CN104048611A - Contact type measuring head with controllable measuring force - Google Patents
Contact type measuring head with controllable measuring force Download PDFInfo
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- CN104048611A CN104048611A CN201310077753.8A CN201310077753A CN104048611A CN 104048611 A CN104048611 A CN 104048611A CN 201310077753 A CN201310077753 A CN 201310077753A CN 104048611 A CN104048611 A CN 104048611A
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- guide rail
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Abstract
The invention provides a contact type measuring head with a controllable measuring force. The contact type measuring head comprises an air guide rail die and a guide core. The guide core has the hollow inside and penetrates the air guide rail die. The air guide rail die has an air inlet; and a guide groove for forming an air guide rail is arranged in the inner surface. An air supply adapter pipe connected to the air inlet is arranged at the guide core and is used for air inflation in the guide core. Besides, a spring is connected to the lower end of the guide core and is also arranged between the guide core and a base plate; a probe penetrating the base plate is connected to the lower end of the spring; and a grating ruler that is in parallel connection with a laser displacement sensor is connected to the upper end of the guide core. According to the measuring head, the pneumatic control technology is used; and precise adjustment of the measuring force is realized by changing the internal pressure value and the external pressure value of the guide core. The measuring force not only can be selected according to the material feature of a measured object but also can be adjusted in real time after selected based on the surface configuration change, thereby ensuring invariability of the measuring force. The measuring head has the high adaptability for the feature of the measured object, so that the measuring precision can be improved.
Description
Technical field
The present invention relates to precision measurement equipment technical field, particularly the controlled contact measuring head of a kind of ergometry.
Background technology
For the light sheet type device form tolerance of (comprising ultraprecise part, precision die, optics die, plane thin-wall part etc.), the measurement of surfaceness, need to use the precision measurement equipment with gauge head.According to the difference of measuring principle, contactless, contact two classes that gauge head can be divided into, wherein contactless gauge head can be by optical scanning to obtain the morpheme error on measured workpiece surface, but its complex structure, cost are high, and limited by Machine Vision Recognition Technology development degree, still do not possess at present nano level measuring accuracy.Contact measuring head utilizes the Surface Contact of probe and measured workpiece, can obtain more accurate morpheme control information, thereby measuring accuracy is brought up to nanometer level.
Traditional contact measuring head is contact touch trigger probe, it produces relativity power by probe with contacting of measured workpiece, force probe generation micro-deformation, thereby trigger gauge head internal mechanism and produce trigger pip, read recorded information after this signal by measuring system, but this metering system can only be realized " point " and measure, and probe contact cannot be synchronizeed and carry out with signal-obtaining.By comparison, contact scanning formula gauge head is all improving to some extent aspect gauge head self and measuring system two, and it has been realized the real-time contact of probe and surface of the work and has read, thereby has improved measuring accuracy and measured efficiency.But still there are following technological difficulties in relevant contact scanning formula gauge head: the flexibility ratio of (1) gauge head is not enough to reflect in real time the subtle change of measured workpiece surface information; (2) gauge head cannot be adjusted ergometry numerical value at any time according to the material feature of measured workpiece and configuration of surface; (3) gauge head cannot ensure that the ergometry that is applied to measured workpiece surface remains constant.
Summary of the invention
Above-mentioned defect and the problem of the measuring accuracy deficiency causing for the bad adaptability of measurand feature for existing contact measuring head, the object of this invention is to provide and a kind ofly can regulate ergometry, can in configuration of surface change procedure, keep the controlled contact measuring head of the constant ergometry of ergometry according to the material behavior of measurand.
For achieving the above object, the invention provides following technical scheme: the controlled contact measuring head of a kind of ergometry, it is characterized in that, comprising: air guide rail mould, lead core, described in lead core inside be hollow, it is through air guide rail mould, described air guide rail mould contains air intake opening, and its inside surface is provided with air slot, after inflation, can and lead at air guide rail mould inside surface and between core outer surface, form air guide rail, the described core of leading is also provided with the air feed transfer tube that is connected to air intake opening, and it is inflated for guide core inner;
The described core lower end of leading is connected with spring, and it is arranged between the base plate of leading core and gauge head bottom, and described spring lower end is connected with the probe that is passed down through base plate, described in lead core upper end and be also connected with grating scale, its connection parallel with laser displacement sensor.
As technique scheme preferably, described gauge head adopts vertical vertical installation.
As technique scheme preferably, described in lead core and only do pumping perpendicular to surface level direction in air guide rail mould inside.
As technique scheme preferably, the cross sectional shape of described air slot is U font.
The present invention also provides the using method of the controlled contact measuring head of a kind of ergometry, it is characterized in that, contains following steps:
Q1: air guide rail mould is filled with pressure gas by air intake opening to air slot, at air guide rail mould and lead between core and form air film layer, makes to lead core in suspended state;
Q2: the marker that placing height value is X0;
Q3: by being filled with gas in air feed transfer tube guide core, adjust and lead the inside and outside portion air pressure of core, make spring in compressive state slightly, to guarantee that probe has appropriate ergometry in the time contacting with body surface;
Q4: gauge head moves down, comes in contact tips of probes and marker, and the acting force forming moves upward probe, and laser displacement sensor reads corresponding numerical value H, records the now vertical height Z1 at place of gauge head;
Q5: remove marker and change measured object, tips of probes is contacted with measured object, adjust probe location until laser displacement sensor reading reaches H again, record the now vertical height Z2 at place of gauge head;
Q6: the thickness difference Δ Z=|Z2-Z1| that calculates marker and measured object;
Q7: calculate measured object thickness L=|X0-Δ Z|.
The controlled contact measuring head of ergometry provided by the invention, utilizes Pneumatic Control Technology, leads the inside and outside atmospheric pressure value of core realized the fine adjustment to ergometry by change.This gauge head both can, according to the material behavior of measurand to select suitable ergometry, can adjust in real time according to the variation of its configuration of surface again, to ensure that ergometry numerical value does not change after selected ergometry.Therefore, gauge head provided by the present invention has stronger adaptability for the feature of measurand, can improve measuring accuracy.
Brief description of the drawings
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the structural representation of the controlled contact measuring head of ergometry of the embodiment of the present invention.
Embodiment
Below in conjunction with accompanying drawing of the present invention, technical scheme of the present invention is carried out to clear, complete description, obviously, described embodiment is only a part of embodiment of the present invention, instead of whole embodiment.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtaining under creative work prerequisite, belong to the scope of protection of the invention.
As shown in Figure 1, the controlled contact measuring head of a kind of ergometry that the embodiment of the present invention provides, comprise: air guide rail mould 1, lead core 2, described inside of leading core 2 is hollow, and it is through air guide rail mould 1, and described air guide rail mould 1 contains air intake opening, its inside surface is provided with air slot, after inflation, can and lead between core 2 outside surfaces at air guide rail mould 1 inside surface and form air guide rail, described in lead core 2 and be also provided with the air feed transfer tube 3 that is connected to air intake opening, it is for guide core 2 inner inflatable; Described core 2 lower ends of leading are connected with spring 4, and it is arranged between the base plate 5 of leading core 2 and gauge head bottom, and described spring 4 lower ends are connected with the probe 6 that is passed down through base plate 5, described in lead core 2 upper ends and be also connected with grating scale 7, its connection parallel with laser displacement sensor 8.
The described core 2 of leading only does pumping perpendicular to surface level direction in air guide rail mould 1 inside.The cross sectional shape of described air slot is U font.Described gauge head adopts vertical vertical installation.
The embodiment of the present invention also provides relevant using method, contains following steps: air guide rail mould is filled with pressure gas by air intake opening to air slot, at air guide rail mould and lead between core and form air film layer, makes to lead core in suspended state; Placing height value is the marker of X0; By being filled with gas in air feed transfer tube guide core, adjust and lead the inside and outside portion air pressure of core, make spring in compressive state slightly, to guarantee that probe has appropriate ergometry in the time contacting with body surface; Gauge head moves down, and tips of probes and marker are come in contact, and the acting force forming moves upward probe, and laser displacement sensor reads corresponding numerical value H, records the now vertical height Z1 at place of gauge head; Remove marker and change measured object, tips of probes is contacted with measured object, adjust probe location until laser displacement sensor reading reaches H again, record the now vertical height Z2 at place of gauge head; Calculate the thickness difference Δ Z=|Z2-Z1| of marker and measured object; Calculate measured object thickness L=|X0-Δ Z|.
The controlled contact measuring head of ergometry provided by the present invention has following beneficial effect:
(1) simple in structure, can be arranged on easily on existing equipment and directly use;
(2) utilize Pneumatic Control Technology, flexible operation, controllability is strong, accurately mobile;
(3) improve measurement precision, reduce costs, raise the efficiency.
The controlled contact measuring head of ergometry provided by the present invention, can lead the inside and outside air pressure change of core by control, accurately regulates its mechanical balance relation in vertical direction; Read in real time because measured object surface height changes and cause grating scale displacement in vertical direction by laser displacement sensor, also can, by data transfer to computing machine, result of calculation be analyzed and be shown.This gauge head has solved traditional contact measuring head cannot select suitable ergometry for concrete measurand, once and cannot ensure the invariable problem of acting force that it applies in each place, measurand surface after selecting ergometry.
The above; be only the specific embodiment of the present invention, but protection scope of the present invention is not limited to this, any be familiar with those skilled in the art the present invention disclose technical scope in; can expect easily changing or replacing, within all should being encompassed in protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of described claim.
Claims (5)
1. the controlled contact measuring head of ergometry, it is characterized in that, comprise: air guide rail mould, lead core, described inside of leading core is hollow, and it is through air guide rail mould, and described air guide rail mould contains air intake opening, its inside surface is provided with air slot, after inflation, can and lead at air guide rail mould inside surface and between core outer surface, form air guide rail, described in lead core and be also provided with the air feed transfer tube that is connected to air intake opening, it is inflated for guide core inner;
The described core lower end of leading is connected with spring, and it is arranged between the base plate of leading core and gauge head bottom, and described spring lower end is connected with the probe that is passed down through base plate, described in lead core upper end and be also connected with grating scale, its connection parallel with laser displacement sensor.
2. the controlled contact measuring head of a kind of ergometry according to claim 1, is characterized in that, described gauge head adopts vertical vertical installation.
3. the controlled contact measuring head of a kind of ergometry according to claim 1, is characterized in that, described in lead core and only do pumping perpendicular to surface level direction in air guide rail mould inside.
4. the controlled contact measuring head of a kind of ergometry according to claim 1, is characterized in that, the cross sectional shape of described air slot is U font.
5. a using method for the controlled contact measuring head of ergometry, is characterized in that, contains following steps:
Q1: air guide rail mould is filled with pressure gas by air intake opening to air slot, at air guide rail mould and lead between core and form air film layer, makes to lead core in suspended state;
Q2: the marker that placing height value is X0;
Q3: by being filled with gas in air feed transfer tube guide core, adjust and lead the inside and outside portion air pressure of core, make spring in compressive state slightly, to guarantee that probe has appropriate ergometry in the time contacting with body surface;
Q4: gauge head moves down, comes in contact tips of probes and marker, and the acting force forming moves upward probe, and laser displacement sensor reads corresponding numerical value H, records the now vertical height Z1 at place of gauge head;
Q5: remove marker and change measured object, tips of probes is contacted with measured object, adjust probe location until laser displacement sensor reading reaches H again, record the now vertical height Z2 at place of gauge head;
Q6: the thickness difference Δ Z=|Z2-Z1| that calculates marker and measured object;
Q7: calculate measured object thickness L=|X0-Δ Z|.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310077753.8A CN104048611A (en) | 2013-03-12 | 2013-03-12 | Contact type measuring head with controllable measuring force |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310077753.8A CN104048611A (en) | 2013-03-12 | 2013-03-12 | Contact type measuring head with controllable measuring force |
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| CN104048611A true CN104048611A (en) | 2014-09-17 |
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| CN201310077753.8A Pending CN104048611A (en) | 2013-03-12 | 2013-03-12 | Contact type measuring head with controllable measuring force |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105444695A (en) * | 2015-12-22 | 2016-03-30 | 四川大学 | Probe contact type measuring head enabling elastic element position limiting method-based dynamic characteristic adjustment |
| CN109211123A (en) * | 2018-10-31 | 2019-01-15 | 浙江德清龙立红旗制药机械有限公司 | Punch die laser detection machine |
| CN110207639A (en) * | 2019-05-22 | 2019-09-06 | 南京泰普森自动化设备有限公司 | Elasticity measurement connector, elasticity measurement unit and elasticity measuring device |
| CN112066900A (en) * | 2020-09-16 | 2020-12-11 | 江西财经大学 | Distance measuring device |
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| JPH1062158A (en) * | 1996-08-26 | 1998-03-06 | Seiko Instr Inc | Atomic force microscope-type surface roughness gage |
| JP2005121370A (en) * | 2003-10-14 | 2005-05-12 | Canon Inc | Surface shape measuring apparatus and method |
| CN102829740A (en) * | 2012-09-12 | 2012-12-19 | 昆山允可精密工业技术有限公司 | Contact measuring apparatus |
| CN102901438A (en) * | 2012-11-08 | 2013-01-30 | 昆山允可精密工业技术有限公司 | Contact type measuring head for measuring thickness of SMT (Surface Mount Technology) net plate |
| CN102901439A (en) * | 2012-11-08 | 2013-01-30 | 昆山允可精密工业技术有限公司 | Contact measuring head for measuring thickness of surface mount technology (SMT) screen plate |
| CN203148397U (en) * | 2013-03-12 | 2013-08-21 | 昆山允可精密工业技术有限公司 | Contact probe with controllable measuring force |
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2013
- 2013-03-12 CN CN201310077753.8A patent/CN104048611A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1062158A (en) * | 1996-08-26 | 1998-03-06 | Seiko Instr Inc | Atomic force microscope-type surface roughness gage |
| JP2005121370A (en) * | 2003-10-14 | 2005-05-12 | Canon Inc | Surface shape measuring apparatus and method |
| CN102829740A (en) * | 2012-09-12 | 2012-12-19 | 昆山允可精密工业技术有限公司 | Contact measuring apparatus |
| CN102901438A (en) * | 2012-11-08 | 2013-01-30 | 昆山允可精密工业技术有限公司 | Contact type measuring head for measuring thickness of SMT (Surface Mount Technology) net plate |
| CN102901439A (en) * | 2012-11-08 | 2013-01-30 | 昆山允可精密工业技术有限公司 | Contact measuring head for measuring thickness of surface mount technology (SMT) screen plate |
| CN203148397U (en) * | 2013-03-12 | 2013-08-21 | 昆山允可精密工业技术有限公司 | Contact probe with controllable measuring force |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105444695A (en) * | 2015-12-22 | 2016-03-30 | 四川大学 | Probe contact type measuring head enabling elastic element position limiting method-based dynamic characteristic adjustment |
| CN105444695B (en) * | 2015-12-22 | 2019-03-22 | 四川大学 | The probe contact measuring head of dynamic characteristic is adjusted based on elastic element limit method |
| CN109211123A (en) * | 2018-10-31 | 2019-01-15 | 浙江德清龙立红旗制药机械有限公司 | Punch die laser detection machine |
| CN110207639A (en) * | 2019-05-22 | 2019-09-06 | 南京泰普森自动化设备有限公司 | Elasticity measurement connector, elasticity measurement unit and elasticity measuring device |
| CN112066900A (en) * | 2020-09-16 | 2020-12-11 | 江西财经大学 | Distance measuring device |
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Application publication date: 20140917 |