CN105564904A - Speed control device of DMOS wafer transmission caterpillar band - Google Patents
Speed control device of DMOS wafer transmission caterpillar band Download PDFInfo
- Publication number
- CN105564904A CN105564904A CN201510806224.6A CN201510806224A CN105564904A CN 105564904 A CN105564904 A CN 105564904A CN 201510806224 A CN201510806224 A CN 201510806224A CN 105564904 A CN105564904 A CN 105564904A
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- roller shaft
- transmission crawler
- chamber
- dmos
- crawler belt
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Abstract
The invention discloses a speed control device of a DMOS wafer transmission caterpillar band. The speed control device comprises a transmission caterpillar band, wherein a plurality of rollers and roller shafts are arranged on the inner part of the transmission caterpillar band; the transmission caterpillar band extends between the plurality of the rollers and the plurality of the roller shafts; in the transmission caterpillar band, a photoelectric detecting device is arranged on at least one roller shaft; the photoelectric detecting device comprises a photoelectric detecting plate arranged on the corresponding roller shaft and a photoelectric sensor connected to the photoelectric detecting plate. According to the technical scheme adopted by the invention, the speed control device of the DMOS wafer transmission caterpillar band can monitor the rotation speed of the roller shafts through the photoelectric detecting device; the roller shafts are used for controlling forwarding and steering of the transmission caterpillar band, so that the rotation speed of the roller shafts is that of the transmission caterpillar band; the technical scheme can detect the rotation speed of the roller shafts in real time through the photoelectric detecting device, so that the speed of the transmission caterpillar band is monitored, and the speed of the transmission caterpillar band is correspondingly controlled, and therefore, the wafer processing stability is ensured.
Description
Technical field
The present invention relates to a kind of quartz conductor disk processing unit (plant), especially a kind of DMOS disk transmission crawler track speeds control setup.
Background technology
DMOS disk in the course of processing for carry out the transmission crawler belt that transmits usually by drive motor drive roller wheel to make its transmission, simultaneously by multiple roller shaft to realize transmitting moving ahead or turning to of crawler belt.In prior art, control setup for controlling the rotating speed of transmission crawler belt is often installed on the mouth of drive motor, namely its rotating speed of monitoring is actual is motor speed, then cannot carry out timely Inspect and control for the mutation occurred in crawler haulage process.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of DMOS disk transmission crawler track speeds control setup, and it can effectively monitor crawler belt speed of transmission and state.
For solving the problems of the technologies described above, the present invention relates to a kind of DMOS disk transmission crawler track speeds control setup, it includes transmission crawler belt, transmission crawler belt inside is provided with multiple roller and roller shaft, transmission crawler belt extends between multiple roller and roller shaft, and described roller drives by drive motor; Described transmission crawler belt extends among processing chamber for processing DMOS disk, cooling chamber, etching chamber and super sonic chamber; In described transmission crawler belt, be provided with photoelectric detection system at least one roller shaft, photoelectric detection system includes the Photoelectric Detection dish be arranged on roller shaft, and the opto-electronic pickup relative with Photoelectric Detection dish.
As a modification of the present invention, described cooling chamber and processing chamber are positioned at same level position, and it is interconnected, and include discharging opening in cooling chamber, described transmission crawler belt extends towards etching chamber via discharging opening, and described etching chamber is positioned at the below of cooling chamber; Include detection roller shaft between described cooling chamber and etching chamber, described photoelectric detection system is arranged at and detects on roller shaft.Adopt above-mentioned design, it is by the relative position of cooling chamber and etching chamber, and the position of photoelectric detection system is arranged, and avoids the hydrofluoric acid that produces in etching chamber working process and dust to impact detecting device.
As a modification of the present invention, distance between described detection roller shaft and cooling chamber is less than the distance detected between roller shaft and etching chamber, it effectively can control the distance between detecting device and etching chamber, thus avoids detecting device to receive impact further.
As a modification of the present invention, be positioned at the transmission crawler belt detecting roller shaft position and carry out extending, the distance between itself and cooling chamber is at most 10 centimetres.
As a modification of the present invention, the correspondence position of described detection roller shaft is provided with apron, and it is arranged at and detects between roller shaft and etching chamber.Adopt above-mentioned design, it effectively blocks the resultant of reaction in etch chamber by apron, thus makes the working stability of detecting device reach best.
Adopt the DMOS disk transmission crawler track speeds control setup of technique scheme, it is monitored by the rotative speed of photoelectric detection system for roller shaft; Because roller shaft is used for moving ahead and turning to of controls transfer crawler belt, the rotating speed of roller shaft is transmission crawler belt, so technique scheme detects the rotating speed of roller shaft in real time by photoelectric detection system, thus the speed of transmission crawler belt is monitored, and corresponding control is carried out to it, to guarantee the stability that disk is processed.
Accompanying drawing explanation
Fig. 1 is schematic diagram of the present invention;
Fig. 2 is the embodiment of the present invention 2 schematic diagram;
Reference numerals list:
1-transmission crawler belt, 2-roller, 3-roller shaft, 31-detection roller shaft, 4-processing chamber, 5-cooling chamber, 6-etching chamber, 7-super sonic chamber, 8-photoelectric detection system, 81-Photoelectric Detection dish, 82-opto-electronic pickup, 9-apron.
Detailed description of the invention
Below in conjunction with detailed description of the invention, illustrate the present invention further, following detailed description of the invention should be understood and be only not used in for illustration of the present invention and limit the scope of the invention.It should be noted that, the word "front", "rear" of use is described below, "left", "right", "up" and "down" refer to direction in accompanying drawing, word " interior " and " outward " refer to the direction towards or away from particular elements geometric centre respectively.
Embodiment 1
A kind of DMOS disk transmission crawler track speeds control setup as shown in Figure 1, it includes transmission crawler belt 1, transmission crawler belt 1 inside is provided with multiple roller 2 and roller shaft 3, and transmission crawler belt 1 extends between multiple roller 2 and roller shaft 3, and described roller 2 drives by drive motor; Described transmission crawler belt 1 extends among processing chamber 4 for processing DMOS disk, cooling chamber 5, etching chamber 6 and super sonic chamber 7; In described transmission crawler belt 1, be provided with photoelectric detection system 8 at least one roller shaft 3, photoelectric detection system 8 includes the Photoelectric Detection dish 81 be arranged on roller shaft 3, and the opto-electronic pickup 82 relative with Photoelectric Detection dish 81.
As a modification of the present invention, described cooling chamber 5 is positioned at same level position with processing chamber 4, and it is interconnected, discharging opening 8 is included in cooling chamber 5, described transmission crawler belt 1 extends towards etching chamber 6 via discharging opening 8, and described etching chamber 6 is positioned at the below of cooling chamber 5; Include between described cooling chamber 5 and etching chamber 6 and detect roller shaft 31, described photoelectric detection system 8 is arranged at and detects on roller shaft 31.Adopt above-mentioned design, it is by the relative position of cooling chamber and etching chamber, and the position of photoelectric detection system is arranged, and avoids the hydrofluoric acid that produces in etching chamber working process and dust to impact detecting device.
As a modification of the present invention, distance between described detection roller shaft 31 and cooling chamber 5 is less than the distance detected between roller shaft 31 and etching chamber 6, it effectively can control the distance between detecting device and etching chamber, thus avoids detecting device to receive impact further.
As a modification of the present invention, be positioned at the transmission crawler belt 1 detecting roller shaft 31 position and carry out extending, the distance between itself and cooling chamber 5 is 8 centimetres.
Adopt the DMOS disk transmission crawler track speeds control setup of technique scheme, it is monitored by the rotative speed of photoelectric detection system for roller shaft; Because roller shaft is used for moving ahead and turning to of controls transfer crawler belt, the rotating speed of roller shaft is transmission crawler belt, so technique scheme detects the rotating speed of roller shaft in real time by photoelectric detection system, thus the speed of transmission crawler belt is monitored, and corresponding control is carried out to it, to guarantee the stability that disk is processed
Embodiment 2
As a modification of the present invention, the correspondence position of described detection roller shaft 31 is provided with apron 9, and it is arranged at and detects between roller shaft 31 and etching chamber 6.Adopt above-mentioned design, it effectively blocks the resultant of reaction in etch chamber by apron, thus makes the working stability of detecting device reach best.
All the other feature & benefits of the present embodiment are all identical with embodiment 1.
Claims (5)
1. a DMOS disk transmission crawler track speeds control setup, it includes transmission crawler belt, and transmission crawler belt inside is provided with multiple roller and roller shaft, and transmission crawler belt extends between multiple roller and roller shaft, and described roller drives by drive motor; Described transmission crawler belt extends among processing chamber for processing DMOS disk, cooling chamber, etching chamber and super sonic chamber; It is characterized in that, in described transmission crawler belt, be provided with photoelectric detection system at least one roller shaft, photoelectric detection system includes the Photoelectric Detection dish be arranged on roller shaft, and the opto-electronic pickup relative with Photoelectric Detection dish.
2. according to DMOS disk transmission crawler track speeds control setup according to claim 1, it is characterized in that, described cooling chamber and processing chamber are positioned at same level position, and it is interconnected, discharging opening is included in cooling chamber, described transmission crawler belt extends towards etching chamber via discharging opening, and described etching chamber is positioned at the below of cooling chamber; Include detection roller shaft between described cooling chamber and etching chamber, described photoelectric detection system is arranged at and detects on roller shaft.
3., according to DMOS disk transmission crawler track speeds control setup according to claim 2, it is characterized in that, the distance between described detection roller shaft and cooling chamber is less than the distance detected between roller shaft and etching chamber.
4., according to DMOS disk transmission crawler track speeds control setup according to claim 3, it is characterized in that, be positioned at the transmission crawler belt detecting roller shaft position and carry out extending, the distance between itself and cooling chamber is at most 10 centimetres.
5., according to DMOS disk transmission crawler track speeds control setup according to claim 4, it is characterized in that, the correspondence position of described detection roller shaft is provided with apron, and it is arranged at and detects between roller shaft and etching chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510806224.6A CN105564904A (en) | 2015-11-20 | 2015-11-20 | Speed control device of DMOS wafer transmission caterpillar band |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510806224.6A CN105564904A (en) | 2015-11-20 | 2015-11-20 | Speed control device of DMOS wafer transmission caterpillar band |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105564904A true CN105564904A (en) | 2016-05-11 |
Family
ID=55875642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510806224.6A Pending CN105564904A (en) | 2015-11-20 | 2015-11-20 | Speed control device of DMOS wafer transmission caterpillar band |
Country Status (1)
| Country | Link |
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| CN (1) | CN105564904A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110764375A (en) * | 2019-11-28 | 2020-02-07 | 上海骄成机电设备有限公司 | Etching device |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07159199A (en) * | 1993-12-13 | 1995-06-23 | Sharp Corp | High precision rotation type speed sensor |
| JPH106629A (en) * | 1996-06-20 | 1998-01-13 | Oki Inf Syst | Ink ribbon drive mechanism |
| JP2000289908A (en) * | 1999-03-31 | 2000-10-17 | Copyer Co Ltd | Image forming device |
| CN2745036Y (en) * | 2004-07-21 | 2005-12-07 | 刘明春 | Optical coded disc of automobile bumper production line |
| CN1892496A (en) * | 2005-07-07 | 2007-01-10 | 株式会社理光 | Drive control device and image forming apparatus |
| CN103472245A (en) * | 2012-06-06 | 2013-12-25 | 珠海格力电器股份有限公司 | Method and device for measuring speed of conveyor belt |
| CN204478805U (en) * | 2015-03-20 | 2015-07-15 | 山西晨洋光伏科技有限公司 | Solar battery sheet sintering furnace |
-
2015
- 2015-11-20 CN CN201510806224.6A patent/CN105564904A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07159199A (en) * | 1993-12-13 | 1995-06-23 | Sharp Corp | High precision rotation type speed sensor |
| JPH106629A (en) * | 1996-06-20 | 1998-01-13 | Oki Inf Syst | Ink ribbon drive mechanism |
| JP2000289908A (en) * | 1999-03-31 | 2000-10-17 | Copyer Co Ltd | Image forming device |
| CN2745036Y (en) * | 2004-07-21 | 2005-12-07 | 刘明春 | Optical coded disc of automobile bumper production line |
| CN1892496A (en) * | 2005-07-07 | 2007-01-10 | 株式会社理光 | Drive control device and image forming apparatus |
| CN103472245A (en) * | 2012-06-06 | 2013-12-25 | 珠海格力电器股份有限公司 | Method and device for measuring speed of conveyor belt |
| CN204478805U (en) * | 2015-03-20 | 2015-07-15 | 山西晨洋光伏科技有限公司 | Solar battery sheet sintering furnace |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110764375A (en) * | 2019-11-28 | 2020-02-07 | 上海骄成机电设备有限公司 | Etching device |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160511 |