CN105565204A - Carrying device and control method thereof - Google Patents
Carrying device and control method thereof Download PDFInfo
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- CN105565204A CN105565204A CN201610016309.9A CN201610016309A CN105565204A CN 105565204 A CN105565204 A CN 105565204A CN 201610016309 A CN201610016309 A CN 201610016309A CN 105565204 A CN105565204 A CN 105565204A
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- China
- Prior art keywords
- lifting table
- controller
- inductor
- elevator
- driven unit
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F7/00—Lifting frames, e.g. for lifting vehicles; Platform lifts
- B66F7/06—Lifting frames, e.g. for lifting vehicles; Platform lifts with platforms supported by levers for vertical movement
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F17/00—Safety devices, e.g. for limiting or indicating lifting force
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F7/00—Lifting frames, e.g. for lifting vehicles; Platform lifts
- B66F7/28—Constructional details, e.g. end stops, pivoting supporting members, sliding runners adjustable to load dimensions
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- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Geology (AREA)
- Mechanical Engineering (AREA)
- Structural Engineering (AREA)
- Control And Safety Of Cranes (AREA)
Abstract
The invention discloses a carrying device and a control method thereof, relates to the technical field of mechanical equipment, and solves the problems of inconvenience for manual operation, easy personal injury, easy damage of surrounding other equipment and circuits and high labor cost caused by more dependence on multi-person manual operation in a traditional carrying device. The carrying device comprises an elevator, a moving bracket and a driving component; the elevator includes a lifting platform; the lifting platform can be freely lifted; the moving bracket is used for placing objects to be carried; and the driving component can drive the moving bracket to shift in or out the lifting platform. The carrying device and the control method thereof, disclosed by the invention, are used for carrying and supporting high-frequency matching boxes.
Description
Technical field
The present invention relates to mechanical equipment technical field, particularly relate to a kind of Handling device and control method thereof.
Background technology
In liquid crystal display manufacturing, high frequency match box 01 in etching apparatus is carried to required height by usual employing Handling device as shown in Figure 1, and lasting bearing force is provided, to make high frequency match box 01 rest on this height, thus work normally.
When high frequency match box 01 breaks down or reaches maintenance cycle, need to be pulled down and change, now, many people enter bottom Handling device, screw rod 02 is turned by spanner, the rotation of screw rod 02 can drive the angle between first connecting rod 03 and second connecting rod 04 and the angle between third connecting rod 05 and double leval jib 06 increase simultaneously or reduce, thus the junction 07 of first connecting rod 03 and third connecting rod 05 is moved up and down, and then drive lifting table 08 to move to required height, then many people promote high frequency match box 01, high frequency match box 01 is made to move into lifting table 08, or shift out from lifting table 08.
Due to the lifting of lifting table 08 and high frequency match box 01 immigration with shift out the manual working all depending on many people, this makes manual operation very inconvenient, when narrow field, many people operation also easily causes operating personal injured, other equipment around and circuit, also easily by operating personal damaged in collision, also can cause cost of labor to increase simultaneously.
Summary of the invention
Embodiments of the invention provide a kind of Handling device and control method thereof, can solve that Handling device of the prior art too much depends on the manual working of many people and the manual operation that causes is inconvenient, personnel's easily injured, other equipment around and circuit problem that easily damaged and cost of labor is high.
For achieving the above object, embodiments of the invention adopt following technical scheme:
Embodiments provide a kind of Handling device, comprising: elevator, described elevator comprises lifting table, and described lifting table can automatic lifting; Traversing carriage, described traversing carriage is for placing article to be handled; Driven unit, described driven unit can drive described traversing carriage to move into described lifting table or shift out from described lifting table.
Further, also comprise: the first inductor, described first inductor is for detecting the height of described lifting table; Controller, described controller is connected with described first inductor and described elevator respectively; When the height of described lifting table equals preset height, described first inductor can send the first feedback signal to described controller, and described controller can receive described first feedback signal, and controls the closedown of described elevator.
Preferably, described driven unit comprises actuating device and pitch wheel and tooth bar, and described actuating device is fixed on described traversing carriage, and described geared sleeve is connected on the output shaft of described actuating device, and described tooth bar is fixed on described lifting table.
Further, described traversing carriage is provided with roller, described lifting table is provided with guide rail, described roller is equipped with in described guide rail, and described roller can roll in described guide rail.
Further, also comprise the second inductor be arranged on described lifting table, described second inductor is all connected with described controller with described driven unit, and described second inductor is for detecting described traversing carriage position residing on described lifting table; When described traversing carriage is in the first predeterminated position on described lifting table, described second inductor can send the second feedback signal to described controller, and described controller can receive described second feedback signal, and controls the closedown of described driven unit.
Preferably, described lifting table comprises locating part, when described traversing carriage is in described first predeterminated position, described traversing carriage and described locating part against, described locating part can stop the movement of described traversing carriage.
Further, described first inductor comprises hoisting position inductor and lowering position inductor, and described hoisting position inductor is all connected with described controller with described lowering position inductor, and described preset height comprises the first preset height and the second preset height; When the height of described lifting table equals described first preset height, described hoisting position inductor can send described first feedback signal to described controller; When the height of described lifting table equals described second preset height, described lowering position inductor can send described first feedback signal to described controller.
Further, described article to be handled are the high frequency match box in etching apparatus, and described lifting table can drive described high frequency match box to be elevated, and described etching apparatus also comprises and being arranged at above described lifting table, and the vacuum chamber that position is fixing; Along with the lifting of described high frequency match box, the port of described high frequency match box can dock with the port of described vacuum chamber, when the port of described high frequency match box docks with the port of described vacuum chamber, the height of described lifting table equals described first preset height.
Further, the side of described elevator is provided with fixed platform, and when the upper surface of described lifting table and the upper surface of described fixed platform are positioned at same plane, the height of described lifting table equals described second preset height.
Further, described fixed platform is provided with the 3rd inductor, described 3rd inductor is connected with described controller, and described 3rd inductor is for detecting described traversing carriage position residing in described fixed platform; When described traversing carriage is in the second predeterminated position in described fixed platform, described 3rd inductor can send the 3rd feedback signal to described controller, and described controller can receive described 3rd feedback signal, and controls the closedown of described driven unit.
Preferably, described hoisting position inductor and described lowering position inductor are displacement pickup.
Preferably, described second inductor is pressure sensor, and described 3rd inductor is opto-electronic pickup.
Preferably, described elevator is Telescopic cylindrical lift.
Preferably, described roller is spherical roller.
A kind of Handling device that the embodiment of the present invention provides, by the automatic lifting of lifting table, make lifting table move to required height, then drive traversing carriage to move by driven unit, thus drive article to be handled move into lifting table or shift out from lifting table.Because described lifting table can automatic lifting, and described driven unit can drive described traversing carriage to move into described lifting table or shift out from described lifting table, therefore, lifting table is moved into or from the process that lifting table shifts out in the process that this Handling device is elevated at lifting table and at article to be handled, all operate without the need to many people, thus significantly save the manual working of personnel, and then make manual operation more convenient, it also avoid that operating personal is injured, other equipment around and circuit is damaged and cost of labor increases problem simultaneously.
The embodiment of the present invention additionally provides a kind of control method for above-mentioned Handling device, and when installing described high frequency match box, described method comprises:
Controller controls described elevator and is in power-up state, and controls described driven unit and be in power-down state;
Controller controls described elevator and declines, described lifting table is declined automatically, when the height of described lifting table equals described second preset height, described lowering position inductor sends described first feedback signal to described controller, described controller receives described first feedback signal, and controls the closedown of described elevator;
Controller controls described elevator and is in power-down state, and controls described driven unit and be in power-up state;
Controller controls described driven unit and opens, described driven unit is made to drive described traversing carriage to move into described lifting table from described fixed platform, when described traversing carriage is in described first predeterminated position, described second inductor sends described second feedback signal to described controller, described controller can receive described second feedback signal, and controls the closedown of described driven unit;
Controller controls described driven unit and is in power-down state, and controls described elevator and be in power-up state;
Controller controls described elevator and rises, described lifting table is made automatically to increase, when the height of described lifting table equals described first preset height, described hoisting position inductor sends described first feedback signal to described controller, described controller receives described first feedback signal, and controls the closedown of described elevator;
Controller controls described elevator and described driven unit is all in power-down state.
Further, when dismantling described high frequency match box, described method also comprises:
Controller controls described elevator and is in power-up state, and controls described driven unit and be in power-down state;
Controller controls described elevator and declines, described lifting table is declined automatically, when the height of described lifting table equals described second preset height, described lowering position inductor sends described first feedback signal to described controller, described controller receives described first feedback signal, and controls the closedown of described elevator;
Controller controls described elevator and is in power-down state, and controls described driven unit and be in power-up state;
Controller controls described driven unit and opens, described driven unit is made to drive described traversing carriage to be moved to described fixed platform from described lifting table, when described traversing carriage is in described second predeterminated position, described 3rd inductor sends described 3rd feedback signal to described controller, described controller can receive described 3rd feedback signal, and controls the closedown of described driven unit;
Controller controls described elevator and described driven unit is all in power-down state.
The control method for above-mentioned Handling device that the embodiment of the present invention provides, due to when lifting table is elevated, controller controls driven unit and is in power-down state, when traversing carriage moves, controller controls elevator and is in power-down state, therefore, can prevent in the process of lifting table lifting, the maloperation of operating personal causes traversing carriage to be caused danger after lifting table or fixed platform shift out, also can prevent in the process of traversing carriage movement simultaneously, the maloperation of operating personal makes elevator be elevated, cause danger after causing traversing carriage to tilt, thus improve the safety of Handling device.
Accompanying drawing explanation
Fig. 1 is the structural representation of Handling device in prior art;
Fig. 2 is the structural representation of embodiment of the present invention Handling device;
Schematic diagram when Fig. 3 is the work of embodiment of the present invention Handling device;
Fig. 4 is the structural representation of driven unit in embodiment of the present invention Handling device;
Fig. 5 is the structural representation of lifting table in embodiment of the present invention Handling device;
Fig. 6 is the lateral plan of traversing carriage in embodiment of the present invention Handling device;
Fig. 7 is the schematic diagram of the port of high frequency match box and the port of vacuum chamber in the embodiment of the present invention;
Reference numeral:
1-elevator; 11-lifting table; 111-locating part;
12-guide rail; 2-traversing carriage; 21-roller;
3-article to be handled; 4-driven unit; 41-actuating device;
42-gear; 43-tooth bar; 5-first inductor;
51-hoisting position inductor; 52-lowering position inductor; 6-second inductor;
7-vacuum chamber; 8-fixed platform; 9-the 3rd inductor.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
In describing the invention, it will be appreciated that, orientation or the position relationship of the instruction such as term " " center ", " on ", D score, "front", "rear", "left", "right", " vertically ", " level ", " top ", " end ", " interior ", " outward " they be based on orientation shown in the drawings or position relationship; be only the present invention for convenience of description and simplified characterization; instead of instruction or imply the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as limitation of the present invention.
In describing the invention, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or connect integratedly; Can be mechanical connection, also can be electrical connection; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, particular case above-mentioned term concrete meaning in the present invention can be understood.
Term " first ", " second " only for describing object, and can not be interpreted as instruction or hint relative importance or imply the quantity indicating indicated technical characteristic.Thus, be limited with " first ", the feature of " second " can express or impliedly comprise one or more these features.
Embodiments provide a kind of Handling device, as shown in Figure 2, comprising: elevator 1, elevator 1 comprises lifting table 11, and lifting table 11 can automatic lifting; Traversing carriage 2, traversing carriage 2 is for placing article 3 to be handled; Driven unit 4, driven unit 4 can drive traversing carriage 2 to move into lifting table 11 or shift out from lifting table 11.
A kind of Handling device that the embodiment of the present invention provides, by the automatic lifting of lifting table 11, make lifting table 11 move to required height, then drive traversing carriage 2 to move by driven unit 4, thus drive article 3 to be handled to move into lifting table 11 or shift out from lifting table 11.Because lifting table 11 can automatic lifting, and driven unit 4 can drive traversing carriage 2 to move into lifting table 11 or shift out from lifting table 11, therefore, lifting table 11 is moved into or from the process that lifting table 11 shifts out in the process that this Handling device is elevated at lifting table 11 and at article 3 to be handled, all operate without the need to many people, thus significantly save the manual working of personnel, and then make manual operation more convenient, it also avoid that operating personal is injured, other equipment around and circuit is damaged and cost of labor increases problem simultaneously.
In order to the height making lifting table 11 can stop at needs accurately, the Handling device in the present embodiment also comprises: the first inductor 5, first inductor 5 is for detecting the height of lifting table 11; Controller (not shown), described controller is connected with the first inductor 5 and elevator 1 respectively; When the height of lifting table 11 equals preset height, the first inductor 5 can send the first feedback signal to described controller, and described controller can receive described first feedback signal, and controls elevator 1 and close.Make thus when elevator 1 cuts out, lifting table 11 is in described preset height just, thus makes lifting table 11 can stop at the height of needs accurately.
Concrete, with reference to Fig. 4 to Fig. 6, above-mentioned driven unit 4 comprises actuating device 41 and pitch wheel 42 and tooth bar 43, and actuating device 41 is fixed on traversing carriage 2, gear 42 is socketed on the output shaft of actuating device 41, and tooth bar 43 is fixed on lifting table 11.When actuating device 41 is opened, actuating device 41 can rotate by driven gear 42, thus gear 42 is rolled along the bearing of trend of tooth bar 43, and then drives traversing carriage 2 move into lifting table 11 along the bearing of trend of tooth bar 43 or shift out from lifting table 11.Rack-and-gear not only driving efficiency is high, and life-span length, stable working, reliability are high, can promote stability during Handling device work, extend the service life of Handling device.
In order to make the movement of traversing carriage 2 on lifting table 11 more steady, with reference to Fig. 4 and Fig. 5, in the present embodiment, traversing carriage 2 is provided with roller 21, lifting table 11 is provided with guide rail 12, guide rail 12 is preferably two rows, roller 21 is equipped with in guide rail 12, and roller 21 can roll in guide rail 12.Thus, traversing carriage 2 can be moved by specific direction, thus reduce rocking of traversing carriage 2, and then make the movement of traversing carriage 2 on lifting table 11 more steady.
Ad-hoc location on lifting table 11 can be stopped at accurately to make traversing carriage 2, with reference to Fig. 5, Handling device in the present embodiment also comprises the second inductor 6 be arranged on lifting table 11, second inductor 6 is all connected with described controller with driven unit 4, and the second inductor 6 is for detecting traversing carriage 2 position residing on lifting table 11; When traversing carriage 2 is in the first predeterminated position on lifting table 11, the second inductor 6 can send the second feedback signal to described controller, and described controller can receive described second feedback signal, and controls driven unit 4 and close.Make thus when driven unit 4 is closed, traversing carriage 2 is in the first predeterminated position just, thus makes traversing carriage 2 can stop at ad-hoc location on lifting table 11 accurately.
On the basis of above-described embodiment, lifting table 11 comprises locating part 111, as shown in Figure 5, when traversing carriage 2 is in described first predeterminated position, traversing carriage 2 and locating part 111 against, locating part 111 can stop the movement of traversing carriage 2.Locating part 111 can be postive stop baffle; double protection can be carried out to traversing carriage 2 by the spacing of locating part 111; prevent the second inductor 6 fault from accurately can not detect position residing for traversing carriage 2, ensure that traversing carriage 2 can be parked in the ad-hoc location on lifting table 11.
Can stop at various height accurately to make lifting table 11, with reference to Fig. 3, first inductor 5 comprises hoisting position inductor 51 and lowering position inductor 52, hoisting position inductor 51 is all connected with described controller with lowering position inductor 52, and described preset height comprises the first preset height and the second preset height; When the height of lifting table 11 equals described first preset height, hoisting position inductor 51 can send described first feedback signal to described controller, described controller can receive described first feedback signal, and control elevator 1 and close, now, lifting table 11 is in the first preset height just; When the height of lifting table 11 equals described second preset height, lowering position inductor 52 can send described first feedback signal to described controller, described controller can receive described first feedback signal, and control elevator 1 and close, now, lifting table 11 is in the second preset height just, and lifting table 11 can be made thus to stop at various height accurately.
As shown in Figures 2 and 3, article to be handled 3 in the present embodiment are the high frequency match box in etching apparatus, the effect of described high frequency match box passes to vacuum chamber 7 after the high-frequency energy provided by radio-frequency power supply is changed, and farthest utilized to make high-frequency energy, lifting table 11 can drive described high frequency match box to be elevated, and described etching apparatus also comprises and being arranged at above lifting table 11, and the vacuum chamber 7 that position is fixing, along with the lifting of described high frequency match box, the port 31 of described high frequency match box can dock with the port 71 of vacuum chamber 7, when the port 31 of described high frequency match box docks with the port 71 of vacuum chamber 7, the height of lifting table 11 equals described first preset height, now, hoisting position inductor 51 sends described first feedback signal to described controller, make described controller control elevator 1 to close, now, described lifting table 11 can provide lasting bearing force for high frequency match box, thus make high frequency match box be in the state of docking with vacuum chamber 7, and then ensure that high frequency match box can work normally.
It should be noted that, with reference to Fig. 7, the port 31 of described high frequency match box and the port 71 of vacuum chamber 7 are copper sheet connectivity port, each described copper sheet connectivity port is provided with six screw holes, when described high frequency match box docks with vacuum chamber 7, the screw hole on different copper sheet connectivity port is one_to_one corresponding respectively, now, screw can be screwed into successively in screw hole corresponding on copper sheet connectivity port, thus the port 31 of high frequency match box is docked with the port 71 of vacuum chamber 7.
Further, with reference to Fig. 2 and Fig. 3, the side of elevator 1 is also provided with fixed platform 8, when the upper surface of lifting table 11 and the upper surface of fixed platform 8 are positioned at same plane, the height of lifting table 11 equals described second preset height, now, lowering position inductor 52 sends described first feedback signal to described controller, make described controller control elevator 1 to close, thus make lifting table 11 be in the state concordant with fixed platform 8, strike in lifting table 11 or fixed platform 8 to prevent traversing carriage 2 when mobile, also traversing carriage 2 run-off the straight can be prevented, and then avoid damage is caused to high frequency match box, facilitate the installation and removal of high frequency match box.
Ad-hoc location in fixed platform 8 can be stopped at accurately to make traversing carriage 2, fixed platform 8 in the present embodiment is provided with the 3rd inductor 9,3rd inductor 9 is connected with described controller, and the 3rd inductor 9 is for detecting traversing carriage 2 position residing in fixed platform 8; When traversing carriage 2 is in the second predeterminated position in fixed platform 8, the 3rd inductor 9 can send the 3rd feedback signal to described controller, and described controller can receive described 3rd feedback signal, and controls driven unit 4 and close.Make thus when driven unit 4 is closed, traversing carriage 2 is in the second predeterminated position just, thus makes traversing carriage 2 can stop at ad-hoc location in fixed platform 8 accurately.
Hoisting position inductor 51 and lowering position inductor 52 are all preferably displacement pickup.Institute's displacement sensors comprises projector and receptor, described projector is fixedly installed, described receptor can move relative to described projector, concrete, described receptor can be arranged on lifting table 11 or on article to be handled 3, thus to draw the height of lifting table 11 to the distance of described projector by detecting described receptor.The accuracy of detection of displacement pickup is high, can further improve the accuracy that lifting table 11 stops at desired height.
Second inductor 6 is preferably pressure sensor, when traversing carriage 2 is in described first predeterminated position, traversing carriage 2 can extrude described pressure sensor, thus make described pressure sensor send described second feedback signal to described controller, 3rd inductor 9 is preferably opto-electronic pickup, the response time of described pressure sensor and described opto-electronic pickup is short, can send corresponding feedback signal in time, thus improve control accuracy to described controller.
Preferably, elevator 1 is Telescopic cylindrical lift, the lifting table 11 of Telescopic cylindrical lift easily controls at the process medium velocity of lifting, brake safe reliability is strong, and horizontal stability is high, can ensure that lifting table 11 can stop at the height of needs accurately, thus lifting table 11 is better connected with other platforms, and then facilitate the immigration of traversing carriage 2 and shift out.
Preferably, roller 21 is spherical roller, and the rotating direction of spherical roller, not by the restriction of rotating shaft, can be avoided stuck situation to occur, thus make the movement of traversing carriage 2 more smooth and easy when therefore rolling in orbit.
The embodiment of the present invention additionally provides a kind of control method for above-mentioned Handling device, and with reference to Fig. 3, when installing described high frequency match box, described method comprises:
Controller controls elevator 1 and is in power-up state, and controls driven unit 4 and be in power-down state;
Controller controls elevator 1 and declines, lifting table 11 is declined automatically, as shown in arrow a in Fig. 3, when the height of lifting table 11 equals described second preset height, lifting table 11 is concordant with fixed platform 8, now, lowering position inductor 52 sends described first feedback signal to described controller, described controller receives described first feedback signal, and controls elevator 1 and close, thus makes lifting table 11 be in the state concordant with fixed platform 8;
Controller controls elevator 1 and is in power-down state, and controls driven unit 4 and be in power-up state;
Controller controls driven unit 4 and opens, driven unit 4 is made to drive traversing carriage 2 to move into lifting table 11 from fixed platform 8, moving direction is as shown in arrow b in Fig. 3, when traversing carriage 2 is in described first predeterminated position, the port 31 of described high frequency match box is positioned at immediately below the port 71 of vacuum chamber 7, and now, the second inductor 6 sends described second feedback signal to described controller, described controller can receive described second feedback signal, and controls driven unit 4 and close;
Controller controls driven unit 4 and is in power-down state, and controls elevator 1 and be in power-up state;
Controller controls elevator 1 and rises, lifting table 11 is made automatically to increase, as shown in arrow c in Fig. 3, when the height of lifting table 11 equals described first preset height, the port 31 of described high frequency match box docks with the port 71 of vacuum chamber 7, now, hoisting position inductor 51 sends described first feedback signal to described controller, described controller receives described first feedback signal, and control elevator 1 and close, thus make high frequency match box be in the state of docking with vacuum chamber 7, and then ensure that high frequency match box can work normally;
Controller controls elevator 1 and driven unit 4 is all in power-down state, so far, and the installation of described high frequency match box.
Further, when dismantling described high frequency match box, described method also comprises:
Controller controls elevator 1 and is in power-up state, and controls driven unit 4 and be in power-down state;
Controller controls elevator 1 and declines, lifting table 11 is declined automatically, as shown in arrow a in Fig. 3, the port 31 of described high frequency match box is separated with the port 71 of vacuum chamber 7, when the height of lifting table 11 equals described second preset height, lifting table 11 is concordant with fixed platform 8, now, lowering position inductor 52 sends described first feedback signal to described controller, described controller receives described first feedback signal, and control elevator 1 and close, thus lifting table 11 is made to be in the state concordant with fixed platform 8;
Controller controls elevator 1 and is in power-down state, and controls driven unit 4 and be in power-up state;
Controller controls driven unit 4 and opens, driven unit 4 is made to drive traversing carriage 2 to be moved to fixed platform 8 from lifting table 11, moving direction is as shown in arrow d in Fig. 3, when traversing carriage 2 is in described second predeterminated position, described high frequency match box has moved into fixed platform 8, and now, the 3rd inductor 9 sends described 3rd feedback signal to described controller, described controller can receive described 3rd feedback signal, and controls driven unit 4 and close;
Controller controls elevator 1 and driven unit 4 is all in power-down state, and so far, described high frequency match box has been dismantled.
The control method for above-mentioned Handling device that the embodiment of the present invention provides, due to when lifting table 11 is elevated, controller controls driven unit 4 and is in power-down state, when traversing carriage 2 moves, controller controls elevator 1 and is in power-down state, therefore, can prevent in the process be elevated at lifting table 11, the maloperation of operating personal causes traversing carriage 2 to be caused danger after lifting table 11 or fixed platform 8 shift out, also can prevent in the process of traversing carriage 2 movement simultaneously, the maloperation of operating personal makes elevator 1 be elevated, cause danger after causing traversing carriage 2 to tilt, thus improve the safety of Handling device.
The above; be only the specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; change can be expected easily or replace, all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of described claim.
Claims (16)
1. a Handling device, is characterized in that, comprising:
Elevator, described elevator comprises lifting table, and described lifting table can automatic lifting;
Traversing carriage, described traversing carriage is for placing article to be handled;
Driven unit, described driven unit can drive described traversing carriage to move into described lifting table or shift out from described lifting table.
2. Handling device according to claim 1, is characterized in that, also comprises:
First inductor, described first inductor is for detecting the height of described lifting table;
Controller, described controller is connected with described first inductor and described elevator respectively;
When the height of described lifting table equals preset height, described first inductor can send the first feedback signal to described controller, and described controller can receive described first feedback signal, and controls the closedown of described elevator.
3. Handling device according to claim 1, it is characterized in that, described driven unit comprises actuating device and pitch wheel and tooth bar, described actuating device is fixed on described traversing carriage, described geared sleeve is connected on the output shaft of described actuating device, and described tooth bar is fixed on described lifting table.
4. Handling device according to claim 1, is characterized in that, described traversing carriage is provided with roller, and described lifting table is provided with guide rail, and described roller is equipped with in described guide rail, and described roller can roll in described guide rail.
5. Handling device according to claim 2, it is characterized in that, also comprise the second inductor be arranged on described lifting table, described second inductor is all connected with described controller with described driven unit, and described second inductor is for detecting described traversing carriage position residing on described lifting table;
When described traversing carriage is in the first predeterminated position on described lifting table, described second inductor can send the second feedback signal to described controller, and described controller can receive described second feedback signal, and controls the closedown of described driven unit.
6. Handling device according to claim 5, it is characterized in that, described lifting table comprises locating part, when described traversing carriage is in described first predeterminated position, described traversing carriage and described locating part against, described locating part can stop the movement of described traversing carriage.
7. Handling device according to claim 5, it is characterized in that, described first inductor comprises hoisting position inductor and lowering position inductor, described hoisting position inductor is all connected with described controller with described lowering position inductor, and described preset height comprises the first preset height and the second preset height;
When the height of described lifting table equals described first preset height, described hoisting position inductor can send described first feedback signal to described controller;
When the height of described lifting table equals described second preset height, described lowering position inductor can send described first feedback signal to described controller.
8. Handling device according to claim 7, it is characterized in that, described article to be handled are the high frequency match box in etching apparatus, described lifting table can drive described high frequency match box to be elevated, described etching apparatus also comprises and being arranged at above described lifting table, and the vacuum chamber that position is fixing;
Along with the lifting of described high frequency match box, the port of described high frequency match box can dock with the port of described vacuum chamber, when the port of described high frequency match box docks with the port of described vacuum chamber, the height of described lifting table equals described first preset height.
9. Handling device according to claim 8, it is characterized in that, the side of described elevator is provided with fixed platform, and when the upper surface of described lifting table and the upper surface of described fixed platform are positioned at same plane, the height of described lifting table equals described second preset height.
10. Handling device according to claim 9, it is characterized in that, described fixed platform is provided with the 3rd inductor, described 3rd inductor is connected with described controller, and described 3rd inductor is for detecting described traversing carriage position residing in described fixed platform;
When described traversing carriage is in the second predeterminated position in described fixed platform, described 3rd inductor can send the 3rd feedback signal to described controller, and described controller can receive described 3rd feedback signal, and controls the closedown of described driven unit.
11. Handling devices according to claim 7, is characterized in that, described hoisting position inductor and described lowering position inductor are displacement pickup.
12. Handling devices according to claim 10, is characterized in that, described second inductor is pressure sensor, and described 3rd inductor is opto-electronic pickup.
13. Handling devices according to claim 1, is characterized in that, described elevator is Telescopic cylindrical lift.
14. Handling devices according to claim 4, is characterized in that, described roller is spherical roller.
15. 1 kinds, for the control method of Handling device according to claim 10, is characterized in that, when installing described high frequency match box, described method comprises:
Controller controls described elevator and is in power-up state, and controls described driven unit and be in power-down state;
Controller controls described elevator and declines, described lifting table is declined automatically, when the height of described lifting table equals described second preset height, described lowering position inductor sends described first feedback signal to described controller, described controller receives described first feedback signal, and controls the closedown of described elevator;
Controller controls described elevator and is in power-down state, and controls described driven unit and be in power-up state;
Controller controls described driven unit and opens, described driven unit is made to drive described traversing carriage to move into described lifting table from described fixed platform, when described traversing carriage is in described first predeterminated position, described second inductor sends described second feedback signal to described controller, described controller can receive described second feedback signal, and controls the closedown of described driven unit;
Controller controls described driven unit and is in power-down state, and controls described elevator and be in power-up state;
Controller controls described elevator and rises, described lifting table is made automatically to increase, when the height of described lifting table equals described first preset height, described hoisting position inductor sends described first feedback signal to described controller, described controller receives described first feedback signal, and controls the closedown of described elevator;
Controller controls described elevator and described driven unit is all in power-down state.
16., according to control method described in claim 15, is characterized in that, when dismantling described high frequency match box, described method also comprises:
Controller controls described elevator and is in power-up state, and controls described driven unit and be in power-down state;
Controller controls described elevator and declines, described lifting table is declined automatically, when the height of described lifting table equals described second preset height, described lowering position inductor sends described first feedback signal to described controller, described controller receives described first feedback signal, and controls the closedown of described elevator;
Controller controls described elevator and is in power-down state, and controls described driven unit and be in power-up state;
Controller controls described driven unit and opens, described driven unit is made to drive described traversing carriage to be moved to described fixed platform from described lifting table, when described traversing carriage is in described second predeterminated position, described 3rd inductor sends described 3rd feedback signal to described controller, described controller can receive described 3rd feedback signal, and controls the closedown of described driven unit;
Controller controls described elevator and described driven unit is all in power-down state.
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