CN105563271A - Tool wheels used for elastic emission machining - Google Patents
Tool wheels used for elastic emission machining Download PDFInfo
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- CN105563271A CN105563271A CN201510956315.8A CN201510956315A CN105563271A CN 105563271 A CN105563271 A CN 105563271A CN 201510956315 A CN201510956315 A CN 201510956315A CN 105563271 A CN105563271 A CN 105563271A
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- China
- Prior art keywords
- optical element
- tool
- machining
- tool wheel
- wheel
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/02—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor by means of tools with abrading surfaces corresponding in shape with the lenses to be made
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention relates to tool wheels used for elastic emission machining, and belongs to the field of optical machining. By applying the tool wheels with the continuously-changing curvature radiuses to an elastic emission machining device, the interaction areas between the tool wheels and the surface of an optical element can be enlarged, and therefore machining efficiency is improved, especially for a concave-surface optical element; in addition, due to the fact that the interaction between the tool wheels and the surface of the optical element is varied gradually and continuously, on the one hand, machining singular points caused by tool wheel positioning errors can be avoided, and the surface machining quality of the whole optical element is improved; on the other hand, the interaction between the tool wheels and the surface of the optical element is also continuous between the adjacent interaction areas, and therefore by exerting continuous and controllable external force, the gaps between the tool wheels and the surface of the optical element can be effectively controlled, and scratching is avoided.
Description
Technical field
The invention belongs to the ultra-smooth technical field in optical element processing later stage, be specifically related to a kind of tool wheel for elastic emission machining.
Background technology
Along with the continuous progress of science and technology, optics develops to the extramalization of yardstick, the optical element with super-smooth surface character is widely used in the key areas such as high-accuracy product and modern national defence, makes technique of super smooth surface processing become the study hotspot of the world today.Such as, the exposure that the extreme ultraviolet that extreme ultraviolet photolithographic utilizes wavelength to be 13.5nm realizes mask pattern as operation wavelength copies, and is opened generation photoetching technique by under the most potentiality that semicon industry is thought for great scale integrated circuit manufacture.According to scattering theory, due to ultrashort operation wavelength, the minimum surface roughness of optical element all can cause the scattering of luminous energy, thus is lowered into image contrast and system production capacity.At present, typical ultra-smooth technology mainly contains mechanical lapping polishing, computer controls small abrasive nose polishing, bathe method polishing, chemically mechanical polishing, MRF, liquid jet polishing, ion beam polishing, elastic emission machining etc.Wherein, elastic emission machining (ElasticEmissionMachining, EEM) technology relies on the tool wheel of High Rotation Speed to drive the nanoscale abrasive particle in polishing fluid to make it to obtain kinetic energy, and contact with optical element surface, abrasive particle and element surface atom occur mutually to adsorb, and under the drive of the polishing fluid of flowing, make the removal of element surface generation atom magnitude, therefore its material remove stable, without advantages such as sub-surface damages, and have significant advantage at highly steep asphere and Free-Form Surface Machining.
The Mori of Osaka, Japan university proposed elastic emission machining technology first in 1976, and the angle in 1987 from electronic diffraction and X-ray, checking EEM is easy to obtain the surface of geometry and crystallization all very " perfection ", next year is studied the material removing rate that different abrasive particle and optical element material combine, further confirmation is completed to the working mechanism of EEM, 2006, the people such as Kubota are studied the relation between the abrasive particle form adopted in EEM and material removing rate, point out that abrasive particle form is more irregular, relative surface area is larger, then material removing rate is higher, and utilized EEM to process low-thermal-expansion optics devitrified glass in 2007, Ra is made to reach 0.085nm.
Traditional EEM technology adopts elastic ball as polishing tool, and the single-point zone of action is extremely limited, there is serious abrasive Flow side leakage, thus reduces working (machining) efficiency.For this reason, the lingering interest celery proposition Elastic Cylindrical emery wheel of Dalian University of Technology substitutes traditional global wheel, solves the side leakage phenomenon of abrasive Flow preferably, adds the active area of abrasive Flow and optical element, thus improves processing speed.No matter but be adopt spherical or cylindrical tool wheel, all only there is single radius of curvature in the radius of its contact surface, still has some limitations in process.
Summary of the invention
The present invention will improve the processing applicability of tool wheel in EEM, provides a kind of tool wheel for elastic emission machining.
In order to solve the problems of the technologies described above, technical scheme of the present invention is specific as follows:
For a tool wheel for elastic emission machining, the shape of this tool wheel is ellipsoid, and its equatorial radius is respectively a and b; Polar radius c is equal with equatorial radius b; And a>b, a/b are not more than 5; The rotating shaft of motor and the equatorial radius a of tool wheel overlap.
In technique scheme, the material of this tool wheel is elastomeric material.
In technique scheme, the material of this tool wheel is polyurethane.
The present invention has following beneficial effect:
Tool wheel for elastic emission machining of the present invention, it utilizes ellipsoid to have the radius of curvature of continuous variable, thus increases the effective active area with optical element surface, especially concave surface optical element, thus improves working (machining) efficiency.
Tool wheel for elastic emission machining of the present invention, in elastic emission machining, effect between it and optical element surface is continually varying, thus make the polishing in whole optical element can not there is singular point because of the position error of tool wheel, thus improve the crudy of whole optical element.
When tool wheel for elastic emission machining of the present invention moves in optical element, because the interaction between it and optical element is continuous gradation, therefore can, by applying the interval of the effective control tool wheel of continually varying external force and optical element surface, prevent optical element surface from scratching.
Tool wheel for elastic emission machining of the present invention, on the one hand, can when not obvious change elastic process wheel quality, elliposoidal elastic process wheel can obtain more greatly, more abundant radius of curvature, thus increase effective work area, improve working (machining) efficiency, and by the relative attitude of adjustment ellipsoid of elasticity processing wheel with element, make unitary elasticity ellipsoid tool wheel can adapt to different element processing; On the other hand, polishing efficiency is determined with gap between tool wheel and optical element, it is continuous print that gap between ellipsoid tool wheel and optical element changes, therefore, polishing efficiency in its single-point machining area is also continually varying, therefore make the even action of EEM in whole optical element be improved, thus improve the quality of finish of whole optical element; In addition, the interaction force of elliposoidal tool wheel and optical element surface is continuous gradation, and this is conducive to being exerted a force the wheel of control tool effectively and the gap of optical element surface by outside, prevents surface tear, improves suface processing quality.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
Fig. 1 is elastic emission machining (EEM) principle device schematic diagram.
Fig. 2 is the comparison schematic diagram of different tool wheel in elastic emission machining device.
Reference numeral in figure is expressed as:
11-numerical control main axle case; 12-motor; 13-resilient tool is taken turns; 14-optical element; 15-optical element platform; 16-polishing fluid; 16-cross spring; 17-load platform;
20-optical component surface shape to be processed; 21-spherical tool is taken turns; 22-cylindrical tool is taken turns; Elliposoidal tool wheel 23; The zone of action of 200-partial enlargement; 211,221, the 231-zone of action;
Detailed description of the invention
Invention thought of the present invention is:
In order to improve the processing applicability of tool wheel in EEM, the present invention proposes a kind of tool wheel for elastic emission machining.This tool wheel is an elastic rotary ellipsoid, on the one hand, when not obvious change elastic process wheel quality, elliposoidal elastic process wheel can obtain more greatly, more abundant radius of curvature, thus increase effective work area, improve working (machining) efficiency, and by the relative attitude of adjustment ellipsoid of elasticity processing wheel with element, make unitary elasticity ellipsoid tool wheel can adapt to different element processing; On the other hand, polishing efficiency is determined with gap between tool wheel and optical element, it is continuous print that gap between ellipsoid tool wheel and optical element changes, therefore, polishing efficiency in its single-point machining area is also continually varying, therefore make the even action of EEM in whole optical element be improved, thus improve the quality of finish of whole optical element; In addition, the interaction force of elliposoidal tool wheel and optical element surface is continuous gradation, and this is conducive to being exerted a force the wheel of control tool effectively and the gap of optical element surface by outside, prevents surface tear, improves suface processing quality.
Fig. 2 is that the single-point effective machining area in elastic emission machining device between different tool wheel compares.The enlarged drawing of the zone of action 200 of the partial enlargement wherein on optical component surface shape 20 to be processed is presented in Fig. 2 lower zone.Obtain the different zones of action under different tool wheel effect according to the character of different solid, the zone of action 211 corresponds to spherical tool wheel 21, and the zone of action 221 corresponds to cylindrical tools wheel 22, and the zone of action 231 corresponds to elliposoidal tool wheel 23.Visible, elliposoidal active wheel 23 possesses maximum machining area at single-point, can improve working (machining) efficiency well.In addition, elliposoidal tool wheel 23 is continuous gradation when tool wheel moves with the interaction of optical element surface 20, this contributes to the power on continuous setup load platform 17, the gap well between retaining tool wheel and optical element surface, thus avoids optical element surface to scratch.
Below in conjunction with accompanying drawing, the present invention is described in detail.
Be illustrated in figure 1 the principle device schematic diagram of elastic emission machining, it is primarily of numerical control main axle case 11, and motor 12 and the resilient tool wheel 13 adopting polyurethane to make are formed.Resilient tool wheel 13 finds region to be processed on optical element 14 under the control of numerical control main axle case, and produces rotation under the drive of motor 12, and drives polishing fluid 16, makes polishing fluid possess certain kinetic energy.Polishing fluid 16 is made up of solvent and abrasive particle, when the abrasive particle moved and optical element 14 surface contact, because being released in of Surface binding energy forms a kind of adhesion between the two, and optical element surface can be departed under the drive of polishing fluid 16, thus realize the removal amount of atomic level.When adding a small power to load platform 17, can make cross spring 16 that slight deformation occurs, thus the interval more adequately between control tool wheel 13 and optical element 14, avoid scratching optical element.Optical element platform 15 mainly plays a part fixing optical element 14.
The section of resilient tool wheel 13 is an ellipse, its major axis and minor axis are respectively a and b, and (equatorial radius of ellipsoid is respectively a and b), and a>b, then the rotating shaft of motor 12 should overlap with major axis, namely ellipsoid of elasticity shape tool wheel be this ellipse around major axis, be also rotation ellipsoid (ellipsoid polar radius c is equal with equatorial radius b) that the rotating shaft of motor 12 is formed.
According to conic section relevant knowledge, the radius of curvature r of ellipsoid is distributed in:
b
2/a<r<a
2/b
Then the Distribution Breadth of r is proportional to (a/b)
3, the distribution of r is wider, then the element processing of this elliposoidal resilient tool wheel to different curvature radius is suitable for also wider, generally, when a/b reaches 5, substantially can cover conventional optical element radius of curvature.When adding man-hour respectively to the element of differently curved degree, keep motor 12 attitude, also for elliposoidal resilient tool wheel attitude constant time, by changing the attitude of optical element platform 15, make elliposoidal resilient tool take turns different parts to contact with the element of differently curved degree, thus keep higher working (machining) efficiency.
Obviously, above-described embodiment is only for clearly example being described, and the restriction not to embodiment.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here exhaustive without the need to also giving all embodiments.And thus the apparent change of extending out or variation be still among the protection domain of the invention.
Claims (3)
1. for a tool wheel for elastic emission machining, it is characterized in that, the shape of this tool wheel is ellipsoid, and its equatorial radius is respectively a and b; Polar radius c is equal with equatorial radius b; And a>b, a/b are not more than 5; The rotating shaft of motor and the equatorial radius a of tool wheel overlap.
2. the tool wheel for elastic emission machining according to claim 1, is characterized in that, the material of this tool wheel is elastomeric material.
3. the tool wheel for elastic emission machining according to claim 2, is characterized in that, the material of this tool wheel is polyurethane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510956315.8A CN105563271A (en) | 2015-12-21 | 2015-12-21 | Tool wheels used for elastic emission machining |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510956315.8A CN105563271A (en) | 2015-12-21 | 2015-12-21 | Tool wheels used for elastic emission machining |
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| CN105563271A true CN105563271A (en) | 2016-05-11 |
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| CN201510956315.8A Pending CN105563271A (en) | 2015-12-21 | 2015-12-21 | Tool wheels used for elastic emission machining |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116494026A (en) * | 2023-06-09 | 2023-07-28 | 浙江大学 | Electrochemical catalytic atomic-level flexible polishing method for hard and brittle elements |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0457259A (en) * | 1990-06-22 | 1992-02-25 | Fujitsu Ltd | Manufacture of magnetic head slider |
| JPH0985614A (en) * | 1995-09-27 | 1997-03-31 | Toshiba Mach Co Ltd | Ultra-precision polishing tool |
| CN2295563Y (en) * | 1997-10-29 | 1998-10-28 | 曾绍谦 | Enhanced abrasive media (one) |
| JP2004098267A (en) * | 2002-09-13 | 2004-04-02 | Canon Inc | Polishing tool, polishing device, and polishing precess |
| JP2011245574A (en) * | 2010-05-25 | 2011-12-08 | Akita Prefectural Univ | Two-dimensional (oval) ultrasonic-assisted chemical mechanical composite machining method and device |
| CN102689246A (en) * | 2012-05-24 | 2012-09-26 | 东华大学 | Controllable mix abrasive jet polishing equipment for large-scale ultra-precision optical glass |
-
2015
- 2015-12-21 CN CN201510956315.8A patent/CN105563271A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0457259A (en) * | 1990-06-22 | 1992-02-25 | Fujitsu Ltd | Manufacture of magnetic head slider |
| JPH0985614A (en) * | 1995-09-27 | 1997-03-31 | Toshiba Mach Co Ltd | Ultra-precision polishing tool |
| CN2295563Y (en) * | 1997-10-29 | 1998-10-28 | 曾绍谦 | Enhanced abrasive media (one) |
| JP2004098267A (en) * | 2002-09-13 | 2004-04-02 | Canon Inc | Polishing tool, polishing device, and polishing precess |
| JP2011245574A (en) * | 2010-05-25 | 2011-12-08 | Akita Prefectural Univ | Two-dimensional (oval) ultrasonic-assisted chemical mechanical composite machining method and device |
| CN102689246A (en) * | 2012-05-24 | 2012-09-26 | 东华大学 | Controllable mix abrasive jet polishing equipment for large-scale ultra-precision optical glass |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116494026A (en) * | 2023-06-09 | 2023-07-28 | 浙江大学 | Electrochemical catalytic atomic-level flexible polishing method for hard and brittle elements |
| CN116494026B (en) * | 2023-06-09 | 2024-05-31 | 浙江大学 | Electrochemical catalytic atomic-level flexible polishing method for hard and brittle elements |
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Application publication date: 20160511 |
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