CN105396369A - Silicon chip cutting liquid recycling tank with loop overflow - Google Patents
Silicon chip cutting liquid recycling tank with loop overflow Download PDFInfo
- Publication number
- CN105396369A CN105396369A CN201510791341.XA CN201510791341A CN105396369A CN 105396369 A CN105396369 A CN 105396369A CN 201510791341 A CN201510791341 A CN 201510791341A CN 105396369 A CN105396369 A CN 105396369A
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- CN
- China
- Prior art keywords
- overflow
- cutting liquid
- tank
- silicon chip
- cell body
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D36/00—Filter circuits or combinations of filters with other separating devices
- B01D36/04—Combinations of filters with settling tanks
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The invention discloses a silicon chip cutting liquid recycling tank with loop overflow. The silicon chip cutting liquid recycling tank comprises a tank body, wherein the tank body is internally provided with an overflow baffle for separating the tank body into a settling tank and an overflow tank; the upper part of the side wall of the settling tank is provided with a cutting liquid inlet; the settling tank is also internally provided with a screen frame horizontally; a microporous filtering membrane is laid on the screen frame; the bottom of the overflow tank is provided with a cutting liquid outlet; the overflow baffle comprises a first overflow baffle, a second overflow baffle and a third overflow baffle which are sequentially arranged vertically; the bottom and two sides of the first overflow baffle are connected with the tank body in a sealed mode, and the height of the first overflow baffle is lower than that of the tank body; two sides of the second overflow baffle are connected with the tank body in a sealed mode, and the bottom of the second overflow baffle and the overflow tank form a clearance; the bottom and two sides of the third overflow baffle are connected with the tank body in a sealed mode. The silicon chip cutting liquid recycling tank with loop overflow can maintain the cutting liquid effectively online in real time and recycle polyethylene glycol of a cutting liquid which is approximately scraped.
Description
Technical field
The present invention relates generally to silicon chip cutting fluid recycle device.
Background technology
In silicon chip cutting production process, as the responsible consumptive material of metal wire cutting, silicon chip cutting fluid is also indispensable, and price is more expensive, and use amount is large.Therefore for the recycling of cutting liquid and the improvement of working service, the production cost of silicon chip processing can effectively be reduced.
Summary of the invention
Goal of the invention: for above-mentioned existing Problems existing and deficiency, the object of this invention is to provide the silicon chip cutting fluid accumulator tank of a kind of loop overflow, effectively can carry out real-time online maintenance to cutting liquid, and scrap to close the recycling that cutting liquid carries out polyethylene glycol.
Technical scheme: for achieving the above object, the present invention is by the following technical solutions: the silicon chip cutting fluid accumulator tank of a kind of loop overflow, comprise cell body, be provided with weir divider in described cell body and cell body is divided into subsider and overflow launder, the top of the sidewall of described subsider is provided with cutting liquid import; That goes back level in described subsider is provided with rack, and this rack is equipped with miillpore filter, and the bottom of described overflow launder is provided with cutting liquid outlet; Described weir divider comprises the first weir divider, the second weir divider and the 3rd weir divider that vertically arrange successively, bottom first weir divider and both sides and cell body are tightly connected, and its height is lower than cell body height, second weir divider both sides and cell body are tightly connected, leave space between bottom and overflow launder, bottom the 3rd weir divider and both sides and cell body are tightly connected.
As preferably, described miillpore filter is hollow-fibre membrane or ceramic membrane, and aperture is 0.2 ~ 2.0um.
As preferably, in described overflow launder, ullage space is connected with vaccum-pumping equipment.
Beneficial effect: compared with prior art, the present invention has the following advantages: while cutting, can carry out filtering screening maintenance to cutting liquid, extend the service life of cutting liquid; And primary dcreening operation can be carried out to close to the cutting liquid scrapped, have reason the recovery of follow-up polyethylene glycol.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Wherein, cell body 1, subsider 2, overflow launder 3, cutting liquid import 4, first weir divider 5, second weir divider 6, the 3rd weir divider 7, cutting liquid outlet 8, rack 9, miillpore filter 10.
Detailed description of the invention
Below in conjunction with specific embodiment, illustrate the present invention further, these embodiments should be understood only be not used in for illustration of the present invention and limit the scope of the invention, after having read the present invention, the amendment of those skilled in the art to the various equivalent form of value of the present invention has all fallen within the application's claims limited range.
As shown in Figure 1, the silicon chip cutting fluid accumulator tank of a kind of loop overflow, comprises cell body, is provided with weir divider cell body is divided into subsider and overflow launder in described cell body, and the top of the sidewall of described subsider is provided with cutting liquid import; That goes back level in described subsider is provided with rack, and this rack is equipped with miillpore filter, and the bottom of described overflow launder is provided with cutting liquid outlet; Described weir divider comprises the first weir divider, the second weir divider and the 3rd weir divider that vertically arrange successively, bottom first weir divider and both sides and cell body are tightly connected, and its height is lower than cell body height, second weir divider both sides and cell body are tightly connected, leave space between bottom and overflow launder, bottom the 3rd weir divider and both sides and cell body are tightly connected.As preferably, described miillpore filter is hollow-fibre membrane or ceramic membrane, and aperture is 0.2 ~ 2.0um.As preferably, in described overflow launder, ullage space is connected with vaccum-pumping equipment.
Cutting liquid enters into the subsider of accumulator tank after catch tray is collected from cutting liquid import, and the suspension settlement particle in sedimentation cutting liquid, then along with liquid level rise stay from the top of the first weir divider after enter gap between two pieces of dividing plates, and enter overflow launder from the bottom of the second weir divider, successively again through the 3rd weir divider and from its top inflow overflow launder, under negative pressure state, carry out cascade filtration through miillpore filter subsequently, finally deliver in subsequent treatment groove carry out material supplement and reclaim.
Claims (3)
1. a silicon chip cutting fluid accumulator tank for loop overflow, is characterized in that: comprise cell body, is provided with weir divider cell body is divided into subsider and overflow launder in described cell body, and the top of the sidewall of described subsider is provided with cutting liquid import; That goes back level in described subsider is provided with rack, and this rack is equipped with miillpore filter, and the bottom of described overflow launder is provided with cutting liquid outlet; Described weir divider comprises the first weir divider, the second weir divider and the 3rd weir divider that vertically arrange successively, bottom first weir divider and both sides and cell body are tightly connected, and its height is lower than cell body height, second weir divider both sides and cell body are tightly connected, leave space between bottom and overflow launder, bottom the 3rd weir divider and both sides and cell body are tightly connected.
2. the silicon chip cutting fluid accumulator tank of loop overflow according to claim 1, is characterized in that: described miillpore filter is hollow-fibre membrane or ceramic membrane, and aperture is 0.2 ~ 2.0um.
3. the silicon chip cutting fluid accumulator tank of loop overflow according to claim 1, is characterized in that: in described overflow launder, ullage space is connected with vaccum-pumping equipment.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510791341.XA CN105396369A (en) | 2015-11-17 | 2015-11-17 | Silicon chip cutting liquid recycling tank with loop overflow |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510791341.XA CN105396369A (en) | 2015-11-17 | 2015-11-17 | Silicon chip cutting liquid recycling tank with loop overflow |
Publications (1)
Publication Number | Publication Date |
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CN105396369A true CN105396369A (en) | 2016-03-16 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201510791341.XA Pending CN105396369A (en) | 2015-11-17 | 2015-11-17 | Silicon chip cutting liquid recycling tank with loop overflow |
Country Status (1)
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CN (1) | CN105396369A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108793554A (en) * | 2018-06-12 | 2018-11-13 | 山东大海新能源发展有限公司 | A kind of silicon chip cutting fluid circulatory system and method using diamond wire |
-
2015
- 2015-11-17 CN CN201510791341.XA patent/CN105396369A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108793554A (en) * | 2018-06-12 | 2018-11-13 | 山东大海新能源发展有限公司 | A kind of silicon chip cutting fluid circulatory system and method using diamond wire |
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Legal Events
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C06 | Publication | ||
PB01 | Publication | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20160316 |
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WD01 | Invention patent application deemed withdrawn after publication |