CN105632983B - A kind of standard for the installation of boiler tube board quartz socket tube checks tool - Google Patents
A kind of standard for the installation of boiler tube board quartz socket tube checks tool Download PDFInfo
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- CN105632983B CN105632983B CN201610164453.7A CN201610164453A CN105632983B CN 105632983 B CN105632983 B CN 105632983B CN 201610164453 A CN201610164453 A CN 201610164453A CN 105632983 B CN105632983 B CN 105632983B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- Condensed Matter Physics & Semiconductors (AREA)
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- Manufacturing & Machinery (AREA)
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Abstract
The invention discloses a kind of standard for the installation of boiler tube board quartz socket tube to check tool, after two quartz socket tubes are installed in boiler tube board vacuum line, the characteristics of uniform gap being formed during using its coaxial socket, standard being checked to, the gap of tubular inspection portion to the quartz socket tube socket part of tool is parallel to stretch into, the gap whether can be freely stretched into according to it to judge whether two quartz socket tubes are in coaxial socket state, the degree of accuracy installed each time so as to Reliable guarantee quartz socket tube, and prevent the product rejection problem because caused by installation offset problem；And tubular inspection portion can be protected and be controlled built-in length during its inspection by setting maintaining part in tubular inspection portion tail end；Also it can quick and precisely judge whether the socket of two quartz socket tubes meets standard by setting watch window in maintaining part.The unified installation check standard that the present invention achievable quartz socket tube quantifies when installing, it is simple and easy to use.
Description
Technical field
The present invention relates to semiconductor integrated circuit apparatus maintenance technology field, is used for boiler tube machine more particularly, to one kind
The standard of platform quartz socket tube installation checks tool.
Background technology
For carrying out the boiler tube board of low temperature nitride processing, such as Tokyo electronics public affairs to semiconductor crystal wafer (Wafer)
The boiler tube board of (TEL) Formula HCD types is taken charge of, equipped with two quartz sleeves being socketed with slotted mode in its vacuum line
Manage (sleeve quartz), for collection process product.
Referring to Fig. 1, Fig. 1 is a kind of installment state structural representation of existing Formula HCD board quartz socket tubes.
As shown in figure 1, two quartz socket tubes A, B are the pipe of insertion, it passes through flange end 7,4 and the pipe of one section of vacuum line 1 respectively
Wall 6 is fixedly mounted using clip, can carry out cleaning maintenance to quartz socket tube A, B by dismantling this section of vacuum line.Wherein, stone
The socket end of English sleeve A has one section of necking part 5, is installed with it to stretch into quartz socket tube B socket end and forms gap
Coaxial parallel socket.There is spacing between quartz socket tube A, B and the tube wall 6 of this section of vacuum line, and form the space 2 of sealing,
It can prevent vacuum line from revealing by being passed through nitrogen.Cladding having heaters 3 on the outside of the tube wall of this section of vacuum line, for preventing
The Process Production thing collected at quartz socket tube A, B condenses.
From figure 1 it appears that because quartz socket tube A, B are only fixed by flange end 7,4, its socket end is hanging
State, thus it is more difficult for realizing that quartz socket tube A, B gap are coaxially socketed.
At present during installation quartz socket tube, mainly by the installation gimmick and experience of engineer, whether it installs accurately main
To rely on and visually inspect, therefore the gap being relatively difficult to ensure between two quartz socket tubes of card is coaxially socketed.Also, different engineer's peace
The quartz socket tube of dress can not seek unity of standard, so as to it cannot be guaranteed that the reliability of installation quality.Once the and installation of quartz socket tube
Position produces deviation, product during low temperature nitride will be caused to accumulate, so that causing particle (particle) defect that flows back.Backflow
Particle is typically fall on and (falls) little particle, and main integrated distribution is at the top of cassette in crystal round fringes position
Gradually successively decrease situation to bottom quantity, this can cause the serious consequence of product rejection.
Therefore, in order to prevent quartz socket tube installation skew cause boiler tube Particle caused by product rejection ask
Topic, design one are used for the standard inspection fixture that quartz socket tube is coaxially socketed installation, just seemed particularly necessary.
The content of the invention
It is an object of the invention to overcome drawbacks described above existing for prior art, there is provided one kind is used for boiler tube board quartz sleeve
Pipe installation standard check tool, can Reliable guarantee quartz socket tube installation when the degree of accuracy, and prevent because installation skew ask
Product rejection problem caused by topic.
To achieve the above object, technical scheme is as follows：
A kind of standard for the installation of boiler tube board quartz socket tube checks tool, and the quartz socket tube is located at boiler tube board
Insertion pipe in vacuum line, including first, second quartz socket tube, it is inner with the mutually inside and outside parallel socket of slotted mode, its
Outer end is fixedly mounted with the tube wall of one section of vacuum line respectively, and the standard checks that tool includes：
Inspection portion, it is one section of pipe, its front end is used for after the fixed installation of first, second quartz socket tube, from the second quartz
The gap of sleeve pipe outer end to first, second quartz socket tube socket part is parallel to be stretched into, whether can freely stretch into the gap according to it
To judge whether first, second quartz socket tube is coaxially socketed；
Maintaining part, fixed with the pipe tail end in inspection portion, during for keeping the round tube shape in inspection portion and control its inspection
Built-in length.
Preferably, between the nominal when tube wall thickness in the inspection portion and first, second quartz socket tube are coaxially socketed
Gap is corresponding, and its it is parallel stretch into when formed gap coordinate.
Preferably, the pipe front end in the inspection portion, which has, helps to stretch into first, second quartz socket tube socket part gap
Introduction part.
Preferably, the section of the introduction part is taper or arc.
Preferably, the maintaining part is to be perpendicularly fixed at the pedestal of inspection portion pipe tail end.
Preferably, the pedestal is flange shape.
Preferably, the maintaining part is provided with the watch window communicated with inspection portion pipe.
Preferably, the watch window is penetrated to be formed by the pipe tail end in inspection portion to maintaining part.
Preferably, the standard checks that tool is made of teflon material.
Preferably, the standard checks that tool use is integrally formed or machining is made.
It can be seen from the above technical proposal that the present invention in boiler tube board vacuum line by installing two quartz socket tubes
Afterwards, using its it is coaxial be socketed when form uniform gap the characteristics of, check the tubular inspection portion of tool to quartz socket tube standard
The gap of socket part is parallel to be stretched into, you can judges whether two quartz socket tubes are according to whether it can freely stretch into the gap
Coaxial socket state, the degree of accuracy installed each time so as to Reliable guarantee quartz socket tube, and prevent because installation skew is asked
Product rejection problem caused by topic；Meanwhile the pedestal maintaining part by being set in tubular inspection portion tail end, it can be examined in standard
Look into and tubular inspection portion is protected when tool is used and deposited, avoid its stress deformation, and can control stretching during its inspection
Enter length；In addition, by setting watch window in pedestal maintaining part, the pipe observation caliber that can pass through inspection portion checks that tool exists
Mated condition in two quartz socket tube socket gaps, so as to rapidly and accurately judge whether the socket of two quartz socket tubes accords with
Standardization.The unified installation check standard quantified when being installed by the achievable quartz socket tube of the present invention, it is simple and easy to use.
Brief description of the drawings
Fig. 1 is a kind of installment state structural representation of existing Formula HCD board quartz socket tubes；
Fig. 2-Fig. 3 is that a kind of standard inspection for the installation of boiler tube board quartz socket tube of a preferred embodiment of the present invention is controlled
Lamps structure schematic diagram；
Fig. 4 is that a kind of standard for the installation of boiler tube board quartz socket tube of a preferred embodiment of the present invention checks tool
Use state diagram.
Embodiment
Below in conjunction with the accompanying drawings, the embodiment of the present invention is described in further detail.
It should be noted that in following embodiments, when embodiments of the present invention are described in detail, in order to clear
Ground represents the structure of the present invention in order to illustrate, special that structure in accompanying drawing is not drawn according to general proportion, and has carried out part
Amplification, deformation and simplified processing, therefore, should avoid being understood in this, as limitation of the invention.
In embodiment of the invention below, Fig. 2-Fig. 3 is referred to, Fig. 2-Fig. 3 is that the present invention one is preferably implemented
A kind of standard for the installation of boiler tube board quartz socket tube of example checks jig structure schematic diagram.As shown in Fig. 2 the one of the present invention
The standard that kind is used for the installation of boiler tube board quartz socket tube checks tool, including the 22 two primary structure portions in inspection portion 21 and maintaining part
Point.Inspection portion 21 is one section of pipe with certain length, and maintaining part 22 is fixedly connected with the pipe tail end in inspection portion 21.
Referring to Fig. 4, Fig. 4 is a kind of standard for the installation of boiler tube board quartz socket tube of a preferred embodiment of the present invention
Check the use state diagram of tool.As shown in figure 4, the stove with Tokyo electronics corporation (TEL) Formula HCD types
Exemplified by pipe board, equipped with two quartz socket tube (sleeve being socketed with slotted mode in the vacuum line 11 of the board
Quartz), respectively first, second quartz socket tube 12,15, for collection process product.First, second quartz socket tube 12,
15 pipe to penetrate, it is fixedly mounted by flange shape outer end 19,16 and one section of tube wall 18 of vacuum line respectively, such as can
It is fixedly mounted, and can be sealed by sealing ring using clip.Can be by dismantling this section of vacuum line, to first, second stone
English sleeve pipe carries out cleaning maintenance.The inner of first, second quartz socket tube 12,15 is socket end, wherein, the first quartz socket tube 12
The inner has one section of parallel necking part 17, to stretch into the inner of the second quartz socket tube 15, within, external square type and second quartzy
Sleeve pipe is installed, and forms the coaxial parallel socket in gap.The tube wall of first, second quartz socket tube 12,15 and this section of vacuum line
There is spacing between 18, and form the space 13 of sealing, can prevent vacuum line from revealing by being passed through nitrogen.This section of vacuum tube
Cladding having heaters 14 on the outside of the tube wall on road, for the Process Production thing for preventing from collecting at first, second quartz socket tube 12,15
Condense.
Refer to Fig. 2 and combine and refer to Fig. 4.Standard check the front end 24 in tool pipe inspection portion 21 be used for first, the
After two quartz socket tubes are fixedly mounted, gap from from the second quartz socket tube outer end to first, second quartz socket tube socket part is parallel to stretch
Enter, whether can freely stretch into the gap according to it to judge whether first, second quartz socket tube is coaxially socketed.This is to make use of
The characteristics of should forming a circle uniform gap in its set junction when the coaxial socket of first, second quartz socket tube composition.
As a preferred embodiment, the thickness of tube wall 23 in inspection portion 21 can be same with first, second quartz socket tube
Axle be socketed when nominal clearance it is corresponding, and can pipe is parallel stretch into the gap when formed gap coordinate.
As above-mentioned further preferred embodiment, the pipe front end 24 in inspection portion 21, which can have, helps it to stretch into the
First, the introduction part in the second quartz socket tube socket part gap.For example, the pipe front end in inspection portion can be processed into taper or
The introduction part of arc section (figure omits).
Fig. 4 is referred to please continue to refer to Fig. 2 and combination.As a preferred embodiment, maintaining part 22 can be vertical solid
Due to the pedestal of the pipe tail end of inspection portion 21.The maintaining part of base construction can be used for keeping the round tube shape in inspection portion and control it
Built-in length during inspection.So, when standard checks that tool does not have to or deposited, inspection portion 21 is carried using pedestal 22, is kept away
Exempt from it to touch hard thing and damage；Or check tool in use, pedestal 22 can play a part of handle, so as to right in standard
Tubular inspection portion 21 is protected, and is avoided its stress and is deformed；The maintaining part 22 of base construction can also by its with
The distance between second quartz socket tube outer end judges the depth that inspection portion 21 enters, and to control built-in length during its inspection, keeps away
Exempt to be excessively entering into the necking part for touching the first quartz socket tube.
As above-mentioned further preferred embodiment, pedestal 22 can be processed into along the pipe tail end of inspection portion 21 it is parallel to
The flange shape of outer setting.
Referring to Fig. 3, it is Fig. 2 left view structure.Maintaining part 22 can be set a watch window 25, watch window 25 with
The pipe of inspection portion 21 communicates, and the pipe observation caliber that can pass through inspection portion checks that tool is socketed in gap in two quartz socket tubes
Mated condition, so as to rapidly and accurately judge whether the socket of first, second quartz socket tube meets standard.It is preferable as one
Embodiment, the tail end of watch window 25 and inspection portion pipe 21 can be penetrated and set, maximized watch window, seen with facilitating
Examine.
The above-mentioned standard of the present invention checks that tool can be made of such as teflon material, and can use and be integrally formed or cut
Cut and be processed into.Hardness can also be used less than quartz socket tube 12,15 and with certain wear-resisting, decay resistance material and
Corresponding manufacturing process is made.
As shown in figure 4, the above-mentioned standard of the present invention checks tool 20 when in use, in first, second quartz socket tube 12,15
After in the vacuum line 11 of boiler tube board, check the tubular inspection portion 21 of tool 20 by the of diagram right side standard
The outer end of two quartz socket tube 15 is stretched into the second quartz socket tube pipe, and parallel is stretched between two quartz socket tubes 12,15 socket parts
Gap.The characteristics of uniform gap is necessarily formed when being coaxially socketed using first, second quartz socket tube, if the energy of tubular inspection portion 21
It is enough freely to stretch into the gap of two quartz socket tube socket parts, then it can determine whether that first, second quartz socket tube 12,15 is in coaxial sleeve
Connect state；, whereas if during the installation skew of first, second quartz socket tube 12,15, its mutual gap necessarily varies, then
Tubular inspection portion 21 cannot be by the small position in gap, so as to can determine whether that first, second quartz socket tube 12,15 is in non-
Coaxial socket state.Standard is held when maintaining part 22 helps to check and checks that the parallel approach axis of tool 20 and control enter
Dynamics.
In summary, it is coaxial using its after the present invention in boiler tube board vacuum line by installing two quartz socket tubes
The characteristics of uniform gap is formed during socket, standard being checked to, the gap of tubular inspection portion to the quartz socket tube socket part of tool is put down
Row stretches into, you can judge whether two quartz socket tubes are in coaxial socket state according to whether it can freely stretch into the gap,
The degree of accuracy installed each time so as to Reliable guarantee quartz socket tube, and prevent the product because caused by installation offset problem
Scrap problem；Meanwhile the pedestal maintaining part by being set in tubular inspection portion tail end, it can check that tool is used and deposited in standard
Tubular inspection portion is protected when putting, avoids its stress deformation, and built-in length during its controllable inspection；It is in addition, logical
Cross and watch window is set in pedestal maintaining part, the pipe observation caliber that can pass through inspection portion checks tool in two quartz sleeve pipe sleeves
The mated condition in gap is connect, so as to rapidly and accurately judge whether the socket of two quartz socket tubes meets standard.Pass through this
The unified installation check standard quantified during quartz socket tube installation can be achieved in invention, simple and easy to use.
Above-described is only the preferred embodiments of the present invention, the embodiment and the patent guarantor for being not used to the limitation present invention
Scope, therefore the equivalent structure change that every specification and accompanying drawing content with the present invention is made are protected, similarly should be included in
In protection scope of the present invention.
Claims (10)
1. a kind of standard for the installation of boiler tube board quartz socket tube checks tool, the quartz socket tube is true located at boiler tube board
Insertion pipe in blank pipe road, including first, second quartz socket tube, it is inner with the mutually inside and outside parallel socket of slotted mode, outside it
End is fixedly mounted with the tube wall of one section of vacuum line respectively, it is characterised in that the standard checks that tool includes：
Inspection portion, it is one section of pipe, its front end is used for after the fixed installation of first, second quartz socket tube, from the second quartz socket tube
The gap of outer end to first, second quartz socket tube socket part is parallel to be stretched into, whether can freely stretch into the gap to sentence according to it
Whether disconnected first, second quartz socket tube is coaxially socketed；
Maintaining part, fixed with the pipe tail end in inspection portion, for keeping the round tube shape in inspection portion and controlling stretching during its inspection
Enter length.
2. the standard according to claim 1 for the installation of boiler tube board quartz socket tube checks tool, it is characterised in that institute
The nominal clearance stated when the tube wall thickness in inspection portion is coaxially socketed with first, second quartz socket tube is corresponding, and flat at it
Gap is formed when row stretches into coordinate.
3. the standard according to claim 1 or 2 for the installation of boiler tube board quartz socket tube checks tool, its feature exists
In the pipe front end in the inspection portion has the introduction part for helping to stretch into first, second quartz socket tube socket part gap.
4. the standard according to claim 3 for the installation of boiler tube board quartz socket tube checks tool, it is characterised in that institute
The section for stating introduction part is taper or arc.
5. the standard according to claim 1 for the installation of boiler tube board quartz socket tube checks tool, it is characterised in that institute
It is to be perpendicularly fixed at the pedestal of inspection portion pipe tail end to state maintaining part.
6. the standard according to claim 5 for the installation of boiler tube board quartz socket tube checks tool, it is characterised in that institute
It is flange shape to state pedestal.
7. the standard for being used for the installation of boiler tube board quartz socket tube according to claim 1 or 5 checks tool, its feature exists
In the maintaining part is provided with the watch window communicated with inspection portion pipe.
8. the standard according to claim 7 for the installation of boiler tube board quartz socket tube checks tool, it is characterised in that institute
Watch window is stated to penetrate to be formed to maintaining part by the pipe tail end in inspection portion.
9. the standard according to claim 1 for the installation of boiler tube board quartz socket tube checks tool, it is characterised in that institute
State standard and check that tool is made of teflon material.
10. the standard according to claim 9 for the installation of boiler tube board quartz socket tube checks tool, it is characterised in that
The standard checks that tool use is integrally formed or machining is made.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610164453.7A CN105632983B (en) | 2016-03-22 | 2016-03-22 | A kind of standard for the installation of boiler tube board quartz socket tube checks tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610164453.7A CN105632983B (en) | 2016-03-22 | 2016-03-22 | A kind of standard for the installation of boiler tube board quartz socket tube checks tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105632983A CN105632983A (en) | 2016-06-01 |
| CN105632983B true CN105632983B (en) | 2018-03-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610164453.7A Active CN105632983B (en) | 2016-03-22 | 2016-03-22 | A kind of standard for the installation of boiler tube board quartz socket tube checks tool |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105632983B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5002503A (en) * | 1989-09-08 | 1991-03-26 | Viacom International, Inc., Cable Division | Coaxial cable connector |
| CN101368867A (en) * | 2008-07-11 | 2009-02-18 | 王颖峰 | Self-locking type manual plugging apparatus |
| CN201656187U (en) * | 2009-12-25 | 2010-11-24 | 合肥佰特微波技术有限公司 | Adapter for fast plugging and unplugging test |
| CN201688820U (en) * | 2010-05-07 | 2010-12-29 | 中国葛洲坝集团股份有限公司 | Hollow circular sleeve center positional deviation measurement device |
-
2016
- 2016-03-22 CN CN201610164453.7A patent/CN105632983B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5002503A (en) * | 1989-09-08 | 1991-03-26 | Viacom International, Inc., Cable Division | Coaxial cable connector |
| CN101368867A (en) * | 2008-07-11 | 2009-02-18 | 王颖峰 | Self-locking type manual plugging apparatus |
| CN201656187U (en) * | 2009-12-25 | 2010-11-24 | 合肥佰特微波技术有限公司 | Adapter for fast plugging and unplugging test |
| CN201688820U (en) * | 2010-05-07 | 2010-12-29 | 中国葛洲坝集团股份有限公司 | Hollow circular sleeve center positional deviation measurement device |
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| Publication number | Publication date |
|---|---|
| CN105632983A (en) | 2016-06-01 |
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