CN105259211A - Gas-sensor nanometer sensitive material, slurry with gas-sensor nanometer sensitive material, preparing method of gas-sensor nanometer sensitive material, preparing method of slurry and application of gas-sensor nanometer sensitive material - Google Patents
Gas-sensor nanometer sensitive material, slurry with gas-sensor nanometer sensitive material, preparing method of gas-sensor nanometer sensitive material, preparing method of slurry and application of gas-sensor nanometer sensitive material Download PDFInfo
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Abstract
The invention relates to a gas-sensor nanometer sensitive material, slurry with the gas-sensor nanometer sensitive material, preparing of the gas-sensor nanometer sensitive material, preparing of the slurry and an application of the gas-sensor nanometer sensitive material. A preparing method of the gas-sensor nanometer sensitive material includes the following steps that 1, stannate is added into ultrapure water and subjected to ultrasonic dispersion, a stannate solution is obtained, a urea ethanol solution is added, ultrasonic processing continues, an obtained mixed solution is transferred into a hydrothermal reaction kettle, after reaction is completed, cooling is carried out, and bottom precipitate is collected, centrifugally washed, arranged in a dryer and dried; 2, nanometer SnO2 hollow sphere powder obtained after drying is added into distilled water to be subjected to ultrasonic dispersion, a Pd(NO3)2 solution is dropwise added under the stirring condition, ammonium hydroxide is added till the pH of the mixed solution ranges from 9 to 12, the mixture is stirred at the indoor temperature, bottom precipitate is centrifugally collected, washed to be neutral and dried, and finally Pd-doping nanometer SnO2 hollow spheres are obtained. The gas-sensor nanometer sensitive material, the slurry, the preparing and the application have the advantages that the preparing methods are simple, the quantity of introduced foreign ions is small, the yield is high, volume production is facilitated, the specific area of the material is large, dispersity is good, and high sensitivity and short response recovery time are achieved.
Description
Technical field
The invention belongs to gas sensor domain, be specifically related to a kind of gas sensor nano sensitive material, its slurry and Synthesis and applications thereof.
Background technology
In recent years, along with the problem such as environmental ecology, atmospheric pollution is on the rise, strengthen also seeming particularly important to the detection of ambient atmosphere, gas sensor is widely used in detecting various gas as a kind of conventional gas detecting instrument.Sensitive material is the core of gas sensor, directly determines the performance of gas sensor practical application.The gas sensor realizing commercialization the earliest, be most widely used using metal or metal-oxide semiconductor (MOS) as the semiconductor gas sensor of sensitive layer.And the sensitivity of current this kind of semiconductor gas sensor ubiquity is low, response recovers slow, poor selectivity and detectability is low etc. that outstanding problem limits its range of application and place.Select and development of new sensitive material, all will the gas sensitization characteristic of gas sensor be made to reach optimum.
Compared to the Semiconductor gas sensors material of routine, drastically increase response sensitivity, selectivity, long-time stability using nano material as the gas sensor of sensitive material, to reduction working temperature and shortening response recovery time also important role.But the preparation of nano sensitive material often exists the shortcomings such as complex process is wayward, productive rate is low, not easily produces in batches, also more rare in the application product of reality.On the other hand, size performance is the key of nano sensitive material coating technology, and slurry preparation directly affects the film forming stability of gas-sensitive sensor device.Be heated due to nano material and easily reunite, apply rete cracking after easily causing thermal treatment, film forming thickness heterogeneity, the problem such as consistance, poor repeatability.
Summary of the invention
In order to solve the problems of the technologies described above, the invention provides a kind of gas sensor nano sensitive material, its slurry and Synthesis and applications thereof, the new gas sensor with high sensitivity, high reliability made, rely on the performance characteristics such as its high integration, volume are little, low-power consumption, lift gas sensor is in the application in the smart home life fields such as portable mobile apparatus, indoor air chemical pollution, air-conditioning refrigerator.
The present invention is for solving the problems of the technologies described above, and the technical scheme of employing is: a kind of gas sensor nano sensitive material, is characterized in that: comprise the product that following reaction prepares:
1) stannate is added in ultrapure water, ultrasonic disperse 5 ~ 20min, obtain transparent homogeneous stannate aqueous solution, add urea ethanolic solution, continue ultrasonic mixing 10 ~ 20min, the mixed solution obtained proceeds in hydrothermal reaction kettle, after having reacted, be cooled to room temperature, collect bottom settlings thing, centrifuge washing, is placed in baking oven dry;
2) nano SnO will obtained after drying
2hollow spherical powder, adds distilled water ultrasonic disperse 10 ~ 30min, drips Pd (NO under stirring condition
3)
2solution, adds the pH of ammoniacal liquor to mixed solution 9 ~ 12, stirred at ambient temperature 12 ~ 24h, collected by centrifugation bottom settlings, and washing, to neutral, finally obtains the nano-stannic oxide (PdO/SnO of Pd doping after drying
2) hollow ball.
By such scheme, described stannate is sodium stannate or potassium stannate.
By such scheme, the concentration of described stannate aqueous solution is 0.01 ~ 0.05mol/L.
By such scheme, the concentration of described urea ethanolic solution is 0.05 ~ 0.5mol/L.
By such scheme, the volume ratio of stannate aqueous solution and urea ethanolic solution is (1 ~ 4): 1.
By such scheme, described hydrothermal temperature is 120 ~ 180 DEG C, and the hydro-thermal reaction time is 12 ~ 24h.
By such scheme, described baking temperature is 60 ~ 80 DEG C, and drying time is 12 ~ 24h.
By such scheme, described Pd (NO
3)
2with SnO
2mass ratio be (0.5 ~ 5): 100.
By such scheme, the nano-stannic oxide (PdO/SnO of described Pd doping
2) diameter of hollow ball is 300 ~ 500nm.
The preparation method of described gas sensor nano sensitive material, includes following steps:
1) stannate is added in ultrapure water, ultrasonic disperse 5 ~ 20min, obtain transparent homogeneous stannate aqueous solution, add urea ethanolic solution, continue ultrasonic mixing 10 ~ 20min, the mixed solution obtained proceeds in hydrothermal reaction kettle, after having reacted, be cooled to room temperature, collect bottom settlings thing, centrifuge washing, is placed in baking oven dry;
2) nano SnO will obtained after drying
2hollow spherical powder, adds distilled water ultrasonic disperse 10 ~ 30min, drips Pd (NO under stirring condition
3)
2solution, adds the pH of ammoniacal liquor to mixed solution 9 ~ 12, stirred at ambient temperature 12 ~ 24h, collected by centrifugation bottom settlings, and washing, to neutral, finally obtains the nano-stannic oxide (PdO/SnO of Pd doping after drying
2) hollow ball.
The air-sensitive slurry of described gas sensor nano sensitive material, it includes following mass percent composition:
Gas sensor nano sensitive material: 20 ~ 50%; Solvent: 45 ~ 75%; Spreading agent: 1 ~ 2.5%; Defoamer: 0.3 ~ 1%; Cementing agent: 0.1 ~ 0.5%; High molecular weight water soluble polymer: 0.5 ~ 1%.
By such scheme, described solvent is the potpourri of glycerine, ethylene glycol and water, and wherein the mass percent of glycerine, ethylene glycol, water is (40 ~ 60%): (30 ~ 50%): (10 ~ 30%).
By such scheme, described spreading agent is BYK-190; Described defoamer is n-octyl alcohol; Described cementing agent is polyvinyl alcohol water solution; Described high molecular weight water soluble polymer is hydroxyethyl cellulose.
The preparation method of described air-sensitive slurry, includes following preparation process:
1) solvent and high molecular weight water soluble polymer are carried out weighing mixing;
2) by gas sensor nano sensitive material and step 1) solvent carrier that obtains mixes;
3) to step 2) mixed liquor in add spreading agent, defoamer, cementing agent successively, wherein respectively form content be by percentage to the quality: gas sensor nano sensitive material: 20 ~ 50%; Solvent: 45 ~ 75%; Spreading agent: 1 ~ 2.5%; Defoamer: 0.3 ~ 1%; Cementing agent: 0.1 ~ 0.5%; High molecular weight water soluble polymer: 0.5 ~ 1%;
4) step 3) mixed liquor after rotation-revolution stirring machine mix and blend, deaeration process, prepare the slurry of final nano sensitive material.
The described application of gas sensor nano sensitive material in gas sensor.
Nano sensitive material slurry prepared by the present invention is coated on gas sensor substrate, at 60,150,200 DEG C, be first incubated 5min successively except materials such as desolventizings, recycling high temperature or oxygen plasma remove polymkeric substance and strengthen sintering, finally carry out air-sensitive performance test, probe temperature is 320 DEG C, and test ethanol gas concentration is 1 ~ 1000ppm.
The invention has the beneficial effects as follows:
1, the nano Pd particle O/SnO for preparing of the present invention
2hollow ball sensitive material, preparation method is simple, and introduce foreign ion few, productive rate is high, is easy to batch production, and material specific surface area is large, good dispersion, has high sensitivity and response recovery time faster;
2, solvent in the responsive slurry prepared of the present invention, spreading agent, defoamer can to volatilize removing successively through Low Temperature Heat Treatment, not easily cause rete crackle and defect, high-temperature heat treatment or oxygen plasma are except no-bonder, high molecular polymer, strengthen rete sintering and the cohesiveness with rete, improve membranous layer stability, the duct that high molecular polymer stays after removing is simultaneously conducive to the transmission of gas molecule, promotes the gas sensing property of responsive rete;
3, be applied in the mini type gas sensor based on MEMS technology, be expected to the widespread demand meeting Portable manual intelligent multifunctional product sensor market.
Accompanying drawing explanation
Fig. 1 is the SEM figure of nano sensitive material described in embodiment 2;
Fig. 2 is the TEM figure of nano sensitive material described in embodiment 2;
Fig. 3 be nano sensitive material described in embodiment 2 material with slurry by a some glue coating photo on a si substrate;
Fig. 4 is that the responsive slurry rete of nanometer described in embodiment 2 is to the sensitivity of ethanol and concentration relationship figure.
Embodiment
Below in conjunction with embodiment, the present invention will be further described in detail, but this explanation can not be construed as limiting the invention.
Embodiment 1
Joined by sodium stannate in ultrapure water, ultrasonic disperse 5min obtains the transparent homogeneous aqueous solution of 0.01mol/L, adds the 0.05mol/L urea ethanolic solution that ultrasonic disperse is good, both volume ratios are 1:1, continue ultrasonic mixing 10min, the mixed solution obtained proceeds in hydrothermal reaction kettle, 120 DEG C of reaction 12h, after having reacted, be cooled to room temperature, collect bottom settlings thing, centrifuge washing, be placed in 60 DEG C of dry 24h of baking oven, finally obtain nano SnO
2hollow ball.
By the nano SnO obtained after drying
2hollow spherical powder, adds distilled water ultrasonic disperse 15min, drips Pd (NO under stirring condition
3)
2solution, Pd (NO
3)
2with SnO
2mass ratio be 1:100, add the pH=9 of ammoniacal liquor to mixed solution, stirred at ambient temperature 12h, collected by centrifugation bottom settlings, washing, to neutral, finally obtains the nanometer 1wt%PdO/SnO of Pd doping after drying
2hollow ball.
With nanometer 1wt%PdO/SnO
2hollow ball is slurry prepared by sensitive material, and each constituent mass number percent of interpolation is respectively,
Sensitive material: 23%;
Solvent: 75%, solvent is the potpourri of glycerine, ethylene glycol and water; Spreading agent: 1.5%; Defoamer: 0.1%; Cementing agent: 0.2%; High molecular weight water soluble polymer: 0.2%, wherein said spreading agent is BYK-190; Described defoamer is n-octyl alcohol; Described cementing agent is polyvinyl alcohol water solution; Described high molecular weight water soluble polymer is hydroxyethyl cellulose;
First solvent and high molecular weight water soluble polymer are carried out weighing mixing, wherein the mass percent of glycerine, ethylene glycol, water is 55:30:15, add spreading agent, defoamer, cementing agent again, the mixed slurry obtained, after rotation-revolution stirring machine mix and blend, deaeration process, finally prepares nano sensitive material slurry.
The nano sensitive material slurry point glue of preparation is coated on gas sensor substrate, at 60,150,200 DEG C, be first incubated 5min successively except materials such as desolventizings, again in 500 DEG C of insulation 1h, removing polymkeric substance also strengthens sintering, finally carry out air-sensitive performance test, probe temperature is 320 DEG C, and test ethanol gas concentration is 1 ~ 1000ppm.
Embodiment 2
Joined by potassium stannate in ultrapure water, ultrasonic disperse 10min obtains the transparent homogeneous aqueous solution of 0.02mol/L, adds the 0.1mol/L urea ethanolic solution that ultrasonic disperse is good, both volume ratios are 1.8:1, continue ultrasonic mixing 15min, the mixed solution obtained proceeds in hydrothermal reaction kettle, 150 DEG C of reaction 24h, after having reacted, be cooled to room temperature, collect bottom settlings thing, centrifuge washing, be placed in 80 DEG C of dry 12h of baking oven, finally obtain nano SnO
2hollow ball.
By the nano SnO obtained after drying
2hollow spherical powder, adds distilled water ultrasonic disperse 20min, drips Pd (NO under stirring condition
3)
2solution, Pd (NO
3)
2with SnO
2mass ratio be 2:100, add the pH=10 of ammoniacal liquor to mixed solution, stirred at ambient temperature 24h, collected by centrifugation bottom settlings, washing, to neutral, finally obtains the nanometer 2wt%PdO/SnO of Pd doping after drying
2hollow ball.
With nanometer 2wt%PdO/SnO
2hollow ball is slurry prepared by sensitive material, and each constituent mass number percent of interpolation is respectively,
Sensitive material: 30%;
Solvent: 65%, solvent is the potpourri of glycerine, ethylene glycol and water; Spreading agent: 3%; Defoamer: 0.3%; Cementing agent: 0.5%; High molecular weight water soluble polymer: 0.5%, wherein said spreading agent is BYK-190; Described defoamer is n-octyl alcohol; Described cementing agent is polyvinyl alcohol water solution; Described high molecular weight water soluble polymer is hydroxyethyl cellulose;
First solvent and high molecular weight water soluble polymer are carried out weighing mixing, wherein the mass percent of glycerine, ethylene glycol, water is 45:45:10, add spreading agent, defoamer, cementing agent again, the mixed liquor obtained, after rotation-revolution stirring machine mix and blend, deaeration process, finally prepares nano sensitive material slurry.
The nano sensitive material slurry point glue of preparation is coated on gas sensor substrate, at 60,150,200 DEG C, be first incubated 5min successively except materials such as desolventizings, again in 500 DEG C of insulation 1h, removing polymkeric substance also strengthens sintering, finally carry out air-sensitive performance test, probe temperature is 320 DEG C, and test ethanol gas concentration is 1 ~ 1000ppm.
Fig. 1 is nano SnO
2the scanning electron microscope (SEM) photograph of hollow ball, as seen from the figure, its diameter is 300 ~ 500nm.Fig. 2 is nano SnO
2electronic Speculum figure is retouched in the transmission of hollow ball, and as seen from the figure, that prepare is the SnO of inner hollow
2hollow ball.Fig. 3 is nano SnO
2hollow ball as sensitive material material point glue with slurry coating enlarged photograph on a si substrate, as seen from the figure, the rete shape of coating is intact, and thickness is homogeneous, and the defects such as flawless.Fig. 4 be the responsive slurry rete of nanometer to the sensitivity of ethanol and concentration relationship figure, as seen from the figure, sensitivity and concentration have good linear relationship, are 5 to 1ppm alcohol gas response sensitivity.
Embodiment 3
Joined by potassium stannate in ultrapure water, ultrasonic disperse 20min obtains the transparent homogeneous aqueous solution of 0.04mol/L, adds the 0.4mol/L urea ethanolic solution that ultrasonic disperse is good, both volume ratios are 3:1, continue ultrasonic mixing 20min, the mixed solution obtained proceeds in hydrothermal reaction kettle, 180 DEG C of reaction 24h, after having reacted, be cooled to room temperature, collect bottom settlings thing, centrifuge washing, be placed in 80 DEG C of dry 12h of baking oven, finally obtain nano SnO
2hollow ball.
By the nano SnO obtained after drying
2hollow spherical powder, adds distilled water ultrasonic disperse 20min, drips Pd (NO under stirring condition
3)
2solution, Pd (NO
3)
2with SnO
2mass ratio be 2:100, add the pH=10 of ammoniacal liquor to mixed solution, stirred at ambient temperature 24h, collected by centrifugation bottom settlings, washing, to neutral, finally obtains the nanometer 2wt%PdO/SnO of Pd doping after drying
2hollow ball.
With nanometer 2wt%PdO/SnO
2hollow ball is slurry prepared by sensitive material, and each constituent mass number percent of interpolation is respectively,
Sensitive material: 40%;
Solvent: 57%; Spreading agent: 2%; Defoamer: 0.3%; Cementing agent: 0.3%; High molecular weight water soluble polymer: 0.4%, wherein said spreading agent is BYK-190; Described defoamer is n-octyl alcohol; Described cementing agent is polyvinyl alcohol water solution; Described high molecular weight water soluble polymer is hydroxyethyl cellulose.
First solvent and high molecular weight water soluble polymer are carried out weighing mixing, wherein the mass percent of glycerine, ethylene glycol, water is 40:50:10, add spreading agent, defoamer, cementing agent again, the mixed liquor obtained, after rotation-revolution stirring machine mix and blend, deaeration process, finally prepares nano sensitive material slurry.
The nano sensitive material slurry point glue of preparation is coated on gas sensor substrate, at 60,150,200 DEG C, be first incubated 5min successively except materials such as desolventizings, use oxygen plasma treatment 1h again, removing polymkeric substance also strengthens sintering, finally carry out air-sensitive performance test, probe temperature is 320 DEG C, and test ethanol gas concentration is 1 ~ 1000ppm.
Embodiment 4
Joined by sodium stannate in ultrapure water, ultrasonic disperse 20min obtains the transparent homogeneous aqueous solution of 0.05mol/L, adds the 0.5mol/L urea ethanolic solution that ultrasonic disperse is good, both volume ratios are 4:1, continue ultrasonic mixing 20min, the mixed solution obtained proceeds in hydrothermal reaction kettle, 150 DEG C of reaction 24h, after having reacted, be cooled to room temperature, collect bottom settlings thing, centrifuge washing, be placed in 80 DEG C of dry 24h of baking oven, finally obtain nano SnO
2hollow ball.
By the nano SnO obtained after drying
2hollow spherical powder, adds distilled water ultrasonic disperse 30min, drips Pd (NO under stirring condition
3)
2solution, Pd (NO
3)
2with SnO
2mass ratio be 4:100, add the pH=10 of ammoniacal liquor to mixed solution, stirred at ambient temperature 24h, collected by centrifugation bottom settlings, washing, to neutral, finally obtains the nanometer 4wt%PdO/SnO of Pd doping after drying
2hollow ball.
With nanometer 4wt%PdO/SnO
2hollow ball is slurry prepared by sensitive material, and each constituent mass number percent of interpolation is respectively,
Sensitive material: 50%;
Solvent: 42%; Spreading agent: 5%; Defoamer: 1%; Cementing agent: 1%; High molecular weight water soluble polymer: 1%, wherein said spreading agent is BYK-190; Described defoamer is n-octyl alcohol; Described cementing agent is polyvinyl alcohol water solution; Described high molecular weight water soluble polymer is hydroxyethyl cellulose;
First solvent and high molecular weight water soluble polymer are carried out weighing mixing, wherein the mass percent of glycerine, ethylene glycol, water is 45:45:10, add spreading agent, defoamer, cementing agent again, the mixed liquor obtained, after rotation-revolution stirring machine mix and blend, deaeration process, finally prepares nano sensitive material slurry.
The nano sensitive material slurry point glue of preparation is coated on gas sensor substrate, at 60,150,200 DEG C, be first incubated 5min successively except materials such as desolventizings, use oxygen plasma treatment 1h again, removing polymkeric substance also strengthens sintering, finally carry out air-sensitive performance test, probe temperature is 320 DEG C, and test ethanol gas concentration is 1 ~ 1000ppm.
Claims (15)
1. a gas sensor nano sensitive material, is characterized in that: comprise the product that following reaction prepares:
1) stannate is added in ultrapure water, ultrasonic disperse 5 ~ 20min, obtain transparent homogeneous stannate aqueous solution, add urea ethanolic solution, continue ultrasonic mixing 10 ~ 20min, the mixed solution obtained proceeds in hydrothermal reaction kettle, after having reacted, be cooled to room temperature, collect bottom settlings thing, centrifuge washing, is placed in baking oven dry;
2) nano SnO will obtained after drying
2hollow spherical powder, adds distilled water ultrasonic disperse 10 ~ 30min, drips Pd (NO under stirring condition
3)
2solution, adds the pH of ammoniacal liquor to mixed solution 9 ~ 12, stirred at ambient temperature 12 ~ 24h, collected by centrifugation bottom settlings, and washing, to neutral, finally obtains the nano-stannic oxide (PdO/SnO of Pd doping after drying
2) hollow ball.
2. gas sensor nano sensitive material according to claim 1, is characterized in that: described stannate is sodium stannate or potassium stannate.
3. gas sensor nano sensitive material according to claim 2, is characterized in that: the concentration of described stannate aqueous solution is 0.01 ~ 0.05mol/L.
4. gas sensor nano sensitive material according to claim 1, is characterized in that: the concentration of described urea ethanolic solution is 0.05 ~ 0.5mol/L.
5. gas sensor nano sensitive material according to claim 1, is characterized in that: the volume ratio of stannate aqueous solution and urea ethanolic solution is (1 ~ 4): 1.
6. gas sensor nano sensitive material according to claim 1, is characterized in that: described hydrothermal temperature is 120 ~ 180 DEG C, and the hydro-thermal reaction time is 12 ~ 24h.
7. gas sensor nano sensitive material according to claim 1, is characterized in that: described baking temperature is 60 ~ 80 DEG C, and drying time is 12 ~ 24h.
8. gas sensor nano sensitive material according to claim 1, is characterized in that: described Pd (NO
3)
2with SnO
2mass ratio be (0.5 ~ 5): 100.
9. gas sensor nano sensitive material according to claim 1, is characterized in that: the nano-stannic oxide (PdO/SnO of described Pd doping
2) diameter of hollow ball is 300 ~ 500nm.
10. the preparation method of gas sensor nano sensitive material according to claim 1, includes following steps:
1) stannate is added in ultrapure water, ultrasonic disperse 5 ~ 20min, obtain transparent homogeneous stannate aqueous solution, add urea ethanolic solution, continue ultrasonic mixing 10 ~ 20min, the mixed solution obtained proceeds in hydrothermal reaction kettle, after having reacted, be cooled to room temperature, collect bottom settlings thing, centrifuge washing, is placed in baking oven dry;
2) nano SnO will obtained after drying
2hollow spherical powder, adds distilled water ultrasonic disperse 10 ~ 30min, drips Pd (NO under stirring condition
3)
2solution, adds the pH of ammoniacal liquor to mixed solution 9 ~ 12, stirred at ambient temperature 12 ~ 24h, collected by centrifugation bottom settlings, and washing, to neutral, finally obtains the nano-stannic oxide (PdO/SnO of Pd doping after drying
2) hollow ball.
11. 1 kinds of air-sensitive slurries including gas sensor nano sensitive material according to claim 1, it includes following mass percent composition:
Gas sensor nano sensitive material: 20 ~ 50%; Solvent: 45 ~ 75%; Spreading agent: 1 ~ 2.5%; Defoamer: 0.3 ~ 1%; Cementing agent: 0.1 ~ 0.5%; High molecular weight water soluble polymer: 0.5 ~ 1%.
12. air-sensitive slurries according to claim 11, it is characterized in that: described solvent is the potpourri of glycerine, ethylene glycol and water, wherein the mass percent of glycerine, ethylene glycol, water is (40 ~ 60%): (30 ~ 50%): (10 ~ 30%).
13. air-sensitive slurries according to claim 11, is characterized in that: described spreading agent is BYK-190; Described defoamer is n-octyl alcohol; Described cementing agent is polyvinyl alcohol water solution; Described high molecular weight water soluble polymer is hydroxyethyl cellulose.
The preparation method of 14. air-sensitive slurries according to claim 11, includes following preparation process:
1) solvent and high molecular weight water soluble polymer are carried out weighing mixing;
2) by gas sensor nano sensitive material and step 1) solvent carrier that obtains mixes;
3) to step 2) mixed liquor in add spreading agent, defoamer, cementing agent successively, wherein respectively form content be by percentage to the quality: gas sensor nano sensitive material: 20 ~ 50%; Solvent: 45 ~ 75%; Spreading agent: 1 ~ 2.5%; Defoamer: 0.3 ~ 1%; Cementing agent: 0.1 ~ 0.5%; High molecular weight water soluble polymer: 0.5 ~ 1%;
4) step 3) mixed liquor after rotation-revolution stirring machine mix and blend, deaeration process, prepare the slurry of final nano sensitive material.
15. application of gas sensor nano sensitive material according to claim 1 in gas sensor.
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