CN105403365A - Helium leak detector - Google Patents
Helium leak detector Download PDFInfo
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- CN105403365A CN105403365A CN201510540813.4A CN201510540813A CN105403365A CN 105403365 A CN105403365 A CN 105403365A CN 201510540813 A CN201510540813 A CN 201510540813A CN 105403365 A CN105403365 A CN 105403365A
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Abstract
The problem that the helium concentration in checking environment gas cannot be managed exists. A helium leak detector of the invention includes a mode setting portion for setting any one of a leakage detection mode for detecting the helium leakage from a test, and an indoor detection mode for detecting the indoor helium with the test; and a control portion for storing a detection result detected by an analyzing tube in a storage portion corresponding to the set detection mode.
Description
Technical field
The present invention relates to a kind of helium leak check instrument (heliumleakdetector).
Background technology
Such as shown in patent documentation 1, following closed container inspection method is well-known, that is, enclose in closed container by helium atmosphere pressurization, finds welding defect by detecting the helium that spills from closed container.Cannot normally check when checking the concentrations of helium height in environmental gas, but helium is tasteless odorless, human body is discovered less than concentration change.
[prior art document]
[patent documentation]
[patent documentation 1] Japanese Patent Laid-Open 2010-159974
Summary of the invention
[inventing problem to be solved]
In the invention that patent documentation 1 is recorded, cannot concentrations of helium in control inspection environmental gas.
[technological means of dealing with problems]
(1) gas detecting position is directed in analyzer tube and measures helium by the helium leak check instrument of the preferred embodiment of the present invention.Helium leak check instrument comprises: pattern (mode) configuration part, set the helium leakage from test body is measured leak tested pattern, with to any one of the indoor measurement pattern that the helium of the indoor being provided with test body measures; And control part, make the testing result measured by analyzer tube be stored in storage part corresponding to set mode determination.
(2) in more preferably embodiment, control part makes leak tested pattern or indoor measurement pattern be stored in storage part with being associated with measurement result.
(3) in more preferably embodiment, helium leak check instrument of the present invention also comprises: threshold value configuration part, and setting judges the non-defective unit of test body, the non-defective unit defective products threshold value of defective products, and sets the reliability thresholds judging the reliability of leak tested; And reporting unit, be judged to be defective products when measurement result exceedes non-defective unit defective products threshold value when leak tested pattern and report, and be judged to be improper environment when measurement result exceedes reliability thresholds when indoor measurement pattern and report.
(4) in more preferably embodiment, control part is setting indoor measurement pattern when starting, forbade switching to leak tested pattern before the measurement result of analyzer tube is lower than reliability thresholds, and when measurement result switches to leak tested pattern lower than allowing during reliability thresholds.
(5) in more preferably embodiment, helium leak check instrument of the present invention comprises: the 1st interface (port), for installation testing body; 2nd interface, for installing the pipe arrangement via throttling bodies, the gas in the helium of indoor mensuration region being directed into analyzer tube; And path switching part, so that the mode being directed into analyzer tube from the gas of any one in the 1st interface and the 2nd interface is switched gas passage.
(6) in more preferably embodiment, control part when selecting leak tested pattern, the gas from the 1st interface is directed into the mode of analyzer tube, control path switching part; And control part is when selecting indoor measurement pattern, the gas from the 2nd interface is directed into the mode of analyzer tube, control path switching part.
(7) in more preferably embodiment, control part is when measuring stipulated number with leak tested pattern, or when measuring the stipulated time with leak tested pattern, the setting carried out to indoor measurement pattern switches, or operation report portion carries out reporting to remind switching to indoor measurement pattern.
(8) gas detecting position is directed in analyzer tube and measures helium by the helium leak check instrument of the preferred embodiment of the present invention.Helium leak check instrument comprises: the 1st interface, for installation testing body; 2nd interface, for installing the pipe arrangement via throttling bodies, the gas in the helium of indoor mensuration region being directed into analyzer tube; And path switching part, so that the mode being directed into analyzer tube from the gas of any one in the 1st interface and the 2nd interface is switched gas passage.
(9) in more preferably embodiment, helium leak check instrument of the present invention also comprises: instruction unit, the switching of instruction path switching part; And drive division, when indicating from instruction unit output switching, switching being carried out to path switching part and drives.
(10) in more preferably embodiment, helium leak check instrument of the present invention also comprises control part, when selecting leak tested pattern, the gas from the 1st interface to be directed into the mode of analyzer tube, control path switching part, and when selecting indoor measurement pattern, the gas from the 2nd interface is directed into the mode of analyzer tube, control path switching part.
[effect of invention]
According to the present invention, ALARA Principle checks the concentrations of helium in environmental gas.
Accompanying drawing explanation
Fig. 1 is the block scheme of the formation representing helium leak check instrument.
Fig. 2 is the pie graph in gas processing portion.
Fig. 3 is the figure that the scene using helium leak check instrument is described.
Fig. 4 is the process flow diagram of the contents processing representing master routine (mainprogram).
Fig. 5 is the process flow diagram of the contents processing representing environment mensuration subroutine (subprogram).
Fig. 6 is the process flow diagram of the contents processing representing test body mensuration subroutine.
[explanation of symbol]
10: helium leak check instrument
11: control part
12: display part
13: input part
13a: environment measures button
13b: test body measures start button
13c: test body measures conclusion button
13d: power knob
14: storage part
14a: environment daily record
14b: test body daily record
14c: threshold value is had a guide look of
15: reporting unit
19: gas processing portion
21: analyzer tube
22: turbomolecular pump
23: traction pump
24: oil rotary pump
25: pipe arrangement
50: test body
60: helium tank
CAP: throttling bodies (kapillary)
EXP1, EXP2: interface
SFV1, SFV2, BV, TV, LV, FV: valve
PM1, PM2: vacuum meter
S101 ~ S110: each step of contents processing of master routine
S201 ~ S212: each step of environment mensuration subroutine
S301 ~ S317: each step of test body mensuration subroutine
Embodiment
The invention provides a kind of helium leak check instrument, improving the reliability of test and the efficiency of test by measuring the concentrations of helium of also management testing environment.Below, be described in detail based on embodiment.
Below, be described with reference to the embodiment of Fig. 1 ~ Fig. 6 to helium leak check instrument of the present invention.
Fig. 1 is the block scheme of the formation representing helium leak check instrument 10.Helium leak check instrument 10 comprises: control part 11; Display part 12, to operator (operator) information; Input part 13, transmits the input of operator to control part 11; Storage part 14; Reporting unit 15; Gas processing portion 19, comprises pump (pump) and valve (valve), analyzer tube.
Control part 11 comprises central processing unit (CentralProcessingUnit, CPU), ROM (read-only memory) (ReadOnlyMemory, and random access memory (RandomAccessMemory ROM), RAM), by the program of preserving in ROM being launched at RAM and performing and carry out process described later.Control part 11 utilizes signal wire to be connected with display part 12, input part 13, storage part 14, reporting unit 15, and the input and output of the information of transmission or action command.Control part 11 is also connected with some composed components in gas processing portion 19, is hereafter described in detail.
Display part 12 is such as liquid crystal panel, shows the information exported from control part 11.Input part 13 comprises multiple button, and described multiple button comprises environment and measures button 13a, test body mensuration start button 13b, test body mensuration conclusion button 13c and power knob 13d, and by the input and output of operator to control part 11.When operating environment measures button 13a, set the environment mode determination (reliability determination pattern) that the concentrations of helium of indoor is measured.As operational testing body measurement start button 13b, set the pattern (test body mode determination) that the helium leakage amount of test body is measured.As operational testing body measurement conclusion button 13c, mensuration end is inputed to control part 11.Power knob 13d for the operation when helium leak check instrument 10, by operating power button to each portion supply power.
Storage part 14 is such as flash memory (flashmemory), stores in storage part 14: environment daily record (log) 14a, the helium detection limit under storage environment mode determination and detection moment; Test body daily record 14b, the helium detection limit under On-board test body measurement pattern and detection moment; And threshold value guide look 14c, comprise various threshold value.
As the threshold value of preserving in threshold value guide look 14c, preserve such as the good no determinating reference of test result and the threshold value of non-defective unit defective products determinating reference and the reliability thresholds as the indoor concentrations of helium determinating reference normal or abnormal relative to measurement sensitivity.These threshold values can change from the user interface of input part 13 (userinterface) picture.When user changes these threshold values according to measuring accuracy, required detection sensitivity etc., the value after changing is remained in threshold value guide look 14c.
Reporting unit 15 is such as digital simulation (DigitalAnalog, DA) converter and loudspeaker (speaker), by carrying out certain report according to the information ring exported from control part 11 to operator.Reporting unit 15 is ring muli-sounds by tone color, volume, interval etc., and such as operator can judge helium detection limit exceedes threshold value under which pattern of environment mode determination and test body mode determination.Except reporting unit 15 utilizes except acoustic notifications, or replace utilizing acoustic notifications, also can at display part 12 with the display such as word or icon (icon) report content.
With reference to Fig. 2, gas processing portion 19 is described.Fig. 2 represents gas processing portion 19, namely from the figure of the pipeline of gas access to analyzer tube 21 of helium leak check instrument 10.Gas processing portion 19 comprises vacuum meter PM1, the vacuum meter PM2 of the vacuum tightness in analyzer tube 21, turbomolecular pump (turbomolecularpump) 22, traction pump (dragpump) 23, oil rotary pump (oilrotarypump) 24 and signal piping.The opening and closing of the startup of each pump, stopping or valve described later is controlled according to the detected value of vacuum meter PM1 or vacuum meter PM2.Gas processing portion 19 comprises: valve FV, valve BV, valve TV, valve LV, valve SFV1, valve SFV2, and above-mentioned valve is the path switching part with actuator, in order to carry out opening and closing to exhaust pathway and helium lead-in path and helium distribution channel; Interface EXP1, interface EXP2; Pipe arrangement 25, in order to measure environment helium; And kapillary (capillarytube) CAP.
Control part 11 utilizes signal wire to be connected with analyzer tube 21, turbomolecular pump 22, traction pump 23, oil rotary pump 24, vacuum meter PM1, vacuum meter PM2 and all valves, omits signal wire herein.
Analyzer tube 21 is via turbomolecular pump 22, traction pump 23, valve FV and pipe arrangement is connected to oil rotary pump 24.Interface EXP1 connecting test body in two connecting interfaces that helium leak check instrument 10 has.And at another interface EXP2 connecting pipings 25, and be connected with kapillary CAP in the front end of pipe arrangement 25.Pipe arrangement 25 with suck to the mode of the gas in the space that the concentrations of helium of the indoor being provided with test body detects around.Such as, pipe arrangement 25 can use flexible metal tube, pitch tube, rubber tube etc.
Interface EXP1 and interface EXP2 is connected to analysis path via open and close valve SFV1, SFV2, even if also can change determination object under the state being connected with test body.That is, indoor environment concentration determination can be changed to from test body leak tested by the open and close controlling of open and close valve SFV1, SFV2.These open and close controlling measure button 13a with environment and test body carries out with measuring the operations linkage of start button 13b.When measuring button 13a to environment and carrying out making operation, open and close valve SFV1 closes, and open and close valve SFV2 opens.When measuring start button 13b to test body and carrying out making operation, open and close valve SFV1 opens, and open and close valve SFV2 closes.
Valve LV is vent valve (ventvalve), becomes atmospheric pressure when opening valve LV in pipeline, the replaceable test body be connected with interface EXP1.Valve TV pipe arrangement is connected to the exhausr port of turbomolecular pump 22.Valve FV is arranged between traction pump 23 and oil rotary pump 24.Valve BV is arranged on connecting interface EXP1 and between connecting interface EXP2 and oil rotary pump 24.
The air of surrounding environment can be directed in pipeline from kapillary CAP and to utilize analyzer tube 21 to detect helium, and calculate the concentrations of helium of environment according to the flow of air and helium detection limit.The flow of room air that kapillary CAP sucks is the difference of pressure in the pipeline that measures according to atmospheric pressure and vacuum meter and the conductance (conductance) of kapillary CAP both known and calculates.
Use the inspection method of the test body of helium leak check instrument 10 to have of all kinds, such as, carry out as follows in vacuum blowing method.The test body of closed container is connected to interface EXP1, one side utilizes turbomolecular pump 22 grade to carry out vacuum exhaust to the inside of test body, faced by one, test body blows helium atmosphere, can determine whether welding defect according to the detection limit of the helium detected by analyzer tube 21.
(assuming that use scenes)
The scene of Fig. 3 to the helium leak check instrument 10 using present embodiment is used to be described.
Fig. 3 represents and uses helium leak check instrument 10 by the bad scene of the welding of vacuum blowing method checkout body 50.Have the test body 50 of multiple same shape, operator converts test body successively and checks.In the inspection that helium tank (bottle) 60 utilizes vacuum blowing method to carry out for operator.The pipe arrangement 25 be connected with the interface EXP2 of helium leak check instrument 10, can bend the mode that the air near test body 50 is directed into helium leak check instrument 10 from kapillary CAP front end.
Operator before the inspection starting test body, or is checking that midway measures the namely indoor concentrations of helium of inspection environment to confirm as the state on checking without affecting.Its reason is, when the concentrations of helium height of indoor, although do not blow helium, analyzer tube 21 also can detect helium, thus cannot differentiate with the exception of helium leak check instrument 10.
When the concentrations of helium of environment is below threshold value, operator starts the inspection of test body 50.Then, such as, when starting to check and through the stipulated time, constantly little through 1, operator measures the concentrations of helium of test environment again, determine that the concentrations of helium of environment is continue the inspection of test body 50 after below threshold value.The reference value of this threshold value to be discriminating test body be non-defective unit or defective products, and be kept in described threshold value guide look 14c.
(process flow diagram)
Use Fig. 4 ~ Fig. 6 that the process that the control part 11 of helium leak check instrument 10 carries out is described.Fig. 4 is the process flow diagram of the contents processing representing the program (hereinafter referred to as master routine) performed by control part 11 when helium leak check instrument 10 starts.This master routine calls following subroutine, that is, the environment mensuration subroutine of action represented by the process flow diagram of Fig. 5 and the test body mensuration subroutine of action represented by the process flow diagram of Fig. 6.During these subroutines of execution, stop the process of master routine.
(master routine)
In step S101, control part 11 starts the timing of master timer (maintimer) t1, and enters step S102.After this master timer t1 keeping count (count) time before the dump of helium leak check instrument 10.
In step s 102, control part 11 hereafter uses the environment illustrated by Fig. 5 to measure, at the end of environment measures, enter step S103.
In step s 103, control part 11 judges whether time that master timer t1 counts exceeds schedule time Tm, such as 1 hour.Control part 11 enters step S104 when judgement exceeds schedule time Tm, and enters step S106 when judgement does not exceed schedule time Tm.
In step S104, in the same manner as step S102, control part 11 hereafter uses the environment illustrated by Fig. 5 to measure, at the end of environment measures, enter step S105.
In step S105, the time that control part 11 couples of master timer t1 count resets (reset) and makes the time return to zero, and enters step S106.
In step s 106, control part 11 judges whether that pressing environment by operator measures button 13a, has pressed environment measures button 13a enter step S107 in judgement, and enters step S108 when environment mensuration button 13a is not pressed in judgement.
In step s 107, control part 11 hereafter uses the environment illustrated by Fig. 5 to measure as described, at the end of environment measures, enter step S108.
In step S108, control part 11 judges whether that pressing test body by operator measures start button 13b.Press test body measures start button 13b in judgement and entered step S109, and entered step S110 when test body mensuration start button 13b is not pressed in judgement.
In step S109, control part 11 hereafter uses the test body illustrated by Fig. 6 to measure, at the end of test body measures, enter step S110.
In step s 110, control part 11 judges whether to press power knob 13d by operator.When judging to have pressed power knob 13d, the program that tenth skill is represented by Fig. 4, is back to step S103 when power knob 13d is not pressed in judgement.
(environment mensuration subroutine)
Be described with reference to the action of Fig. 5 to the environment mensuration subroutine called from master routine.
In step s 201, control part 11 carries out following process to make the inside of analyzer tube 21 for below specified vacuum degree.Open valve FV and close all valves in addition, making turbomolecular pump 22, traction pump 23 and oil rotary pump 24 operate and carry out vacuum exhaust.When the vacuum tightness that gauge PM2 detects becomes below the vacuum tightness of regulation, shutoff valve FV, makes all pumps stop and entering step S202.
In step S202, control part 11 is opened valve SFV2 and enters step S203.
In step S203, control part 11, in order to carry out slightly taking out and opening valve BV in the pipeline of helium leak check instrument 10, carries out vacuum exhaust by oil rotary pump 24.The vacuum tightness that gauge PM1 detects enters step S204 when becoming below the vacuum tightness of regulation.
In step S204, control part 11, in order to form the formation of carrying out bigness scale examination (grosstest) and open valve FV, makes traction pump 23 and turbomolecular pump 22 operate and carry out vacuum exhaust.The vacuum tightness that gauge PM2 detects enters step S205 when becoming below the vacuum tightness of regulation.
In step S205, control part 11 is in order to form the formation of carrying out accurate measurement examination (finetest) and open valve TV and shutoff valve BV.The vacuum tightness that gauge PM2 detects enters step S206 when becoming below the vacuum tightness of regulation.
In step S206, control part 11 starts the timing utilizing environment timer t2, and enters step S207.
In step S207, control part 11 obtains the helium detection limit that analyzer tube 21 detects, and enters step S208.
In step S208, the helium detection limit obtained in step S207 and current moment are kept in environment daily record 14a by control part 11, and enter step S209.
In step S209, the environment mensuration threshold value that the helium detection limit obtained in step S207 and threshold value are had a guide look of 14c by control part 11 compares, and whether the helium detection limit acquired by judgement is greater than environment mensuration threshold value.Step S210 is entered when judging that helium detection limit is greater than environment mensuration threshold value, and when judging that helium detection limit enters step S211 as below environment mensuration threshold value.
Environment set threshold value is inputted numerical value from input part 13 and is kept at threshold value guide look 14c according to required measuring accuracy, detection sensitivity by user before the test begins.Also can carry out overriding to the threshold value of having preserved to upgrade, also can be kept at the test for next time in new data region.
In step S210, control part 11 operation report portion 15 carries out report to represent that environment measures existing problems, and enters step S211.
In step S211, control part 11 judges whether time that environment timer t2 counts exceeds schedule time Te, such as 5 seconds.When judging to enter step S212 when exceeding, and when judging to be back to step S207 when not exceeding.
In step S212, control part 11 makes all pumps stop, and waiting for the valve SFV2 that the stipulated time measures to close environment after making to return to atmospheric pressure in pipeline, the EOP (end of program) that action is represented by Fig. 5, is back to the master routine that action is represented by Fig. 4.
(test body mensuration subroutine)
Be described with reference to the action of Fig. 6 to the test body mensuration subroutine called from master routine.
In the process of step S301 ~ step S310, the process of many process and step S201 ~ step S210 repeats, and the difference of process is only described and omits the explanation of same treatment.
In step S202, open valve SFV2, but open valve SFV1 in step s 302.By this process, the test body being arranged on interface EXP1 front end is connected with the pipeline of helium leak check instrument 10, in step S303, also carry out vacuum exhaust to the inside of test body.In order to start the counting of environment timer t2 to the time counting carrying out environment mensuration in step S206, but start the counting of test body timer t3 to carry out environment mensuration in each stipulated time in step S306.In step S209 and step S210, detection limit and environment mensuration threshold value are compared, the report that environment measures is carried out when detection limit is greater than environment mensuration threshold value, but in step S309 and step S310, detection limit and test body mensuration threshold value are compared, carries out the report that test body measures when detection limit is greater than test body mensuration threshold value.That is, report that the helium leakage amount from test body is defective products greatly.
Test body mensuration threshold value is inputted numerical value from input part 13 and is kept at threshold value guide look 14c according to required measuring accuracy, detection sensitivity by user before the test begins.Also can carry out overriding to the threshold value of having preserved to upgrade, also can be kept at the test for next time in new data region.
In step S311, control part 11 judges whether time that test body timer t3 counts exceeds schedule time Tt, such as 1 hour.When judging to enter step S312 when exceeding, and when judging to enter step S316 when not exceeding.
In step S312, control part 11 opens valve SFV2 and shutoff valve SFV1 to carry out environment mensuration, and enters step S313.
Even if under test starts environment that originally indoor concentrations of helium is low, when the continuous stipulated time tests with Shangdi, have the worry that the concentrations of helium in room air rises, therefore these steps are for concentrations of helium in measuring cell termly.
In step S313, control part 11 execution environment measure core processing and step S206 ~ step S211 after, enter step S314.In addition, in the process flow diagram using the environment illustrated by Fig. 2 to measure, before starting to measure, carry out slightly taking out in pipeline, but carry out in step S301 ~ step S305 in this process flow diagram, therefore omit.
In step S314, control part 11 opens valve SFV1 and shutoff valve SFV2 and enter step S315 to be back to test body and measuring.
In step S315, the time that control part 11 couples of test body timer t3 count resets and makes the time return to zero, and enters step S316.
In step S316, control part 11 judges whether that pressing test body by operator measures conclusion button 13c.Press test body measures conclusion button 13c in judgement and entered step S317, and be back to step S307 when test body mensuration conclusion button 13c is not pressed in judgement.
In step S317, control part 11 makes all pumps stop, and opens the test body that vent valve LV is connected with interface EXP1 with removal.Then, the EOP (end of program) that action is represented by Fig. 6, is back to the master routine that action is represented by Fig. 4.
According to described embodiment, following action effect can be obtained.
(1) in the past, in helium leak check instrument of the present invention, by being called that the determination method of smelling spy method (sniffermethod) measures environment concentrations of helium.But the mensuration of environment concentrations of helium and the mensuration of test body are all carried out with same mode determination.That is, the pattern of the mensuration measuring environment concentrations of helium and management testing body do not installed by helium leak check instrument.In helium leak check instrument in the past, do not import the management by measurement program (management) of management concentrations of helium.When the concentrations of helium of test environment is more than setting, helium analyzer tube detects the helium of more than setting, thus cannot ensure Measurement reliability.Or, the alarm ring and in fact cannot measuring when the concentration height detected sometimes.
Helium leak check instrument of the present invention comprises: mode setting part and input part 13, set the helium leakage from test body is measured leak tested pattern, with to any one of the indoor measurement pattern that the helium of the indoor being provided with test body measures; And control part 11, make the testing result measured by analyzer tube be stored in storage part 14 corresponding to set mode determination.
According to helium leak check instrument of the present invention, can before the mensuration of leak tested pattern, or indoor measurement pattern and concentrations of helium in measuring cell is selected in the mensuration midway of leak tested pattern.Therefore, can suppress the leak tested of carrying out test body when the concentrations of helium of indoor is high, thus measure operating efficiency raising, the reliability of estimating precision also improves.
(2) control part 11 is configured to the determination data measured with leak tested pattern to be stored in test body daily record 14b, and is stored in environment daily record 14a by the determination data measured with indoor measurement pattern.That is, measurement result is stored in storage part 14 with mode determination with being associated.
Therefore, easily can distinguish that measurement result is the result measured with which kind of pattern.
(3) helium leak check instrument 10 also comprises: threshold value configuration part and input part 13, and setting judges that test body is the non-defective unit defective products threshold value of non-defective unit, defective products, and setting judges the reliability thresholds of the reliability of leak tested; And reporting unit 15, be judged to be defective products when measurement result exceedes non-defective unit defective products threshold value when leak tested pattern and report, and be judged to be improper environment when measurement result exceedes reliability thresholds when indoor measurement pattern and report.
Therefore, in leak tested pattern, can distinguish immediately from measurement site and produce leakage.When reporting from reporting unit 15 when setting indoor measurement pattern, the mensuration under improper environment can be characterized as immediately, and the mensuration under the environment without reliability can be characterized as immediately.Its result, can be transferred to mode determination, therefore can carry out the high mensuration of reliability efficiently after carrying out the operation row making indoor helium concentration reduce.
(4) helium leak check instrument 10 is configured to comprise: the 1st interface and interface EXP1, for installation testing body; 2nd interface and interface EXP2, for installing the pipe arrangement 25 via throttling bodies CAP (kapillary CAP), the gas in the helium of indoor mensuration region being directed into analyzer tube 21; And path switching part and valve SFV1 and valve SFV2, so that the mode being directed into analyzer tube 21 from the gas of any one in the 1st interface and the 2nd interface is switched gas passage.
By being directed into analyzer tube 21 by from the gas of any one in two interfaces manually or automatically, therefore can simply in switching chamber concentrations of helium measure and test body leak tested, thus workability improves.
(5) control part 11 when select leak tested pattern time the gas from the 1st interface to be directed into the mode control path switching part of analyzer tube 21, and when selection indoor measurement pattern time the gas from the 2nd interface to be directed into the mode control path switching part of analyzer tube 21.Its result, need not carry out indoor concentrations of helium mensuration and switch with the interface of test body leak tested, thus workability improves by user.
(variation 1)
In said embodiment, helium leak check instrument 10 has two kinds of patterns of test body mode determination and environment mode determination, but mode determination is not limited thereto.Also can arrange and check eudiometry pattern.
In inspection eudiometry pattern, also can measure the concentration of gas for checking and helium and judge whether the concentration of helium is in the concentration range of regulation.When the concentration range that the concentration ratio of helium atmosphere specifies is dense, the use amount of the helium atmosphere of high price can be saved by using after reduction concentration.When the concentration range that the concentration ratio of helium atmosphere specifies is light, the possibility that cannot detect leakage is high, is in proper range can prevent from detecting to omit by making the concentration of helium atmosphere in advance.And then in inspection eudiometry pattern, when the concentration of the helium atmosphere detected is included in the concentration range of regulation, operation report portion 15 reports, therefore by operator, the concentration of helium atmosphere is adjusted to suitable and consumption that is ALARA Principle helium atmosphere.
(variation 2)
Also mode determination can be set for each kind of test body.Such as requiring high detection sensitivity or high-precision high-quality mode determination and require low detection sensitivity or the low-quality mode determination of low precision compared with high-quality mode determination.Mode determination is set by each kind for test body, and different threshold values can be set for each kind of test body, therefore learn threshold value by heart without the need to each kind for test body, thus the burden of operator can be alleviated.
Such as, in high-quality mode determination, compared with low-quality mode determination, non-defective unit defective products decision threshold is set low, if but the threshold value that user pre-enters each pattern can be configured to, then also automatically set non-defective unit defective products determinating reference and threshold value in linkage with model selection.
(variation 3)
In said embodiment, when being pressed test body by operator and measuring start button 13b, carry out the mensuration of test body mode determination, but the condition in order to switch to test body mode determination also can be set.
Such as, the helium detection limit that also can detect in the mensuration by environment mode determination is forbidden switching to test body mode determination before becoming below environment mensuration threshold value.That is, also can be when being pressed test body by operator and measuring start button 13b, first carry out the mensuration of environment mode determination, and switch to environment mode determination when helium detection limit becomes below environment mensuration threshold value.
According to this variation 3, following action effect can be obtained:
(1) control part setting indoor measurement pattern when starting, forbade switching to leak tested pattern before the measurement result of analyzer tube 21 is lower than reliability thresholds, and when measurement result switches to leak tested pattern lower than allowing during reliability thresholds.Specifically, when setting is changed to leak tested pattern lower than during reliability thresholds by helium detection limit automatically that measure with indoor measurement pattern.Therefore, testing efficiency improves.
(variation 4)
In said embodiment, helium leak check instrument 10 comprises two and measures interfaces, but the quantity of mensuration interface included by helium leak check instrument is not limited thereto.Also only can comprise one and measure interface, and switch mode determination by operator.Also can comprise the mensuration interface of more than three, and select whether the gas from arbitrary interface is directed into analyzer tube 21 when selecting leak tested pattern.
(variation 5)
In said embodiment, be configured to just started afterwards at helium leak check instrument 10 and often just carried out the mensuration of environment mode determination through the stipulated time, but the sequential (timing) of carrying out the mensuration of environment mode determination is not limited thereto.
The mensuration of environment mode determination is carried out when also can reach stipulated number whenever the number of times being pressed test body mensuration start button 13b or test body mensuration conclusion button 13c by operator.Its reason is, little at the volume of test body, when the inspection at 1 place only needs little time, has the worry that the concentrations of helium in environment rose according to measuring number of times in the short time.
(variation 6)
In said embodiment, be configured to just started afterwards at helium leak check instrument 10 and often just carried out the mensuration of environment mode determination through the stipulated time, but also can replace the mensuration of carrying out environment mode determination, and operation report portion 15 prompting switches to environment mode determination and measures.
(variation 7)
In said embodiment, only when the accurate measurement examination of opening valve TV, valve FV and shutoff valve BV, the amount of helium that record, analysis and assessment pipe 21 detect.But, when starting the state before accurate measurement examination and namely open valve BV, valve FV and the bigness scale of shutoff valve TV trying, the amount of helium of detection and detection moment also can be recorded.
(variation 8)
In embodiments, by the helium detection limit under storage environment mode determination from detect the moment environment daily record 14a, with the helium detection limit under On-board test body measurement pattern with detect the test body daily record 14b in moment and be set as different memory areas.But, also environment daily record 14a and test body daily record 14b can be set as a memory area, in this case, data identification is carried out by enclosing the sign (flag) of each mode determination to the testing result arranging helium detection limit and detection moment.
(variation 9)
In embodiments, the open and close controlling of open and close valve SFV1, SFV2 is set to measure the operations linkage person that button 13a and test body measure start button 13b with environment and be described.But the open and close controlling of open and close valve SFV1, SFV2 also manually can be carried out by user.
(variation 10)
In embodiments, the helium leak check instrument being set as prerequisite with leak tested pattern and indoor measurement pattern is described.But, omit the following helium leak check instrument of the concept of pattern setting also within the scope of the invention.
That is, also within the scope of the invention, namely this helium leak check instrument comprises following helium leak check instrument: the 1st interface, for installation testing body; 2nd interface, for installing the pipe arrangement via throttling bodies, the gas in the helium of indoor mensuration region being directed into analyzer tube; And path switching part, so that the mode being directed into analyzer tube from the gas of any one in the 1st interface and the 2nd interface is switched gas passage.
(variation 11)
And then also can form the helium leak check instrument of variation 9 as follows.Also can form helium leak check instrument as follows, namely comprise: instruction unit, indicate the switching of described path switching part; And drive division, when switching instruction from instruction unit input, switching being carried out to path switching part and drives.Drive division comprises two concepts of hand control and automation.That is, can at the open and close valve being interfaced to the manual open and close valve of channel setting till analyzer tube path from two or utilizing actuator to drive.
(variation 12)
And then also can form the helium leak check instrument of variation 10 as follows.Also helium leak check instrument can be formed as follows, namely control part is comprised, when selecting leak tested pattern the gas from the 1st interface to be directed into the mode control path switching part of analyzer tube, and when selecting indoor measurement pattern the gas from the 2nd interface to be directed into the mode control path switching part of analyzer tube.
Described each embodiment and variation also may be combined with respectively.
In described, describe various embodiment and variation, but the present invention is not limited to these contents.Other forms expected in the scope of technical thought of the present invention are also contained in scope of the present invention.
Claims (10)
1. a helium leak check instrument, is directed into the gas detecting position in analyzer tube and measures helium, it is characterized in that comprising:
Mode setting part, set any one in leak tested pattern and indoor measurement pattern, wherein said leak tested pattern measures the helium leakage from test body, and the helium of described indoor measurement pattern to the indoor being provided with described test body measures; And
Control part, makes the testing result measured by described analyzer tube be stored in storage part corresponding to the mode determination of described setting.
2. helium leak check instrument according to claim 1, is characterized in that, described control part makes described leak tested pattern or described indoor measurement pattern be stored in being associated in described storage part with described measurement result.
3. helium leak check instrument according to claim 1 and 2, characterized by further comprising:
Threshold value configuration part, setting non-defective unit defective products threshold value and reliability thresholds, wherein said non-defective unit defective products threshold value is to judging that described test body is non-defective unit or defective products, and described reliability thresholds judges the reliability of leak tested; And
Reporting unit, be judged to be defective products when described measurement result exceedes described non-defective unit defective products threshold value when described leak tested pattern and report, and be judged to be improper environment when described measurement result exceedes described reliability thresholds when described indoor measurement pattern and report.
4. helium leak check instrument according to claim 1 and 2, it is characterized in that, described control part sets described indoor measurement pattern when starting, forbade switching to described leak tested pattern before the measurement result of described analyzer tube is lower than described reliability thresholds, and when described measurement result switches to described leak tested pattern lower than allowing during described reliability thresholds.
5. helium leak check instrument according to claim 1 and 2, is characterized in that comprising:
1st interface, for the described test body of installation;
2nd interface, for installation pipe arrangement, the helium of described indoor is measured the gas in region by described pipe arrangement via throttling bodies, be directed into described analyzer tube; And
Path switching part, in the mode by being directed into described analyzer tube from the gas of any one in described 1st interface and described 2nd interface, switches gas passage.
6. helium leak check instrument according to claim 5, is characterized in that, described control part, when selecting described leak tested pattern, controls described path switching part in the mode gas from described 1st interface being directed into described analyzer tube; And described control part is when selecting described indoor measurement pattern, the gas from described 2nd interface to be directed into the mode of described analyzer tube, controls described path switching part.
7. helium leak check instrument according to claim 3, it is characterized in that, described control part is when measuring stipulated number with described leak tested pattern, or when measuring the stipulated time with described leak tested pattern, the setting carried out to described indoor measurement pattern switches, or uses described reporting unit to carry out reporting to remind switching to described indoor measurement pattern.
8. a helium leak check instrument, is directed into the gas detecting position in analyzer tube and measures helium, it is characterized in that comprising:
1st interface, for installation testing body;
2nd interface, for installation pipe arrangement, the helium of indoor is measured the gas in region by described pipe arrangement via throttling bodies, be directed into described analyzer tube; And
Path switching part, in the mode by being directed into described analyzer tube from the gas of any one in described 1st interface and described 2nd interface, switches gas passage.
9. helium leak check instrument according to claim 8, characterized by further comprising:
Instruction unit, indicates the switching of described path switching part; And
Drive division, when from described instruction unit output switching instruction, carries out switching to described path switching part and drives.
10. helium leak check instrument according to claim 9, characterized by further comprising:
Control part, when selecting leak tested pattern, the gas from described 1st interface to be directed into the mode of described analyzer tube, controls described path switching part; And when selecting indoor measurement pattern, the gas from described 2nd interface to be directed into the mode of described analyzer tube, control described path switching part.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014184534A JP6425206B2 (en) | 2014-09-10 | 2014-09-10 | Helium leak detector |
| JP2014-184534 | 2014-09-10 |
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| Publication Number | Publication Date |
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| CN105403365A true CN105403365A (en) | 2016-03-16 |
| CN105403365B CN105403365B (en) | 2019-01-22 |
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| CN201510540813.4A Active CN105403365B (en) | 2014-09-10 | 2015-08-28 | Helium leak check instrument |
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| JP (1) | JP6425206B2 (en) |
| KR (1) | KR101735554B1 (en) |
| CN (1) | CN105403365B (en) |
| TW (1) | TWI583934B (en) |
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| CN111735581B (en) * | 2020-06-24 | 2024-08-23 | 安徽伽德罗工业技术有限公司 | Automatic gas proportioning device and proportioning method thereof |
| KR102633347B1 (en) | 2021-12-13 | 2024-02-06 | 주식회사 에테르씨티 | Leak inspection system for high pressure gas fuel supply system and method of the same |
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- 2015-08-28 CN CN201510540813.4A patent/CN105403365B/en active Active
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2016057202A (en) | 2016-04-21 |
| JP6425206B2 (en) | 2018-11-21 |
| KR20160030446A (en) | 2016-03-18 |
| CN105403365B (en) | 2019-01-22 |
| TWI583934B (en) | 2017-05-21 |
| KR101735554B1 (en) | 2017-05-15 |
| TW201610407A (en) | 2016-03-16 |
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Effective date of registration: 20230829 Address after: Japan Shiga Otsu yidingmu 8 No. 1. Patentee after: Shimadzu Industrial Systems Co.,Ltd. Address before: Japan Shiga Otsu yidingmu 8 No. 1. Patentee before: SHIMADZU EMIT CO.,LTD. |