CN105568225B - Resistive heating device and resistance heating evaporation source - Google Patents
Resistive heating device and resistance heating evaporation source Download PDFInfo
- Publication number
- CN105568225B CN105568225B CN201410538769.9A CN201410538769A CN105568225B CN 105568225 B CN105568225 B CN 105568225B CN 201410538769 A CN201410538769 A CN 201410538769A CN 105568225 B CN105568225 B CN 105568225B
- Authority
- CN
- China
- Prior art keywords
- electrode
- hole
- external
- screw thread
- heating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The present invention provides a kind of resistive heating device and resistance heating evaporation sources, resistive heating device includes fixed bottom stage, the fixed bottom stage has the inner surface and the outer surface being oppositely arranged, and the fixed bottom stage also has the first electrode through-hole and second electrode through-hole through described the inner surface and the outer surface；Resistance wire positioned at the inner surface side；Electrode and the second inner electrode in first be electrically connected with the both ends of the resistance wire；And first external electrode and the second external electrode, the first external electrode are detachably electrically connected with electrode in described first in the first electrode through hole, the second external electrode is detachably electrically connected with the second inner electrode in the second electrode through hole.Resistive heating device of the invention is capable of fixing crucible of different shapes and heats, when needing replacing evaporation material, it is only necessary to replace crucible, and replace conveniently, to save cost.
Description
Technical field
The present invention relates to vacuum deposition apparatus, and in particular to a kind of resistive heating device and resistance heating evaporation source.
Background technique
Vacuum vapor plating is a kind of common coating process, is widely used for semiconductor devices, metal and other function
The film preparation of energy property material.Evaporation source is the most key component of vacuum evaporation coating film device.According to the difference of heating method,
Evaporation source can be divided into electron beam heating evaporation source and resistance heating evaporation source.Resistance heating evaporation source is to utilize resistance wire
The evaporation material in heat crucible generated after energization makes its vaporization, and resistance heating evaporation source is simple with structure, steams
It sends out high-efficient, the advantages that temperature is stable and homogeneous heating, has been largely used in industry and laboratory.
Resistance heating evaporation source mainly includes resistive heating device and crucible, in order to avoid evaporation material is mixed with crucible
Or reaction, to different evaporation materials, often require to use the crucible of unlike material.The shape and structure of crucible are by crucible material
Limitation, and the shape of crucible and structure determine crucible installation complexity and evaporation source setting angle.It is in the prior art
The assembly of resistive heating device and crucible in resistance heating evaporation source be it is one-to-one, when needing replacing evaporation material
When, entire resistance heating evaporation source can only be replaced.
Summary of the invention
In view of the above-mentioned problems, An embodiment provides a kind of resistive heating devices, comprising:
Fixed bottom stage, the fixed bottom stage have the inner surface and the outer surface being oppositely arranged, and the fixed bottom stage also has
Through the first electrode through-hole and second electrode through-hole of described the inner surface and the outer surface；
Resistance wire positioned at the inner surface side；
Electrode and the second inner electrode in first be electrically connected with the both ends of the resistance wire；
First external electrode and the second external electrode, electrode is logical in the first electrode in the first external electrode and described first
It is detachably electrically connected at hole, the second external electrode is detachably electrically connected with the second inner electrode in the second electrode through hole
It connects.
Preferably, the resistance wire in solenoidal structure and defines a cylindric accommodation space, and the cylindric receiving is empty
Between there is the center line of the vertical inner surface.
Preferably, the fixed bottom stage also has the third through-hole through described the inner surface and the outer surface, and the resistance adds
Thermal further includes the thermocouple being threaded through in the third through-hole.
Preferably, the resistive heating device further includes crucibles cylinder, and the crucibles cylinder includes:
Accommodation tube, the accommodation tube are in tubular open at one end；And
Fixed bottom plate, the fixed bottom plate have respectively corresponding with the first electrode through-hole and second electrode through-hole the
One bottom hole and the second bottom hole, the fixed bottom plate pass through electrode, the first external electrode, the second inner electrode in described first
It is connected with the second external electrode with the fixed bottom stage.
Preferably, one of them in described first in electrode and the first external electrode passes through the first electrode through-hole and the
One bottom hole is detachably connected with another, one of them in the second inner electrode and the second external electrode passes through described the
Two electrode through-holes and the second bottom hole are detachably connected with another.
Preferably, electrode and the second inner electrode are respectively provided with the first external screw thread and the second external screw thread in described first, described
First external electrode and the second external electrode is respectively provided with the first internal screw thread and the second internal screw thread, the first of electrode the outer spiral shell in described first
Line, which sequentially passes through, to be connected with the first screw-internal thread fit of the first external electrode after first bottom hole and first electrode through-hole
It connects, the second external screw thread of the second inner electrode sequentially passes through after second bottom hole and second electrode through-hole with described
Second screw-internal thread fit of two external electrodes connects.
Preferably, the first external electrode and the second external electrode is respectively provided with the first external screw thread and the second external screw thread, described
Electrode and the second inner electrode are respectively provided with the first internal screw thread and the second internal screw thread, the outer spiral shell of the first of the first external electrode in first
Line sequentially pass through after the first electrode through-hole and the first bottom hole with described first in the first screw-internal thread fit of electrode connect
It connects, the second external screw thread of the second external electrode sequentially passes through after the second electrode through-hole and the second bottom hole with described
The second screw-internal thread fit connection of electrode in two.
Preferably, one of them in described first in electrode and the first external electrode passes through the first electrode through-hole and another
One is detachably connected, one of them in the second inner electrode and the second external electrode is across the second electrode through-hole and separately
One is detachably connected.
Preferably, electrode and the second inner electrode are respectively provided with the first external screw thread and the second external screw thread in described first, described
First external electrode and the second external electrode is respectively provided with the first internal screw thread and the second internal screw thread, the first of electrode the outer spiral shell in described first
Line is connect after passing through the first electrode through-hole with the first screw-internal thread fit of the first external electrode, the second inner electrode
Second external screw thread is connect after passing through the second electrode through-hole with the second screw-internal thread fit of the second external electrode.
Preferably, the first external electrode and the second external electrode is respectively provided with the first external screw thread and the second external screw thread, described
Electrode and the second inner electrode are respectively provided with the first internal screw thread and the second internal screw thread, the outer spiral shell of the first of the first external electrode in first
Line is connect after passing through the first electrode through-hole with the first screw-internal thread fit of electrode in described first, the second external electrode
Second external screw thread is connect after passing through the second electrode through-hole with the second screw-internal thread fit of the second inner electrode.
One embodiment of the present of invention additionally provides a kind of resistance heating evaporation source, fills including above-mentioned resistance heating
It sets；And crucible.
Resistive heating device of the invention is capable of fixing crucible of different shapes and heats, when needing replacing evaporation material
When, it is only necessary to crucible is replaced, and is replaced conveniently, to save cost, extends resistance heating evaporation source in plated film
Application range in technique.
Detailed description of the invention
Embodiments of the present invention is further illustrated referring to the drawings, in which:
Fig. 1 is the front view of the resistive heating device of first embodiment of the invention.
Fig. 2 is the exploded view of resistive heating device shown in FIG. 1.
Fig. 3 is the cross-sectional view of resistive heating device shown in Fig. 2.
Fig. 4 is the front view after resistive heating device shown in FIG. 1 and a crucible assembly.
Fig. 5 is the cross-sectional view of crucible shown in Fig. 4.
Fig. 6 is the front view after resistive heating device shown in FIG. 1 and the assembly of another crucible.
Fig. 7 is the front view of the resistance heating evaporation source of present pre-ferred embodiments.
Fig. 8 is the cross-sectional view of the resistive heating device of second embodiment of the invention.
Fig. 9 is the front view of the resistive heating device of third embodiment of the invention.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, pass through below in conjunction with attached drawing specific real
Applying example, the present invention is described in more detail.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention,
It is not intended to limit the present invention.
Referring to shown in Fig. 1~3, resistive heating device 10 include resistance wire 4, interior electrode 51, interior electrode 52, fixed bottom stage 7,
Thermocouple 9 and external electrode 81,82.
As shown in Fig. 2, the material of fixed bottom stage 7 can be the insulation and thermal insulations material such as aluminium oxide, ceramics, rounded plate
Shape has the inner surface 74 being oppositely arranged and outer surface 75.As shown in figure 3, with through inner surface 74 and outside on fixed bottom stage 7
Through-hole 71, through-hole 72 and the through-hole 73 on surface 75, through-hole 73 are located at or are located substantially at the center of fixed bottom stage 7.
As shown in Figure 1, resistance wire 4 is located at the side of the inner surface 74 of fixed bottom stage 7, material can be tungsten or tantalum,
In the case where energization, for converting electrical energy into thermal energy.Resistance wire 4 is in solenoidal structure, to define that a cylindric receiving is empty
Between.The center line L vertical inside surface 74 of the cylindric accommodation space.Resistance wire 4 is not being compressed under natural conditions by external force,
Any two points are not short-circuit.
It as shown in figure 3, interior electrode 51,52 is identical, and is all metal electrode.One end of interior electrode 51,52 has
There is external screw thread 511,521.External electrode 81,82 is also identical, and is all metal electrode.External electrode 81,82 be respectively provided with it is interior
The internal screw thread 811,821 that the external screw thread 511,521 of electrode 51,52 is cooperatively connected.As shown in figures 1 and 3, interior electrode 51,52
External screw thread 511,521 is each passed through through-hole 71,72 and the internal screw thread 811,821 of external electrode 81,82 is cooperatively connected, thus interior electrode
51 and external electrode 81 be fixed on fixed bottom stage 7 so that interior electrode 51 and external electrode 81 are detachably electrically connected.Equally, interior electricity
Pole 52 and external electrode 82 are fixed on fixed bottom stage 7, so that interior electrode 52 and external electrode 82 are detachably electrically connected.
Thermocouple 9 uses thermocouple in the prior art, and thermocouple 9 is threaded through in through-hole 73, for measure resistance wire 4 or
Temperature near it.
Fig. 4 is the front view after resistive heating device 10 shown in FIG. 1 and an assembly of crucible 11.Fig. 5 is crucible 11
Cross-sectional view.As shown in figure 5, crucible 11 includes crucible tube 111 and crucible bottom plate 112, crucible 11 be can be by easily molded material
It is integrally formed manufacture.Crucible tube 111 is in tubular open at one end.On crucible bottom plate 112 have respectively with through-hole 71 and through-hole 72
Corresponding crucible bottom plate through-hole 1121,1122 also has blind hole 1123 corresponding with through-hole 73 on crucible bottom plate 112.Such as Fig. 4
Shown, resistance wire 4 is set on crucible tube 111, and crucible bottom plate 112 is in contact with the inner surface 74 of fixed bottom stage 7.Interior electrode 51
External screw thread 511 sequentially pass through and be cooperatively connected after crucible bottom plate through-hole 1121 and through-hole 71 with the internal screw thread 811 of external electrode 81, together
The external screw thread 521 of electrode 52 sequentially passes through the internal screw thread 821 after crucible bottom plate through-hole 1122 and through-hole 72 with external electrode 82 in sample
It is cooperatively connected, so that crucible 11 is fixed on fixed bottom stage 7.Thermocouple 9 is inserted into blind hole 1123 after passing through through-hole 73, is used for
Measure the temperature of 11 bottom of crucible.
Fig. 6 is resistive heating device 10 shown in FIG. 1 and the front view after the assembly of another crucible 15.As shown in fig. 6, earthenware
Crucible 15 is in tubular open at one end by be not easy molding material manufacture, and resistance wire 4 is set on the lateral wall of crucible 15, fixed
The inner surface 74 of bottom stage 7 and the bottom connection of crucible 15 touch, and are used to support the evaporation material of crucible 15 and its inside.
In another assembly method of the invention, resistance wire 4 is closely wound crucible 15, and crucible 15 is supported,
So that the bottom of crucible 15 can adjust steaming close to the inner surface 74 of (not contacting) fixed bottom stage 7 according to actual needs in this way
The setting angle to rise.
Resistive heating device 10 of the invention can be fixed and heat to different crucibles, different when needing to evaporate
When evaporating material, it is only necessary to replace crucible.For example, rotating external electrode 81 in one direction thus will after crucible is cooling
Interior electrode 51 and external electrode 81 separate, and rotate external electrode 82 in one direction equally to divide interior electrode 52 and external electrode 82
It opens.Former crucible is taken out, new crucible is placed on the inner surface 74 of fixed bottom stage 7, then resistance wire 4 is set in crucible
On, it is detachably connected itself and interior electrode 51 finally along opposite direction rotation external electrode 81, and rotation is outer in the opposite direction
Electrode 82 is detachably connected itself and interior electrode 52.Therefore resistive heating device 10 of the invention increases in coating process
Application range has saved cost.
Fig. 7 is the front view of the resistance heating evaporation source of a preferred embodiment of the present invention.Resistance heating evaporation source
100 include resistive heating device 10 (referring to Fig. 1-3), heat shielding set 2, heat shielding lid 1 and the crucible 11 in heat shielding set 2
Or 15 (referring to Fig. 5-6).Heat shielding set 2 is in the tubular of both ends open, and heat shielding lid 1 is in tabular, is had on heat shielding lid 1 logical
Hole (Fig. 7 is not shown), the through-hole are used to the evaporation material in crucible 11 or 15 leading to desired position.In heat shielding set 2
In axial direction, heat shielding lid 1 aligns and is fixedly connected with the upper end opening of heat shielding set 2, while fixed bottom stage 7 and heat shielding set
2 lower ending opening aligns and is detachably connected (such as be threadedly coupled or be bolted).Wherein in resistive heating device 10
Interior electrode 51,52, resistance wire 4 and crucible 11 or 15 are located in heat shielding set 2, and external electrode 81,82 is located at the outer of heat shielding set 2
Portion.Those skilled in the art is it is found that in order to show the connection relationship of resistive heating device 10 and heat shielding set 2, resistance heating
Formula evaporation source 100 does not show that power supply device, temperature control equipment and cooling device therein, structure and connection relationship
It is known to the skilled person, details are not described herein.
Fig. 8 is the cross-sectional view of the resistive heating device 20 of second embodiment of the invention.It is essentially identical with Fig. 3, difference
It is that interior electrode 51 ' and interior electrode 52 ' are respectively provided with internal screw thread 511 ' and 521 ', external electrode 81 ', 82 ' is respectively provided with and interior spiral shell
The external screw thread 811 ' and 821 ' in mating connection of line 511 ' and 521 ', external screw thread 811 ' and 821 ' respectively can pass through through-hole 71,
72 is in mating connection with internal screw thread 511 ' and 521 '.
Fig. 9 is the front view of the resistive heating device 30 of third embodiment of the invention.It is essentially identical with Fig. 1, difference
It is, further includes crucibles cylinder 14, crucibles bucket 14 includes containment drum and fixed bottom plate, containment drum and crucible tube 111
Shape is identical, and fixed bottom plate is identical with the shape of crucible bottom plate 112, and details are not described herein, therefore Fig. 9 is identical with Fig. 4.Earthenware
Crucible containment drum 14 can be integrated molding, to have maximum mechanical strength and the smallest crack.Crucibles of the invention
When bucket 14 is using the permitted materials manufacture of evaporation materials, crucibles bucket 14 can accommodate unlike material, of different shapes
Crucible.Can also use directly as crucible (can fill more evaporation material, when extending the single use of evaporation source at this time
Between).
It in other embodiments of the invention, can also be using the interior electrode 51 ', 52 ' and external electrode 81 ', 82 ' in Fig. 8
The interior electrode 51,52 and external electrode 81,82 in Fig. 9 are replaced respectively.
In other embodiments of the invention, interior electrode and corresponding external electrode can also be through bolt in through-hole
71, it connects at 72.
Although the present invention has been described by means of preferred embodiments, the present invention is not limited to described here
Embodiment, without departing from the present invention further include made various changes and variation.
Claims (9)
1. a kind of resistive heating device characterized by comprising
Fixed bottom stage, the fixed bottom stage have the inner surface and the outer surface being oppositely arranged, and the fixed bottom stage, which also has, to be run through
The first electrode through-hole and second electrode through-hole of described the inner surface and the outer surface；
Resistance wire positioned at the inner surface side；
Electrode and the second inner electrode in first be electrically connected with the both ends of the resistance wire；And
First external electrode and the second external electrode, electrode is in the first electrode through hole in the first external electrode and described first
Detachable electrical connection, the second external electrode are detachably electrically connected with the second inner electrode in the second electrode through hole；
Crucibles cylinder, the crucibles cylinder include:
Accommodation tube, the accommodation tube are in tubular open at one end；And
Fixed bottom plate, the fixed bottom plate have the first bottom corresponding with the first electrode through-hole and second electrode through-hole respectively
Plate through-hole and the second bottom hole, the fixed bottom plate pass through electrode in described first, the first external electrode, the second inner electrode and the
Two external electrodes are connected with the fixed bottom stage.
2. resistive heating device according to claim 1, which is characterized in that the fixed bottom stage also has through described interior
The third through-hole on surface and outer surface, the resistive heating device further include the thermocouple being threaded through in the third through-hole.
3. resistive heating device according to claim 1, which is characterized in that in described first in electrode and the first external electrode
One of them pass through the first electrode through-hole and the first bottom hole and be detachably connected with another, the second inner electrode
The second electrode through-hole and the second bottom hole is passed through with one of them in the second external electrode to be detachably connected with another.
4. resistive heating device according to claim 3, which is characterized in that electrode and the second inner electrode point in described first
Not Ju You the first external screw thread and the second external screw thread, the first external electrode and the second external electrode is respectively provided with the first internal screw thread and
Two internal screw threads, in described first first external screw thread of electrode sequentially pass through after first bottom hole and first electrode through-hole with
First screw-internal thread fit of the first external electrode connects, and the second external screw thread of the second inner electrode sequentially passes through described second
It is connect after bottom hole and second electrode through-hole with the second screw-internal thread fit of the second external electrode.
5. resistive heating device according to claim 3, which is characterized in that the first external electrode and the second external electrode point
Not Ju You the first external screw thread and the second external screw thread, electrode and the second inner electrode are respectively provided with the first internal screw thread and in described first
Two internal screw threads, the first external screw thread of the first external electrode sequentially pass through after the first electrode through-hole and the first bottom hole with
The first screw-internal thread fit connection of electrode, the second external screw thread of the second external electrode sequentially pass through described second in described first
It is connect after electrode through-hole and the second bottom hole with the second screw-internal thread fit of the second inner electrode.
6. resistive heating device according to claim 1 or 2, which is characterized in that electrode and the first dispatch from foreign news agency in described first
One of them in extremely is detachably connected across the first electrode through-hole with another, the second inner electrode and the second dispatch from foreign news agency
One of them in extremely is detachably connected across the second electrode through-hole with another.
7. resistive heating device according to claim 6, which is characterized in that electrode and the second inner electrode point in described first
Not Ju You the first external screw thread and the second external screw thread, the first external electrode and the second external electrode is respectively provided with the first internal screw thread and
Two internal screw threads, the first external screw thread of electrode passes through the with the first external electrode after the first electrode through-hole in described first
The connection of one screw-internal thread fit, the second external screw thread of the second inner electrode pass through after the second electrode through-hole with described second outside
Second screw-internal thread fit of electrode connects.
8. resistive heating device according to claim 6, which is characterized in that the first external electrode and the second external electrode point
Not Ju You the first external screw thread and the second external screw thread, electrode and the second inner electrode are respectively provided with the first internal screw thread and in described first
Two internal screw threads, the first external screw thread of the first external electrode pass through after the first electrode through-hole with described first in electrode the
The connection of one screw-internal thread fit, the second external screw thread of the second external electrode pass through after the second electrode through-hole with described second in
Second screw-internal thread fit of electrode connects.
9. a kind of resistance heating evaporation source characterized by comprising
Such as resistive heating device described in any item of the claim 1 to 8；And
Crucible.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410538769.9A CN105568225B (en) | 2014-10-13 | 2014-10-13 | Resistive heating device and resistance heating evaporation source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410538769.9A CN105568225B (en) | 2014-10-13 | 2014-10-13 | Resistive heating device and resistance heating evaporation source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105568225A CN105568225A (en) | 2016-05-11 |
| CN105568225B true CN105568225B (en) | 2018-12-21 |
Family
ID=55878836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410538769.9A Active CN105568225B (en) | 2014-10-13 | 2014-10-13 | Resistive heating device and resistance heating evaporation source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105568225B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108728800B (en) * | 2017-04-24 | 2019-12-24 | 中国科学院物理研究所 | Multifunctional processing device used in vacuum environment |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201386134Y (en) * | 2009-02-27 | 2010-01-20 | 大连齐维科技发展有限公司 | Simple evaporator |
| CN103726022A (en) * | 2013-11-22 | 2014-04-16 | 上海和辉光电有限公司 | Heating evaporation source for organic materials |
-
2014
- 2014-10-13 CN CN201410538769.9A patent/CN105568225B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201386134Y (en) * | 2009-02-27 | 2010-01-20 | 大连齐维科技发展有限公司 | Simple evaporator |
| CN103726022A (en) * | 2013-11-22 | 2014-04-16 | 上海和辉光电有限公司 | Heating evaporation source for organic materials |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105568225A (en) | 2016-05-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204594784U (en) | A kind of electric heating counteract appearance | |
| EP3100014B1 (en) | Temperature measurement on a surface heater for a household appliance | |
| CN105568225B (en) | Resistive heating device and resistance heating evaporation source | |
| EP2085729B1 (en) | High temperature tube furnace for pyrolysis | |
| CN202042452U (en) | Hollow cathode ion source | |
| AU2016363364A1 (en) | Microwave oven | |
| CN108728800B (en) | Multifunctional processing device used in vacuum environment | |
| CN210293876U (en) | Sample electromagnetic induction heating/supporting device suitable for Hopkinson bar | |
| CN112261739A (en) | Heating element and manufacturing method thereof | |
| CN104183695A (en) | Polarization system and method of large-length-diameter-ratio piezoelectric ceramic transistor | |
| CN105072722B (en) | Heater | |
| TW201501182A (en) | An ion implantation machine presenting increased productivity | |
| CN104642418A (en) | Bread maker | |
| CN103601366A (en) | Cooling water jacket of glass fiber kiln electrode | |
| CN208337915U (en) | A kind of graphite heater | |
| US20210251048A1 (en) | Air heater | |
| CN207701304U (en) | A kind of triggerless electrode that can reduce vacuum arc thruster starting the arc energy | |
| CN212025443U (en) | Vacuum evaporation source heating device capable of effectively shielding outward heat radiation | |
| DE112015006538B4 (en) | HEAT PROTECTION TUBE FOR METAL HOLDING FURNACE | |
| JP2015214463A (en) | Graphitization furnace | |
| CN203590493U (en) | Silicon carbide rod | |
| AT514562B1 (en) | autoclave | |
| WO2023065946A1 (en) | Aerosol fixing apparatus and aerosol generating apparatus | |
| CN105021960A (en) | Enclosed temperature-control corona discharge device | |
| CN106935472B (en) | The shielding construction of binding nut filament support in a kind of ion source discharge room |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |