CN105588708A - Test system and test method for testing high-precision transmittance of optical filter - Google Patents
Test system and test method for testing high-precision transmittance of optical filter Download PDFInfo
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- CN105588708A CN105588708A CN201510941431.2A CN201510941431A CN105588708A CN 105588708 A CN105588708 A CN 105588708A CN 201510941431 A CN201510941431 A CN 201510941431A CN 105588708 A CN105588708 A CN 105588708A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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Abstract
The invention discloses a test system and a test method for testing the high-precision transmittance of an optical filter. The system comprises a laser pump broadband light source, a light modulator, a double-cascaded monochromator system, a light collimating system, a test camera obscura, a UV-visible photomultiplier, a high-voltage power supply module, an optoelectronic signal processing module, a lock-in amplifier and an industrial control computer. During the test, the light generated by a light source is modulated by the light modulator to enter the double-cascaded monochromator system, and then the high-quality monochromatic light is generated. Through the light collimating system, the light output by a grating monochromator is converted into the quasi-parallel and small-beam-diameter monochromatic light and then the monochromatic light enters a to-be-tested optical filter. After being attenuated by the optical filter, the light enters the photomultiplier to generate an amplified photocurrent signal. After that, the photocurrent signal, output by the photomultiplier, is processed by the signal processing module and then is fed into the lock-in amplifier for phase-sensitive detection. According to the invention, based on the operating mode of the light modulator and the lock-in amplifier, the transmission rate of the optical filter can be accurately measured.
Description
Technical field
The invention belongs to low-light technical field, particularly a kind of test macro and test of optical filter high accuracy transmitanceMethod.
Background technology
Transmitance is to evaluate the major parameter of optical filter high accuracy characteristic. Spectrum how accurately to measure optical filter is saturatingCross rate, direct relation preparation and the Performance Detection thereof of optical filter, also gives to a certain extent solar blind ultraviolet detector partPracticality provides guidance. If the optical constant of optical filter is higher, be extremely micro-through optical filter decay optical signal laterWeak.
At present, domestic optical constant is greater than to the report that 10 optical filter transmission measurement is not correlated with, does not more mentionThe detection technique of its transmitance and method.
Summary of the invention
The object of the present invention is to provide a kind of test macro and method of testing of optical filter high accuracy transmitance, forMeasuring optical optical filter transmitance, its detectable go out the optical filter OD value transmitance that is 12.
The technical solution that realizes the object of the invention is: a kind of test macro of optical filter high accuracy transmitance, bagDraw together laser pump (ing) wideband light source, optical modulator, twin-stage receipts or other documents in duplicate look instrument system, optical alignment system, test camera bellows, ultraviolet canSee photomultiplier, high-voltage power module, Photoelectric Signal Processing module, lock-in amplifier and industrial computer, described purpleOuter visible photomultiplier and tested optical filter are all arranged in test camera bellows, and tested optical filter be positioned at optical alignment system andBetween UV, visible light photoelectricity multiplier tube, two optical filter wheels of described twin-stage receipts or other documents in duplicate look instrument system light inlet and light-emitting window respectively200nm and 350nm high-pass filter are housed;
Laser pump (ing) wideband light source generation white light becomes to have the optical signal of setpoint frequency through light modulator modulates, through twin-stage receipts or other documents in duplicateThe grating of look instrument system produces pure monochromatic light, and it is quasi-parallel, little beam diameter that monochromatic light is incident to optical alignment system transitionMonochromatic light, then be incident to tested optical filter; Monochromatic light after tested optical filter decay is incident to the multiplication of UV, visible light photoelectricityPipe, the photo-signal that becomes to amplify through opto-electronic conversion under the effect of high-voltage power module; Right in signal processing module againThe photo-signal of photomultiplier output is sent into lock-in amplifier and is carried out phase-sensitive detection and obtain after carrying out filter and amplification and processingTo stable voltage signal; The voltage signal values that industrial computer obtains according to lock-in amplifier is determined the luminous power seeing throughValue, is the transmitance of tested optical filter with the ratio of the luminous power of non-filtered sheet decay.
A kind of optical filter high accuracy transmission measurement method, comprises the following steps:
The light modulation that step 1, optical modulator send laser pump (ing) wideband light source becomes the optical signal of setpoint frequency;
Step 2, twin-stage receipts or other documents in duplicate look instrument system convert the optical signal of modulation in the monochromatic light of setting wavelength;
The monochromatic light of step 3, monochromator output is incident to the light that optical alignment system transition is quasi-parallel, little beam diameter, thenIrradiate tested optical filter;
Step 4, monochromatic light after the decay of tested optical filter are incident to UV, visible light photoelectricity multiplier tube, at high voltage source mouldThe photo-signal being amplified through opto-electronic conversion under the effect of piece;
Step 5, signal processing module carry out filter amplifying processing to the photo-signal of photomultiplier output, send into lockPhase amplifier carries out phase-sensitive detection and obtains stable value of electrical signals;
Step 6, the signal value obtaining according to step 5 are determined luminous power, calculate the transmitance of optical filter.
Compared with prior art, its remarkable advantage is in the present invention:
(1) the present invention has suppressed bias light and the spurious signal in environment effectively, filters out and incident optical signal frequencySimilar effective signal of telecommunication, has improved signal to noise ratio;
(2) the present invention has proposed concrete method of testing and the test macro of optical filter high accuracy transmitance first, itsThe limit is surveyed OD value up to 12, has filled up the blank of domestic optical filter high accuracy transmission measurement method and technology;
(3) the present invention adopts the mode of operation of optical modulator and lock-in amplifier, has scientifically provided optical filter highThe method of testing of precision transmitance, has improved the practicality that is operated in " day blind area " ultraviolet detection device.
Below in conjunction with accompanying drawing, the present invention is described in further detail.
Brief description of the drawings
Fig. 1 is optical filter high accuracy transmission measurement system principle diagram of the present invention.
Fig. 2 is the transmission measurement figure of filter plate sample in embodiment of the present invention.
Detailed description of the invention
For optical filter, spectral transmittance is one of its important performance parameter, how accurately to measure optical filterSpectral transmittance, direct relation preparation and the Performance Detection thereof of optical filter, also gives to a certain extent a day blind ultraviolet detectionThe practicality of device provides guidance. In order to detect more accurately the spectrum of high absorption filter in UV, visible light optical rangeTransmitance, the present invention proposes a kind of for the optical filter high accuracy transmitance survey in 200～600nm spectral regionTest system and method for testing.
In conjunction with Fig. 1, the test macro of a kind of optical filter high accuracy transmitance of the present invention, is characterized in that, comprisesLaser pump (ing) wideband light source, optical modulator, twin-stage receipts or other documents in duplicate look instrument system, optical alignment system, test camera bellows, UV, visible lightPhotomultiplier, high-voltage power module, Photoelectric Signal Processing module, lock-in amplifier and industrial computer, described ultravioletVisible photomultiplier and tested optical filter are all arranged in test camera bellows, and tested optical filter is positioned at optical alignment system and purpleBetween outer visible photomultiplier, two optical filter wheels of described twin-stage receipts or other documents in duplicate look instrument system light inlet and light-emitting window fill respectivelyThere are 200nm and 350nm high-pass filter;
Laser pump (ing) wideband light source generation white light becomes to have the optical signal of setpoint frequency through light modulator modulates, through twin-stage receipts or other documents in duplicateThe grating of look instrument system produces pure monochromatic light, and it is quasi-parallel, little beam diameter that monochromatic light is incident to optical alignment system transitionMonochromatic light, then be incident to tested optical filter; Monochromatic light after tested optical filter decay is incident to the multiplication of UV, visible light photoelectricityPipe, the photo-signal that becomes to amplify through opto-electronic conversion under the effect of high-voltage power module; Right in signal processing module againThe photo-signal of photomultiplier output is sent into lock-in amplifier and is carried out phase-sensitive detection and obtain after carrying out filter and amplification and processingTo stable voltage signal; The voltage signal values that industrial computer obtains according to lock-in amplifier is determined the luminous power seeing throughValue, is the transmitance of tested optical filter with the ratio of the luminous power of non-filtered sheet decay.
Further, the modulating frequency of optical modulator is 172Hz.
The high pressure range that high-voltage power module produces is 0～1000V.
The present invention also provides a kind of optical filter high accuracy transmission measurement method, and detailed process is:
The light modulation that step 1, optical modulator send laser pump (ing) wideband light source becomes the optical signal of setpoint frequency, is specially:
It is luminous that laser pump (ing) wideband light source adopts the mode of laser pump (ing) to maintain plasma discharge, avoided use electrode instituteThe many disadvantages of bringing; First light the xenon in bulb by electrion, make xenon temperature raise ionization become etc. fromDaughter, continuous laser light beam enters bulb through lens focus, utilizes the energy of laser to maintain the plasma in bulb,Now high pressure can be closed, and adopts to focus on good laser and maintain plasma, can make ultraviolet excitation stable andBe easy to focus on; Thereby can produce the white light of high brightness, high stability;
The light modulation that optical modulator light source sends becomes to have the optical signal of setpoint frequency, so that follow-up signal processing moduleWith lock-in amplifier, useful signal is screened and filtering to noise signal;
Step 2, by computer control twin-stage receipts or other documents in duplicate look instrument system, the optical signal of modulation is converted to and sets the monochrome of wavelengthLight, is specially:
Twin-stage receipts or other documents in duplicate look instrument system has dispersion addition and dispersion to subtract each other two kinds of patterns: the twin-stage receipts or other documents in duplicate that adopts dispersion combined modeLook instrument system, can double lifting spectral resolution, is applicable to measuring demand by high-resolution; Adopt dispersion phase size reduction mode,Effectively reduce the veiling glare of monochromator, thereby can carry out the more detection of small-signal;
Due to this system testing be optical filter high accuracy, the optical signal seeing through is extremely faint, to the requirement of veiling glareHigher, so it adopts dispersion phase size reduction mode, and another source of veiling glare is mainly the second-order diffraction of grating, soAll added the optical filtering of the high-pass filter that specific cutoff wavelength is housed at the light inlet of twin-stage receipts or other documents in duplicate look instrument system and light-emitting windowSheet wheel, controls it and rotates to reach the object of eliminating veiling glare.
The monochromatic light of step 3, monochromator output is incident to the light that optical alignment system transition is quasi-parallel, little beam diameter, thenIrradiate tested optical filter, be specially:
Optical filter to be measured is put into the test camera bellows that ultravioplet photomultiplier is housed, made it be clipped in monochromator light-emitting window placeIn the middle of optical alignment system and photomultiplier; What this photomultiplier used is SbCs Bialkali photocathode, is suitable for ultraviolet lightWith the detection of visible ray, meet the requirement of test job optical filter transmitance in the ultraviolet detection device of " day blind area ";
Step 4, monochromatic light after the decay of tested optical filter are incident to UV, visible light photoelectricity multiplier tube, at high voltage source mouldThe photo-signal being amplified through opto-electronic conversion under the effect of piece,
Step 5, signal processing module carry out filter amplifying processing to the photo-signal of photomultiplier output, send into lockPhase amplifier carries out phase-sensitive detection and obtains stable value of electrical signals;
Step 6, the signal value obtaining according to step 5 are determined luminous power, calculate the transmitance of optical filter;
The value of electrical signals V that industrial computer obtains according to lock-in amplifier1, and demarcate in file at identical high pressure phase co-wavelengthUnder luminous power P0Corresponding voltage signal values V0The luminous power P seeing through converts1：
Calculating optical optical filter is transmitance T (λ) under certain specific wavelength λ:
Wherein, P0(λ) be illustrated in the luminous power that under certain specific wavelength, non-filtered sheet is decayed, P1(λ) be illustrated in that certain is specificLuminous power under wavelength after optical filter decay.
Choose the sample of an optical filter, test according to above-mentioned steps, verify that this cover test macro can detect filterThe transmitance that mating plate OD value is 12, result as shown in Figure 2.
Claims (8)
1. a test macro for optical filter high accuracy transmitance, is characterized in that, comprises laser pump (ing) broadband lightSource, optical modulator, twin-stage receipts or other documents in duplicate look instrument system, optical alignment system, test camera bellows, UV, visible light photoelectricity multiplier tube, heightVoltage source module, Photoelectric Signal Processing module, lock-in amplifier and industrial computer, described UV, visible light photoelectricity multiplier tubeAll be arranged in test camera bellows with tested optical filter, and tested optical filter is positioned at optical alignment system and the multiplication of UV, visible light photoelectricityBetween pipe, two optical filter wheels of described twin-stage receipts or other documents in duplicate look instrument system light inlet and light-emitting window are equipped with respectively optical filter;
Laser pump (ing) wideband light source generation white light becomes to have the optical signal of setpoint frequency through light modulator modulates, through twin-stage receipts or other documents in duplicateThe grating of look instrument system produces pure monochromatic light, and it is quasi-parallel, little beam diameter that monochromatic light is incident to optical alignment system transitionMonochromatic light, then be incident to tested optical filter; Monochromatic light after tested optical filter decay is incident to the multiplication of UV, visible light photoelectricityPipe, the photo-signal that becomes to amplify through opto-electronic conversion under the effect of high-voltage power module; Right in signal processing module againThe photo-signal of photomultiplier output is sent into lock-in amplifier and is carried out phase-sensitive detection and obtain after carrying out filter and amplification and processingTo stable voltage signal; The voltage signal values that industrial computer obtains according to lock-in amplifier is determined the luminous power seeing throughValue, is the transmitance of tested optical filter with the ratio of the luminous power of non-filtered sheet decay.
2. the test macro of optical filter high accuracy transmitance according to claim 1, is characterized in that, instituteTwo optical filter wheels stating twin-stage receipts or other documents in duplicate look instrument system light inlet and light-emitting window are equipped with respectively 200nm and the filter of 350nm high passMating plate.
3. the test macro of optical filter high accuracy transmitance according to claim 1, is characterized in that lightThe modulating frequency of modulator is 172Hz.
4. the test macro of optical filter high accuracy transmitance according to claim 1, is characterized in that, instituteShow that the high pressure range that high-voltage power module produces is 0～1000V.
5. a method of testing for optical filter high accuracy transmitance, is characterized in that, comprises the following steps:
The light modulation that step 1, optical modulator send laser pump (ing) wideband light source becomes the optical signal of setpoint frequency;
Step 2, twin-stage receipts or other documents in duplicate look instrument system convert the optical signal of modulation in the monochromatic light of setting wavelength;
The monochromatic light of step 3, monochromator output is incident to the light that optical alignment system transition is quasi-parallel, little beam diameter, thenIrradiate tested optical filter;
Step 4, monochromatic light after the decay of tested optical filter are incident to UV, visible light photoelectricity multiplier tube, at high voltage source mouldThe photo-signal being amplified through opto-electronic conversion under the effect of piece;
Step 5, signal processing module carry out filter amplifying processing to the photo-signal of photomultiplier output, send into lockPhase amplifier carries out phase-sensitive detection and obtains stable value of electrical signals;
Step 6, the signal value obtaining according to step 5 are determined luminous power, calculate the transmitance of optical filter.
6. the method for testing of optical filter high accuracy transmitance according to claim 5, is characterized in that, stepThe modulating frequency of the optical modulator described in rapid 1 is 172Hz.
7. the method for testing of optical filter high accuracy transmitance according to claim 5, is characterized in that, instituteShow that the high pressure range that high-voltage power module produces is 0～1000V.
8. the method for testing of optical filter high accuracy transmitance according to claim 5, is characterized in that, stepIn rapid 6, the computing formula of optical filter transmitance T (λ) is as follows:
Wherein, P0(λ) be illustrated in the luminous power that under certain specific wavelength, non-filtered sheet is decayed, P1(λ) be illustrated in that certain is specificUnder wavelength, through optical filter decay luminous power later, λ is wavelength.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107063647A (en) * | 2017-05-05 | 2017-08-18 | 四川九州光电子技术有限公司 | The isolation of filter plate and the detection means and method of input light loss objective |
| CN110108449A (en) * | 2019-06-26 | 2019-08-09 | 深圳市楠轩光电科技有限公司 | A kind of optics module test macro and method |
| CN112033648A (en) * | 2020-09-10 | 2020-12-04 | 重庆理工大学 | Cut-off depth detection method of optical filter |
| CN112433082A (en) * | 2020-10-30 | 2021-03-02 | 国网山东省电力公司青岛供电公司 | Optical fiber voltage measuring system and method |
| CN114199527A (en) * | 2021-12-22 | 2022-03-18 | 长沙麓邦光电科技有限公司 | OD value detection method and system of graded filter and storage medium |
| CN117232786A (en) * | 2023-08-31 | 2023-12-15 | 上海紫红光电技术有限公司 | Deep cut-off transmittance testing system and method for solar blind filter |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107063647A (en) * | 2017-05-05 | 2017-08-18 | 四川九州光电子技术有限公司 | The isolation of filter plate and the detection means and method of input light loss objective |
| CN110108449A (en) * | 2019-06-26 | 2019-08-09 | 深圳市楠轩光电科技有限公司 | A kind of optics module test macro and method |
| CN110108449B (en) * | 2019-06-26 | 2022-05-10 | 深圳市楠轩光电科技有限公司 | Optical module testing system and method |
| CN112033648A (en) * | 2020-09-10 | 2020-12-04 | 重庆理工大学 | Cut-off depth detection method of optical filter |
| CN112433082A (en) * | 2020-10-30 | 2021-03-02 | 国网山东省电力公司青岛供电公司 | Optical fiber voltage measuring system and method |
| CN114199527A (en) * | 2021-12-22 | 2022-03-18 | 长沙麓邦光电科技有限公司 | OD value detection method and system of graded filter and storage medium |
| CN114199527B (en) * | 2021-12-22 | 2023-11-17 | 长沙麓邦光电科技有限公司 | OD value detection method, system and storage medium of graded optical filter |
| CN117232786A (en) * | 2023-08-31 | 2023-12-15 | 上海紫红光电技术有限公司 | Deep cut-off transmittance testing system and method for solar blind filter |
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Application publication date: 20160518 |