CN105628247B - Ultra-high resolution temperature sensor based on external liquid bag and spectrum valley point - Google Patents
Ultra-high resolution temperature sensor based on external liquid bag and spectrum valley point Download PDFInfo
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- CN105628247B CN105628247B CN201610085876.XA CN201610085876A CN105628247B CN 105628247 B CN105628247 B CN 105628247B CN 201610085876 A CN201610085876 A CN 201610085876A CN 105628247 B CN105628247 B CN 105628247B
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Abstract
The invention discloses an ultrahigh resolution temperature sensor based on an external liquid bag and a spectrum valley point, which consists of an external liquid bag, a metal block, a vertical waveguide, a horizontal waveguide, two metal films and a horizontal signal light; the signal light adopts broadband light or sweep frequency light; the liquid bag is connected with the vertical waveguide, and the metal block is arranged in the vertical waveguide and can move; the vertical waveguide and the horizontal waveguide are connected. The invention has compact structure, small volume and convenient integration, and the sensitivity of the temperature sensor can reach-2.3037 multiplied by 109nm/℃。
Description
Technical Field
The invention relates to an ultrahigh-resolution nanoscale temperature sensor, in particular to an ultrahigh-resolution temperature sensor based on an external liquid sac structure and a spectrum valley point.
Background
The temperature sensor is one of the most widely used sensors in practical application, and the temperature sensor is ubiquitous from a cold and hot table in our life, a thermometer to a large instrument and a temperature control device on an integrated circuit. Although the traditional temperature sensors such as thermal resistor, platinum resistor, bimetallic switch, etc. have respective advantages, they are no longer suitable for miniature and high-precision products. The semiconductor temperature sensor has the advantages of high sensitivity or resolution, small volume, low power consumption, strong anti-interference capability and the like, so that the semiconductor temperature sensor is widely applied to semiconductor integrated circuits.
The waveguide based on the surface plasmon polariton can break through the limit of diffraction limit, and realize the processing and transmission of the optical information with the nanometer scale. The surface plasmon polariton is a surface electromagnetic wave which is formed by coupling of an electromagnetic wave and free electrons on the surface of a metal and propagates on the surface of the metal when the electromagnetic wave is incident on a metal and medium interface. Many devices based on surface plasmon structures have been proposed, such as filters, circulators, logic gates, optical switches, etc., according to the properties of surface plasmons. These devices are relatively simple in structure and very convenient for optical circuit integration.
Currently, temperature sensors have been proposed that are 70 pm/deg.C or-0.65 nm/deg.C depending on the nature of the surface plasmon. Although these surface plasmon temperature sensors are small in volume, the sensitivity or resolution is not high.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide an ultra-high resolution temperature sensor with an MIM structure, which is convenient to integrate.
In order to achieve the purpose, the invention adopts the following design scheme:
the invention relates to an ultrahigh resolution temperature sensor based on an external liquid bag and a spectrum valley point, which consists of the external liquid bag, a metal block, a vertical waveguide, a horizontal waveguide, two metal films and a horizontal signal light; the signal light adopts broadband light or sweep frequency light; the liquid bag is connected with the vertical waveguide, and the metal block is arranged in the vertical waveguide and can move; the vertical waveguide and the horizontal waveguide are connected.
The substance in the liquid bag is a substance with high thermal expansion coefficient.
The substance with high expansion coefficient is alcohol or mercury.
The liquid sac is in a cubic shape, a spherical shape, an ellipsoidal shape or an irregular shape.
The metal is gold or silver.
The metal is silver.
The horizontal waveguide and the vertical waveguide are waveguides of an MIM structure.
The medium in the horizontal waveguide is air.
The wavelength range of the signal light is 700nm-1000nm of spectrum signals.
Compared with the prior art, the invention has the beneficial effects that:
1. compact structure, small volume and convenient integration.
2. The sensitivity of the temperature sensor can reach-2.3037 multiplied by 109nm/deg.C, response time on the order of microseconds.
Drawings
Fig. 1 is a schematic two-dimensional structure of a first embodiment of the temperature sensor of the present invention.
In the figure: external liquid bag 1 metal block 2 vertical waveguide 3 metal film 4 horizontal waveguide 5 metal film 6 horizontal signal light 200
Fig. 2 is a schematic two-dimensional structure of a second embodiment of the temperature sensor of the present invention.
In the figure: external liquid bag 1 metal block 2 vertical waveguide 3 metal film 4 horizontal waveguide 5 metal film 6 horizontal signal light 200
Fig. 3 is a graph of transmission spectra of signal light of different wavelengths.
Fig. 4 is a graph of transmission spectrum versus temperature.
Fig. 5 is a graph of the amount of wavelength shift of a transmission spectrum valley point versus temperature.
Detailed Description
The invention is described in detail below with reference to the accompanying drawings.
The temperature sensor shown in fig. 1 is composed of an external liquid bag 1, a metal block 2, a vertical waveguide 3, a horizontal waveguide 5, two metal films 4 and 6 (metal films which are not etched) and a horizontal signal light 200 (the waveguide surface forms surface plasmon); the signal light adopts broadband light or sweep frequency light; the external liquid bag 1 is connected with the vertical waveguide 3, and the metal block 2 is arranged in the vertical waveguide and can move; the vertical waveguide 3 and the horizontal waveguide 5 are connected; the liquid bag is spherical, the radius R of the liquid bag is 0.1mm, the specific heat capacity of the substance in the liquid bag 1 is low, and the substance is a substance with high thermal expansion coefficient, the substance in the liquid bag 1 (temperature sensitive cavity) is a substance with high thermal expansion coefficient, the substance with high thermal expansion coefficient is alcohol or mercury, and the substance with high thermal expansion coefficient is preferably alcohol; the metal is gold or silver, preferably silver, and the thickness of the metal film (hereinafter, the thickness is expressed as h)1Expressed) adopts a value range of more than 100nm, and the thickness of 100nm is the best; the metal block 2 is arranged in the vertical waveguide 3 and can move, the length m of the moving metal block 2 is in a value range of 80nm-150nm, the length of 125nm is the best, the distance s between the moving metal block 2 and the horizontal waveguide 5 is in a distance range of 0nm-200nm and is determined by the position of the metal block 2, the metal block 2 is gold or silver, and the best is silver; the vertical waveguide 3 and the horizontal waveguide 5 are connected; the vertical waveguide 3 and the horizontal waveguide 5 are waveguides with MIM structures, namely the MIM waveguides are of metal-insulator-metal structures, and insulators are non-conductive transparent substances; the non-conductive transparent substance adopts air, silicon dioxide or silicon; the vertical waveguide 3 is located at the upper end of the horizontal waveguide 5(ii) a The width b of the vertical waveguide 3 is in a value range of 30nm-60nm, the width of 35nm is the best, the length M of the vertical waveguide 3 is more than 200nm, and the length of 300nm is the best; the distance a from the left edge of the vertical waveguide 3 to the left edge of the metal film 6 is in a value range of 350nm-450nm, and 400nm is the best distance. The width d of the horizontal waveguide 5 is in a value range of 30nm-100nm, the width of 50nm is the best, and the medium in the horizontal waveguide 5 is air; the distance c from the lower edge of the horizontal waveguide 5 to the edge of the metal film 6 is in a value range larger than 150 nm; the wavelength range of the signal light adopts a spectrum signal of 700nm-1000 nm; the volume of the alcohol is changed through the change of the temperature, the alcohol expands to push the movable metal block 3 to move towards the horizontal waveguide 5 to change the length of an air section in the vertical waveguide 4, so that the transmissivity of the signal light is changed, and the information of the temperature change can be obtained according to the information of the movement of the transmission spectrum valley point. When the temperature is reduced to the initial temperature again, the metal block 3 returns to the position of the initial pressure balance under the action of the external atmospheric pressure, so that the next detection is convenient.
The transmittance of the signal light is changed when the movable metal block 3 moves downwards, and the movable metal block 3 moves downwards under the control of temperature, so that the change of the temperature affects the position of the transmission spectrum valley point of the signal light, and the information of the temperature change can be obtained according to the information of the movement of the transmission spectrum valley point.
The volume expansion coefficient of the alcohol is alphaethanol＝1.1×10-3/° c, density at room temperature (20 ℃) of 0.789g/cm3. The coefficient of linear expansion of silver is alphaAg＝19.5×10-6DEG C. The silver expands negligibly at the same temperature change compared to the expansion coefficient of alcohol. The effect of temperature changes on the volume of silver is no longer considered in the present invention. The relation between the position change of the metal block and the temperature can be calculated according to the volume of the liquid bag and the sectional area of the movable metal block, thereby defining a proportional coefficient sigma representing the moving distance of the metal block corresponding to the change of the unit temperature
This formula can also be used as a measure of the temperature sensitivity of the structure. According to the formula, the influence of the sectional area of the circular absorption cavity and the width of the movable metal block on the position change of the metal block is relatively large, and the total consideration of b is 35 nm. σ ═ 1.32 × 109nm/deg.C, the result is the amount of movement of the metal block as a function of temperature.
In the embodiment shown in fig. 2, another schematic structural diagram of a temperature sensor is shown, wherein the temperature sensor is composed of an external liquid bag 1, a metal block 2, a vertical waveguide 3, a horizontal waveguide 5, two metal films 4 and 6 (metal films which are not etched) and a horizontal signal light 200 (surface plasmons are formed on the surface of the waveguide); the signal light adopts broadband light or sweep frequency light; the external liquid bag 1 is connected with the vertical waveguide 3, and the metal block 2 is arranged in the vertical waveguide and can move; the vertical waveguide 3 and the horizontal waveguide 5 are connected; the section of the liquid bag is a regular hexagonal cone, the side length r of the liquid bag is 0.1mm, the specific heat capacity of a substance in the liquid bag 1 (a temperature sensitive cavity) is low, the substance in the liquid bag 1 is a substance with a high thermal expansion coefficient, the substance with the high thermal expansion coefficient is alcohol or mercury, and the substance with the high thermal expansion coefficient is preferably alcohol; the metal is gold or silver, preferably silver, and the thickness of the metal film is h1The value range of more than 100nm is adopted, and the thickness of 100nm is the best; the metal block 2 is arranged in the vertical waveguide 3 and can move, the length m of the moving metal block 2 is in a value range of 80nm-150nm, the length of 125nm is the best, the distance s between the moving metal block 2 and the horizontal waveguide 5 is in a distance range of 0nm-200nm and is determined by the position of the metal block 2, the metal block 2 is gold or silver, and the best is silver; the vertical waveguide 3 and the horizontal waveguide 5 are connected; the vertical waveguide 3 and the horizontal waveguide 5 are waveguides with MIM structures, namely the MIM waveguides are of metal-insulator-metal structures, and insulators are non-conductive transparent substances; the non-conductive transparent substance adopts air, silicon dioxide or silicon; the vertical waveguide 3 is positioned at the upper end of the horizontal waveguide 5; the width b of the vertical waveguide 3 is in a value range of 30nm-60nm, the width of 35nm is the best, the length M of the vertical waveguide 3 is more than 200nm, and the length of 300nm is the best; the distance a from the left edge of the vertical waveguide 3 to the left edge of the metal film 6 adopts the value range of 350nm-450nm,most preferably 400 nm. The width d of the horizontal waveguide 5 is in a value range of 30nm-100nm, the width of 50nm is the best, and the medium in the horizontal waveguide 5 is air; the distance c from the lower edge of the horizontal waveguide 5 to the edge of the metal film 6 is in a value range larger than 150 nm; the wavelength range of the signal light adopts a spectrum signal of 700nm-1000 nm; the volume of the alcohol is changed through the change of the temperature, the alcohol expands to push the movable metal block 3 to move towards the horizontal waveguide 5 to change the length of an air section in the vertical waveguide 4, so that the transmissivity of the signal light is changed, and the information of the temperature change can be obtained according to the information of the movement of the transmission spectrum valley point. When the temperature is reduced to the initial temperature again, the metal block 3 returns to the position of the initial pressure balance under the action of the external atmospheric pressure, so that the next detection is convenient.
The movable metal block 3 moves downwards to change the distance from the movable metal block to the horizontal waveguide 5, and the transmittance of the signal light is changed accordingly. As shown in FIG. 3, the transmittance of light with wavelengths of 700nm to 1000nm is shown when the values of s are different. The initial position of the metal block is the position at the initial temperature (e.g. 20 ℃), and its value s is 160 nm; it can be seen from the figure that the wavelength position of the valley point of the transmittance of the horizontal waveguide 5 gradually shifts back in red as s decreases. Since the change in position of the movable metal block 3 is temperature dependent. Alcohol region temperature 1.189 x 10 at every increase dT-8The position of the movable metal block 3 is moved down by 15.7nm due to the thermal expansion of alcohol. The downward movement of the movable metal block 3 changes the length of the horizontal waveguide 5, and finally the transmittance of the horizontal waveguide 5 changes. The amount of movement of the movable metal block 3 caused by the unit amount of change in temperature is consistent with the interval scanned here, so the change in transmittance of the horizontal waveguide 5 caused by the change in the value s of the position of the movable metal block 3 can be indirectly expressed by the change in temperature. The amount of s in the results of fig. 3 can be replaced by temperature and the results are shown in fig. 4. From fig. 4, it can be obtained that the change law of the horizontal waveguide transmittance due to the change of s caused by the change of the temperature T is in accordance with that of fig. 3. In fig. 3, it can be seen that dT is 1.189 × 10 per change in temperature-8Degree C, shift of the wave trough point wavelength of the horizontal waveguide transmittance plotThe amount is very large. The temperature information can be known from the spectral characteristics of the output light from the horizontal waveguide 5. And obtaining a wavelength chart of each temperature point corresponding to a transmission rate wave trough point through fine scanning, wherein the relation chart is shown in figure 5. In the figure, the black line with square points is a data point obtained by simulation, and the black line is a curve obtained by fitting according to simulation data. The sensitivity of the temperature sensor can be expressed in d λ/dT. The sensitivity of the data temperature sensor obtained by simulation according to fig. 5 is large or small, and is in a fluctuating state, so that the performance of the temperature sensor is not well represented, and a straight line is obtained by performing interpolation fitting on the original data. According to the expression of the sensitivity of the temperature sensor, the sensitivity of the temperature sensor is obtained as the slope of a black curve: d lambda/dT-2.3037X 109nm/DEG C. In addition, the sensitivity of the corresponding movable metal block 3 to the temperature is increased by increasing the volume of the alcohol containing cavity, and the sensitivity of the temperature sensor is also correspondingly increased.
Although this patent has described some specific examples, various modifications will be apparent to those skilled in the art without departing from the spirit of the invention as defined by the claims.
Claims (5)
1. The utility model provides an ultra-high resolution ratio temperature sensor based on external liquid bag and spectrum valley point which characterized in that: the device consists of an external liquid bag, a metal block, a vertical waveguide, a horizontal waveguide, two metal films and a signal light; the horizontal waveguide and the vertical waveguide are of a metal-insulator-metal waveguide structure; the external liquid bag is connected with the vertical waveguide; the section of the external liquid bag is a spherical or regular hexagonal cone, and the radius of the external liquid bag is 0.1 mm; a metal block is arranged in the vertical waveguide; the vertical waveguide is connected with the horizontal waveguide; the signal light is transmitted along the direction of the horizontal waveguide, and broadband light or sweep light is adopted; the volume of the substance in the external liquid bag is increased through the temperature, the metal block is pushed to move towards the horizontal waveguide, so that the wavelength movement of the transmission spectrum valley point of the signal light is adjusted, and the spectrum signal with the wavelength of 700-1000 nm is obtainedThe detection sensitivity is-2.3037 multiplied by 109nm/DEG C temperature sensor.
2. The ultra-high resolution temperature sensor based on an external liquid bag and a spectrum valley point as claimed in claim 1, wherein: the substance in the external liquid bag is a substance with high thermal expansion coefficient.
3. The ultra-high resolution temperature sensor based on an external liquid bag and a spectrum valley point as claimed in claim 1, wherein: the substance in the external liquid bag is alcohol or mercury.
4. The ultra-high resolution temperature sensor based on an external liquid bag and a spectrum valley point as claimed in claim 1, wherein: the metal block is gold or silver.
5. The ultra-high resolution temperature sensor based on an external liquid bag and a spectrum valley point as claimed in claim 1, wherein: the medium in the horizontal waveguide is air.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
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| CN201610085876.XA CN105628247B (en) | 2016-02-15 | 2016-02-15 | Ultra-high resolution temperature sensor based on external liquid bag and spectrum valley point |
| PCT/CN2016/106687 WO2017140148A1 (en) | 2016-02-15 | 2016-11-21 | Ultra high-resolution temperature sensor on the basis of external liquid capsule and spectrum valley point |
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| CN201610085876.XA CN105628247B (en) | 2016-02-15 | 2016-02-15 | Ultra-high resolution temperature sensor based on external liquid bag and spectrum valley point |
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| CN105716729B (en) * | 2016-02-15 | 2021-03-16 | 深圳市诺安环境安全股份有限公司 | High-resolution temperature sensor based on built-in liquid bag and spectrum valley point |
| CN105571742B (en) * | 2016-02-15 | 2021-04-30 | 深圳市诺安环境安全股份有限公司 | Ultra-high resolution temperature sensor based on external liquid bag and fixed wavelength |
| CN105606250B (en) * | 2016-02-15 | 2021-07-13 | 深圳市诺安太赫兹技术有限公司 | High-resolution temperature sensor based on built-in liquid bag and fixed wavelength |
| CN105628247B (en) * | 2016-02-15 | 2021-03-16 | 深圳市诺安环境安全股份有限公司 | Ultra-high resolution temperature sensor based on external liquid bag and spectrum valley point |
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| WO2017140148A1 (en) | 2017-08-24 |
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