CN105236349B - Driving type piezoelectric actuator high accuracy lead wire clamp - Google Patents
Driving type piezoelectric actuator high accuracy lead wire clamp Download PDFInfo
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- CN105236349B CN105236349B CN201510683859.1A CN201510683859A CN105236349B CN 105236349 B CN105236349 B CN 105236349B CN 201510683859 A CN201510683859 A CN 201510683859A CN 105236349 B CN105236349 B CN 105236349B
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Abstract
The invention discloses a kind of high-precision lead wire clamp of driving type piezoelectric actuator, the wire clamp is to use sheet material wire cutting integrally formed, including bridge type displacement amplifying mechanism and matrix, and matrix is formed at the movable end both sides of bridge type displacement amplifying mechanism；Bridge type displacement amplifying mechanism is provided with the fixed cross beam parallel with matrix, movable beam and connects their two quadric chains, and the two ends of movable beam are respectively formed with a flexible parallel pair of trigger structure connected with matrix；Piezoelectric ceramic actuator is provided between fixed cross beam and movable beam；Two parallel-crank mechanisms are formed with the side of matrix, perpendicular tie-beam is formed with the output end of parallel-crank mechanism, jaw is formed with tie-beam；The output end of bridge type displacement amplifying mechanism and the input of parallel-crank mechanism are connected by flexible hinge III.Small volume of the present invention, compact conformation, clamping force are reliable and stable, manufacturing cost is low, with larger displacement equations multiple.
Description
Technical field
The invention belongs to micro-device packaging field, more particularly to a kind of high-precision lead wire clamp of driving type piezoelectric actuator.
Background technology
In recent years, flourishing with microelectronic industry, the development of microelectronic industry is comprehensive as a country is weighed
The important symbol of strength is closed, as the important leverage for promoting national sustained economic development and national strategy basic industry safety.
With the sustainable development of microelectronic industry, its relevant industries device is constantly towards miniaturization, high-performance and high integration direction hair
Exhibition, it is more and more stricter for the quality requirement of encapsulating products, therefore the quality and efficiency of micro-device packaging are proposed higher
It is required that.
So-called micro-device packaging is, by a micro element with certain function, one to be placed on by series of process
Therewith in adaptable device, to ensure that micro element being capable of steady operation.As the key components of micro-device packaging equipment,
Lead wire clamp completed in encapsulation process it is quick it is controllable open and closed action, control lead completes high-speed, high precision motion,
The conveying of lead is realized with blocking, its performance quality directly affects package quality, and then influences the performance of micro element and use the longevity
Life.
Traditional lead wire clamp is mainly using type of drive, these type of drive such as magnetic valve, voice coil motor, linear electric motors
Selection influence wire clamp mechanical structure compactedness, be likely to result in that wire clamp folding is unstable, clamping force is non-constant, limit wire clamp
The raising of kinematic accuracy and package quality.In addition, driver of the magnetostrictor used also as wire clamp, but the driving of such wire clamp and
Control system is more complicated.Existing lead wire clamp uses pivotally connected two clamping limbs mostly, passes through the rotary motion of clamping limb
The open and close movement of wire clamp is realized, so that jaw can be caused can not to realize parallel motion, lead loosening is easily caused, it is impossible to realize stable
Clamping.Due to wire clamp folding frequently, therefore it is required that the connection pivot between clamping limb has very high-wearing feature.In order to realize wire clamp
High-speed, high precision folding, it is necessary to reduce pivot size and wire clamp total quality as much as possible.Current most of lead wire clamps
Connect pivot and use ruby material, so as to cause the manufacturing cost of wire clamp too high.Existing lead wire clamp can realize essence mostly
True position control, but the control for clamping force mainly uses indirect mode, i.e., demarcated using preloading spring or power etc.
Mode is realized.These modes can be influenceed in motion process by inertia force, it is difficult to accurately ensure the stably and controllable of clamping force,
And power calibration process is more complicated.
The content of the invention
The present invention provides a kind of driving type piezoelectric actuator high-precision lead line to solve technical problem present in known technology
Folder, the wire clamp small volume, compact conformation, clamping force are reliable and stable, manufacturing cost is low, and kinematic accuracy is high.
The present invention is adopted the technical scheme that to solve technical problem present in known technology：A kind of driving type piezoelectric actuator
High-precision lead wire clamp, the wire clamp is to use sheet material wire cutting integrally formed, including bridge type displacement amplifying mechanism and matrix, institute
State bridge type displacement amplifying mechanism and described matrix to be arranged symmetrically on wire clamp center line, described matrix is formed at the bridge type position
Move the movable end both sides of enlarger；The bridge type displacement amplifying mechanism is provided with the fixed cross beam parallel with described matrix, movable
Crossbeam and the connection fixed cross beam and two quadric chains of the movable beam, the quadric chain is using flexibility
The connection of hinge I is formed, and the defeated of bridge type displacement amplifying mechanism is respectively provided with the outside of two quadric chains
Go out end；The two ends of the movable beam are respectively formed with a flexible parallel pair of trigger structure connected with described matrix；Described solid
Determine to be provided with piezoelectric ceramic actuator between crossbeam and the movable beam, the longitudinal centre line of the piezoelectric ceramic actuator is with being somebody's turn to do
The center line of wire clamp is overlapped, and the piezoelectric ceramic actuator is provided with pretension bolt, and the pretension bolt is connected to the movable horizontal stroke
Liang Shang；Two parallel-crank mechanisms being arranged symmetrically on wire clamp center line, two institutes are formed with the side of described matrix
State the both sides that parallel-crank mechanism is located at the bridge type displacement amplifying mechanism respectively；The parallel-crank mechanism is provided with output
End and input, the output end of the parallel-crank mechanism are arranged on its end away from described matrix, parallel four side
The input of shape mechanism sets within it side close to the position of described matrix, and the parallel-crank mechanism is to use flexible hinge
What II connection was formed, perpendicular tie-beam is formed with the output end of the parallel-crank mechanism, in the connection
Beam is formed with jaw on the end away from described matrix；The output end of the bridge type displacement amplifying mechanism and the institute on the outside of it
The input for stating parallel-crank mechanism is connected by flexible hinge III.
The tie-beam is flexible beam, and metal strain plate is pasted with the flexible beam.
Transition arc structure is each formed with the inside of the two ends of the flexible beam.
The present invention has the advantages and positive effects of：Using driving source of the piezoelectric ceramic actuator as lead wire clamp,
Wire clamp total quality and movement inertia can substantially be reduced.Other piezoelectric ceramic actuator has small volume, rigidity height, response speed
The features such as degree is fast, displacement resolution is high, the quadric chain folding positioned at its both sides is driven using piezoelectric ceramic actuator, can be with
It is effectively improved the Static and dynamic performance of wire clamp.Piezoelectric ceramic actuator is arranged on inside wire clamp, cable clamp structure is compact.Using parallel
Quadrangular mechanism realizes the parallel motion of jaw, can avoid, because clamping component causes lead to loosen, can effectively improving
The clamping stability and precision of wire clamp.By being arranged symmetrically parallel pair of trigger structure of two flexibilities at movable beam two ends, to ensure
Bridge type amplifier movable beam is along wire clamp center line movement, so as to ensure that wire clamp is suddenly opening the motion essence of emergency stop lower jaw
Degree.In addition using bridge type displacement amplifying mechanism and parallel-crank mechanism two-stage enlarger, make wire clamp that there are larger opening and closing
Amount, can realize the stable holding to different-diameter lead.Using feedback element of the metal strain plate as wire clamp chucking power, energy
Measurement and the Real-time Feedback of chucking power are enough realized, so as to improve the stability that lead wire clamp works in encapsulation process.Using one
Molding structure, it is not necessary to precious materials, low manufacture cost.In summary, small volume of the present invention, compact conformation, clamping force are stable
Reliably, manufacturing cost is low, with larger displacement equations multiple, can realize chucking power measurement and feedback, can be applied to draw
Line bonding sealed in unit.
Brief description of the drawings
Fig. 1 is structural representation of the invention；
Fig. 2 is the partial schematic diagram of the present invention, includes matrix and bridge type displacement amplifying mechanism；
Fig. 3 is the partial schematic diagram of the present invention, includes matrix, parallel-crank mechanism, tie-beam and jaw；
Fig. 4 is the fundamental diagram of the parallel-crank mechanism of the present invention；
Fig. 5 is the fundamental diagram of the bridge type displacement amplifying mechanism of the present invention.
In figure：1st, matrix, 2, parallel-crank mechanism, 2-1, flexible hinge II, 2-2, the input of parallel-crank mechanism
End, 2-3, the output end of parallel-crank mechanism, 3, flexible hinge III, 4, bridge type displacement amplifying mechanism, 4-1, quadric chain；
4-2, flexible hinge I, 4-3, the output end of bridge type displacement amplifying mechanism, 4-4, fixed cross beam, 4-5, movable beam；5th, piezoelectricity is made pottery
Porcelain driver, 6, tie-beam, 7, jaw, 8, metal strain plate, 9, pretension bolt, 10, flexible parallel pair of trigger structure.
Embodiment
In order to further understand the content, features and effects of the present invention, hereby enumerating following examples, and coordinate accompanying drawing
Describe in detail as follows：
Refer to Fig. 1~Fig. 5, a kind of high-precision lead wire clamp of driving type piezoelectric actuator, the wire clamp is to use sheet material wire cutting one
It is body formed, including bridge type displacement amplifying mechanism 4 and matrix 1, the bridge type displacement amplifying mechanism 4 and described matrix 1 on
Wire clamp center line is arranged symmetrically, and described matrix 1 is formed at the movable end both sides of the bridge type displacement amplifying mechanism 4.
The bridge type displacement amplifying mechanism 4 is provided with the fixed cross beam 4-4 parallel with described matrix 1, movable beam 4-5 and company
Two quadric chains 4-1, the quadric chain 4-1 for meeting the fixed cross beam 4-4 and movable beam 4-5 are to use
The 4-2 of flexible hinge I connects what is formed, and a bridge type displacement is respectively provided with the outside of two quadric chain 4-1 and is put
The output end 4-3 of great institutions；The two ends of the movable beam 4-5 be respectively formed with one with described matrix 1 connect it is flexible parallel
Double trigger structures 10；Piezoelectric ceramic actuator 5, the piezoelectricity are provided between the fixed cross beam 4-4 and the movable beam 4-5
The longitudinal centre line of ceramic driver 5 is overlapped with the center line of the wire clamp, and the piezoelectric ceramic actuator 5 is provided with pretension bolt 9,
The pretension bolt 9 is connected on the movable beam 4-5.
Two parallel-crank mechanisms 2 being arranged symmetrically on wire clamp center line, two are formed with the side of described matrix 1
The individual parallel-crank mechanism 2 is located at the both sides of the bridge type displacement amplifying mechanism 4 respectively.
The parallel-crank mechanism 2 is provided with output end and input, and the output end 2-3 of the parallel-crank mechanism is set
Put in its end away from described matrix 1, the input 2-2 of the parallel-crank mechanism sets within it side close to the base
The position of body 1, the parallel-crank mechanism 2 connects to be formed using the 2-1 of flexible hinge II, in the parallelogram machine
Perpendicular tie-beam 6 is formed with the output end 2-3 of structure, is formed on the end of the tie-beam 6 away from described matrix 1
There is jaw 7.
The output end 4-3 of the bridge type displacement amplifying mechanism and the parallel-crank mechanism on the outside of it input
2-2 is held to be connected by flexible hinge III 3.
The present invention uses symmetrical structure, can realize heat error compensation, reduces because lead wire clamp is heated uneven caused
Error.In order to ensure the machining accuracy of lead wire clamp, described matrix 1, bridge type displacement amplifying mechanism 4, parallel-crank mechanism 2,
Flexible hinge III 3, tie-beam 6, flexible parallel pair of trigger structure 10 and jaw 7 use integrated formed structure.The parallelogram
Mechanism 2 is to connect what is formed by being rectangle the four of arrangement 2-1 of flexible hinge II.
The present invention at movable beam 4-5 two ends by forming the flexible parallel pair of trigger structure 10 connected with matrix 1, to protect
Movable beam 4-5 is demonstrate,proved along wire clamp center line translation, so as to ensure that wire clamp is suddenly opening the kinematic accuracy of emergency stop lower jaw.
In the present embodiment, the tie-beam 6 is flexible beam, and metal strain plate 8 is pasted with the flexible beam.Work as pincers
When mouth 7 clamps lead, flexible beam can produce plastic deformation, and chucking power can be realized by the output quantity for measuring metal strain plate 8
Measurement and feedback, and then by controlling the input signal of piezoelectric ceramic actuator 5, it is possible to achieve the control to chucking power.
Transition arc structure is each formed with the inside of the two ends of the flexible beam, to eliminate the stress concentration that flexible beam is produced in deformation
Phenomenon.
The operation principle of the present invention：
Fig. 1~Fig. 5 is referred to, in the use of the present invention, matrix 1 and fixed cross beam 4-4 are fixed on body.When in pressure
When the two ends of electroceramics driver 5 apply driving voltage, piezoelectric ceramic actuator 5 will extend, driving bridge type displacement amplifying mechanism 4
In movable beam 4-5, movable beam 4-5 under the constraint of flexible parallel pair of trigger structure 10 along the downward translation of wire clamp center line,
The output end 4-3 of quadric chain is translated to inner side, and bridge type displacement amplifying mechanism 4 is by the output displacement of piezoelectric ceramic actuator 5
It is amplified, pulls flexible hinge III 3, drives parallel-crank mechanism 2 to move, parallel-crank mechanism 2 passes through flexible beam band
Movable clamp port 7 is moved, and realizes that jaw 7 closes to clamp lead.After the driving voltage at the two ends of piezoelectric ceramic actuator 5 is removed, pressure
Electroceramics driver 5 will then revert to former length, and lead wire clamp returns to original position, jaw 7 in the presence of flexible hinge elastic force
Open to discharge lead.It can change the pretightning force of piezoelectric ceramic actuator 5 by adjusting pretension bolt 9, two pincers can be adjusted
The spacing of mouth 7, the need for meeting the different size leads of clamping.Jaw 7 is connected by flexible beam with parallel-crank mechanism 2,
When jaw 7 clamps lead, flexible beam can produce plastic deformation, and folder can be realized by the output quantity for measuring metal strain plate 8
Holding force is measured and feedback.The parallel-crank mechanism 2 also acts as the effect of leverage in wire clamp, with displacement equations work(
Energy.
Although the preferred embodiments of the present invention are described above in conjunction with accompanying drawing, the invention is not limited in upper
The embodiment stated, above-mentioned embodiment is only schematical, be not it is restricted, this area it is common
Technical staff in the case of present inventive concept and scope of the claimed protection is not departed from, may be used also under the enlightenment of the present invention
To make many forms, these are belonged within protection scope of the present invention.
Claims (3)
1. the high-precision lead wire clamp of a kind of driving type piezoelectric actuator, it is characterised in that the wire clamp is integrally formed using sheet material wire cutting
, including bridge type displacement amplifying mechanism and matrix, the bridge type displacement amplifying mechanism and described matrix are on wire clamp center line
It is arranged symmetrically, described matrix is formed at the movable end both sides of the bridge type displacement amplifying mechanism；
The bridge type displacement amplifying mechanism is provided with the fixed cross beam parallel with described matrix, movable beam and connects described fixed horizontal
Two quadric chains of beam and the movable beam, the quadric chain is connected using flexible hinge I and formed, two
The output end of a bridge type displacement amplifying mechanism is respectively provided with the outside of the individual quadric chain；By in the movable horizontal stroke
The two ends of beam respectively form a flexible parallel pair of trigger structure connected with described matrix, movable beam is transported along wire clamp center line
It is dynamic；Be provided with piezoelectric ceramic actuator between the fixed cross beam and the movable beam, the piezoelectric ceramic actuator it is vertical
Overlapped to center line with the center line of the wire clamp, the piezoelectric ceramic actuator is provided with pretension bolt, the pretension bolt connection
In the movable beam；
Two parallel-crank mechanisms being arranged symmetrically on wire clamp center line are formed with the side of described matrix, described in two
Parallel-crank mechanism is located at the both sides of the bridge type displacement amplifying mechanism respectively；
The parallel-crank mechanism is provided with output end and input, and it is remote that the output end of the parallel-crank mechanism is arranged on its
From the end of described matrix, the input of the parallel-crank mechanism sets within it side close to the position of described matrix, institute
State parallel-crank mechanism and formation is connected using flexible hinge II, formed in the output end of the parallel-crank mechanism
There is perpendicular tie-beam, jaw is formed with end of the tie-beam away from described matrix；
The output end of the bridge type displacement amplifying mechanism and the input of the parallel-crank mechanism on the outside of it pass through
Flexible hinge III is connected.
2. the high-precision lead wire clamp of driving type piezoelectric actuator according to claim 1, it is characterised in that the tie-beam is flexibility
Beam, metal strain plate is pasted with the flexible beam.
3. the high-precision lead wire clamp of driving type piezoelectric actuator according to claim 2, it is characterised in that the two ends of the flexible beam
Inner side is each formed with transition arc structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201510683859.1A CN105236349B (en) | 2015-10-20 | 2015-10-20 | Driving type piezoelectric actuator high accuracy lead wire clamp |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510683859.1A CN105236349B (en) | 2015-10-20 | 2015-10-20 | Driving type piezoelectric actuator high accuracy lead wire clamp |
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| CN105236349A CN105236349A (en) | 2016-01-13 |
| CN105236349B true CN105236349B (en) | 2017-10-17 |
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Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107154747B (en) * | 2017-06-05 | 2018-10-30 | 西安交通大学 | A kind of radial piezoelectric actuator based on flexible enlarged structure |
| CN109004858A (en) * | 2017-06-06 | 2018-12-14 | 广州简成光电有限公司 | A kind of piezo-electric motor |
| CN107457765A (en) * | 2017-08-18 | 2017-12-12 | 天津大学 | A kind of driving type piezoelectric actuator three-level displacement equations micro clamping device |
| CN108068099B (en) * | 2017-12-22 | 2020-11-20 | 上海工程技术大学 | Micro-clamp with two-stage amplification mechanism |
| CN108173453A (en) * | 2018-01-29 | 2018-06-15 | 长春工业大学 | Parallel-connection driving type piezoelectricity stick-slip line motor and its driving method |
| CN109231152B (en) * | 2018-09-30 | 2020-06-16 | 重庆大学 | Micro-clamp for measuring clamping force and clamping jaw displacement by using fiber Fabry-Perot interferometer |
| CN109317778A (en) * | 2018-11-01 | 2019-02-12 | 深圳市德沃先进自动化有限公司 | A kind of high speed wire-clamping device based on bonding equipment |
| FR3102946B1 (en) * | 2019-11-13 | 2022-04-01 | Percipio Robotics | Device for microactuator and microactuator equipped with such a device |
| CN112659096B (en) * | 2020-12-15 | 2024-05-07 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Double-drive micro-nano operating device and method with clamping and drawing functions |
| CN112953295B (en) * | 2021-02-07 | 2022-10-18 | 天津大学 | Piezoelectric driving type rotary micro-positioning system |
| CN117612982A (en) * | 2024-01-24 | 2024-02-27 | 宁波尚进自动化科技有限公司 | Displacement amplification mechanism and bonding equipment |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10107402A1 (en) * | 2001-02-14 | 2002-08-29 | Ruben Keoschkerjan | Piezo-electric parallel micro-gripper e.g. for positioning objects in micro-optics and micro-electronics, uses two parallel guides with solid hinges and two lever drives fixed on base |
| CN100381258C (en) * | 2004-01-08 | 2008-04-16 | 大连理工大学 | Flexible micro gripper |
| EP2338972B1 (en) * | 2009-12-23 | 2018-05-16 | Eppendorf Ag | Apparatus and method for generating a tool motion |
| FR2975935B1 (en) * | 2011-06-06 | 2013-07-05 | Centre Nat Rech Scient | TOOL FOR MICROTECHNIC CLIP |
| CN103331748B (en) * | 2013-06-09 | 2015-01-07 | 北京航空航天大学 | Miniaturized flexible micro clamp based on piezoelectric driving |
| CN104647347B (en) * | 2014-09-26 | 2016-08-24 | 浙江大学 | The piezoelectric microgripper amplified based on flexible hinge |
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