CN105269102A - Five-axis linkage ultrasonic composite electric spark micro-finish machining numerical control machine tool - Google Patents
Five-axis linkage ultrasonic composite electric spark micro-finish machining numerical control machine tool Download PDFInfo
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- CN105269102A CN105269102A CN201510840353.7A CN201510840353A CN105269102A CN 105269102 A CN105269102 A CN 105269102A CN 201510840353 A CN201510840353 A CN 201510840353A CN 105269102 A CN105269102 A CN 105269102A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
- B23H7/38—Influencing metal working by using specially adapted means not directly involved in the removal of metal, e.g. ultrasonic waves, magnetic fields or laser irradiation
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- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention relates to a five-axis linkage ultrasonic composite electric spark micro-finish machining numerical control machine tool. The machine tool comprises a tool electrode, an amplitude-change pole, a flange plate, a piezoelectric transducer, a support disc, a supporting frame, a stand column, a base, an A-direction rotary workbench mechanism, a C-direction rotary liquid tank mechanism, a Z-axis lifting table mechanism, a Y-axis sliding mechanism and an X-axis saddle mechanism. Vibrational excitation is added in the transverse direction of the tool electrode so that workpieces can be transversely machined by the tool electrode, the limitation of a machine tool workpiece forming mechanism is removed, and multi-direction machining of the workpieces is achieved. The workbench mechanism is driven through five-axis linkage for feeding, the feeding direction is stable, the feeding speed is controlled and adjusted by a servo motor, micro-fine feeding machining of the workpieces on a complex line is achieved, and the probability of the tool electrode for machining complex special-shaped faces is increased. In machining of the machine tool, a workbench moves to promote flowing of work liquid, machining heat and machined products can be easily discharged, the work liquid is updated, and the machining efficiency and precision of the workpieces are improved.
Description
Technical field
The present invention relates to the micro-fine finishining Digit Control Machine Tool of a kind of five-axle linkage ULTRASONIC COMPLEX electric spark, belong to compound, micro-NTM technical field.
Background technology
In Modern Manufacturing Science, precise fine and complex surface machining technology set, multi-disciplinary content of having intersected, the manufacture of difficult-to-machine material (as electronic ceramics, high temperature alloy, carbide alloy etc.), Complex Different Shape face (as: three-dimension curved surface, special-shaped hole slot etc.) parts has become the focus of research, is also the important means promoting that all kinds of technique competitively develops.
In compound, micro-NTM technical field, there are many combined machining methods, as ULTRASONIC COMPLEX micro EDM, ULTRASONIC COMPLEX electrochemical micromachining, the fine high energy beam machining of ULTRASONIC COMPLEX etc.The advantages such as these processing methods have not to be affected by workpiece hardness, elaboration power is little, tool loss is very little, play a significant role in the micro-fine finishining of parts, solve cutting of hardworking material difficult processing with the precision, the microfabrication difficult problem that realize.
Trickle discharge and supersonic frequency can vibrate with frequently by existing ULTRASONIC COMPLEX electric spark machine tool, synchronous organic composite, solve in rapidoprint hardness and toughness is high, processing is deeply through the problem lower than fine finishining precision micro-during large workpiece.But, during this type of machine tool processing workpiece process, between tool-electrode and workpiece, there is not lateral cutting forces, again because lathe is subject to the restriction of compacting mechanism, be generally difficult to realize the processing to Complex Different Shape face.Meanwhile, the processing district working solution flowable of this kind of lathe is little, as easy as rolling off a log processed product blocking, and then causes working (machining) efficiency, machining accuracy to decline, and is difficult to obtain precision machined effect.
Summary of the invention
In order to solve the problem, the object of this invention is to provide the micro-fine finishining Digit Control Machine Tool of a kind of five-axle linkage ULTRASONIC COMPLEX electric spark, supersonic frequency vibration is vibrated effective compound with tool-electrode, the processing work of fine feeding is driven by five-axle linkage workbench, solve difficult-to-machine material, the unmanageable problem in Complex Different Shape face, the present invention can realize again effective eliminating of elaboration products, and the circulation of promoting working processes liquid upgrades, improves machining gap, improves working (machining) efficiency, the precision of workpiece.
Technical scheme of the present invention is, the micro-fine finishining Digit Control Machine Tool of a kind of five-axle linkage ULTRASONIC COMPLEX electric spark, comprises tool-electrode, ultrasonic transformer, ring flange, PZT (piezoelectric transducer), tray deck, bracing frame, column, base, A to rotary workbench mechanism, C to rotating liquid groove mechanism, Z axis lifting platform mechanism, Y-axis slide mechanism, X-axis saddle mechanism;
Described tool-electrode is installed and is connected to bottom ultrasonic transformer, and outside ultrasonic transformer, cover has ring flange; Described tray deck is positioned at directly over ultrasonic transformer, is fixedly loaded on below bracing frame circular hole end; Described PZT (piezoelectric transducer) is arranged at above ultrasonic transformer, and is supported on bracing frame;
Support frame as described above one end and tray deck are installed fixing, and the other end and column are installed fixing; Described column lower end is provided with bearing, bearing and base are fixed, base is also provided with X-axis guide rail slide, the X-axis saddle mechanism that can slide is provided with thereon above X-axis guide rail slide, the Y-axis slide mechanism of Y direction movement is provided with above X-axis saddle mechanism, Z axis lifting platform mechanism is equipped with in Y-axis slide mechanism inside, Z axis lifting platform mechanism is provided with C to the C rotated to support round platform, C to support round platform on be installed with C to rotating liquid groove mechanism, C to rotating liquid groove mechanism built with A to rotary workbench mechanism.
Described tool-electrode upper end is arranged in the screwed hole bottom ultrasonic transformer by screw.
Described ring flange is band neck W.N flange, be loaded on the vibration nodal point place of ultrasonic transformer, ring flange surrounding is symmetrical to be connected with four and to grip part, four grip part and ring flange is fixed through bolt, each part that grips is equipped with vibration radiation head, each vibration radiation head rear end is provided with transducer, and vibration radiation head and transducer are connected and fixed by holding frame and described tray deck bolt.
The described part side that grips is spill, installs with ring flange matched in clearance; Gripping part opposite side is drive screw, coordinates install with vibration radiation head internal thread hole.
Relative to described ring flange symmetrically, distributing position is consistent with described X-axis saddle mechanism and described Y-axis slide mechanism direction of feed respectively for described vibration radiation head.
The packing ring of the effect playing damping and noise abatement is housed between support frame as described above and described tray deck.
In the micro-fine finishining Digit Control Machine Tool of described five-axle linkage ULTRASONIC COMPLEX electric spark, X-axis saddle mechanism, ball-screw is equipped with in X-axis guide rail slide and described Y-axis slide mechanism, ball-screw by driven by servomotor rotate drive respectively X-axis saddle mechanism X axis move forward into, Y-axis slide mechanism Y-axis move forward into, Z axis lifting platform mechanism Z-axis direction vertical feed, described C is to rotating liquid groove mechanism, A is rotated to rotating liquid groove mechanism relative to Z axis lifting platform mechanism and C by driven by servomotor respectively respectively to rotary workbench mechanism, angle rotatable scope is respectively-180 ~ 180o,-90 ~ 90o.
Described C is spill to rotating liquid groove mechanism, and its inwall and A are to rotary workbench mechanism both sides matched in clearance, and C is provided with board slot to the Baltimore groove two ends of rotating liquid groove mechanism.Can clamping high strength, anticorrosion, leakproof clamping plate, for holding working solution.
Described A is spill to rotary workbench mechanism, and A is provided with T-slot clamping plate to the concave bottom surfaces of rotary workbench mechanism.Clamping workpiece is firm, is beneficial to the eliminating of working solution flowing, elaboration products.
Support frame as described above can manually locate on column, can do lifting moving or rotate around column on column.
The invention has the beneficial effects as follows: laterally add vibrational excitation at tool-electrode, make tool-electrode can horizontal processing work, eliminate the restriction of Machinetool workpiece compacting mechanism, realize the multi-direction processing of workpiece.Table mechanism of the present invention drives feeding by five-axle linkage, and direction of feed is stablized, and feed speed is regulated by Serve Motor Control, achieves workpiece fine feeding processing on complicated circuit, for tool-electrode processed complex shaped face adds possibility.In machine tooling process, movable workbench facilitates the flowing of working solution, is beneficial to and gets rid of processing heat and elaboration products, realize the renewal of working solution, effectively improves the efficiency and precision of work pieces process.
The invention provides the micro-fine finishining Digit Control Machine Tool of a kind of five-axle linkage ULTRASONIC COMPLEX electric spark, novel structure, solve difficult-to-machine material, the unmanageable problem in Complex Different Shape face, work pieces process efficiency is high, precision is high, has a wide range of applications market.
Accompanying drawing explanation
Fig. 1 five-axle linkage ULTRASONIC COMPLEX electric spark micro-fine finishining structure of numerically controlled machine-tool schematic diagram.
Fig. 2 five-axle linkage ULTRASONIC COMPLEX electric spark micro-fine finishining Digit Control Machine Tool ring flange assembly structure, partial sectional view.
Fig. 3 five-axle linkage ULTRASONIC COMPLEX electric spark micro-fine finishining Digit Control Machine Tool front view.
Fig. 4 five-axle linkage ULTRASONIC COMPLEX electric spark micro-fine finishining Digit Control Machine Tool right view.
Fig. 5 five-axle linkage ULTRASONIC COMPLEX electric spark micro-fine finishining Digit Control Machine Tool top view.
In figure: 1 tool-electrode, 2 ultrasonic transformers, 3 tray decks, 4 bolts, 5 PZT (piezoelectric transducer)s, 6 packing rings, 7 bracing frames, 8 columns, 9 workpiece, 10 back shafts, 11C is to rotating liquid groove mechanism, 12Z axle lifting platform mechanism, 13Y axle slide mechanism, 14X axle saddle mechanism, 15X axle servomotor, 16X axle ball-screw, 17Y axle ball-screw, 18Y axle servomotor, 19X axis rail slide, 20 bases, 21Z axle sliding tray, 22A is to rotary workbench mechanism, 23T type groove clamping plate, 24 board slots, 25A is to servomotor, 26C is to support round platform, 27 bearings, 101 holding frames, 104 holding frames, 107 holding frames, 110 holding frames, 102 transducers, 105 transducers, 108 transducers, 111 transducers, 103 vibration radiation heads, 106 vibration radiation heads, 109 vibration radiation heads, 112 vibration radiation heads, 113 screwed holes, 114 grip part, 115 bolts hole, 116 ring flanges.
Detailed description of the invention
Illustrate that the invention will be further described below in conjunction with accompanying drawing and accompanying drawing.
Below in conjunction with accompanying drawing, the present invention is described in further detail.
The micro-fine finishining Digit Control Machine Tool of five-axle linkage ULTRASONIC COMPLEX electric spark, comprises tool-electrode 1, ultrasonic transformer 2, ring flange 116, PZT (piezoelectric transducer) 5, tray deck 3, bracing frame 7, column 8, base 20, A to rotary workbench mechanism 22, C to rotating liquid groove mechanism 11, Z axis lifting platform mechanism 12, Y-axis slide mechanism 17, X-axis saddle mechanism 14.Tool-electrode 1 upper end is arranged in the screwed hole directly over it bottom ultrasonic transformer 2 by screw, and the vibration nodal point place cover of ultrasonic transformer 2 has neck W.N flange dish 116.
PZT (piezoelectric transducer) 5 is set above ultrasonic transformer 2, tray deck 3 is positioned at directly over ultrasonic transformer 2, and be fixedly loaded on below bracing frame 7 circular hole end, bracing frame 7 other end is installed on column 8, bracing frame 7 can manually locate, and can on described column 8, do lifting moving or rotate around column 8, described column 8 lower end is provided with bearing 27, bearing 27 and base 20 rear end are fixed, base 20 also arranges X-axis guide rail slide 19, the X-axis saddle mechanism 14 that can slide thereon is set above X-axis guide rail slide 19, the Y-axis slide mechanism 13 of Y direction movement is set above X-axis saddle mechanism 14, Z axis lifting platform mechanism 12 is equipped with in Y-axis slide mechanism 13 inside, this Z axis lifting platform mechanism 12 is arranged C to the C rotated to support round platform 26, this C is installed with C to rotating liquid groove mechanism 11 on support round platform 26, C to rotating liquid groove mechanism 11 built with A to rotary workbench mechanism 22.
Ultrasonic transformer 2 upper end is connected to PZT (piezoelectric transducer) 5, when PZT (piezoelectric transducer) 5 accesses ultrasonic-frequency power supply, ultrasonic-frequency power supply produces continuously adjustable supersonic frequency alternate electrical signal, after described PZT (piezoelectric transducer) 5 amplifies with ultrasonic transformer 2 conversion, be connected described tool-electrode 1, described tool-electrode 1 lower surface will produce with supersonic frequency mechanical oscillation frequently.
In the present invention, ring flange 116 is preferably band neck W.N flange, be loaded on the vibration nodal point place of described ultrasonic transformer 2, ring flange 116 surrounding is symmetrical to be connected with four and to grip part 114, ring flange 116 is bolted symmetrical four of surrounding and grips part 114, each part 114 that grips is equipped with vibration radiation head 103, 106, 109, 112, vibration radiation head 103, 106, 109, 112 rear ends are respectively arranged with transducer 102, 105, 108, 111, vibration radiation head and transducer are by holding frame 101, 104, 107, 110 are connected and fixed with tray deck 3 bolt.
Further, gripping part 114 side is that spill and ring flange 116 matched in clearance are installed, and opposite side is drive screw, can coordinate install with vibration radiation head 103,106,109,112 internal thread hole.
Vibration radiation head 103,106,109,112 relative to ring flange 116 symmetrically, distributing position is consistent with described X-axis saddle mechanism 14 and described Y-axis slide mechanism 13 direction of feed respectively, wherein, vibration radiation head 103,109 position distribution direction is consistent with described Y-axis slide mechanism 13 direction of feed, and vibration radiation head 106,112 position distribution direction is consistent with described X-axis saddle mechanism 14 direction of feed.After described transducer 102,105,108,111 is energized, vibration signal is after vibration radiation head 103,109 amplifies, tool-electrode 1 will produce the vibrational excitation of Y direction, and vibration signal is after vibration radiation head 105,111 amplifies, and tool-electrode 1 will produce the vibrational excitation of X-direction.
Tray deck 3 is fixedly loaded on below bracing frame 7 circular hole end through ultrasonic transformer 2, tray deck 3 arranges symmetrical bolt hole, packing ring 6 is housed between bracing frame 7 and tray deck 3, can play the effect of damping and noise abatement.
Be provided with ball-screw in X-axis saddle mechanism 14, X-axis guide rail slide 19 and Y-axis slide mechanism 13, ball-screw is rotated by driven by servomotor and drives that X-axis saddle mechanism 14X moves axially feeding, Y-axis slide mechanism 13Y moves axially feeding, Z axis lifting platform mechanism Z-axis direction vertical feed respectively; Described C is rotated to rotating liquid groove mechanism 11 relative to Z axis lifting platform mechanism 12 and C by driven by servomotor to rotating liquid groove mechanism 11, A respectively respectively to rotary workbench mechanism 22, and angle rotatable scope is respectively-180 ~ 180o ,-90 ~ 90o.Be specially: the X-axis ball-screw 16 being provided with X-direction in (1) described X-axis saddle mechanism 14, ball-screw 16 by X-axis servomotor 15 drive rotate drive X-axis saddle mechanism 14 do on described X-axis guide rail slide 19 X axis move forward into.(2) described Y-axis slide mechanism 13 bottom is provided with the Y-axis ball-screw 17 of Y direction, Y-axis ball-screw 17 by Y-axis servomotor 18 drive rotate drive Y-axis slide mechanism 13 do in described X-axis saddle mechanism 14 Y-axis move forward into.(3) described Y-axis slide mechanism 13 inside is also provided with Z axis servomotor and Z axis ball-screw, the every limit of described Z axis lifting platform mechanism 12 is provided with 2 Z axis sliding trays 21, is rotated drive Z axis lifting platform mechanism 12 along the Z axis sliding tray 21 of surrounding symmetry in Z-direction lifting moving by Z axis servomotor.Z axis lifting platform mechanism 12 upper end is provided with the C that is connected to servomotor with C to supporting round platform 26, and under the driving of servomotor, C rotates to support round platform 26 around the Z-axis direction, and rotational angle range is-180o ~ 180o.
Described C is spill to rotating liquid groove mechanism 11, its inwall and described A are to rotary workbench mechanism 22 both sides matched in clearance, be fixed on described C bottom it on support round platform 26, C rotates to support round platform 26 being loaded on C in Z axis lifting platform mechanism 12 under the driving of servomotor.C is provided with board slot 24 to the Baltimore groove two ends of rotating liquid groove mechanism 11, can clamping high strength, anticorrosion, leakproof clamping plate, for holding working solution.
Described A is to rotary workbench mechanism 22 in spill, and concave bottom surfaces is provided with T-slot clamping plate 23, for the firm workpiece of clamping, is beneficial to the eliminating of working solution flowing, elaboration products.
Described A is placed to directed installation of servomotor 25 to the back shaft 10 at rotating liquid groove mechanism 11 two ends with A to rotary workbench mechanism 22 by described C, and rotate around X axis under A drives to servomotor 25, rotational angle range is-90o ~ 90o.
In figure: 1 tool-electrode, 2 ultrasonic transformers, 3 tray decks, 4 bolts, 5 PZT (piezoelectric transducer)s, 6 packing rings, 7 bracing frames, 8 columns, 9 workpiece, 10 back shafts, 11C is to rotating liquid groove mechanism, 12Z axle lifting platform mechanism, 13Y axle slide mechanism, 14X axle saddle mechanism, 15X axle servomotor, 16X axle ball-screw, 17Y axle ball-screw, 18Y axle servomotor, 19X axis rail slide, 20 bases, 21Z axle sliding tray, 22A is to rotary workbench mechanism, 23T type groove clamping plate, 24 board slots, 25A is to servomotor, 26C is to support round platform, 27 bearings, 101 holding frames, 104 holding frames, 107 holding frames, 110 holding frames, 102 transducers, 105 transducers, 108 transducers, 111 transducers, 103 vibration radiation heads, 106 vibration radiation heads, 109 vibration radiation heads, 112 vibration radiation heads, 113 screwed holes, 114 grip part, 115 bolts hole, 116 ring flanges.
Described servomotor (X-axis servomotor 15, Y-axis servomotor 18, Z axis servomotor, A are to servomotor 25, C to servomotor) is connected to Programmable Logic Controller after driver, Programmable Logic Controller is connected with computer again, procedure is delivered into computer to control to perform, realizes the micro-fine finishining of five-axle linkage of workpiece 9.
In process, described working solution selects mass fraction 15% absolute ethyl alcohol suspension, adds W10 boron carbide abrasive particle simultaneously, prevents the frequent short circuit in processing; Simultaneously, in the high-frequency electrical pulses resource loop be connected with workpiece 9 and ultrasonic transformer 2, current sensor and emergency switch are set, effective detection processing district short circuit and computer controlled stop only described feed mechanism feeding are run, and reduce the situation because short circuit causes workpiece 9 and tool-electrode 1 to burn.
The above embodiment is only with the detailed description to technical solution of the present invention; do not limit the specific embodiment of the present invention; those of ordinary skill in the art is to be understood that; without departing from the inventive concept of the premise; to the simple modification of technical scheme of the present invention or replacement, can all belong to the protection domain of technical solution of the present invention.
Claims (10)
1. the micro-fine finishining Digit Control Machine Tool of five-axle linkage ULTRASONIC COMPLEX electric spark, comprises tool-electrode (1), ultrasonic transformer (2), ring flange (116), PZT (piezoelectric transducer) (5), tray deck (3), bracing frame (7), column (8), base (20), A to rotary workbench mechanism (22), C to rotating liquid groove mechanism (11), Z axis lifting platform mechanism (12), Y-axis slide mechanism (13), X-axis saddle mechanism (14);
Described tool-electrode (1) is installed and is connected to ultrasonic transformer (2) bottom, and ultrasonic transformer (2) outside cover has ring flange (116); Described tray deck (3) is positioned at directly over ultrasonic transformer (2), is fixedly loaded on below bracing frame (7) circular hole end; Described PZT (piezoelectric transducer) (5) is arranged at ultrasonic transformer (2) top, and is supported on bracing frame (7);
Support frame as described above (7) one end and tray deck (3) are installed fixing, and the other end and column (8) are installed fixing, described column (8) lower end is provided with bearing (27), bearing (27) is fixed with base (20), base (20) is also provided with X-axis guide rail slide (19), X-axis guide rail slide (19) top is provided with the X-axis saddle mechanism (14) that can slide thereon, X-axis saddle mechanism (14) top is provided with the Y-axis slide mechanism (13) of Y direction movement, Z axis lifting platform mechanism (12) is equipped with in Y-axis slide mechanism (13) inside, Z axis lifting platform mechanism (12) is provided with C to the C rotated to support round platform (26), C is installed with C to rotating liquid groove mechanism (11) in support round platform (26), C to rotating liquid groove mechanism (11) built with A to rotary workbench mechanism (22).
2. the micro-fine finishining Digit Control Machine Tool of five-axle linkage ULTRASONIC COMPLEX electric spark according to claim 1, is characterized in that: described tool-electrode (1) upper end is arranged in the screwed hole of ultrasonic transformer (2) bottom by screw.
3. the micro-fine finishining Digit Control Machine Tool of five-axle linkage ULTRASONIC COMPLEX electric spark according to claim 1, it is characterized in that: described ring flange (116) is band neck W.N flange, be loaded on the vibration nodal point place of ultrasonic transformer (2), ring flange (116) surrounding is symmetrical to be connected with four and to grip part (114), four grip part (114) and fix through bolt with ring flange (116), each part (114) that grips is equipped with vibration radiation head, each vibration radiation head rear end is provided with transducer, vibration radiation head and transducer are connected and fixed by holding frame and described tray deck (3) bolt.
4. the micro-fine finishining Digit Control Machine Tool of five-axle linkage ULTRASONIC COMPLEX electric spark according to claim 3, is characterized in that: described in grip part (114) side be spill, install with ring flange (116) matched in clearance; Gripping part (114) opposite side is drive screw, coordinates install with vibration radiation head internal thread hole.
5. the micro-fine finishining Digit Control Machine Tool of five-axle linkage ULTRASONIC COMPLEX electric spark according to claim 3, it is characterized in that: relative to described ring flange symmetrically, distributing position is consistent with described X-axis saddle mechanism (14) and described Y-axis slide mechanism (13) direction of feed respectively for described vibration radiation head.
6. the micro-fine finishining Digit Control Machine Tool of five-axle linkage ULTRASONIC COMPLEX electric spark according to claim 1, is characterized in that: the packing ring (6) that the effect playing damping and noise abatement is housed between support frame as described above (7) and described tray deck (3).
7. the micro-fine finishining Digit Control Machine Tool of five-axle linkage ULTRASONIC COMPLEX electric spark according to claim 1, it is characterized in that: in the micro-fine finishining Digit Control Machine Tool of described five-axle linkage ULTRASONIC COMPLEX electric spark, be equipped with ball-screw in X-axis saddle mechanism (14), X-axis guide rail slide (19) and described Y-axis slide mechanism (13), ball-screw is rotated by driven by servomotor and drives X-axis saddle mechanism (14) X axis to move forward into respectively to move forward into, Z axis lifting platform mechanism (12) Z-axis direction vertical feed to, Y-axis slide mechanism (13) Y-axis; Described C is rotated to rotating liquid groove mechanism (11) relative to Z axis lifting platform mechanism (12) and C by driven by servomotor to rotating liquid groove mechanism (11), A respectively respectively to rotary workbench mechanism (22), and angle rotatable scope is respectively-180 ~ 180o ,-90 ~ 90o.
8. the micro-fine finishining Digit Control Machine Tool of five-axle linkage ULTRASONIC COMPLEX electric spark according to claim 1, it is characterized in that: described C to rotating liquid groove mechanism (11) in spill, its inwall and A are to rotary workbench mechanism (22) both sides matched in clearance, and C is provided with board slot (24) to the Baltimore groove two ends of rotating liquid groove mechanism (11).
9. the micro-fine finishining Digit Control Machine Tool of five-axle linkage ULTRASONIC COMPLEX electric spark according to claim 1, it is characterized in that: described A is to rotary workbench mechanism (22) in spill, and A is provided with T-slot clamping plate (23) to the concave bottom surfaces of rotary workbench mechanism (22).
10. the micro-fine finishining Digit Control Machine Tool of five-axle linkage ULTRASONIC COMPLEX electric spark according to claim 1, is characterized in that: support frame as described above (7) above can manually locate at column (8), can do lifting moving or rotate around column (8) on column (8).
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