CN105606990A - Aging test box - Google Patents
Aging test box Download PDFInfo
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- CN105606990A CN105606990A CN201510815287.8A CN201510815287A CN105606990A CN 105606990 A CN105606990 A CN 105606990A CN 201510815287 A CN201510815287 A CN 201510815287A CN 105606990 A CN105606990 A CN 105606990A
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- aging test
- casing
- test case
- fan blade
- driven disc
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Abstract
The invention discloses an aging test box which comprises a box body, at least one blade control module and at least one gas filling port. The blade control module comprises a blade driving device outside the box body, a blade driven device which is placed in the box body and separated from the blade driving device, and a blade connected with the blade driven device.
Description
Technical field
The present invention relates to semiconductor manufacture and field of machining, particularly a kind of aging test case.
Background technology
In integrated circuit (IC) manufacture process, due to the reason such as technique, material, inevitably can cause certain divingIn defect, can not find with general detection and quality control method, and need to apply heavily stressed (electric, hot etc.) to deviceDefect is activated and just can be found, as bad in silicon chip surface pollution, welding cavity, chip and shell thermal resistance coupling etc.
The aging test process of integrated circuit is heavily stressed by it is applied exactly, accelerates that its latent defect exposes fastProcess. In national military standard GJB548B, specify, the object of aging test is the device scraping through in order to screen and reject those, canThe product defective to reject, initial failure may occur is a kind of harmless screening test technology. When aging test,Need to require in accordance with regulations to apply the test that one or more stress carry out to device, to expose mass defect and potential the lacking of deviceFall into, and reject defective device, remaining device just has higher dependability.
Fig. 1 is existing aging test case schematic diagram. As shown in Figure 1, aging test plate 105, heater in aging test case104, temperature sensor 107 and fan blade 104 are positioned at casing, and drive motors 101 is positioned at outside casing, and drive motors 101 is by drivingMoving axis 102 connects fan blade 103. In casing, be provided with multiple aging test plates 105, on each aging test plate 105, be provided with manyThe test base 106 of individual placement integrated circuit. Aging test case bottom is provided with heater 104, in order to press desired temperature pairAging test case heats, and aging test upper box part is provided with temperature sensor 107, utilizes this temperature sensor 107 passableDetect the unlatching of temperature in aging test case control heater 104 or close.
At present increasing product and application surface mount device, and device pin top layer mostly is terne metal, the content of tin more than 60%, is easy to oxidized conventionally in long-time high temperature aerobic environment. Along with semiconductor devices ruleThe continuous enhancing of the increasing and environmental consciousness of mould, device adopts BGA, LGA, TQFP, QFN, TSOP etc. multiple highly dense moreThe unleaded surface mount packing forms of degree multi-pipe pin, the tin content of this type of lead-free alloy is conventionally more than 96%, and high tinalloy is being grownJust more easily oxidized in time high temperature aerobic environment. Therefore in, aging test process, be filled with inert gas shielding through deoxygenationAfter, device pin can be not oxidized through long-time high temperature aging test yet, ensured the quality of device in aging test processAnd safety, guarantee that device pin there will not be the quality problems of dry joint and rosin joint in electrical fitting technology link, to product and dressStandby overall quality improves very large effect.
The drive motors of existing aging test case is positioned at casing outside, and fan blade is positioned at box house, and driving shaft is through caseBody connects fan blade. This just need to open a through hole on casing, makes the sealing variation of aging test case. When aging test,In the time having inert gas to be filled with, can let out through described through hole, this use to inert gas causes waste. If leakedAmount larger, can make aging test case inert gas concentration around too high, personnel's breathing is caused to difficulty. And,When aging test, the high temperature of box house can conduct to drive motors by driving shaft, caloric value while making drive motors workFurther increase, drive motors is caused to certain damage.
Summary of the invention
The invention provides a kind of aging test case, solved in existing aging test case sealing poor, drive motors rapid wearThe problem of wound.
For achieving the above object, a kind of aging test case provided by the invention, comprises casing, at least one fan blade control mouldPiece and at least one gas are filled with mouth, and wherein, described fan blade control module comprises the blade driving dress that is positioned at described casing outsidePut, be positioned at the fan blade slave unit that described box house and described blade driving device are separated, and driven with described fan bladeThe fan blade that device is connected.
Wherein, described blade driving device comprises drive motors, the first driving shaft and driving chip, described fan blade slave unitComprise driven disc, the second driving shaft.
Wherein, between described driving chip and described driven disc, there is magnetic induction.
Wherein, described drive motors rotates and drives described the first driving shaft and described driving chip to rotate, and described driving chip turnsThe described driven disc of moving drive rotates, and described driven disc rotates and drives described the second driving shaft and fan blade to rotate.
Wherein, described driving chip is contrary or identical with described driven disc opposite face magnetic pole.
Wherein, described casing arranges at least one gas vent valve.
Wherein, at least one oxygen detection device is set in described casing.
Wherein, in described casing, at least one heater is set.
Wherein, at least one temperature sensor is set for detection of the environment temperature in described casing in described casing.
Wherein, heat-barrier material is equipped with in described casing outside.
Compared with prior art, the present invention has the following advantages:
Aging test case of the present invention, can ensure the sealing of casing, has reduced the use amount of inert gas, simultaneously protectionDrive motors.
Brief description of the drawings
Fig. 1 is existing aging test case schematic diagram;
Fig. 2 is the aging test case schematic diagram in the embodiment of the present invention;
Reference numeral:
101: drive motors; 102: driving shaft; 103: fan blade;
104: heater; 105: aging test plate; 106: aging test socket;
107: temperature sensor;
201: drive motors; 202: driving chip; 203: the first driving shafts;
204: heat-barrier material; 205: driven disc; 206: the second driving shafts;
207: fan blade; 208: temperature sensor; 209: aging test plate;
210: heater; 211: aging test socket; 212: casing;
213: gas is filled with hole; 214: oxygen detection device; 215: gas vent valve.
Detailed description of the invention
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, below in conjunction with accompanying drawing to the present inventionDetailed description of the invention be described in detail.
Processing method of the present invention can be widely used in every field, and can utilize many suitable materialsMaking, is to be illustrated by preferred embodiment below, and the present invention is not limited to this specific embodiment, this area certainlyThe interior known general replacement of those of ordinary skill is encompassed in protection scope of the present invention far and away.
The overall tightness of tradition aging test case is bad, when aging test, is filled with inert gas device pin is protectedTime, gas can let out from the through hole of installation driving shaft, causes the waste of gas, and aging test case surrounding environment is causedImpact, serious words jeopardize personnel health, and meanwhile, heat conducts to drive motors by driving shaft, and drive motors also canCause damage.
In order to tackle the high speed development of IC-components, the present invention proposes a kind of new aging test case, can ensureThe sealing of casing, thus Leakage Gas greatly reduced, can not cause damage to drive motors simultaneously.
Fig. 2 is the overall schematic of the aging test case in the explanation embodiment of the present invention. Below in conjunction with Fig. 2 to of the present inventionEmbodiment is elaborated.
As shown in Figure 2, aging test case of the present invention, comprises casing 212, at least one fan blade control module and at least oneIndividual gas is filled with mouth 213, and wherein, described fan blade control module comprises the blade driving device that is positioned at described casing outside, is positioned atThe fan blade slave unit that described box house and described blade driving device are separated, and be connected with described fan blade slave unitThe fan blade 207 connecing.
In the present embodiment, a fan blade control module is installed, it is installed on the sidepiece of casing 212, changes in casing 212Air flow direction, at the interior formation circulating current of casing 212, makes the Temperature Distribution in casing 212 comparatively even. Particularly, heater210 pairs of interior heating of casing 212, by the parallel each aging test plate 209 of blowing over of fan blade 207 for aging test device heats, heater210 design temperature can be the desired temperature in casing 212, and it is normally according to the aging test temperature of aging test deviceDegree requires and sets, can be between 20 DEG C-250 DEG C, as be 20 DEG C, 100 DEG C, 150 DEG C, 200 DEG C or 250 DEG C.
In the present embodiment, blade driving device is positioned at casing 212 outsides, and fan blade slave unit is positioned at casing 212 inside, twoPerson is separated from each other, and makes casing 212 sidepieces without open a through hole for the two connection, has ensured the integrality of casing 212, fromAnd ensure the sealing of casing 212. Casing 212 outsides are normal temperature environment, and therefore, blade driving device can adopt normal temperature materialDesign, also can adopt exotic material design; Casing 212 internal temperatures can be between 20 DEG C-250 DEG C, and therefore, fan blade is drivenDevice and fan blade 207 all adopt exotic material design. In the present embodiment, blade driving device adopts normal temperature design of material, windLeaf slave unit adopts exotic material design. In aging test process, in the time that the interior temperature of casing 212 raises, because fan blade drivesMoving device separates with fan blade slave unit, can not produce heat conduction between the two.
In other embodiments of the invention, fan blade control module can be installed on bottom half, also can be according to casingSize, 1 above fan blade control module is installed, it is installed on bottom and/or the sidepiece of casing.
In the present embodiment, gas is filled with mouthfuls 213 upper side walls that can be arranged at casing 212. In the present embodiment, the gas being filled withBody is nitrogen, and its quality is lighter than oxygen, for making aging test case can reach good gas-filled protective effect, and upper at casing 212Portion (upper side wall or top), is filled with mouth 213 as being provided with a gas at upper side wall place. Make that nitrogen is parallel to be filled with by topAfter, progressively diffusion, drives heavier oxygen out of casing 212 downwards better downwards.
In other embodiments of the invention, also can be on the sidewall of casing or top, bottom arranges multiple gas and be filled with mouth,As 2,4,8 etc., to make the distribution of gas in casing more even, the protection better effects if of the pin to aging test device.
In other embodiments of the invention, being filled with mouthful gas being filled with by this gas can be nitrogen, can be also heliumOther inert gas such as gas, or the combination of various inert gases, the oxygen content that it can dilute in casing, prevents aging testThe pin of device is oxidized.
In the present embodiment, described blade driving device comprises drive motors 201, the first driving shaft 203 and driving chip 202,Described fan blade slave unit comprises driven disc 205, the second driving shaft 206. Drive motors 201, the first driving shaft 203 and driving chip202 are positioned at casing 212 outsides, and driven disc 205, the second driving shaft 206 are positioned at box house. Due to the driving of casing 212 outsidesMotor 201, the first driving shaft 203, driving chip 202 separate with driven disc 205, second driving shaft 206 of casing 212 inside, oldIn refining process of the test, in the time that the interior temperature of casing 212 raises, do not have box house heat and conduct to drive motors 201, can be not rightIt causes damage.
In the present embodiment, between described driving chip 202 and described driven disc 205, there is magnetic induction. Driving chip 202 is with drivenSheet 205 all adopts magnetic material design, has magnetic induction between the two. In the time that driving chip 202 rotates, according to magnetic induction principle,It can drive driven disc 205 to rotate.
In other embodiments of the invention, the two can adopt electromagnetic material design, makes them have electromagnetic induction.
In the present embodiment, described drive motors 201 rotates and drives described the first driving shaft 203 and described driving chip 202 to turnMoving, described driving chip 202 rotates and drives described driven disc 205 to rotate, and described driven disc 205 rotates and drives described the second driving shaft206 and fan blade 207 rotate. When fan blade 207 is worked, the operation principle of fan blade control module is as follows: drive motors 201 starts, bandMoving the first driving shaft 203 rotates, and the first driving shaft 203 rotates and drives driving chip 202 to rotate, and it is driven that driving chip 202 rotates driveSheet 205 rotates, and driven disc 205 rotates and drives the second driving shaft 206 to rotate, and the second driving shaft 206 rotates and drives fan blade 207 to turnMoving. The rotation of fan blade 207 drives the gas flow in casing 212, makes the temperature in casing 212 even.
In the present embodiment, described driving chip 202 is contrary or identical with described driven disc 205 opposite face magnetic poles. Work as Magnetic PhaseMeanwhile, driving chip 202 rotates, and due to the interattraction of magnetic induction, attracts driven disc 205 to follow its rotation; When Magnetic Phase inverse time,Driving chip 202 rotates, and due to the effect of repelling each other of magnetic induction, promotes driven disc 205 and follows its rotation.
In the present embodiment, described casing 212 arranges at least one gas vent valve 215. In order to improve, gas is filled withEfficiency, drives oxygen out of casing 212 as early as possible, is also provided with a gas vent valve 215 in the bottom center of casing 212, shouldOutlet valve is closed at ordinary times, is inwardly filled with gas when be filled with mouth 213 by gas, during as nitrogen, can open this valve 215, withQuickly the oxygen in casing 212 is driven away, reduce quickly the oxygen content in casing 212. When the oxygen in casing 212Content is low to moderate while reaching requirement, stops being filled with nitrogen in it, closes outlet valve 215 simultaneously, maintains hypoxemia ring in casing 212Border.
In other embodiments of the invention, multiple gas vent valves can be set, to accelerate oxygen content in casingThe speed reducing.
In the present embodiment, interior at least one the oxygen detection device 214 that arranges of described casing 212. Oxygen detection device 214 is establishedBe placed in casing 212 bottoms, for detection of the interior oxygen content of casing 212.
In the present embodiment, at least one heater 210 of the interior placement of described casing 212. Heater 210 is placed on casing 212Sidewall, under the drive of circulating current, casing 212 is heated.
In other embodiments of the invention, can also in casing, place more than 1 heater, as 2,3,5,8Deng, it can be placed in casing uniformly, as placed 8 at sidewall, to realize heating more uniformly.
In the present embodiment, at least one temperature sensor 208 of the interior placement of described casing 212 is for detection of described casing 212Interior environment temperature. Temperature sensor 208 is placed on the top of casing 212, and the temperature that it detects in casing 212, obtains temperatureDetected value. This temperature detection value is compared with the desired temperature of casing 212, if be greater than this desired temperature, close and addsHot device 210, if be less than this desired temperature, heater 210.
In other embodiments of the invention, can also in casing, place more than 1 temperature sensor, as at casingTop, in, bottom places 3 temperature sensors, detects the temperature value at three positions simultaneously, with determine temperature in casing evenlyProperty.
In the present embodiment, heat-barrier material 204 is equipped with in described casing 212 outsides, prevents the exchange heat that casing is inside and outside, ensuresIn casing, the temperature of each several part is even.
Although the present invention with preferred embodiment openly as above, it is not for limiting the present invention, any this area skillArt personnel without departing from the spirit and scope of the present invention, can make possible variation and amendment, therefore guarantor of the present inventionThe scope of protecting should be as the criterion with the scope that the claims in the present invention were defined.
Claims (10)
1. the invention discloses a kind of aging test case, comprise casing, at least one fan blade control module and at least one gasBe filled with mouth, wherein, described fan blade control module comprises the blade driving device that is positioned at described casing outside, is positioned at described casingThe fan blade slave unit that portion and described blade driving device are separated, and the fan blade being connected with described fan blade slave unit.
2. aging test case as claimed in claim 1, is characterized in that: described blade driving device comprises drive motors,One driving shaft and driving chip, described fan blade slave unit comprises driven disc, the second driving shaft.
3. aging test case as claimed in claim 2, is characterized in that: between described driving chip and described driven disc, have magneticInduction.
4. the aging test case as described in claim 1,2 or 3, is characterized in that: described drive motors rotates and drives described theOne driving shaft and described driving chip rotate, and described driving chip rotates and drives described driven disc to rotate, and described driven disc rotates and drivesDescribed the second driving shaft and fan blade rotate.
5. the aging test case as described in claim 1,2,3 or 4, is characterized in that: described driving chip and described driven disc phaseOpposite magnetic pole is contrary or identical.
6. aging test case as claimed in claim 1, is characterized in that: described casing arranges at least one gas vent valveDoor.
7. aging test case as claimed in claim 1, is characterized in that: described casing arranges at least one oxygen detection dressPut.
8. aging test case as claimed in claim 1, is characterized in that: at least one heater is set in described casing.
9. aging test case as claimed in claim 1, is characterized in that: at least one temperature sensor is set in described casingFor detection of the environment temperature in described casing.
10. the aging test case as described in claim 1,2,3,4 or 5, is characterized in that: heat insulation material is equipped with in described casing outsideMaterial.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510815287.8A CN105606990A (en) | 2015-11-24 | 2015-11-24 | Aging test box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510815287.8A CN105606990A (en) | 2015-11-24 | 2015-11-24 | Aging test box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105606990A true CN105606990A (en) | 2016-05-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510815287.8A Pending CN105606990A (en) | 2015-11-24 | 2015-11-24 | Aging test box |
Country Status (1)
| Country | Link |
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60155941A (en) * | 1983-12-26 | 1985-08-16 | Chiyoda Seisakusho:Kk | Controlling method of environmental resistance tester |
| US4881591A (en) * | 1985-09-23 | 1989-11-21 | Sharetree Limited | Oven for the burn-in of integrated circuits |
| CN2764976Y (en) * | 2004-12-30 | 2006-03-15 | 乔保振 | Magnetic transmission draught fan used for sealing equipment |
| CN201716335U (en) * | 2010-05-27 | 2011-01-19 | 北京新润泰思特测控技术有限公司 | Ageing testing box and ageing testing system |
| CN201716395U (en) * | 2010-05-27 | 2011-01-19 | 北京新润泰思特测控技术有限公司 | Aging test box |
| US20120103967A1 (en) * | 2010-11-02 | 2012-05-03 | King Yuan Electronics Co., Ltd. | Burn-in oven having inverter fan and heat regulator |
| US20120206157A1 (en) * | 2011-02-10 | 2012-08-16 | King Yuan Electronics Co., Ltd. | Structure of burn-in oven |
| CN202991543U (en) * | 2012-11-26 | 2013-06-12 | 绍兴明透装甲材料有限责任公司 | Magnetic driving fan of autoclave |
| CN203114664U (en) * | 2013-02-21 | 2013-08-07 | 天津市惠森机电工厂 | Magnetic transmission non-leakage centrifugal fan |
| CN205427132U (en) * | 2015-11-24 | 2016-08-03 | 北京新润泰思特测控技术有限公司 | Aging test case |
-
2015
- 2015-11-24 CN CN201510815287.8A patent/CN105606990A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60155941A (en) * | 1983-12-26 | 1985-08-16 | Chiyoda Seisakusho:Kk | Controlling method of environmental resistance tester |
| US4881591A (en) * | 1985-09-23 | 1989-11-21 | Sharetree Limited | Oven for the burn-in of integrated circuits |
| CN2764976Y (en) * | 2004-12-30 | 2006-03-15 | 乔保振 | Magnetic transmission draught fan used for sealing equipment |
| CN201716335U (en) * | 2010-05-27 | 2011-01-19 | 北京新润泰思特测控技术有限公司 | Ageing testing box and ageing testing system |
| CN201716395U (en) * | 2010-05-27 | 2011-01-19 | 北京新润泰思特测控技术有限公司 | Aging test box |
| US20120103967A1 (en) * | 2010-11-02 | 2012-05-03 | King Yuan Electronics Co., Ltd. | Burn-in oven having inverter fan and heat regulator |
| US20120206157A1 (en) * | 2011-02-10 | 2012-08-16 | King Yuan Electronics Co., Ltd. | Structure of burn-in oven |
| CN202991543U (en) * | 2012-11-26 | 2013-06-12 | 绍兴明透装甲材料有限责任公司 | Magnetic driving fan of autoclave |
| CN203114664U (en) * | 2013-02-21 | 2013-08-07 | 天津市惠森机电工厂 | Magnetic transmission non-leakage centrifugal fan |
| CN205427132U (en) * | 2015-11-24 | 2016-08-03 | 北京新润泰思特测控技术有限公司 | Aging test case |
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Application publication date: 20160525 |