CN105419925A - Silicon wafer cutting liquid recycling tank - Google Patents
Silicon wafer cutting liquid recycling tank Download PDFInfo
- Publication number
- CN105419925A CN105419925A CN201510791343.9A CN201510791343A CN105419925A CN 105419925 A CN105419925 A CN 105419925A CN 201510791343 A CN201510791343 A CN 201510791343A CN 105419925 A CN105419925 A CN 105419925A
- Authority
- CN
- China
- Prior art keywords
- cutting liquid
- tank
- cell body
- silicon wafer
- cutting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M175/00—Working-up used lubricants to recover useful products ; Cleaning
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Organic Chemistry (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
The invention discloses a silicon wafer cutting liquid recycling tank which comprises a tank body. An overflow separation plate is arranged in the tank body to separate the tank body into a settling tank and an overflow tank. A cutting liquid inlet is formed in the upper portion of the side wall of the settling tank. A net rack is further horizontally arranged in the settling tank. A micropore filter screen is laid on the net rack. A cutting liquid outlet is formed in the bottom of the overflow tank. The height of the overflow separation plate is smaller than that of the tank body. According to the silicon wafer cutting liquid recycling tank, cutting liquid can be filtered, screened and maintained while cutting, so that the service life of the cutting liquid is prolonged. The cutting liquid about to scrap can be preliminarily screened, and subsequent polyethylene glycol recycling is facilitated.
Description
Technical field
The present invention relates generally to silicon chip cutting fluid recycle device.
Background technology
In silicon chip cutting production process, as the responsible consumptive material of metal wire cutting, silicon chip cutting fluid is also indispensable, and price is more expensive, and usage quantity is large.Therefore for the recycling of cutting liquid and the improvement of working service, the production cost of silicon chip processing can effectively be reduced.
Summary of the invention
Goal of the invention: for above-mentioned existing Problems existing and deficiency, the object of this invention is to provide a kind of silicon chip cutting fluid accumulator tank, effectively can carry out real-time online maintenance to cutting liquid, and scraps to close the recycling that cutting liquid carries out polyoxyethylene glycol.
Technical scheme: for achieving the above object, the present invention is by the following technical solutions: a kind of silicon chip cutting fluid accumulator tank, comprise cell body, be provided with weir divider cell body is separated into subsider and overflow groove in described cell body, the top of the sidewall of described subsider is provided with cutting liquid import; That goes back level in described subsider is provided with rack, and this rack is equipped with millipore filtration, and the bottom of described overflow groove is provided with cutting liquid outlet; The height of described weir divider is lower than the height of cell body.
As preferably, described millipore filtration is hollow-fibre membrane or ceramic membrane, and aperture is 0.2 ~ 2.0um.More preferably multi-layer fiber film-stack structure.
As preferably, in described overflow groove, liquid level underlying space is connected with vaccum-pumping equipment.
Beneficial effect: compared with prior art, the present invention has the following advantages: while cutting, can carry out filtering screening maintenance to cutting liquid, extend the work-ing life of cutting liquid; And primary dcreening operation can be carried out to close to the cutting liquid scrapped, have reason the recovery of follow-up polyoxyethylene glycol.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Wherein, cell body 1, weir divider 2, subsider 3, overflow groove 4, cutting liquid import 5, cutting liquid outlet 6, rack 7, millipore filtration 8.
Embodiment
Below in conjunction with specific embodiment, illustrate the present invention further, these embodiments should be understood only be not used in for illustration of the present invention and limit the scope of the invention, after having read the present invention, the amendment of those skilled in the art to the various equivalent form of value of the present invention has all fallen within the application's claims limited range.
As shown in Figure 1, a kind of silicon chip cutting fluid accumulator tank, comprises cell body, is provided with weir divider cell body is separated into subsider and overflow groove in described cell body, and the top of the sidewall of described subsider is provided with cutting liquid import; That goes back level in described subsider is provided with rack, and this rack is equipped with millipore filtration, and the bottom of described overflow groove is provided with cutting liquid outlet; The height of described weir divider is lower than the height of cell body.As preferably, described millipore filtration is hollow-fibre membrane or ceramic membrane, and aperture is 0.2 ~ 2.0um.More preferably multi-layer fiber film-stack structure.As preferably, in described overflow groove, liquid level underlying space is connected with vaccum-pumping equipment.
Cutting liquid enters into the subsider of accumulator tank after catch tray is collected from cutting liquid import, and the suspension settlement particle in sedimentation cutting liquid, then enter overflow groove along with liquid level rises from weir divider overflow, under negative pressure state, carry out cascade filtration through millipore filtration subsequently, finally deliver in subsequent disposal groove carry out material supplement and reclaim.
Claims (3)
1. a silicon chip cutting fluid accumulator tank, is characterized in that: comprise cell body, is provided with weir divider cell body is separated into subsider and overflow groove in described cell body, and the top of the sidewall of described subsider is provided with cutting liquid import; That goes back level in described subsider is provided with rack, and this rack is equipped with millipore filtration, and the bottom of described overflow groove is provided with cutting liquid outlet; The height of described weir divider is lower than the height of cell body.
2. silicon chip cutting fluid accumulator tank according to claim 1, it is characterized in that: described millipore filtration is hollow-fibre membrane or ceramic membrane, aperture is 0.2 ~ 2.0um.
3. silicon chip cutting fluid accumulator tank according to claim 1, is characterized in that: in described overflow groove, liquid level underlying space is connected with vaccum-pumping equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510791343.9A CN105419925A (en) | 2015-11-17 | 2015-11-17 | Silicon wafer cutting liquid recycling tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510791343.9A CN105419925A (en) | 2015-11-17 | 2015-11-17 | Silicon wafer cutting liquid recycling tank |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105419925A true CN105419925A (en) | 2016-03-23 |
Family
ID=55498473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510791343.9A Pending CN105419925A (en) | 2015-11-17 | 2015-11-17 | Silicon wafer cutting liquid recycling tank |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105419925A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117482631A (en) * | 2024-01-02 | 2024-02-02 | 北京禹涛环境工程有限公司 | Low-power hospital sewage treatment device |
-
2015
- 2015-11-17 CN CN201510791343.9A patent/CN105419925A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117482631A (en) * | 2024-01-02 | 2024-02-02 | 北京禹涛环境工程有限公司 | Low-power hospital sewage treatment device |
| CN117482631B (en) * | 2024-01-02 | 2024-03-22 | 北京禹涛环境工程有限公司 | Low-power hospital sewage treatment device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20160323 |