CN102722088A - Non-contact coarse-fine motion layer positioning system and motion control method thereof - Google Patents

Abstract

The invention relates to a non-contact coarse-fine motion layer positioning system and a motion control method thereof. The positioning device comprises a micropositioner and two coarse positioning stages which are symmetrically arranged on the both sides of the micropositioner. The micropositioner is suspended above the two coarse positioning stages by a voice coil motor; the coarse positioning stages are non-mechanically connected and each coarse positioning stage is non-mechanically connected with the micropositioner; the SDOF (Six Degree of Free) motion of the micropositioner can be implemented; and the two coarse positioning stages move along the Y-axis direction. In the control method for controlling the motion along the Y-axis direction, a laser ruler signal is used as position feedback of the micropositioner along the Y-axis direction; the voice coil motor is utilized to drive so as to implement the motion of the micropositioner along the Y-axis direction; eddy current sensor signals are used as positional deviation between the coarse positioning stages and the micropositioner along the Y-axis direction; and the deviation is used as controller feedback to implement the synchronous movement of the coarse positioning stages and the micropositioner along the Y-axis direction.

Description

Thick smart fold layer positioning system of a kind of non-contact type and motion control method thereof

Technical field

The present invention relates to the thick smart fold layer locating device kinetic control system of a kind of non-contact type, belong to the semiconductor lithography apparatus field.

Background technology

Ultra-precise micro displacement platform with nanoscale motion positions precision is one of semiconductor equipment critical component, like the silicon chip platform in the litho machine, mask platform etc.For realizing the ultraprecise positioning requirements, be widely used as a kind of ultraprecise motion stage with air supporting and the floating performance element that is constrained to supporting way of magnetic.When air supporting constraint conduct support and guide effect, reduce the effects such as friction force that the physical construction transmission causes, improved the system motion bearing accuracy.When being driver element with linear electric motors, the Lorentz force that in the permanent magnet array air-gap field, is produced by hot-wire coil provides driving force, changes the thrust of performance element through size of current in the control coil, has advantages of simple structure and simple.

Usually adopt the structure of thick smart fold layer at present in the lithographic equipment, comprise two coarse motion platforms and a micropositioner, connect through a crossbeam between two coarse motion platforms, micropositioner is installed on the crossbeam, realizes being synchronized with the movement of two coarse motion platforms and micropositioner through crossbeam.Connect the complicacy that crossbeam has increased structural design on the one hand, increased the system architecture quality, bigger quality will influence the system motion response performance; On the other hand, when structure motion, if two coarse motion platforms along the Y direction location deviation; Owing to connect beam action; Make and the coupling that produces acting force and reacting force between two coarse motion platforms make the performance of two coarse motion platforms influence each other, the motion positions precision that influences system.Therefore design the thick smart fold layer locating device that does not have the machinery connection and design to the control method of this locating device significant.

Summary of the invention

The purpose of this invention is to provide a kind of locating device and position measurement and motion control arithmetic that is applied to the semiconductor equipment; Not only satisfy the six-freedom motion positioning requirements, solve problems such as the complex structure, the exercise performance that are caused by the physical construction coupling in the thick smart fold layer structure of present mask platform influence each other simultaneously.

Technical scheme of the present invention is following:

The thick smart fold layer positioning system of a kind of non-contact type, this control system comprises locating device, position-measurement device, drive unit and control module;

Locating device comprises pedestal, a micropositioner and two coarse motion platforms that are arranged symmetrically in the micropositioner both sides, does not have machinery between two coarse motion platforms, between coarse motion platform and the micropositioner and is connected;

Position-measurement device comprises:

1) laser ruler is used to measure the absolute position of micropositioner barycenter along the Y axle;

2) two grating measuring devices, each grating measuring device comprise a grating chi and a read head, are used to measure the displacement of coarse motion platform along Y direction;

3) seven current vortex sensors, wherein:

First current vortex sensor and second current vortex sensor are installed on the first coarse motion platform; Be arranged in one along on the straight line of Y axle; Be used to measure the relative position of micropositioner, the first and second electric vortex sensor measuring values differential as the corner of micropositioner around the Z axle along X axle and coarse motion platform;

The 3rd current vortex sensor is installed on the first coarse motion platform, measures between the first coarse motion platform and the micropositioner relative position along Y direction; The 4th current vortex sensor is installed on the second coarse motion platform, measures between the second coarse motion platform and the micropositioner relative position along Y direction;

The 5th current vortex sensor and the 6th current vortex sensor are installed on the first coarse motion platform, and are positioned at one along on the straight line of Y axle, and the 7th current vortex sensor is installed on the second coarse motion platform, and are positioned at one along on the straight line of X axle with the 5th current vortex sensor; These three current vortex sensors are used to measure the absolute position of micropositioner along the Z axle; The 5th current vortex sensor and the 6th electric vortex sensor measuring value differential as the corner of micropositioner around the X axle, the 5th current vortex sensor and the 7th electric vortex sensor measuring value differential as the corner of micropositioner around the Y axle;

Drive unit comprises:

1) ten voice coil motors

Micropositioner comprises four voice coil motor, two voice coil motor and four voice coil motors that drive along Z-direction that drive along X-direction of driving along Y direction; The coil block of first voice coil motor, second voice coil motor, five notes of traditional Chinese music circle motor is fixed on the first coarse motion platform; Permanent magnet assembly is fixed on the micropositioner; The coil block of the 3rd voice coil motor, the 4th voice coil motor, the 6th voice coil motor is fixed on the second coarse motion platform, and permanent magnet assembly is fixed on the micropositioner;

Subtonic circle motor, octave circle motor, the 9th voice coil motor, the tenth voice coil motor structure are identical, comprise outer magnetic ring, internal magnetic ring, cylindrical coil assembly, gravitational equilibrium magnetic post; The axis of outer magnetic ring and internal magnetic ring is along Z-direction, and outer magnetic ring is identical with the internal magnetic ring magnetizing direction, radially and by the annulus outside surface points to the center of circle; Cylindrical coil is between internal magnetic ring and outer magnetic ring, and the coiling axis is along Z-direction; The axis of magnetic post is along Z-direction, and magnetizing direction is along Z axle positive dirction; The cylindrical coil assembly of subtonic circle motor, octave circle motor is fixed on the first coarse motion platform, and the cylindrical coil assembly of the 9th voice coil motor, the tenth voice coil motor is fixed on the second coarse motion platform;

2) two linear electric motors

Two linear electric motors are used to drive the first coarse motion platform and the second coarse motion platform respectively;

Said control module comprises industrial computer, numbered card, A/D card, D/A card and the driver that contains control program; Numbered card is gathered the increment signal of grating chi and laser ruler; The A/D card is gathered the signal of current vortex sensor; Numbered card and A/D card input to industrial computer with the signal that collects, and industrial computer is controlled micropositioner and coarse motion platform as position feed back signal with said signal, and steering order exports driver to through the D/A card; The driving force output current is given motor, realizes the motion of micropositioner and coarse motion platform.

Based on described thick smart fold layer positioning system, adopted a kind of motion control method, this control method comprises the steps:

1) begins at servo period, set the six-degree of freedom displacement amount of micropositioner, wherein x _dBe the displacement along the X axle, y _dBe the displacement along the Y axle, z _dBe the displacement along the Z axle, θ _XdBe the corner displacement amount around the X axle, θ _YdBe the corner displacement amount around the Y axle, θ _ZdBe corner displacement amount around the Z axle; The current vortex sensor signal that the laser ruler signal of then numbered card being gathered and A/D card are gathered is as the feedback signal of micropositioner control loop, with the current vortex sensor signal of the A/D card collection feedback signal as coarse motion platform control loop;

2) find the solution according to the micropositioner six-degree of freedom displacement amount of setting and feedback signal that each voice coil motor is corresponding exerts oneself; Wherein first voice coil motor, second voice coil motor, the 3rd voice coil motor and the 4th voice coil motor control micropositioner moves and around the degree of freedom of Z axle rotation along the Y direction; The degree of freedom that five notes of traditional Chinese music circle motor and the 6th voice coil motor control micropositioner move along directions X; Subtonic circle motor, octave circle motor, the 9th voice coil motor and the tenth voice coil motor control micropositioner along the Z direction move, around the rotation of X axle with around the degree of freedom of Y axle rotation, the motor power output is calculated by following formula:

${\mathrm{<figure-callout\; id="301"\; label="F"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{301}={\mathrm{<figure-callout\; id="302"\; label="F"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{302}=k_{p301}{e}_y+k_{d301}{\stackrel{\&CenterDot;}{e}}_y+{\mathrm{<figure-callout\; id="301"\; label="c"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">c</figure-callout>}}_{301}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_y+a_{301}{e}_y}{|{\stackrel{\&CenterDot;}{e}}_y+e_y|+{\mathrm{<figure-callout\; id="301"\; label="b"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">b</figure-callout>}}_{301}}+k_{301}{e}_{{\mathrm{\&theta;}}_z}+k_{301}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_z}$

${\mathrm{<figure-callout\; id="303"\; label="F"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{303}={\mathrm{<figure-callout\; id="304"\; label="F"\; filenames="HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{304}=k_{p303}{e}_y+k_{d303}{\stackrel{\&CenterDot;}{e}}_y+{\mathrm{<figure-callout\; id="303"\; label="c"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">c</figure-callout>}}_{303}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_y+a_{303}{e}_y}{|{\stackrel{\&CenterDot;}{e}}_y+e_y|+b_{303}}-k_{303}{e}_{{\mathrm{\&theta;}}_z}-k_{303}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_z}$

${\mathrm{<figure-callout\; id="305"\; label="F"\; filenames="HDA00001716162300091.png,HDA00001716162300092.png"\; state="\{\{state\}\}">F</figure-callout>}}_{305}=F_{306}=k_{p305}{e}_x+k_{d305}{\stackrel{\&CenterDot;}{e}}_x+{\mathrm{<figure-callout\; id="305"\; label="c"\; filenames="HDA00001716162300091.png,HDA00001716162300092.png"\; state="\{\{state\}\}">c</figure-callout>}}_{305}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_x+a_{305}{e}_x}{|{\stackrel{\&CenterDot;}{e}}_x+{a_{305}e}_x|+{\mathrm{<figure-callout\; id="305"\; label="b"\; filenames="HDA00001716162300091.png,HDA00001716162300092.png"\; state="\{\{state\}\}">b</figure-callout>}}_{305}}$

$F_{307}=k_{p307}{e}_z+k_{d307}{\stackrel{\&CenterDot;}{e}}_y+c_{307}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{307}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{307}{e}_y|+b_{307}}+k_{307}{e}_{{\mathrm{\&theta;}}_x}+k_{307}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_x}+k_{307}{e}_{{\mathrm{\&theta;}}_y}+k_{307}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_y}$

$F_{308}=k_{p308}{e}_z+k_{d308}{\stackrel{\&CenterDot;}{e}}_z+c_{308}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{308}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{308}{e}_z|+b_{308}}+k_{308}{e}_{{\mathrm{\&theta;}}_x}+k_{308}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_x}-k_{308}{e}_{{\mathrm{\&theta;}}_y}-k_{308}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_y}$

$F_{309}=k_{p309}{e}_z+k_{d309}{\stackrel{\&CenterDot;}{e}}_z+c_{309}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{309}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{309}{e}_z|+b_{309}}-k_{309}{e}_{{\mathrm{\&theta;}}_x}-k_{309}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_x}+k_{309}{e}_{{\mathrm{\&theta;}}_y}+k_{309}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_y}$

$F_{3010}=k_{p3010}{e}_z+k_{d3010}{\stackrel{\&CenterDot;}{e}}_z+c_{3010}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{3010}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{3010}{e}_z|+b_{3010}}-k_{3010}{e}_{{\mathrm{\&theta;}}_x}-k_{3010}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_x}-k_{3010}{e}_{{\mathrm{\&theta;}}_y}-k_{3010}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_y}$

Wherein: F ₃₀₁Be the first voice coil motor power output, F ₃₀₂Be the output of second voice coil motor, F ₃₀₃Be the 3rd voice coil motor power output, F ₃₀₄Be the 4th voice coil motor power output, F ₃₀₅Be five notes of traditional Chinese music circle motor power output, F ₃₀₆Be the output of the 6th voice coil motor, F ₃₀₇Be subtonic circle motor power output, F ₃₀₈Be octave circle motor power output, F ₃₀₉Be the 9th voice coil motor power output, F ₃₀₁₀It is the tenth voice coil motor power output;

k _P301, k _P303, k _P305, k _P307, k _P308, k _P309, k _P3010, k _D301, k _D303, k _D305, k _D307, k _D308, k _D309, k _D3010, c ₃₀₁, c ₃₀₃, c ₃₀₅, c ₃₀₇, c ₃₀₈, c ₃₀₉, c ₃₀₁₀, a ₃₀₁, a ₃₀₃, a ₃₀₅, a ₃₀₇, a ₃₀₈, a ₃₀₉, a ₃₀₁₀, b ₃₀₁, b ₃₀₃, b ₃₀₅, b ₃₀₇, b ₃₀₈, b ₃₀₉, b ₃₀₁₀, k ₃₀₁, k ₃₀₃, k ₃₀₅, k ₃₀₇, k ₃₀₈, k ₃₀₉, k ₃₀₁₀Be the controller scale-up factor;

e _y=y _d-y, y _dFor micropositioner along the Y direction target location, y is the laser ruler feedback signal,

Be e _yFirst order derivative to the time; e _x=x _d-x, x _dBe the target location of micropositioner along the X axle, x is a feedback signal,

Be e _xSingle order to the time is reciprocal; e _z=z _d-z, z _dBe the target location of micropositioner along the Z axle, z is a feedback signal,

Be e _zSingle order to the time is reciprocal;

θ _XdBe the target location of micropositioner around the X axle, θ _xBe feedback signal,

For Single order to the time is reciprocal;

θ _YdBe the target location of micropositioner around the Y axle, θ _yBe feedback signal,

For Single order to the time is reciprocal;

θ _ZdBe the target rotation angle of micropositioner around the Z axle, θ _zBe feedback signal,

For

Single order to the time is reciprocal;

The coarse motion platform only has the degree of freedom of y direction, and its control system will keep coarse motion platform and micropositioner constant at the relative position of y direction, establishes the first coarse motion platform and micropositioner relative position and keeps y _Cd1Constant, the second coarse motion platform and micropositioner relative position keep y _Cd2Constant.In the motion control method of two coarse motion platforms; The first coarse motion platform with the power output of first voice coil motor and second voice coil motor as feedforward; The 3rd current vortex sensor signal is the position deviation between the micropositioner and the first coarse motion platform, serves as that feedback realizes the first coarse motion platform moving along the Y axle with this deviation; The second coarse motion platform with the power output of the 3rd voice coil motor and the 4th voice coil motor as feedforward; The 4th current vortex sensor signal is the position deviation between the micropositioner and the second coarse motion platform; With this deviation serves as that feedback realizes the second coarse motion platform along the moving of Y axle, and coarse motion platform linear electric motors power output is calculated according to following formula:

$F_{1001}=F_{302}+F_{301}+k_{p1001}{e}_{y1001}+k_{d1001}{\stackrel{\&CenterDot;}{e}}_{y1001}+{\mathrm{<figure-callout\; id="1001"\; label="c"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">c</figure-callout>}}_{1001}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_{y1001}+a_{1001}{e}_{y1001}}{|{\stackrel{\&CenterDot;}{e}}_{y1001}+a_{1001}{e}_{y1001}|+b_{1001}}$

$F_{1002}=F_{304}+F_{303}+k_{p1002}{e}_{y1002}+k_{d1002}{\stackrel{\&CenterDot;}{e}}_{y1002}+{\mathrm{<figure-callout\; id="1002"\; label="c"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">c</figure-callout>}}_{1002}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_{y1002}+a_{1002}{e}_{y1002}}{|{\stackrel{\&CenterDot;}{e}}_{y1002}+a_{1002}{e}_{y1002}|+{\mathrm{<figure-callout\; id="1002"\; label="b"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">b</figure-callout>}}_{1002}}$

Wherein: F ₁₀₀₁Be the first coarse motion platform linear electric motors power output, F ₁₀₀₂It is the second coarse motion platform linear electric motors power output;

k _P1001, k _P1002, k _D1001, k _D1002, c ₁₀₀₁, c ₁₀₀₂, a ₁₀₀₁, a ₁₀₀₂, b ₁₀₀₁, b ₁₀₀₂Be the controller scale-up factor;

e _Y1001=y _Cd1-y _C1, y _Cd1Be the first coarse motion platform and micropositioner target relative position, y _C1The 3rd current vortex sensor feedback signal;

Be e _Y1001The 3rd current vortex sensor signal is to the derivative of time;

e _Y1002=y _Cd2-y _C2, y _Cd2Be the second coarse motion platform and micropositioner target relative position, y _C2The 4th current vortex sensor feedback signal; Be e _Y1002Derivative to the time;

3) obtain the steering order of each motor according to the power output of each drive motor of finding the solution; This steering order inputs to driver after sticking into the conversion of line number mould by D/A; Driver output current pro rata drives corresponding motor, and then realizes the motion of micropositioner and coarse motion platform.

The present invention has the following advantages and the technique effect of high-lighting: the invention solves problems such as the complex structure, the exercise performance that have the physical construction coupling to cause in the thick smart fold layer structure at present influence each other; The lamination positioning device structure that is designed is simple; Contactlessly eliminated friction; The invention provides the six degree of freedom settlement method simultaneously, and a kind of control method, have and control effect preferably.

Description of drawings

Fig. 1 is a positioning device structure principle schematic of the present invention (axonometric drawing).

Fig. 2 is a coarse motion platform axonometric drawing of the present invention.

Fig. 3 is a coarse motion platform side view of the present invention.

Fig. 4 is a micropositioner structural representation of the present invention (axonometric drawing).

Fig. 5 is the present invention's first voice coil motor cut-open view.

Fig. 6 is the present invention's five notes of traditional Chinese music circle electric machine structure synoptic diagram (axonometric drawing).

Fig. 7 is a five notes of traditional Chinese music circle motor cut-open view.

Fig. 8 is a subtonic circle electric machine structure synoptic diagram of the present invention (axonometric drawing).

Fig. 9 is subtonic circle motor outer magnetic ring figure of the present invention.

Figure 10 is subtonic circle motor internal magnetic ring figure of the present invention.

Figure 11 is subtonic circle motor magnetic post figure of the present invention.

Figure 12 is a voice coil motor coil position view of the present invention.

Figure 13 is a grating chi synoptic diagram of the present invention (axonometric drawing).

Figure 14 is a grating chi front view of the present invention.

Figure 15 is the present invention's first current vortex sensor-the 4th current vortex sensor position view.

Figure 16 is the present invention's the 5th current vortex sensor-the 7th current vortex sensor position view.

Figure 17 is a laser ruler position view of the present invention.

Figure 18 is a laser ruler instrumentation plan of the present invention.

Figure 19 is a laser ruler instrumentation plan of the present invention.

Figure 20 is a control principle process flow diagram of the present invention.

Among the figure:

The 001-pedestal;

The 1001-first coarse motion platform, the 1002-second coarse motion platform

The 101-linear electric motors, 102-support component, 103-director element, 104-Connection Element

The 200-micropositioner

201-first voice coil motor, 202-second voice coil motor, 203-the 3rd voice coil motor, 204-the 4th voice coil motor

211-first coil block, 212-first permanent magnet assembly, 213-second permanent magnet assembly

The 2121-first main permanent magnet, the 2142-second main permanent magnet, 2125 the 3rd main permanent magnets; 2131-the 4th main permanent magnet, 2133-the 5th main permanent magnet, 2135-the 6th main permanent magnet; 2122-first attaches permanent magnet, and 2124-second attaches permanent magnet, and 2132-the 3rd attaches permanent magnet; 2134-the 4th attaches permanent magnet, the 2142-first iron yoke

205-five notes of traditional Chinese music circle motor, 206-the 6th voice coil motor

221-second coil block, 222-the 3rd permanent magnet assembly, 223 the 4th permanent magnet assemblies, 2221-the 7th main permanent magnet, 2222-the 8th main permanent magnet, 2231-the 9th main permanent magnet, 2232-the tenth main permanent magnet, 2241-three-iron yoke, 2242-the 4th iron yoke

207-subtonic circle motor, 208-octave circle motor, 209-the 9th voice coil motor, 2010 the tenth voice coil motors

231-tertiary coil assembly, 232-outer magnetic ring, 233-internal magnetic ring, 234 magnetic posts

401-first current vortex sensor, 402-second current vortex sensor, 403-the 3rd current vortex sensor, 404-the 4th current vortex sensor, 405-the 5th current vortex sensor, 406-the 6th current vortex sensor, 407-the 7th current vortex sensor

300-optical grating ruler measurement system

301-grating chi, 301-grating chi erecting frame, 302-grating chi adjusting gear, 303-grating chi, 304-read head, 305-grating chi zero mark

The 900-laser ruler, the 901-catoptron

Embodiment

Below in conjunction with accompanying drawing principle of the present invention, structure and the course of work are further specified the present invention.

Fig. 1 is the structural representation (axonometric drawing) of locating device of the present invention.Locating device of the present invention comprises pedestal 001, micromotion platform 200, the first coarse motion platform 1001, the second coarse motion platform 1002, and these two coarse motion platforms are arranged symmetrically in micromotion platform 200 both sides.

The first coarse motion platform 1001 is identical with the second coarse motion platform, 1002 structures, and Fig. 2 is the second coarse motion platform, 1002 axis of no-feathering mappings, and Fig. 3 is the second coarse motion platform, 1002 side views.Second coarse motion 1002 comprises linear electric motors 101, Connection Element 104, an air supporting support component 102 and an air supporting director element 103.Connection Element 104 is affixed with linear electric motors, and air supporting support component 102 is connected with linear electric motors, and air supporting director element 103 is connected with air supporting support component 102.

The upper surface of the lower surface of air supporting support component 102 and pedestal 001 is relatively positive; Support component 102 lower surfaces have pore; The pore axis forms between air supporting support component 102 and the pedestal 001 along the air supporting of Z-direction and supports along Z-direction, and the air supporting supporting way adopts the mode of vacuum preload; The side of the side of air supporting director element 103 and pedestal 001 is relatively positive; There is pore the side of air supporting director element 103, and the axis of pore forms the air supporting guiding along X-direction between air supporting director element 103 and the pedestal 001; Guide direction is along Y direction, and the air supporting mode is the mode of vacuum preload.

Fig. 4 is micropositioner 200 axis of no-feathering mappings, micropositioner 200 by first voice coil motor 201 that drives along Y direction, second voice coil motor 202, the 3rd voice coil motor 203, the 4th voice coil motor 204 realize along Y direction move and around the rotation of Z axle.Realize moving by the five notes of traditional Chinese music circle motor that drives along X-direction 205, the 6th voice coil motor 206 along the X axle.By realize along the shaft-driven subtonic circle of Z motor 207, octave circle motor 208, the 9th voice coil motor 209, the tenth voice coil motor 2010 micropositioners 200 along the Z axle move and around the rotation of X axle, Y axle.Therefore realize the six-freedom motion of micromotion platform 200 through these ten voice coil motors.

First voice coil motor 201, second voice coil motor 202, the 3rd voice coil motor 203, the 4th voice coil motor 204 structures are identical, and Fig. 5 is first voice coil motor, 201 structure cut-open views.First voice coil motor 201 comprises first permanent magnet assembly 212, second permanent magnet assembly 213, first coil block 211.First coil block 211 is between first permanent magnet assembly 212 and second permanent magnet assembly 213, and retention gap.

Shown in figure 12, the coil block of first voice coil motor 201 and second voice coil motor 202 is fixed on the first coarse motion platform 1001, and the permanent magnet assembly of first voice coil motor 201 and second voice coil motor 202 is fixed on the micromotion platform 200.The coil block of the 3rd voice coil motor 203 and the 4th voice coil motor 204 is fixed on the second coarse motion platform 1002, and the permanent magnet assembly of the 3rd voice coil motor 203 and the 4th voice coil motor 204 is fixed on the micromotion platform 200.When first voice coil motor 201, second voice coil motor 202, the 3rd voice coil motor 203, the 4th voice coil motor 204 are identical along the Y direction driving force; Realize that micromotion platform 200 moves along the Y axle; When these four voice coil motors are inequality along the Y direction driving force, realize the rotation of micromotion platform 200 around the Z axle.

As shown in Figure 4, five notes of traditional Chinese music circle motor 205 is identical with the 6th voice coil motor 206 structures, and is positioned at along on same the straight line of X axle.Fig. 6 is five notes of traditional Chinese music circle motor 220 axonometric drawings, and Fig. 7 is five notes of traditional Chinese music circle motor 220 cut-open views.Shown in figure 12; The coil block of five notes of traditional Chinese music circle motor 205 is fixed on the first coarse motion platform 1001; Its permanent magnet assembly is fixed on the micropositioner 200, and the coil block of the 6th voice coil motor 206 is fixed on the second coarse motion platform 1002, and its permanent magnet assembly is fixed on the micropositioner 200.During coil electricity, five notes of traditional Chinese music circle motor 205 and the 6th voice coil motor 206 drive micropositioner 200 and move in the X-axis direction.

The structure of subtonic circle motor 207, octave circle motor 208, the 9th voice coil motor 209, the tenth voice coil motor 2010 is identical.Fig. 8 is subtonic circle motor 207 axis of no-feathering mappings.Subtonic circle motor 207 comprises outer magnetic ring 232, internal magnetic ring 233, cylindrical coil assembly 231, gravitational equilibrium magnetic post 234.

Fig. 9 is outer magnetic ring 232 front views in the subtonic circle motor 207.Figure 10 is internal magnetic ring 233 front views in the subtonic circle motor 207.Figure 11 is magnetic post 234 front views in the subtonic circle motor 207.The axis of outer magnetic ring 232 and internal magnetic ring 233 is along Z-direction, and outer magnetic ring 232 is identical with internal magnetic ring 233 magnetizing directions, radially and by the annulus outside surface points to the center of circle.Cylindrical coil 231 is between internal magnetic ring 233 and outer magnetic ring 232, and the coiling axis is along Z-direction.The axis of magnetic post 234 is along Z-direction, and magnetizing direction is along Z axle positive dirction.As shown in Figure 4; The coil block of subtonic circle motor 207 and octave circle motor 208 is fixed on the first coarse motion platform 1001; And be positioned at same along on the straight line of Y axle; The coil block of the 9th voice coil motor 209 and the tenth voice coil motor 2010 is fixed on the second coarse motion platform 1002, and is positioned at same along on the straight line of Y axle.The outer magnetic ring 232 of these four voice coil motors, internal magnetic ring 233 and magnetic post 234 are fixed on the micromotion platform 200.During cylindrical coil 231 energisings; Produce Lorentz force between hot-wire coil 231 and internal magnetic ring 233, the outer magnetic ring 232; When these four voice coil motors produce along Z axle Lorentz force size when identical; Realize that micromotion platform 200 moves along Z-direction, when the Lorentz force that produces when these four voice coil motors varies in size, realize that micromotion platform 200 rotates and rotates around the Y axle around the X axle.During coil electricity, produce Lorentz force between hot-wire coil 231 and the magnetic post 234, the size that changes electric current makes the Lorentz force that produces equate with the gravity of micropositioner 200, reaches the purpose of micropositioner 200 gravitational equilibriums.

The position measurement scheme of the first coarse motion platform 1001, the second coarse motion platform 1002, micropositioner 200 is following:

The optical grating ruler measurement device comprises the first grating chi, 3001 measurement mechanisms and the second optical grating ruler measurement device 3002 that structure is identical, and Figure 13 is the first optical grating ruler measurement device, 3001 axonometric drawings, and Figure 14 is the first optical grating ruler measurement device, 3001 front views.These two grating measuring devices are arranged symmetrically in the both sides of two coarse motion platforms along X-direction.Each grating measuring device comprises a grating chi 303, grating chi erecting frame 301, a read head 304 and a grating chi adjusting gear 302.Grating chi adjusting gear 302 is fixed on the pedestal 001, and grating chi erecting frame 301 is fixedly connected with grating chi adjusting gear 302, and the long side direction that makes grating chi erecting frame 301 through adjustment grating chi adjustment rack 302 is along Y direction.Grating chi 303 is pasted and is fixed on grating chi erecting frame 301 surfaces, and grating fringe is along Y direction.Grating reading head 304 is connected with linear electric motors 101, when linear electric motors 101 when the Y axle moves, the optical grating ruler measurement device is used for detecting the first coarse motion platform 1001 and the second coarse motion platform 1002 position along Y direction.

Like Figure 15, shown in Figure 16; Comprise seven current vortex sensors in the relative position measurement system of the micropositioner 200 and the first coarse motion platform 1001, the second coarse motion platform 1002; Each current vortex sensor is installed on the first coarse motion platform 1001, the second coarse motion platform 1002, measures metallic conductor and is installed on the micropositioner 200.First current vortex sensor 401, second current vortex sensor 402 are installed on the first coarse motion platform 1001; And be positioned at along on the straight line of Y axle; Measure between micropositioner 200 and the coarse motion platform 100 along x direction of principal axis relative distance, first current vortex sensor 401 and second current vortex sensor, 402 signals differential measured between micropositioner 200 and two the coarse motion platforms relative rotation around the Z axle.The 3rd current vortex sensor 403, the 4th current vortex sensor 404 are installed in respectively on the first coarse motion platform 1001 and the second coarse motion platform 1002; And be positioned at one along on the straight line of X-direction, measure micropositioner 200 respectively with respect to the first coarse motion platform 1001, the second coarse motion platform 1002 distance along Y direction.The 5th current vortex sensor 405, the 6th current vortex sensor 406 are installed on the first coarse motion platform 1001; And be positioned at one along on the straight line of Y direction; The 7th current vortex sensor 407 is installed on the second coarse motion platform 1002, and is positioned at one along on the straight line of X axle with the 5th current vortex sensor 405.The 5th current vortex sensor 405, the 6th current vortex sensor 406, the 7th current vortex sensor 407 are used to measure between micropositioner 200 and the first coarse motion platform 1001, the second coarse motion platform 1002 along the Z-direction distance; The variate micropositioner 200 of the 5th current vortex sensor 405 and the 6th current vortex sensor 406 is around the X Shaft angle, and the variate micropositioner 200 of the 5th current vortex sensor 405, the 7th current vortex sensor 407 is around the corner of Y axle.

Figure 17 is the laser measuring device for measuring synoptic diagram, and laser ruler 900 is measured micropositioner 200 along the Y direction absolute position.

Two coarse motion platforms are survey sensor with the optical grating ruler measurement device, and whole locating device is moved to grating chi zero mark 305 places, and are shown in figure 18, with this moment micropositioner 200 barycenter be coordinate system and recording laser chi reading A.

Micropositioner 200 six-degree of freedom position calculate as follows:

The Y direction position: micropositioner 200 adopts laser ruler to measure along the Y shaft position, and shown in figure 19, when micropositioner moved to a certain position by initial point, the laser ruler reading was B, and then micropositioner 200 under global coordinate system along the Y direction position does

y=B-A

The X-direction position: micropositioner 200 is recorded by first current vortex sensor 401, second current vortex sensor 402 along the X-direction position, and first current vortex sensor, 401 signals are x ₄₀₁, second current vortex sensor, 402 signals are x ₄₀₂, micropositioner 200 along the X-direction position is:

X=(x ₄₀₁+x ₄₀₂)/2

The Z-direction position: micropositioner 200 is recorded by the 5th current vortex sensor 405, the 6th current vortex sensor 406 and the 7th current vortex sensor 407 along the Z-direction position, and the 5th current vortex sensor 405 signals are x ₄₀₅, the 6th current vortex sensor 406 signals are x ₄₀₆, the 7th current vortex sensor 407 signals are x ₄₀₇, promptly micropositioner 200 along the Z-direction position is:

Z=(x ₄₀₅+x ₄₀₆+x ₄₀₇)/3

Around the X Shaft angle: for just, micropositioner 200 is recorded by the 5th current vortex sensor 405, the 6th current vortex sensor 406 around the X Shaft angle, that is: with counterclockwise

θ _X=(x ₄₀₆-x ₄₀₅)/L ₂

Around the Y Shaft angle: for just, micropositioner 200 is recorded by the 5th current vortex sensor 405, the 7th current vortex sensor 407 around the Y Shaft angle, that is: with counterclockwise

θ _Y=(x ₄₀₇-x ₄₀₅)/L ₃

Around the Z Shaft angle: for just, micropositioner 200 is recorded by first current vortex sensor 401, second current vortex sensor 402 around the Z Shaft angle, that is: with counterclockwise

θ _Z=(x ₄₀₂-x ₄₀₁)/L ₁

Record by the 3rd current vortex sensor 403 along Y axle relative position between the first coarse motion platform 1001 and the micropositioner 200, that is:

x _{Phase 1}=x ₄₀₃

Record by the 4th current vortex sensor 404 along Y axle relative position between the second coarse motion platform 1002 and the micropositioner 200, that is:

x _{Phase 2}=x ₄₀₄

The control block diagram of each coarse motion platform and micropositioner 200 is as shown in the figure.The signal that measurement mechanism measures transforms through A/D digital quantity is input in the computing machine; Utilize the control method of design to handle these digital signals; And the digital quantity that calculates exported to the D/A card; Analog quantity through after the D/A conversion is input in the driver of each voice coil motor and linear electric motors; Driver is according to the coil input current of these analog values to each voice coil motor, and according to each voice coil motor of Lorentz force rule and linear motor driving micropositioner and each coarse motion platform motion, the position of micropositioner and each coarse motion platform is measured by measurement mechanism.

In the motion control of micropositioner and coarse motion platform, adopted a kind of motion control method, this control method comprises the steps:

1) begins at servo period, set the six-degree of freedom displacement amount of micropositioner, wherein x _dBe the displacement along the X axle, y _dBe the displacement along the Y axle, z _dBe the displacement along the Z axle, θ _XdBe the corner displacement amount around the X axle, θ _YdBe the corner displacement amount around the Y axle, θ _ZdBe corner displacement amount around the Z axle; The current vortex sensor signal that the laser ruler signal of then numbered card being gathered and A/D card are gathered is as the feedback signal of micropositioner control loop, with the current vortex sensor signal of the A/D card collection feedback signal as coarse motion platform control loop;

2) find the solution according to the micropositioner six-degree of freedom displacement amount of setting and feedback signal that each voice coil motor is corresponding exerts oneself; Wherein first voice coil motor, second voice coil motor, the 3rd voice coil motor and the 4th voice coil motor control micropositioner moves and around the degree of freedom of Z axle rotation along the Y direction; The degree of freedom that five notes of traditional Chinese music circle motor and the 6th voice coil motor control micropositioner move along directions X; Subtonic circle motor, octave circle motor, the 9th voice coil motor and the tenth voice coil motor control micropositioner along the Z direction move, around the rotation of X axle with around the degree of freedom of Y axle rotation, the motor power output is calculated by following formula:

${\mathrm{<figure-callout\; id="301"\; label="F"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{301}={\mathrm{<figure-callout\; id="302"\; label="F"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{302}=k_{p301}{e}_y+k_{d301}{\stackrel{\&CenterDot;}{e}}_y+{\mathrm{<figure-callout\; id="301"\; label="c"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">c</figure-callout>}}_{301}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_y+a_{301}{e}_y}{|{\stackrel{\&CenterDot;}{e}}_y+e_y|+{\mathrm{<figure-callout\; id="301"\; label="b"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">b</figure-callout>}}_{301}}+k_{301}{e}_{{\mathrm{\&theta;}}_z}+k_{301}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_z}$

${\mathrm{<figure-callout\; id="303"\; label="F"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{303}={\mathrm{<figure-callout\; id="304"\; label="F"\; filenames="HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{304}=k_{p303}{e}_y+k_{d303}{\stackrel{\&CenterDot;}{e}}_y+{\mathrm{<figure-callout\; id="303"\; label="c"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">c</figure-callout>}}_{303}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_y+a_{303}{e}_y}{|{\stackrel{\&CenterDot;}{e}}_y+e_y|+b_{303}}-k_{303}{e}_{{\mathrm{\&theta;}}_z}-k_{303}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_z}$

${\mathrm{<figure-callout\; id="305"\; label="F"\; filenames="HDA00001716162300091.png,HDA00001716162300092.png"\; state="\{\{state\}\}">F</figure-callout>}}_{305}=F_{306}=k_{p305}{e}_x+k_{d305}{\stackrel{\&CenterDot;}{e}}_x+{\mathrm{<figure-callout\; id="305"\; label="c"\; filenames="HDA00001716162300091.png,HDA00001716162300092.png"\; state="\{\{state\}\}">c</figure-callout>}}_{305}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_x+a_{305}{e}_x}{|{\stackrel{\&CenterDot;}{e}}_x+{a_{305}e}_x|+{\mathrm{<figure-callout\; id="305"\; label="b"\; filenames="HDA00001716162300091.png,HDA00001716162300092.png"\; state="\{\{state\}\}">b</figure-callout>}}_{305}}$

$F_{307}=k_{p307}{e}_z+k_{d307}{\stackrel{\&CenterDot;}{e}}_y+c_{307}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{307}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{307}{e}_y|+b_{307}}+k_{307}{e}_{{\mathrm{\&theta;}}_x}+k_{307}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_x}+k_{307}{e}_{{\mathrm{\&theta;}}_y}+k_{307}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_y}$

$F_{308}=k_{p308}{e}_z+k_{d308}{\stackrel{\&CenterDot;}{e}}_z+c_{308}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{308}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{308}{e}_z|+b_{308}}+k_{308}{e}_{{\mathrm{\&theta;}}_x}+k_{308}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_x}-k_{308}{e}_{{\mathrm{\&theta;}}_y}-k_{308}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_y}$

$F_{309}=k_{p309}{e}_z+k_{d309}{\stackrel{\&CenterDot;}{e}}_z+c_{309}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{309}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{309}{e}_z|+b_{309}}-k_{309}{e}_{{\mathrm{\&theta;}}_x}-k_{309}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_x}+k_{309}{e}_{{\mathrm{\&theta;}}_y}+k_{309}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_y}$

$F_{3010}=k_{p3010}{e}_z+k_{d3010}{\stackrel{\&CenterDot;}{e}}_z+c_{3010}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{3010}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{3010}{e}_z|+b_{3010}}-k_{3010}{e}_{{\mathrm{\&theta;}}_x}-k_{3010}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_x}-k_{3010}{e}_{{\mathrm{\&theta;}}_y}-k_{3010}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_y}$

Wherein: F ₃₀₁Be the first voice coil motor power output, F ₃₀₂Be the output of second voice coil motor, F ₃₀₃Be the 3rd voice coil motor power output, F ₃₀₄Be the 4th voice coil motor power output, F ₃₀₅Be five notes of traditional Chinese music circle motor power output, F ₃₀₆Be the output of the 6th voice coil motor, F ₃₀₇Be subtonic circle motor power output, F ₃₀₈Be octave circle motor power output, F ₃₀₉Be the 9th voice coil motor power output, F ₃₀₁₀It is the tenth voice coil motor power output;

k _P301, k _P303, k _P305, k _P307, k _P308, k _P309, k _P3010, k _D301, k _D303, k _D305, k _D307, k _D308, k _D309, k _D3010, c ₃₀₁, c ₃₀₃, c ₃₀₅, c ₃₀₇, c ₃₀₈, c ₃₀₉, c ₃₀₁₀, a ₃₀₁, a ₃₀₃, a ₃₀₅, a ₃₀₇, a ₃₀₈, a ₃₀₉, a ₃₀₁₀, b ₃₀₁, b ₃₀₃, b ₃₀₅, b ₃₀₇, b ₃₀₈, b ₃₀₉, b ₃₀₁₀, k ₃₀₁, k ₃₀₃, k ₃₀₅, k ₃₀₇, k ₃₀₈, k ₃₀₉, k ₃₀₁₀Be the controller scale-up factor;

e _y=y _d-y, y _dFor micropositioner along the Y direction target location, y is the laser ruler feedback signal, Be e _yFirst order derivative to the time; e _x=x _d-x, x _dBe the target location of micropositioner along the X axle, x is a feedback signal,

Be e _xSingle order to the time is reciprocal; e _z=z _d-z, z _dBe the target location of micropositioner along the Z axle, z is a feedback signal,

Be e _zSingle order to the time is reciprocal;

θ _XdBe the target location of micropositioner around the X axle, θ _xBe feedback signal,

For

Single order to the time is reciprocal;

θ _YdBe the target location of micropositioner around the Y axle, θ _yBe feedback signal,

For

Single order to the time is reciprocal;

θ _ZdBe the target rotation angle of micropositioner around the Z axle, θ _zBe feedback signal,

For

Single order to the time is reciprocal;

The coarse motion platform only has the degree of freedom of y direction, and its control system will keep coarse motion platform and micropositioner constant at the relative position of y direction, establishes the first coarse motion platform and micropositioner relative position and keeps y _Cd1Constant, the second coarse motion platform and micropositioner relative position keep y _Cd2Constant.In the motion control method of two coarse motion platforms; The first coarse motion platform with the power output of first voice coil motor and second voice coil motor as feedforward; The 3rd current vortex sensor signal is the position deviation between the micropositioner and the first coarse motion platform, serves as that feedback realizes the first coarse motion platform moving along the Y axle with this deviation; The second coarse motion platform with the power output of the 3rd voice coil motor and the 4th voice coil motor as feedforward; The 4th current vortex sensor signal is the position deviation between the micropositioner and the second coarse motion platform; With this deviation serves as that feedback realizes the second coarse motion platform along the moving of Y axle, and coarse motion platform linear electric motors power output is calculated according to following formula:

${\mathrm{<figure-callout\; id="1001"\; label="F"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">F</figure-callout>}}_{1001}={\mathrm{<figure-callout\; id="302"\; label="F"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{302}+{\mathrm{<figure-callout\; id="301"\; label="F"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{301}+k_{p1001}{e}_{y1001}+k_{d1001}{\stackrel{\&CenterDot;}{e}}_{\mathrm{<figure-callout\; id="1001"\; label="y"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">y</figure-callout>}1001}+{\mathrm{<figure-callout\; id="1001"\; label="c"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">c</figure-callout>}}_{1001}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_{\mathrm{<figure-callout\; id="1001"\; label="y"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">y</figure-callout>}1001}+a_{1001}{e}_{y1001}}{|{\stackrel{\&CenterDot;}{e}}_{\mathrm{<figure-callout\; id="1001"\; label="y"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">y</figure-callout>}1001}+a_{1001}{e}_{y1001}|+{\mathrm{<figure-callout\; id="1001"\; label="b"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">b</figure-callout>}}_{1001}}$

${\mathrm{<figure-callout\; id="1002"\; label="F"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">F</figure-callout>}}_{1002}={\mathrm{<figure-callout\; id="304"\; label="F"\; filenames="HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{304}+{\mathrm{<figure-callout\; id="303"\; label="F"\; filenames="HDA00001716162300062.png,HDA00001716162300071.png"\; state="\{\{state\}\}">F</figure-callout>}}_{303}+k_{p1002}{e}_{y1002}+k_{d1002}{\stackrel{\&CenterDot;}{e}}_{\mathrm{<figure-callout\; id="1002"\; label="y"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">y</figure-callout>}1002}+{\mathrm{<figure-callout\; id="1002"\; label="c"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">c</figure-callout>}}_{1002}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_{\mathrm{<figure-callout\; id="1002"\; label="y"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">y</figure-callout>}1002}+a_{1002}{e}_{y1002}}{|{\stackrel{\&CenterDot;}{e}}_{\mathrm{<figure-callout\; id="1002"\; label="y"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">y</figure-callout>}1002}+a_{1002}{e}_{y1002}|+{\mathrm{<figure-callout\; id="1002"\; label="b"\; filenames="HDA00001716162300011.png,HDA00001716162300061.png"\; state="\{\{state\}\}">b</figure-callout>}}_{1002}}$

Wherein: F ₁₀₀₁Be the first coarse motion platform linear electric motors power output, F ₁₀₀₂It is the second coarse motion platform linear electric motors power output;

k _P1001, k _P1002, k _D1001, k _D1002, c ₁₀₀₁, c ₁₀₀₂, a ₁₀₀₁, a ₁₀₀₂, b ₁₀₀₁, b ₁₀₀₂Be the controller scale-up factor;

e _Y1001=y _Cd1-y _C1, y _Cd1Be the first coarse motion platform and micropositioner target relative position, y _C1The 3rd current vortex sensor feedback signal; Be e _Y1001The 3rd current vortex sensor signal is to the derivative of time;

e _Y1002=y _Cd2-y _C2, y _Cd2Be the second coarse motion platform and micropositioner target relative position, y _C2The 4th current vortex sensor feedback signal;

Be e _Y1002Derivative to the time;

3) obtain the steering order of each motor according to the power output of each drive motor of finding the solution; This steering order inputs to driver after sticking into the conversion of line number mould by D/A; Driver output current pro rata drives corresponding motor, and then realizes the motion of micropositioner and coarse motion platform.

Claims (2)

1. thick smart fold layer positioning system of non-contact type, it is characterized in that: this control system comprises locating device, position-measurement device, drive unit and control module;

Described locating device comprises pedestal, a micropositioner and two coarse motion platforms that are arranged symmetrically in the micropositioner both sides, does not have machinery between two coarse motion platforms, between coarse motion platform and the micropositioner and is connected;

Described position-measurement device comprises:

1) laser ruler is used to measure the absolute position of micropositioner barycenter along the Y axle;

2) two grating measuring devices, each grating measuring device comprise a grating chi and a read head, are used to measure the displacement of coarse motion platform along Y direction;

3) seven current vortex sensors, wherein:

First current vortex sensor and second current vortex sensor are installed on the first coarse motion platform; Be arranged in one along on the straight line of Y axle; Be used to measure the relative position of micropositioner, the first and second electric vortex sensor measuring values differential as the corner of micropositioner around the Z axle along X axle and coarse motion platform;

The 3rd current vortex sensor is installed on the first coarse motion platform, measures between the first coarse motion platform and the micropositioner relative position along Y direction; The 4th current vortex sensor is installed on the second coarse motion platform, measures between the second coarse motion platform and the micropositioner relative position along Y direction;

The 5th current vortex sensor and the 6th current vortex sensor are installed on the first coarse motion platform, and are positioned at one along on the straight line of Y axle, and the 7th current vortex sensor is installed on the second coarse motion platform, and are positioned at one along on the straight line of X axle with the 5th current vortex sensor; These three current vortex sensors are used to measure the absolute position of micropositioner along the Z axle; The 5th current vortex sensor and the 6th electric vortex sensor measuring value differential as the corner of micropositioner around the X axle, the 5th current vortex sensor and the 7th electric vortex sensor measuring value differential as the corner of micropositioner around the Y axle;

Said drive unit comprises:

1) ten voice coil motors

Micropositioner comprises four voice coil motor, two voice coil motor and four voice coil motors that drive along Z-direction that drive along X-direction of driving along Y direction; The coil block of first voice coil motor, second voice coil motor, five notes of traditional Chinese music circle motor is fixed on the first coarse motion platform; Permanent magnet assembly is fixed on the micropositioner; The coil block of the 3rd voice coil motor, the 4th voice coil motor, the 6th voice coil motor is fixed on the second coarse motion platform, and permanent magnet assembly is fixed on the micropositioner;

Subtonic circle motor, octave circle motor, the 9th voice coil motor, the tenth voice coil motor structure are identical, comprise outer magnetic ring, internal magnetic ring, cylindrical coil assembly, gravitational equilibrium magnetic post; The axis of outer magnetic ring and internal magnetic ring is along Z-direction, and outer magnetic ring is identical with the internal magnetic ring magnetizing direction, radially and by the annulus outside surface points to the center of circle; Cylindrical coil is between internal magnetic ring and outer magnetic ring, and the coiling axis is along Z-direction; The axis of magnetic post is along Z-direction, and magnetizing direction is along Z axle positive dirction; The cylindrical coil assembly of subtonic circle motor, octave circle motor is fixed on the first coarse motion platform, and the cylindrical coil assembly of the 9th voice coil motor, the tenth voice coil motor is fixed on the second coarse motion platform;

2) two linear electric motors

Two linear electric motors are used to drive the first coarse motion platform and the second coarse motion platform respectively;

Said control module comprises industrial computer, numbered card, A/D card, D/A card and the driver that contains control program; Numbered card is gathered the increment signal of grating chi and laser ruler; The A/D card is gathered the signal of current vortex sensor; Numbered card and A/D card input to industrial computer with the signal that collects, and industrial computer is controlled micropositioner and coarse motion platform as position feed back signal with said signal, and steering order exports driver to through the D/A card; The driving force output current is given motor, realizes the motion of micropositioner and coarse motion platform.

2. the motion control method of the thick smart fold layer positioning system of non-contact type as claimed in claim 1 is characterized in that said control method comprises the steps:

1) begins at servo period, set the six-degree of freedom displacement amount of micropositioner, wherein x _dBe the displacement along the X axle, y _dBe the displacement along the Y axle, z _dBe the displacement along the Z axle, θ _XdBe the corner displacement amount around the X axle, θ _YdBe the corner displacement amount around the Y axle, θ _ZdBe corner displacement amount around the Z axle; The current vortex sensor signal that the laser ruler signal of then numbered card being gathered and A/D card are gathered is as the feedback signal of micropositioner control loop, with the current vortex sensor signal of the A/D card collection feedback signal as coarse motion platform control loop;

2) find the solution according to the micropositioner six-degree of freedom displacement amount of setting and feedback signal that each voice coil motor is corresponding exerts oneself; Wherein first voice coil motor, second voice coil motor, the 3rd voice coil motor and the 4th voice coil motor control micropositioner moves and around the degree of freedom of Z axle rotation along the Y direction; The degree of freedom that five notes of traditional Chinese music circle motor and the 6th voice coil motor control micropositioner move along directions X; Subtonic circle motor, octave circle motor, the 9th voice coil motor and the tenth voice coil motor control micropositioner along the Z direction move, around the rotation of X axle with around the degree of freedom of Y axle rotation, the motor power output is calculated by following formula:

$F_{301}=F_{302}=k_{p301}{e}_y+k_{d301}{\stackrel{\&CenterDot;}{e}}_y+c_{301}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_y+a_{301}{e}_y}{|{\stackrel{\&CenterDot;}{e}}_y+e_y|+b_{301}}+k_{301}{e}_{{\mathrm{\&theta;}}_z}+k_{301}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_z}$

$F_{303}=F_{304}=k_{p303}{e}_y+k_{d303}{\stackrel{\&CenterDot;}{e}}_y+c_{303}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_y+a_{303}{e}_y}{|{\stackrel{\&CenterDot;}{e}}_y+e_y|+b_{303}}-k_{303}{e}_{{\mathrm{\&theta;}}_z}-k_{303}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_z}$

$F_{305}=F_{306}=k_{p305}{e}_x+k_{d305}{\stackrel{\&CenterDot;}{e}}_x+c_{305}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_x+a_{305}{e}_x}{|{\stackrel{\&CenterDot;}{e}}_x+{a_{305}e}_x|+b_{305}}$

$F_{307}=k_{p307}{e}_z+k_{d307}{\stackrel{\&CenterDot;}{e}}_y+c_{307}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{307}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{307}{e}_y|+b_{307}}+k_{307}{e}_{{\mathrm{\&theta;}}_x}+k_{307}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_x}+k_{307}{e}_{{\mathrm{\&theta;}}_y}+k_{307}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_y}$

$F_{308}=k_{p308}{e}_z+k_{d308}{\stackrel{\&CenterDot;}{e}}_z+c_{308}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{308}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{308}{e}_z|+b_{308}}+k_{308}{e}_{{\mathrm{\&theta;}}_x}+k_{308}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_x}-k_{308}{e}_{{\mathrm{\&theta;}}_y}-k_{308}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_y}$

$F_{309}=k_{p309}{e}_z+k_{d309}{\stackrel{\&CenterDot;}{e}}_z+c_{309}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{309}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{309}{e}_z|+b_{309}}-k_{309}{e}_{{\mathrm{\&theta;}}_x}-k_{309}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_x}+k_{309}{e}_{{\mathrm{\&theta;}}_y}+k_{309}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_y}$

$F_{3010}=k_{p3010}{e}_z+k_{d3010}{\stackrel{\&CenterDot;}{e}}_z+c_{3010}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_z+a_{3010}{e}_z}{|{\stackrel{\&CenterDot;}{e}}_z+a_{3010}{e}_z|+b_{3010}}-k_{3010}{e}_{{\mathrm{\&theta;}}_x}-k_{3010}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_x}-k_{3010}{e}_{{\mathrm{\&theta;}}_y}-k_{3010}{\stackrel{\&CenterDot;}{e}}_{{\mathrm{\&theta;}}_y}$

Wherein: F ₃₀₁Be the first voice coil motor power output, F ₃₀₂Be the output of second voice coil motor, F ₃₀₃Be the 3rd voice coil motor power output, F ₃₀₄Be the 4th voice coil motor power output, F ₃₀₅Be five notes of traditional Chinese music circle motor power output, F ₃₀₆Be the output of the 6th voice coil motor, F ₃₀₇Be subtonic circle motor power output, F ₃₀₈Be octave circle motor power output, F ₃₀₉Be the 9th voice coil motor power output, F ₃₀₁₀It is the tenth voice coil motor power output;

k _P301, k _P303, k _P305, k _P307, k _P308, k _P309, k _P3010, k _D301, k _D303, k _D305, k _D307, k _D308, k _D309, k _D3010, c ₃₀₁, c ₃₀₃, c ₃₀₅, c ₃₀₇, c ₃₀₈, c ₃₀₉, c ₃₀₁₀, a ₃₀₁, a ₃₀₃, a ₃₀₅, a ₃₀₇, a ₃₀₈, a ₃₀₉, a ₃₀₁₀, b ₃₀₁, b ₃₀₃, b ₃₀₅, b ₃₀₇, b ₃₀₈, b ₃₀₉, b ₃₀₁₀, k ₃₀₁, k ₃₀₃, k ₃₀₅, k ₃₀₇, k ₃₀₈, k ₃₀₉, k ₃₀₁₀Be the controller scale-up factor;

e _y=y _d-y, y _dFor micropositioner along the Y direction target location, y is the laser ruler feedback signal,

Be e _yFirst order derivative to the time; e _x=x _d-x, x _dBe the target location of micropositioner along the X axle, x is a feedback signal,

Be e _xSingle order to the time is reciprocal; e _z=z _d-z, z _dBe the target location of micropositioner along the Z axle, z is a feedback signal, Be e _zSingle order to the time is reciprocal; θ _XdBe the target location of micropositioner around the X axle, θ _xBe feedback signal,

For

Single order to the time is reciprocal;

θ _YdBe the target location of micropositioner around the Y axle, θ _yBe feedback signal,

For

Single order to the time is reciprocal;

θ _ZdBe the target rotation angle of micropositioner around the Z axle, θ _zBe feedback signal,

For

Single order to the time is reciprocal;

The coarse motion platform only has the degree of freedom of y direction, and its control system will keep coarse motion platform and micropositioner constant at the relative position of y direction, establishes the first coarse motion platform and micropositioner relative position and keeps y _Cd1Constant, the second coarse motion platform and micropositioner relative position keep y _Cd2Constant.In the motion control method of two coarse motion platforms; The first coarse motion platform with the power output of first voice coil motor and second voice coil motor as feedforward; The 3rd current vortex sensor signal is the position deviation between the micropositioner and the first coarse motion platform, serves as that feedback realizes the first coarse motion platform moving along the Y axle with this deviation; The second coarse motion platform with the power output of the 3rd voice coil motor and the 4th voice coil motor as feedforward; The 4th current vortex sensor signal is the position deviation between the micropositioner and the second coarse motion platform; With this deviation serves as that feedback realizes the second coarse motion platform along the moving of Y axle, and coarse motion platform linear electric motors power output is calculated according to following formula:

$F_{1001}=F_{302}+F_{301}+k_{p1001}{e}_{y1001}+k_{d1001}{\stackrel{\&CenterDot;}{e}}_{y1001}+c_{1001}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_{y1001}+a_{1001}{e}_{y1001}}{|{\stackrel{\&CenterDot;}{e}}_{y1001}+a_{1001}{e}_{y1001}|+b_{1001}}$

$F_{1002}=F_{304}+F_{303}+k_{p1002}{e}_{y1002}+k_{d1002}{\stackrel{\&CenterDot;}{e}}_{y1002}+c_{1002}\&CenterDot;\frac{{\stackrel{\&CenterDot;}{e}}_{y1002}+a_{1002}{e}_{y1002}}{|{\stackrel{\&CenterDot;}{e}}_{y1002}+a_{1002}{e}_{y1002}|+b_{1002}}$

Wherein: F ₁₀₀₁Be the first coarse motion platform linear electric motors power output, F ₁₀₀₂It is the second coarse motion platform linear electric motors power output; k _P1001, k _P1002, k _D1001, k _D1002, c ₁₀₀₁, c ₁₀₀₂, a ₁₀₀₁, a ₁₀₀₂, b ₁₀₀₁, b ₁₀₀₂Be the controller scale-up factor; e _Y1001=y _Cd1-y _C1, y _Cd1Be the first coarse motion platform and micropositioner target relative position, y _C1The 3rd current vortex sensor feedback signal;

Be e _Y1001The 3rd current vortex sensor signal is to the derivative of time;

e _Y1002=y _Cd2-y _C2, y _Cd2Be the second coarse motion platform and micropositioner target relative position, y _C2The 4th current vortex sensor feedback signal;

Be e _Y1002Derivative to the time;

3) obtain the steering order of each motor according to the power output of each drive motor of finding the solution; This steering order inputs to driver after sticking into the conversion of line number mould by D/A; Driver output current pro rata drives corresponding motor, and then realizes the motion of micropositioner and coarse motion platform.

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