CN105444695A - Probe contact type measuring head enabling elastic element position limiting method-based dynamic characteristic adjustment - Google Patents
Probe contact type measuring head enabling elastic element position limiting method-based dynamic characteristic adjustment Download PDFInfo
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- CN105444695A CN105444695A CN201510973662.1A CN201510973662A CN105444695A CN 105444695 A CN105444695 A CN 105444695A CN 201510973662 A CN201510973662 A CN 201510973662A CN 105444695 A CN105444695 A CN 105444695A
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- flexible member
- gauge head
- feeler lever
- measuring head
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The invention discloses a probe contact type measuring head enabling elastic element limiting method-based dynamic characteristic adjustment and belongs to the workpiece surface shape quality detection technical field. The sensor is mainly composed of a measuring head module, a measuring head supporting module, a displacement detecting module and a measurement force generation module; the measuring head module includes a probe, a probing rod and a position limiting mechanism, and can move with the surface change of a measured workpiece; the measuring head supporting module is a magnetic suspension bearing and provides a radial supporting force required by the measuring head module; the displacement detection module is a precision grating and measures the displacement quantity of the measuring head module; and the measuring force generation module is an elastic element. According to the probe contact type measuring head of the invention, non-contact type electromagnetic bearing and elastic element position limiting adjustment design is adopted, the following characteristics of the probe and a measured surface can be enhanced, and the dynamic characteristics and measuring force control of the measuring head can be improved, and dynamic adjustment and measuring force control of the probe system can be carried out according to different materials and different surface shape characteristics.
Description
Technical field
The present invention relates to workpiece surface appearance to measure and technical field of quality detection, particularly a kind of probes touch formula gauge head regulating dynamic perfromance based on flexible member limit method.
Background technology
Probes touch formula gauge head is the core devices of accurate topography measurement instrument, is widely used for industry measuring surface form that is online and off-line part and detects and characterize.
In probes touch formula gauge head, the dynamic perfromance of gauge head is the key factor affecting measuring accuracy.Probes touch formula gauge head utilizes probe tip to contact and streaks sample surface, and utilizes the displacement of displacement sensitive element detector probe, thus characterizes the surface topography of sample.But owing to being subject to the impact of probes touch formula gauge head dynamic perfromance in measuring process, probe can not keep in touch with sample surface constantly.This phenomenon causes measurement result to occur pattern distortion and measuring accuracy reduction etc.
The mode improving probes touch formula gauge head dynamic perfromance has multiple, comprising: the elastic modulus improving probe system, reduces the equivalent mass of probe system and the ratio of damping etc. regulating probe system.The elastic modulus improving probe system can cause the increase of ergometry, adds the possibility of sample surface and probe system damage; Owing to being subject to the constraint of probe system part geometry relations and mechanical property, the equivalent mass of probe system is difficult to effective reduction; Regulate the ratio of damping of probe system can cause the raising of technical costs and financial cost.
Summary of the invention
In order to improve the dynamic perfromance of probes touch formula gauge head and keep less ergometry, realize the precision measurement of workpiece surface appearance, we have invented the probes touch formula gauge head regulating dynamic perfromance based on flexible member limit method.
The present invention relates to the probes touch formula gauge head regulating dynamic perfromance based on flexible member limit method, mainly comprise: gauge head module, gauge head supporting module, displacement detection module, ergometry generation module, bearing control module, displacement signal acquisition module, signal analysis and processing module etc.Described gauge head module comprises for contacting sample surfaces and the probe (1) of its modification of surface morphology of perception, feeler lever (2) and flexible member position-limit mechanism (3), described probe (1) is fixedly connected in the left end face of feeler lever (2), described feeler lever (2) is arranged in gauge head support module, described flexible member position-limit mechanism (3) comprises L shape fixed head (3-1), stop screw (3-2) and trip bolt (3-3), is fixed on the side of feeler lever (2) and the position of close left side.
Described gauge head supporting module comprises sensor base (4) and magnetic suspension bearing (5), described sensor base (4) is fixed on surveying work platform (8), described magnetic suspension bearing (5) is fixedly mounted in sensor base (4), by the magneticaction with feeler lever (2), radial support needed for gauge head module power is provided, and is connected with signal analysis and processing module (12) by bearing control module (10).
Described displacement detection module is a kind of precise grating, comprises scale grating (6-1) and read head (6-2), and described scale grating is nested on feeler lever (2), can be mobile along with feeler lever (2); Described read head (6-2) is corresponding with scale grating (6-1), be fixedly mounted in sensor base (4), and be connected with signal analysis and processing module (12) by displacement signal acquisition module (11), be used for the displacement information of reading feeler lever.
Described ergometry generation module is a kind of flexible member (7), described flexible member (7) is spring or spring leaf, one end of flexible member (7) is fixedly connected on the right side inwall of sensor base (4), and the other end is fixedly connected in its right end face of described feeler lever (2).Before measurement starts, Pre strained state is in by position-limit mechanism (3) adjustable elastic element (7), measurement starts rear measured workpiece (9) makes to produce between probe (1) and measured workpiece (9) horizontal direction ergometry by the further compression elastic element of contact (7) of probe (2), thus ensure that the good contact between probe (1) and measured workpiece (9), be conducive to probe (1) and follow the pattern change on measured workpiece (9) surface and move.
Regulate the probes touch formula gauge head of dynamic perfromance as above based on flexible member limit method, a nearlyer step is illustrated as: described gauge head module is made up of probe (1), feeler lever (2) and flexible member position-limit mechanism (3).Described probe (1) is coaxially connected with feeler lever (2), described flexible member position-limit mechanism (3) comprises L shape fixed head (3-1) as shown in Figure 2, stop screw (3-2), with trip bolt (3-3), base plate and the side plate of described L shape fixed head (3-1) are respectively equipped with threaded hole, threaded hole on base plate described in described trip bolt (3-3) screws in, and L shape fixed head (3-1) and feeler lever (2) are carried out fastening, threaded hole on side plate described in described stop screw (3-2) screws in, and the top of stop screw (3-2) contacts with the inner left wall of described sensor base (4).
The probes touch formula gauge head of dynamic perfromance is regulated as above based on flexible member limit method, a nearlyer step is illustrated as: described feeler lever (2) is magnetic material, the axis of feeler lever (2) overlaps with the axis of magnetic suspension bearing (5), can move left and right along X-direction.
The probes touch formula gauge head of dynamic perfromance is regulated as above based on flexible member limit method, a nearlyer step is illustrated as: there is stable radial forces between described magnetic suspension bearing (5) and feeler lever (2), for described gauge head module provides reliable radial support.The size of described radial forces according to actual needs, is regulated by bearing control module (10) by described signal analysis and processing module (12), the measuring error that the Radial Perturbation that can reduce gauge head module causes.
The probes touch formula gauge head of dynamic perfromance is regulated as above based on flexible member limit method, a nearlyer step is illustrated as: described flexible member position-limit mechanism (3) and flexible member (7) with the use of, realize the dynamic perfromance of probe system and the coordination of ergometry and optimization by the initial variable of adjustable elastic element (7).Its principle is: in the threaded hole on the side plate of the L shape fixed head (3-1) described in described stop screw (3-2) screws in, its top contacts with the inner left wall of described sensor base (4), gauge head module can be made to move left and right by regulating stop screw (3-1) the precession degree of depth in threaded hole, change pretightning force and the initial variable of flexible member (7), thus change the dynamic perfromance of probe system.
Beneficial effect of the present invention
The probes touch formula gauge head invented employs the design of contactless electromagnetic bearing and the spacing adjustment of flexible member, the following feature of probe and tested surface can be strengthened, promote dynamic perfromance and the control survey power of gauge head, and probe system can be carried out for different materials and the not workpiece of coplanar type feature and regulate the control with ergometry dynamically, while improving measuring accuracy, have also been enlarged the usable range of probes touch formula gauge head.
Accompanying drawing explanation
Fig. 1 the present invention is based on the probes touch formula gauge head one-piece construction schematic diagram that flexible member limit method regulates dynamic perfromance.
Fig. 2 the present invention is based on the probes touch formula gauge head position-limit mechanism schematic diagram that flexible member limit method regulates dynamic perfromance.
Embodiment
The present invention relates to the probes touch formula gauge head regulating dynamic perfromance based on flexible member limit method, below in conjunction with drawings and Examples, the present invention will be further described.
The probes touch formula gauge head based on flexible member limit method adjustment dynamic perfromance described in FIG comprises: gauge head module, gauge head supporting module, displacement detection module, ergometry generation module, bearing control module, displacement signal acquisition module, signal analysis and processing module etc.Described gauge head module is connected and composed by probe 1, feeler lever 2 and flexible member position-limit mechanism 3, can follow the pattern change on sample surface and move; Described gauge head supporting module comprises sensor base 3 and magnetic suspension bearing 4, described sensor base 4 is fixed on surveying work platform 8, described magnetic suspension bearing 5 is fixed in sensor base 4, and being used for provides reliable and stable radial supporting force to gauge head module; Described displacement detection module is a kind of precise grating, comprises scale grating 6-1 and read head 6-2, can read the displacement information of gauge head module; Described ergometry generation module is flexible member 7, in the present embodiment for spring; Described signal analysis and processing mould 12 pieces is for having the computer system of digital signal processing capability.
Specific embodiment of the invention process is: be first placed on by measured workpiece 9 on displacement platform and also fixed, described sensor base 4 is fixed on surveying work platform 8 and keeps static, described probe 1 and feeler lever 2 are arranged along X-direction, the tip of probe 1 is corresponding with the surface of measured workpiece 9, and the top of stop screw 3-2 contacts with the inner left wall of pedestal 4 and makes spring 7 be in Pre strained state.
Secondly for the requirement of the different original state of different measured workpiece 9 pairs of probe systems and ergometry, before the start of the measurement, first regulate the precession degree of depth of described stop screw 3-2 in L shape fixed head, change the initial variable of spring 7, thus the original state of probe system and initial measurement power are adjusted to the best, both can ensure probe and measured workpiece routinely good contact, the wearing and tearing on probe and measured workpiece surface can have been reduced again.
Last under the driving of scanning mechanism, workpiece moves along Y-axis or Z-direction, owing to there is small ergometry between probe 1 and measured workpiece 9, the microcosmic peak valley of surface of the work rises and falls and gauge head module will be made to move left and right along X-direction, and magnetic suspension bearing 5 can ensure low frictional properties and the highly conforming properties of this movement for radial support power that gauge head module provides., described gauge head moving left and right by the precise grating perception of displacement detection module 6 and being converted to electric signal along X axis, be transferred in computer system 12 through displacement signal acquisition module 11 again, described computer system 12 can reconstruct measured workpiece surface microscopic topographic through computational analysis.
Described gauge head module provides along the supporting power of Axial and radial primarily of magnetic suspension bearing 5, and described computer system 12 can adjust the control program of magnetic suspension bearing 5 in real time by bearing control module 10, to ensure that gauge head module stability is suspended in magnetic suspension bearing.
The above exemplary illustrates that elastic element 7 adopts spring, is only preferred embodiment of the present invention, not in order to limit the present invention; All within thought of the present invention and principle, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (6)
1. regulate the probes touch formula gauge head of dynamic perfromance based on flexible member limit method, comprising: gauge head module, gauge head supporting module, displacement detection module, ergometry generation module, bearing control module, displacement signal acquisition module, signal analysis and processing module etc.; It is characterized in that: described gauge head module is made up of probe (1), feeler lever (2) and flexible member position-limit mechanism (3), the axis of feeler lever (2) overlaps with the axis of magnetic suspension bearing (5);
Described gauge head supporting module comprises sensor base (4) and magnetic suspension bearing (5), described sensor base (4) is fixed on surveying work platform (8), described magnetic suspension bearing (5) is fixedly mounted in sensor base (4), and described magnetic suspension bearing (5) is connected with signal analysis and processing module (12) by bearing control module (10);
Described displacement detection module is grating scale, comprise scale grating (6-1) and read head (6-2), described scale grating (6-1) is nested on feeler lever (2), feeler lever (2) can be followed mobile, described read head (6-2) is corresponding with scale grating (6-1), be fixed on the intermediate projections position of sensor base (4), and be connected with signal analysis and processing module (12) by displacement signal acquisition module (11);
Described ergometry generation module is flexible member (7), and described flexible member (7) one end is fixed in sensor base (4), and the other end is connected with its right end face of feeler lever (2).
2. the probes touch formula gauge head of dynamic perfromance is regulated as claimed in claim 1 based on flexible member limit method, it is characterized in that: the probe (1) in described gauge head module is coaxially connected with feeler lever (2), described flexible member position-limit mechanism (3) is fixed on the side of feeler lever (2) and the position of close left side.
3. the probes touch formula gauge head of dynamic perfromance is regulated as claimed in claim 1 or 2 based on flexible member limit method, it is characterized in that: described feeler lever (2) is magnetic material, described magnetic suspension bearing (5), by the magneticaction with feeler lever (2), provides the power of the radial support needed for gauge head module.
4. the probes touch formula gauge head of dynamic perfromance is regulated as claimed in claim 1 or 2 based on flexible member limit method, it is characterized in that: described flexible member position-limit mechanism (3) comprises L shape fixed head (3-1), stop screw (3-2), with trip bolt (3-3), base plate and the side plate of described L shape fixed head (3-1) are respectively equipped with threaded hole, L shape fixed head (3-1) and feeler lever (2) also carry out fastening by the threaded hole on the base plate described in described trip bolt (3-3) screws in, threaded hole on side plate described in described stop screw (3-2) screws in, and the top of stop screw (3-2) contacts with the inner left wall of described sensor base (4).
5. the probes touch formula gauge head of dynamic perfromance is regulated as claimed in claim 1 based on flexible member limit method, it is characterized in that: described flexible member (7) is spring or spring leaf, one end of flexible member (7) is fixedly connected on the inwall of sensor base (4), the other end is fixedly connected in described feeler lever (2) its right end face, and its Pre strained state is regulated by flexible member position-limit mechanism (3).
6. regulate the probes touch formula gauge head of dynamic perfromance as claimed in claim 1 based on flexible member limit method, it is characterized in that: described signal analysis and processing module is the computer system with digital signal processing capability.
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| CN201510973662.1A CN105444695B (en) | 2015-12-22 | 2015-12-22 | The probe contact measuring head of dynamic characteristic is adjusted based on elastic element limit method |
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| CN201510973662.1A CN105444695B (en) | 2015-12-22 | 2015-12-22 | The probe contact measuring head of dynamic characteristic is adjusted based on elastic element limit method |
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| CN105444695A true CN105444695A (en) | 2016-03-30 |
| CN105444695B CN105444695B (en) | 2019-03-22 |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106093752A (en) * | 2016-06-20 | 2016-11-09 | 东莞市联洲知识产权运营管理有限公司 | A kind of test probe card being applied to integrated circuit |
| CN106596344A (en) * | 2017-02-13 | 2017-04-26 | 长春理工大学 | Viscosity detecting sensor based on electromagnetic induction |
| CN107272577A (en) * | 2017-07-06 | 2017-10-20 | 天通吉成机器技术有限公司 | A kind of periphery grinding machine on-line measurement and measurer for thickness |
| CN107816958A (en) * | 2017-11-23 | 2018-03-20 | 大连豪森瑞德设备制造有限公司 | Multi-model measures fast replacing device |
| CN107825115A (en) * | 2017-11-27 | 2018-03-23 | 苏州索力旺新能源科技有限公司 | A kind of photovoltaic junction box assembling detection device |
| CN110207639A (en) * | 2019-05-22 | 2019-09-06 | 南京泰普森自动化设备有限公司 | Elasticity measurement connector, elasticity measurement unit and elasticity measuring device |
| CN110243858A (en) * | 2019-06-10 | 2019-09-17 | 佛山科学技术学院 | A kind of plant fluid flow test device and its detection method |
| CN111692984A (en) * | 2020-06-19 | 2020-09-22 | 南京工业大学 | Bridge dynamic deflection measuring device and measuring method based on magnetic suspension technology |
| CN113865542A (en) * | 2021-09-17 | 2021-12-31 | 浙大宁波理工学院 | Measuring device and measuring method for curved surface morphology |
| CN115219750A (en) * | 2022-07-07 | 2022-10-21 | 深圳市斯纳达科技有限公司 | Three-dimensional electric probe base with force feedback |
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| CN106596344A (en) * | 2017-02-13 | 2017-04-26 | 长春理工大学 | Viscosity detecting sensor based on electromagnetic induction |
| CN107272577A (en) * | 2017-07-06 | 2017-10-20 | 天通吉成机器技术有限公司 | A kind of periphery grinding machine on-line measurement and measurer for thickness |
| CN107816958B (en) * | 2017-11-23 | 2023-12-22 | 大连豪森瑞德设备制造有限公司 | Multi-model measuring quick-changing device |
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| CN107825115A (en) * | 2017-11-27 | 2018-03-23 | 苏州索力旺新能源科技有限公司 | A kind of photovoltaic junction box assembling detection device |
| CN110207639A (en) * | 2019-05-22 | 2019-09-06 | 南京泰普森自动化设备有限公司 | Elasticity measurement connector, elasticity measurement unit and elasticity measuring device |
| CN110243858A (en) * | 2019-06-10 | 2019-09-17 | 佛山科学技术学院 | A kind of plant fluid flow test device and its detection method |
| CN110243858B (en) * | 2019-06-10 | 2024-03-22 | 佛山科学技术学院 | Plant liquid flow detection device and detection method thereof |
| CN111692984A (en) * | 2020-06-19 | 2020-09-22 | 南京工业大学 | Bridge dynamic deflection measuring device and measuring method based on magnetic suspension technology |
| CN113865542A (en) * | 2021-09-17 | 2021-12-31 | 浙大宁波理工学院 | Measuring device and measuring method for curved surface morphology |
| CN115219750A (en) * | 2022-07-07 | 2022-10-21 | 深圳市斯纳达科技有限公司 | Three-dimensional electric probe base with force feedback |
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