CN105171537B - It can inhibit the ultrasonic vibration polishing grinding head apparatus of optical element intermediate frequency error - Google Patents
It can inhibit the ultrasonic vibration polishing grinding head apparatus of optical element intermediate frequency error Download PDFInfo
- Publication number
- CN105171537B CN105171537B CN201510636296.0A CN201510636296A CN105171537B CN 105171537 B CN105171537 B CN 105171537B CN 201510636296 A CN201510636296 A CN 201510636296A CN 105171537 B CN105171537 B CN 105171537B
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- China
- Prior art keywords
- mill
- ultrasonic vibration
- intermediate frequency
- flexible hinge
- frequency error
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/002—Grinding heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a kind of ultrasonic vibration polishing grinding head apparatus that can inhibit optical element intermediate frequency error, specific, mill, flexible hinge bistrique and buffer can be driven specifically to carry out the ultrasonic vibration apparatus of ultrasonic vibration including buffer；The mill is rotatably installed in the buffer particularly, which is provided with several holes, and the flexible hinge bistrique is mounted within the bore by flexible hinge.Compared with traditional small abrasive nose polishing is readily incorporated undulatory striped and generates intermediate frequency error, ultrasonic vibration bistrique of the invention passes through cooperation ultrasonic vibration and the movement of flexible hinge bistrique, so that whole mill movement is miscellaneous wrong without chapter, so as to effectively remove intermediate frequency error.
Description
Technical field
The present invention relates to a kind of ultrasonic vibrations to polish small abrasive nose, can inhibit optical element intermediate frequency error more particularly, to one kind
Ultrasonic vibration polishing grinding head apparatus.
Background technique
With the development of science and technology with the raising of manufacture level, and in national significant optical engineering duty and O-E Products
Under the traction of demand growth, high-precision optical element is applied to every field more and more widely.Especially in large-scale optics
A large amount of high-precision optical element is applied in engineering, such as: space flight and aviation, strong laser device, these are to optical element
More stringent requirements are proposed for precision.
Previous optical element surface quality is primarily upon low frequency face shape error and Frequency Surface roughness, to intermediate frequency error
It pays close attention to and few.However, with optical element application diversification and the raising of required precision, people gradually recognize that intermediate frequency misses
The harm of difference.The light beam high frequency modulated and non-linear gain that the intermediate frequency error of optical element will lead to, will cause optical element
Filiform destroy and reduce light beam can focus power, for emerging X-ray optics, intermediate frequency error generate small angle scattering
The resolution ratio of optical system can be greatly reduced.Therefore light laser optical system needs to control the intermediate frequency error of optical element
System.
Polishing is last procedure in optical element Precision Machining, therefore the precision polished is to the final of optical element
Precision influence it is huge, become the emphasis of research.In numerous polishing methods, the small abrasive nose polishing of computer control is application
Most technologies.Traditional small abrasive nose polishing can both correct part intermediate frequency error or correct low frequency aberration, but also could
Undulatory residual is left in polished surface and forms intermediate frequency error.Ultrasonic vibrating machining can be effectively improved surface quality, drop
Low cutting force is especially suitable for the processing of the difficult-to-machine materials such as hard brittleness.
Chinese patent application CN1373698A discloses a kind of micro burnishing apparatus using ultrasonic vibration, is existed by polishing bulb
Workpiece surface is polished under ultrasonic vibration and increases surface hardness.But the device is only used for improving product surface roughness.
Chinese patent application CN103817563A disclose a kind of superhard material micro-structure surface ultrasonic vibration auxiliary polishing device and its
Application method.It is low that it mainly solves mechanical polishing efficiency, and machined surface quality is uneven and micro-structure sharply locates asking for destructible
Topic.But it is only applicable to micro-structure, is not to be suitable for optical element to process.Chinese patent application CN103551927A is disclosed
A kind of device and processing method of electrophoresis assisting ultrasonic vibratory drive grain motion polishing micropore.Although the preceding case also belongs to ultrasound
Vibropolish, but electrophoresis is needed to assist, mechanism is different.
Chinese patent CN102873628A discloses a kind of helix machining path for the polishing of numerical control small tool, this is specially
Benefit reduces intermediate frequency error by changing machining path.CN103317424A discloses a kind of flexible polishing head, which passes through
Change the structure of rubbing head to remove intermediate frequency error.CN104175192A discloses a kind of adaptive grinding head for polishing of polycyclic shape, should
Preceding case matches bistrique surface more with workpiece surface, reduces intermediate frequency error with this by the structure of change rubbing head.
To sum up, it yet there are no the device and method that control optical element intermediate frequency error is polished using ultrasonic vibration.
Summary of the invention
Technical problem to be solved by the present invention lies in provide a kind of ultrasound that optical element intermediate frequency error can be effectively suppressed
Vibratory polishing grinding head device.
In order to solve the above technical problems, the technical solution of the invention is as follows:
A kind of ultrasonic vibration polishing grinding head apparatus can inhibit optical element intermediate frequency error, including buffer is specific, mill,
Flexible hinge bistrique and buffer can be driven specifically to carry out the ultrasonic vibration apparatus of ultrasonic vibration；The mill is rotatably pacified
Particularly mounted in the buffer, several holes be which is provided with, the flexible hinge bistrique is mounted within the bore by flexible hinge.
Preferably, the mill is mounted in the specific bearing hole of the buffer by bearing, and by being fixed on
The bearing (ball) cover of the buffer particularly positions the bearing.
Preferably, the mill drives rotation by a motor.
Preferably, the mill is equipped with mill spindle, the axis of the motor and the mill axis connection.
Preferably, the motor is fixed in a support plate, which then specifically connect with the buffer.
Preferably, the grinding surface of the mill and flexible hinge bistrique is provided with polishing pad.
Preferably, the polishing pad is pasted on the mill and flexible hinge bistrique respectively by hot melt adhesive.
Preferably, the ultrasonic vibration apparatus includes piezoelectric ceramics, supersonic generator, energy converter and luffing
Bar；The piezoelectric ceramics is installed on the specific side side plate of buffer, with buffer specifically closely close to；The supersonic generator
It is connected on energy converter by signal wire, energy converter is connect with amplitude transformer again, and last amplitude transformer is connected to piezoelectricity by signal wire
On ceramics.
Preferably, it is further provided with coolant pipe, the nozzle of the coolant pipe is towards mill；Setting above the mill
There is cricoid mill cover board, the mill cover board and mill are fitted close.
Preferably, it is further provided with connection structure, which is to be fixed on the specific side side plate of the buffer
Connecting plate, be provided with buffer substrate tablet between the side plate and connecting plate.
Preferably, the flexible hinge bistrique is provided with different quantity, arrangement mode or bullet according to the actual situation
Property modulus.
Preferably, equipped with flexible hinge bistrique described in one among the mill, outside intermediate flexible hinge bistrique
All radioactivity are equipped with multiple flexible hinge bistriques, and are located among mill from the flexible hinge bistrique on periphery with different
Elasticity modulus.
After adopting the above scheme, compared with the prior art, the present invention has following outstanding advantages:
1) it can inhibit intermediate frequency error.Traditional small abrasive nose polishing is readily incorporated undulatory striped, and generates intermediate frequency error,
Flexible hinge bistrique of the invention makees random movement under ultrasonic vibration effect, therefore passes through cooperation ultrasonic vibration and flexibility
The movement of hinge bistrique is so that whole mill movement is miscellaneous wrong without chapter, so as to effectively remove intermediate frequency error.
2) polished surface mass effect is good.Only simple rotated by motor drives polishing pad to go for traditional small abrasive nose polishing
Except material, and the present invention introduces ultrasonic vibration wherein, obtains better surface quality using the advantages of ultrasonic vibration.
3) versatility is good.The grinding head device need to only change the structure of connecting plate, can with include robot, manipulator and
Numerically-controlled machine tool is used cooperatively.
4) good cooling results.The present invention using coolant liquid it is built-in, which allow coolant liquid more efficiently into
Enter in polishing area, reaches better polishing effect.
It, can be in short, the present invention changes motion principle by the joint setting of ultrasonic vibration and flexible, hinged bistrique
The corrugated striped that traditional small abrasive nose leaves is effectively eliminated, the intermediate frequency error of optical element polishing is effectively reduced.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the embodiment of the present invention；
Fig. 2 is the grinding head for polishing structural schematic diagram of the embodiment of the present invention.
Specific embodiment
The invention will be further described in the following with reference to the drawings and specific embodiments.
Disclosed is a kind of ultrasonic vibration polishing grinding head apparatus that can inhibit optical element intermediate frequency error, such as scheme
It is presently preferred embodiments of the present invention shown in 1 and Fig. 2.The ultrasonic vibration polishing grinding head apparatus includes that buffer is specific 1, mill
Disk 4, flexible hinge bistrique 5 and the ultrasonic vibration apparatus that the specific 1 progress ultrasonic vibration of buffer can be driven.Wherein:
The mill 4 is rotatably installed on the buffer specific 1, which is equipped with several holes 41, described
Flexible hinge bistrique 5 be mounted in the hole 41 by flexible hinge.Preferably, which can be mounted on throwing by bearing 2
In the bearing hole of optical tool body 1, and the bearing 2 can be positioned by the bearing (ball) cover 9 being fixed on buffer specific 1, and the axis
Socket end lid 9 can be fixed on buffer specific 1 by head bolts 8.
The rotation of the mill 4 can be driven by a motor 13.Specifically, which is equipped with mill spindle 6, the mill
Axis 6 can be connected to 4 middle position of mill by mill screw 7, and the axis and mill spindle 6 of the motor 13 can be connected using key
It connects, to be rotated with movable grinding disc 4.The motor 13 can use motor screw 12 and be fixed in a support plate 10, the support plate
10 are reliably connected with buffer specific 1 with supporting screw 11.
Further, the grinding surface of the mill 4 and flexible hinge bistrique 5 is provided with polishing pad 22, which can
Be pasted on mill 4 and flexible hinge bistrique 5 respectively by hot melt adhesive.
The ultrasonic vibration apparatus is to drive buffer specific 1 to carry out ultrasonic vibration, and then with movable grinding disc 4 and soft
Property hinge bistrique 5 vibrate.Specifically, which includes piezoelectric ceramics 14, supersonic generator 15, energy converter 16
And amplitude transformer 17；The piezoelectric ceramics 14 is installed on the side side plate of buffer specific 1, with buffer specific 1 closely close to；
The supersonic generator 15 is connected on energy converter 16 by signal wire, and energy converter 16 is connect with amplitude transformer 17 again, last luffing
Bar 17 is connected on piezoelectric ceramics 14 by signal wire.
In use, the end that polishing grinding head apparatus of the present invention is mounted on robot can be held by connection structure
On row device, manipulator or numerically-controlled machine tool.Specifically, which can be to be fixed on the specific 1 side side plate of buffer
Connecting plate 19.It, can be in polishing tool to minimize influence of the ultrasonic vibration to robot or Position Accuracy for NC Machines
Buffer substrate tablet 18 is set between the side plate and connecting plate 19 of body 1, and by attachment screw 20 by buffer specific 1,18 and of buffer substrate tablet
Connecting plate 19 is connected.
It is further provided with coolant pipe 21, the nozzle of the coolant pipe 21 is towards mill 4, and the coolant pipe 21 can be with
It is mounted in the support plate 10.Coolant liquid, which is overflowed, in order to prevent reduces cooling effect, can be provided with above the mill 4
Cricoid mill cover board 3, the mill cover board 3 and mill 4 are fitted close.
When work, connecting plate 19 is fixed on the ring flange of end effector of robot, robot is moved to throwing
Optical position.Motor 13 is opened band movable grinding disc 4 and is rotated, and coolant liquid is opened, and coolant liquid is transported in mill 4 by coolant pipe 21
Portion guarantees its cooling effect.The ultrasonic signal that supersonic generator 15 generates is passed by signal wire, energy converter 16 and amplitude transformer 17
To piezoelectric ceramics 14, piezoelectric ceramics 14 generates ultrasonic vibration, and then buffer specific 1 is driven to carry out ultrasonic vibration.It is pasted onto
There are also ultrasonic vibrations while being rotated for polishing pad 22 on mill 4 and flexible hinge bistrique 5, so to optical element into
Row polishing.Simultaneously as the elastic reaction of flexible hinge surpasses flexible hinge bistrique 5 not only in each hole of mill 4
Acoustic vibration, and have certain random file.Therefore, the running track of these flexible hinge bistriques 5 will make during the polishing process
It obtains whole mill 4 and moves miscellaneous mistake without chapter, grind away the corrugated striped initially generated, the final intermediate frequency error for reducing small abrasive nose.
The present invention can replace different polishing pad 22 and flexibility according to actual optical components manufacturing procedure and required precision
Hinge bistrique 5.And quantity, arrangement mode or the elasticity modulus that can change flexible hinge bistrique 5 according to the actual situation, can also
Change the physical property of its flexible hinge, to change its kinetic characteristic.Cooperate the signal frequency for changing supersonic generator 15 simultaneously
The motion profile of rate and buffer specific 1 can more reasonably reduce the intermediate frequency error of optical element.It is further preferable that institute
Flexible hinge bistrique 5 described in being equipped with one among mill 4 is stated, is equipped in intermediate 5 periphery radioactivity of flexible hinge bistrique more
A flexible hinge bistrique 5, and be located among mill 4 from the flexible hinge bistrique 5 on periphery with different elasticity modulus.
The connection structures such as the connecting plate 19 can be according to its fit form of the type change of connection machine, can be with industrial machine
The equipment such as people or numerically-controlled machine tool jointly control the motion profile of ultrasonic vibration small abrasive nose.
The supersonic generator 15 can require to generate the ultrasonic signal of different frequencies according to actual technique, pass through
Energy converter 16 and amplitude transformer 17 make the ultrasonic vibration of the generation different frequency of piezoelectric ceramics 14.And it can change according to the technological requirements
Position of the piezoelectric ceramics 14 on buffer specific 1, can produce the ultrasonic vibration of different directions.
The above described is only a preferred embodiment of the present invention, be not intended to limit the scope of the present invention,
Therefore the changes or modifications that claim under this invention and specification are done in every case, it all should belong to the range that the invention patent covers
Within.
Claims (9)
1. a kind of ultrasonic vibration polishing grinding head apparatus that can inhibit optical element intermediate frequency error, it is characterised in that: including buffer
Specifically (1), the mill (4) for grinding, flexible hinge bistrique (5) and buffer can be driven specifically to carry out the super of ultrasonic vibration
Acoustic vibration device；The mill (4) is rotatably installed on the buffer specific (1), which is provided with several holes (41), described
Flexible hinge bistrique (5) be mounted within the bore by flexible hinge；Flexible hinge described in being equipped with one among the mill (4)
Chain bistrique (5) is equipped with multiple flexible hinge bistriques (5), and position in intermediate flexible hinge bistrique (5) periphery radioactivity
There is different elasticity modulus from the flexible hinge bistrique on periphery among mill (4).
2. the ultrasonic vibration polishing grinding head apparatus according to claim 1 that can inhibit optical element intermediate frequency error, feature
Be: the mill (4) is mounted in the bearing hole of the buffer specific (1) by bearing (2), and by being fixed on this
The bearing (ball) cover (9) of buffer particularly positions the bearing (2).
3. the ultrasonic vibration polishing grinding head apparatus according to claim 1 that can inhibit optical element intermediate frequency error, feature
Be: the mill (4) drives rotation by a motor (13)；The mill (4) is equipped with mill spindle (6), the electricity
The axis of machine (13) and the mill axis connection；The motor (13) is fixed on a support plate (10), the support plate then with it is described
Buffer specific (1) connection.
4. the ultrasonic vibration polishing grinding head apparatus according to claim 1 that can inhibit optical element intermediate frequency error, feature
Be: the grinding surface of the mill (4) and flexible hinge bistrique (5) is provided with polishing pad (22).
5. the ultrasonic vibration polishing grinding head apparatus according to claim 4 that can inhibit optical element intermediate frequency error, feature
Be: the polishing pad (22) is pasted on the mill (4) and flexible hinge bistrique (5) respectively by hot melt adhesive.
6. the ultrasonic vibration polishing grinding head apparatus according to claim 1 that can inhibit optical element intermediate frequency error, feature
Be: the ultrasonic vibration apparatus includes piezoelectric ceramics (14), supersonic generator (15), energy converter (16) and luffing
Bar (17)；The piezoelectric ceramics (14) is installed on the side side plate of buffer specific (1), with buffer specifically closely close to；It should
Supersonic generator (15) is connected on energy converter (16) by signal wire, and energy converter is connect with amplitude transformer (17) again, is finally become
Width bar (17) is connected on piezoelectric ceramics (14) by signal wire.
7. the ultrasonic vibration polishing grinding head apparatus according to claim 1 that can inhibit optical element intermediate frequency error, feature
It is: is further provided with coolant pipe (21), the nozzle of the coolant pipe is towards mill (4)；Setting above the mill (4)
There is cricoid mill cover board (3), the mill cover board and mill are fitted close.
8. the ultrasonic vibration polishing grinding head apparatus according to claim 1 that can inhibit optical element intermediate frequency error, feature
It is: is further provided with connection structure, which is the connecting plate for being fixed on specific (1) side side plate of the buffer
(19), buffer substrate tablet (18) are provided between the side plate and connecting plate.
9. the ultrasonic vibration polishing grinding head apparatus according to claim 1 that can inhibit optical element intermediate frequency error, feature
Be: the flexible hinge bistrique (5) is provided with different quantity, arrangement mode or elasticity modulus according to the actual situation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510636296.0A CN105171537B (en) | 2015-09-30 | 2015-09-30 | It can inhibit the ultrasonic vibration polishing grinding head apparatus of optical element intermediate frequency error |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510636296.0A CN105171537B (en) | 2015-09-30 | 2015-09-30 | It can inhibit the ultrasonic vibration polishing grinding head apparatus of optical element intermediate frequency error |
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| Publication Number | Publication Date |
|---|---|
| CN105171537A CN105171537A (en) | 2015-12-23 |
| CN105171537B true CN105171537B (en) | 2019-03-01 |
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| CN201510636296.0A Expired - Fee Related CN105171537B (en) | 2015-09-30 | 2015-09-30 | It can inhibit the ultrasonic vibration polishing grinding head apparatus of optical element intermediate frequency error |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110842660A (en) * | 2019-11-26 | 2020-02-28 | 东台施迈尔新材料科技有限公司 | Ceramic part surface vibration polishing device |
| CN111185816B (en) * | 2020-01-10 | 2021-09-07 | 中国工程物理研究院激光聚变研究中心 | Two-dimensional random vibration polishing machine tool and polishing method thereof |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB491610A (en) * | 1936-04-10 | 1938-09-06 | Georges Fernand Brendel | Improvements in or relating to grinding and polishing machines for hard materials |
| CN1077406A (en) * | 1992-04-02 | 1993-10-20 | 株式会社关西工厂工业 | The method and apparatus of polished board |
| US5993300A (en) * | 1997-08-18 | 1999-11-30 | Hashimoto; Hiroshi | Ultrasonic vibration composite processing tool |
| DE4447162B4 (en) * | 1994-12-29 | 2004-07-08 | Günther Böhler GmbH | Device for processing surfaces |
| CN1517178A (en) * | 2003-01-27 | 2004-08-04 | 京特・伯勒尔有限公司 | Surface treatment device |
| CN2912913Y (en) * | 2006-06-06 | 2007-06-20 | 广东科达机电股份有限公司 | Major diameter grinding head for polishing |
| CN2920537Y (en) * | 2006-07-03 | 2007-07-11 | 陆永添 | Polishing grinding wheel head capable of automatic fitting processed object surface |
| CN204954499U (en) * | 2015-09-30 | 2016-01-13 | 厦门理工学院 | Ultrasonic vibration polish grinding head device that can restrain optical element intermediate frequency error |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4702765B2 (en) * | 2003-09-24 | 2011-06-15 | 独立行政法人科学技術振興機構 | Vibration polishing method and apparatus |
-
2015
- 2015-09-30 CN CN201510636296.0A patent/CN105171537B/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB491610A (en) * | 1936-04-10 | 1938-09-06 | Georges Fernand Brendel | Improvements in or relating to grinding and polishing machines for hard materials |
| CN1077406A (en) * | 1992-04-02 | 1993-10-20 | 株式会社关西工厂工业 | The method and apparatus of polished board |
| DE4447162B4 (en) * | 1994-12-29 | 2004-07-08 | Günther Böhler GmbH | Device for processing surfaces |
| US5993300A (en) * | 1997-08-18 | 1999-11-30 | Hashimoto; Hiroshi | Ultrasonic vibration composite processing tool |
| CN1517178A (en) * | 2003-01-27 | 2004-08-04 | 京特・伯勒尔有限公司 | Surface treatment device |
| CN2912913Y (en) * | 2006-06-06 | 2007-06-20 | 广东科达机电股份有限公司 | Major diameter grinding head for polishing |
| CN2920537Y (en) * | 2006-07-03 | 2007-07-11 | 陆永添 | Polishing grinding wheel head capable of automatic fitting processed object surface |
| CN204954499U (en) * | 2015-09-30 | 2016-01-13 | 厦门理工学院 | Ultrasonic vibration polish grinding head device that can restrain optical element intermediate frequency error |
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| CN105171537A (en) | 2015-12-23 |
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