected vacuum pipeline junctions of the interconnected system of vacuum and/or sample dolly has the vacuum pipeline crossover node place turning to requirement.
Further, described select location comprises the main vacuum pipeline of the interconnected system of vacuum and chamber props up vacuum pipeline junction.
Further, the working position of described rotatable track comprises and is parallel in main vacuum pipeline the fixing track position of sample dolly and is perpendicular in main vacuum pipeline the fixing track position of sample dolly.
Further, described sample dolly adopts magnetic force driving sample dolly, and also is provided with to drive the magnetic force driving slide block of described sample dolly in the interconnected system of described vacuum.
Further, described magnetic force driving slide block is arranged at outside the vacuum pipeline in the interconnected system of described vacuum.
A kind of sample transfer method being applied to ultra-high vacuum environment, realize based on any one sample transfer system aforesaid, the method comprises: according to real work situation, rotate described rotatable track, make described rotatable track arrive required working position place and the fixing track of respective sample dolly in system interconnected with vacuum coordinates, and then make sample dolly smooth and easy traveling in the interconnected system of vacuum of selecting.
Further, the method comprises: have, selected two vacuum pipeline junctions, the situation turning to operation for selected sample dolly, then, first the working position of described rotatable track is adjusted to track direction fixing with sample dolly in a wherein vacuum pipeline consistent, and order about the selected sample dolly being positioned at this vacuum pipeline and enter commutation transporting room through described rotatable track, then the rotatable track carrying selected sample dolly is rotated set angle, consistent to the fixing track direction of described rotatable track and sample dolly in another vacuum pipeline, order about selected sample dolly afterwards to enter in this another vacuum pipeline.
Further, the method comprises: propping up vacuum pipeline junction for selected sample dolly at main vacuum pipeline and chamber has the situation turning to operation, then, first the working position of described rotatable track is adjusted to track direction fixing with sample dolly in main vacuum pipeline consistent, and order about the selected sample dolly being positioned at main vacuum pipeline and enter commutation transporting room through described rotatable track, afterwards the rotatable track carrying selected sample dolly is rotated 90 ��, described rotatable track is made to prop up the fixing track direction of sample dolly in vacuum pipeline with chamber consistent, order about selected sample dolly again to enter chamber and prop up vacuum pipeline.
Further, the method comprises: for the situation having avoiding operation in a vacuum pipeline with operate more than two sample dollies, these more than two sample dollies are then first made to be compiled in commutation transporting room place mutually, and make the sample dolly being positioned at selected sample dolly front enter commutation transporting room and move on rotatable track, order about the fixing track direction of the sample dolly in described rotatable track and another vacuum pipeline again to be consistent, order about the sample dolly being positioned on rotatable track afterwards to enter this another vacuum pipeline and temporarily park, again described rotatable track is rotated to initial station, and order about selected sample dolly and move to point of destination via described rotatable track.
Compared with prior art, the present invention at least tool have the following advantages: by arrange in the interconnected system of vacuum commutation transporting room (hereinafter referred to as " transporting room "), can effectively complete sample dolly crossing and turning to function in vacuum pipe under vacuum environment, such as, for the interconnected system of vacuum of linear placement, the transporting room increased can as the temporary stop of sample dolly to allow another sample dolly met pass through, and the interconnected system of vacuum for non-linear layout, the transporting room increased can realize the commutation corner operation of sample dolly by its built-in rotatable track.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of sample transfer system being applied to ultra-high vacuum environment in the present invention one exemplary embodiments;
Fig. 2 is one of work shape body schematic diagram of sample transfer system shown in Fig. 1;
Fig. 3 is the two of the work shape body schematic diagram of sample transfer system shown in Fig. 1;
Fig. 4 is the four of the work shape body schematic diagram of sample transfer system shown in Fig. 1;
Description of reference numerals: main vacuum pipeline 1, chamber branch line vacuum pipeline 2, commutation transporting room 3, rotatable track 4, motor-driven mechanism 5, sample dolly fixing track 6, magnetic force driving sample dolly 7, magnetic force driving slide block 8.
Embodiment
Below in conjunction with exemplary embodiments and accompanying drawing, the technical scheme of the present invention is further described.
Consulting is the exemplary embodiments of the present invention shown in Fig. 1, it relates to a kind of sample transfer system being applied to ultra-high vacuum environment, and it comprises main vacuum pipeline 1, chamber branch line vacuum pipeline 2, commutation transporting room 3, rotatable track 4, motor-driven mechanism 5, sample dolly fixing track 6, magnetic force driving sample dolly 7, magnetic force driving slide block 8 etc.
Further general, in the present embodiment, it is prop up vacuum pipeline place at main vacuum pipeline and the chamber of the interconnected system of vacuum, or have the vacuum pipeline crossover node place turning to requirement that commutation transporting room (consulting Fig. 2) is set in sample dolly, commutation transporting room inside is provided with rotatable track (consulting Fig. 2), the effect of rotatable track is for carrying sample dolly, rotatable track adopts motor-driven mechanism to drive, it can around transporting room axis any rotation, its working position is generally and is parallel to the fixing track position of main vacuum pipe sample dolly or is perpendicular to the main little truck position of vacuum pipe sample. having, for needing magnetic force driving sample dolly, the situation turning to operation with chamber junction at main vacuum pipeline: when the rotatable track in the transporting room that commutates and main pipeline internal fixtion track direction are consistent, the magnetic force driving sample dolly being positioned at main vacuum pipe can enter transporting room as shown in Figure 2 via the rotatable track of transporting room under the drive of the outer magnetic force driving slide block of pipeline. then the rotatable track carrying sample dolly can be made around transporting room axis 90-degree rotation by motor-driven structure, it is consistent that the rotatable track now commutated in transporting room props up track direction in vacuum pipeline with chamber, and magnetic force driving sample dolly enters into chamber by-pass line as shown in Figure 3 under the drive of the outer magnetic force driving slide block of pipeline. situation (see figure 4) for there being avoiding operation in main vacuum pipeline with operate multiple stage magnetic force sample dolly: more than two sample dollies are compiled in commutation transporting room place first mutually, a wherein magnetic force driving sample dolly is made to enter commutation transporting room by the outer magnetic force driving slide block of pipeline, then by motor-driven mechanism, the rotatable track direction in transporting room is consistent with the guide rail direction in a trajectory, recycles the outer magnetic force driving slide block of pipeline afterwards and this sample dolly is temporarily parked in branch line vacuum pipe, now recovering rotatable track direction is that initial direction makes another magnetic force driving sample dolly move to point of destination under the outer magnetic force driving slider-actuated of pipeline. meanwhile the magnetic force driving sample dolly being temporarily parked in branch line vacuum pipe can be taken out according to similar approach and deliver to point of destination. so just achieve the avoiding operation of multiple stage magnetic force driving sample dolly in linear vacuum pipe.
The transmission system of the present invention can effectively complete sample dolly crossing and turning to function in vacuum pipe under vacuum environment.
It is noted that the above the specific embodiment of the present invention, do not form limiting the scope of the present invention. Any various other done by the technical conceive of the present invention change and distortion accordingly, all should be included in the protection domain of the claims in the present invention.
Claims (10)
1. one kind is applied to the sample transfer system of ultra-high vacuum environment, it is characterized in that comprising the commutation transporting room being distributed in and sample dolly having in the interconnected system of vacuum the select location place turning to requirement, described commutation transporting room inside is provided with the rotatable track for carrying sample dolly, and described rotatable track around transporting room axis any rotation under driving mechanism drives, and can arrive different operating position and the fixing track of different sample dollies in system interconnected from vacuum coordinates.
2. the sample transfer system being applied to ultra-high vacuum environment according to claim 1, it is characterised in that described select location comprises two selected vacuum pipeline junctions of the interconnected system of vacuum and/or sample dolly has the vacuum pipeline crossover node place turning to requirement.
3. the sample transfer system being applied to ultra-high vacuum environment according to claim 2, it is characterised in that described select location comprises the main vacuum pipeline of the interconnected system of vacuum and chamber props up vacuum pipeline junction.
4. according to any one of claim 1-3, it is applied to the sample transfer system of ultra-high vacuum environment, it is characterised in that the working position of described rotatable track comprises the fixing track position that is parallel in main vacuum pipeline sample dolly and be perpendicular in main vacuum pipeline the fixing track position of sample dolly.
5. according to any one of claim 1-3, it is applied to the sample transfer system of ultra-high vacuum environment, it is characterized in that described sample dolly adopts magnetic force driving sample dolly (7), and in the interconnected system of described vacuum, also it is provided with to drive the magnetic force driving slide block (8) of described sample dolly.
6. it is applied to the sample transfer system of ultra-high vacuum environment according to claim 5, it is characterised in that described magnetic force driving slide block (8) is arranged at outside the vacuum pipeline in the interconnected system of described vacuum.
7. one kind is applied to the sample transfer method of ultra-high vacuum environment, realize based on the sample transfer system according to any one of claim 1-6, it is characterized in that comprising: according to real work situation, rotate described rotatable track, make described rotatable track arrive required working position place and the fixing track of respective sample dolly in system interconnected with vacuum coordinates, and then make sample dolly smooth and easy traveling in the interconnected system of vacuum of selecting.
8. the sample transfer method being applied to ultra-high vacuum environment according to claim 7, it is characterized in that comprising: have, selected two vacuum pipeline junctions, the situation turning to operation for selected sample dolly, then, first the working position of described rotatable track is adjusted to track direction fixing with sample dolly in a wherein vacuum pipeline consistent, and order about the selected sample dolly being positioned at this vacuum pipeline and enter commutation transporting room through described rotatable track, then the rotatable track carrying selected sample dolly is rotated set angle, consistent to the fixing track direction of described rotatable track and sample dolly in another vacuum pipeline, order about selected sample dolly afterwards to enter in this another vacuum pipeline.
9. the sample transfer method being applied to ultra-high vacuum environment according to claim 8, it is characterized in that comprising: propping up vacuum pipeline junction for selected sample dolly at main vacuum pipeline and chamber has the situation turning to operation, then, first the working position of described rotatable track is adjusted to track direction fixing with sample dolly in main vacuum pipeline consistent, and order about the selected sample dolly being positioned at main vacuum pipeline and enter commutation transporting room through described rotatable track, afterwards the rotatable track carrying selected sample dolly is rotated 90 ��, described rotatable track is made to prop up the fixing track direction of sample dolly in vacuum pipeline with chamber consistent, order about selected sample dolly again to enter chamber and prop up vacuum pipeline.
10. the sample transfer method being applied to ultra-high vacuum environment according to claim 7, it is characterized in that comprising: for the situation having avoiding operation in a vacuum pipeline with operate more than two sample dollies, these more than two sample dollies are then first made to be compiled in commutation transporting room place mutually, and make the sample dolly being positioned at selected sample dolly front enter commutation transporting room and move on rotatable track, order about the fixing track direction of the sample dolly in described rotatable track and another vacuum pipeline again to be consistent, order about the sample dolly being positioned on rotatable track afterwards to enter this another vacuum pipeline and temporarily park, again described rotatable track is rotated to initial station, and order about selected sample dolly and move to point of destination via described rotatable track.
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| CN201410635930.4A CN105645107B (en) | 2014-11-13 | 2014-11-13 | Sample transfer system and method applied to ultra-high vacuum environment |
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| CN201410635930.4A CN105645107B (en) | 2014-11-13 | 2014-11-13 | Sample transfer system and method applied to ultra-high vacuum environment |
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| CN105645107A true CN105645107A (en) | 2016-06-08 |
| CN105645107B CN105645107B (en) | 2019-10-18 |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106596990A (en) * | 2016-12-02 | 2017-04-26 | 南京大学 | Ultrahigh vacuum sample transport system |
| CN107082284A (en) * | 2017-03-29 | 2017-08-22 | 中国科学院苏州纳米技术与纳米仿生研究所 | Device for transferring samples and ultra-high vacuum transfer equipment |
| CN107490704A (en) * | 2017-09-06 | 2017-12-19 | 清华大学 | Intersect sample transferring device and the ultrahigh vacuum measuring system with the intersection sample transferring device |
| CN107677844A (en) * | 2017-09-06 | 2018-02-09 | 清华大学 | A kind of sample transferring device and ultrahigh vacuum measuring system |
| CN108061808A (en) * | 2016-11-08 | 2018-05-22 | 中国科学院苏州纳米技术与纳米仿生研究所 | A kind of vacuum interacted system and method for nano material experiment |
| CN108267609A (en) * | 2016-12-31 | 2018-07-10 | 中国科学院苏州纳米技术与纳米仿生研究所 | A kind of sample conveying rack and vacuum plant for vacuum interacted system |
| CN108529236A (en) * | 2018-03-16 | 2018-09-14 | 四川交通职业技术学院 | Logistics pipeline system with converting transmission function |
| CN109081119A (en) * | 2018-09-07 | 2018-12-25 | 中铁第四勘察设计院集团有限公司 | A kind of cold chain pipeline logistics cross-channel turns to remove system |
| CN110040150A (en) * | 2019-04-15 | 2019-07-23 | 南京大学 | A kind of sample transferring device between non-rectilinear interconnection vacuum pipe |
| CN110092148A (en) * | 2019-05-09 | 2019-08-06 | 同方威视技术股份有限公司 | Sample transports detection device and system |
| CN110441100A (en) * | 2018-05-02 | 2019-11-12 | 南京理工大学 | For nanometer powder preparation and the molded high vacuum interacted system of superelevation in situ |
| CN113291724A (en) * | 2021-05-12 | 2021-08-24 | 北京航空航天大学合肥创新研究院(北京航空航天大学合肥研究生院) | Electronic sample pass appearance pole of super high vacuum |
| CN114044289A (en) * | 2021-10-11 | 2022-02-15 | 中国科学院沈阳科学仪器股份有限公司 | Vacuum vertical-connection sample transmission system |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108061808A (en) * | 2016-11-08 | 2018-05-22 | 中国科学院苏州纳米技术与纳米仿生研究所 | A kind of vacuum interacted system and method for nano material experiment |
| CN106596990A (en) * | 2016-12-02 | 2017-04-26 | 南京大学 | Ultrahigh vacuum sample transport system |
| CN106596990B (en) * | 2016-12-02 | 2018-06-19 | 南京大学 | A kind of ultrahigh vacuum sample transport system |
| CN108267609A (en) * | 2016-12-31 | 2018-07-10 | 中国科学院苏州纳米技术与纳米仿生研究所 | A kind of sample conveying rack and vacuum plant for vacuum interacted system |
| CN108267609B (en) * | 2016-12-31 | 2021-11-05 | 中国科学院苏州纳米技术与纳米仿生研究所 | Sample conveying rack for vacuum interconnection system and vacuum device |
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| CN107677844B (en) * | 2017-09-06 | 2019-09-27 | 清华大学 | A kind of sample transferring device and ultrahigh vacuum measuring system |
| CN107490704B (en) * | 2017-09-06 | 2019-06-18 | 清华大学 | Intersect sample transferring device and the ultrahigh vacuum measuring system with the intersection sample transferring device |
| CN107677844A (en) * | 2017-09-06 | 2018-02-09 | 清华大学 | A kind of sample transferring device and ultrahigh vacuum measuring system |
| CN107490704A (en) * | 2017-09-06 | 2017-12-19 | 清华大学 | Intersect sample transferring device and the ultrahigh vacuum measuring system with the intersection sample transferring device |
| CN108529236A (en) * | 2018-03-16 | 2018-09-14 | 四川交通职业技术学院 | Logistics pipeline system with converting transmission function |
| CN108529236B (en) * | 2018-03-16 | 2023-10-03 | 四川交通职业技术学院 | Logistics pipeline system with conversion and transmission functions |
| CN110441100A (en) * | 2018-05-02 | 2019-11-12 | 南京理工大学 | For nanometer powder preparation and the molded high vacuum interacted system of superelevation in situ |
| CN110441100B (en) * | 2018-05-02 | 2022-04-01 | 南京理工大学 | Vacuum interconnection system for preparing nano powder and realizing in-situ ultrahigh pressure forming |
| CN109081119A (en) * | 2018-09-07 | 2018-12-25 | 中铁第四勘察设计院集团有限公司 | A kind of cold chain pipeline logistics cross-channel turns to remove system |
| CN110040150A (en) * | 2019-04-15 | 2019-07-23 | 南京大学 | A kind of sample transferring device between non-rectilinear interconnection vacuum pipe |
| CN110092148A (en) * | 2019-05-09 | 2019-08-06 | 同方威视技术股份有限公司 | Sample transports detection device and system |
| CN113291724A (en) * | 2021-05-12 | 2021-08-24 | 北京航空航天大学合肥创新研究院(北京航空航天大学合肥研究生院) | Electronic sample pass appearance pole of super high vacuum |
| CN114044289A (en) * | 2021-10-11 | 2022-02-15 | 中国科学院沈阳科学仪器股份有限公司 | Vacuum vertical-connection sample transmission system |
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