CN105090683A - Framework for semiconductor manufacturing equipment - Google Patents
Framework for semiconductor manufacturing equipment Download PDFInfo
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- CN105090683A CN105090683A CN201510524278.3A CN201510524278A CN105090683A CN 105090683 A CN105090683 A CN 105090683A CN 201510524278 A CN201510524278 A CN 201510524278A CN 105090683 A CN105090683 A CN 105090683A
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- crossbeam
- horizontal beam
- framework
- semiconductor manufacturing
- column
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Abstract
The invention belongs to the technical field of semiconductor equipment and in particular relates to a framework for semiconductor manufacturing equipment. The framework comprises a horizontal beam and a column connected with the horizontal beam; the horizontal beam is divided into a first horizontal beam body and a second horizontal beam body; a groove is formed in the section surface of the first horizontal beam body, and a convex block matched with the groove is arranged on the section surface of the second horizontal beam body; a protecting piece extending outwards is arranged on the section surface of the second horizontal beam body; the horizontal beam is connected with the column through a supporting rod which is obliquely arranged; and the horizontal beam, the column and the supporting rod form a triangular stable structure. By means of the structural design, the framework is convenient to transport and install and higher in anti-seismic property.
Description
Technical field
The invention belongs to semi-conductor device technology field, particularly relate to a kind of semiconductor manufacturing facility framework.
Background technique
Along with the application of semi-conducting material is more and more extensive, the demand manufacturing the equipment of semi-conducting material is also increasing, and this kind equipment is usually bulky, involves great expense, outside equipment, be typically provided with framework, for carrying and protective semiconductor manufacturing equipment.But, this framework still comes with some shortcomings in structural design, because the volume of framework is larger, after dismounting, the volume of component is also very large, the difficulty adding transport and install, in addition, because the weight of semiconductor manufacturing facility is larger, the anti-seismic performance of framework is usually poor, and its soundness and stability need to improve further.
Because above-mentioned defect, the design people, actively in addition research and innovation, to founding a kind of semiconductor manufacturing facility framework, make it have more value in industry.
Summary of the invention
For solving the problems of the technologies described above, the object of this invention is to provide a kind of semiconductor manufacturing facility framework, be convenient to transport and install, and anti-seismic performance is higher.
A kind of semiconductor manufacturing facility framework that the present invention proposes, the column comprise crossbeam, being connected with described crossbeam, described crossbeam is divided into first crossbeam and second cross beam, the section part of described first crossbeam is provided with groove, the section part of described second cross beam is provided with the projection coordinated with described groove type, the section part of described second cross beam is provided with outward extending bluff piece, and described crossbeam is connected with the strut of column by oblique setting, and described crossbeam, column and strut form stable triangular structure.
Further, described groove is along the section distribution in a week of described first crossbeam, rectangular.
Further, described bluff piece is semicircular arc.
Further, described strut and described crossbeam and column are connected by screw.
Further, the material of described framework is stainless steel.
By such scheme, the present invention at least has the following advantages: because the crossbeam of framework is usually longer, therefore crossbeam is divided into first crossbeam and second cross beam by the present invention, be convenient to transport and install, strut is provided with between crossbeam and column, form stable triangular structure, improve the anti-seismic performance of framework.
Above-mentioned explanation is only the general introduction of technical solution of the present invention, in order to better understand technological means of the present invention, and can be implemented according to the content of specification, coordinates accompanying drawing to be described in detail as follows below with preferred embodiment of the present invention.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is the partial structurtes schematic diagram of middle cross beam of the present invention;
Fig. 3 be in Fig. 2 A to side view.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples for illustration of the present invention, but are not used for limiting the scope of the invention.
See Fig. 1 to 3, a kind of semiconductor manufacturing facility framework that the present invention proposes, the column 2 comprise crossbeam 1, being connected with crossbeam 1, crossbeam 1 is divided into first crossbeam 3 and second cross beam 4, and the section part of first crossbeam 3 is provided with groove 5, and groove 5 is along the section distribution in a week of first crossbeam 3, rectangular, the section part of second cross beam 4 is provided with the projection coordinated with groove 5 shape, and the section part of second cross beam 4 is provided with outward extending bluff piece 6, and bluff piece 6 is in semicircular arc.
Crossbeam 1 is connected with the strut 7 of column 2 by oblique setting, and crossbeam 1, column 2 and strut 7 form stable triangular structure, and strut 7 is connected by screw with crossbeam 1 and column 2, and the material of framework is stainless steel.
When mounted, snap in the groove 5 of first crossbeam 3 by the projection of second cross beam 4 section part, peripheral bluff piece 6 is convenient to first crossbeam 3 and second cross beam 4 is aimed at rapidly, then by screw-driving, namely completes installation.
In sum, after the crossbeam 1 of framework is arranged to two-section, is convenient to transport and installs; Groove 5, projection and bluff piece 6 is set at its section part, aims at when being convenient to install, improve installation rate; After arranging strut 7, the stable triangular structure that crossbeam 1, column 2 and strut 7 are formed increases its anti-seismic performance greatly, and structure is simple, with low cost.
The above is only the preferred embodiment of the present invention; be not limited to the present invention; should be understood that; for those skilled in the art; under the prerequisite not departing from the technology of the present invention principle; can also make some improvement and modification, these improve and modification also should be considered as protection scope of the present invention.
Claims (5)
1. a semiconductor manufacturing facility framework, it is characterized in that: the column comprise crossbeam, being connected with described crossbeam, described crossbeam is divided into first crossbeam and second cross beam, the section part of described first crossbeam is provided with groove, the section part of described second cross beam is provided with the projection coordinated with described groove type, the section part of described second cross beam is provided with outward extending bluff piece, and described crossbeam is connected with the strut of column by oblique setting, and described crossbeam, column and strut form stable triangular structure.
2. semiconductor manufacturing facility framework according to claim 1, is characterized in that: described groove is along the section distribution in a week of described first crossbeam, rectangular.
3. semiconductor manufacturing facility framework according to claim 2, is characterized in that: described bluff piece is semicircular arc.
4. semiconductor manufacturing facility framework according to claim 3, is characterized in that: described strut and described crossbeam and column are connected by screw.
5. semiconductor manufacturing facility framework according to claim 4, is characterized in that: the material of described framework is stainless steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510524278.3A CN105090683A (en) | 2015-08-25 | 2015-08-25 | Framework for semiconductor manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510524278.3A CN105090683A (en) | 2015-08-25 | 2015-08-25 | Framework for semiconductor manufacturing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105090683A true CN105090683A (en) | 2015-11-25 |
Family
ID=54571715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510524278.3A Pending CN105090683A (en) | 2015-08-25 | 2015-08-25 | Framework for semiconductor manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105090683A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0051319A2 (en) * | 1980-11-04 | 1982-05-12 | Felix, Gerhard | Hollow section support and/or assembly part for buildings to be erected by the prefabrication method |
| US20060025035A1 (en) * | 2004-07-27 | 2006-02-02 | Glickman Joel I | Panel and girder system for construction toy |
| CN101646875A (en) * | 2006-12-19 | 2010-02-10 | 安德鲁斯·克劳斯·格斯温 | The component groups that can be coupled together |
| CN203286213U (en) * | 2013-05-17 | 2013-11-13 | 刘有林 | Pumping unit supporting frame |
| CN203834805U (en) * | 2014-03-10 | 2014-09-17 | 天津东方澳华彩钢钢结构有限公司 | Cross beam structure for portal frame |
| CN104223921A (en) * | 2013-06-08 | 2014-12-24 | 天津市志国电力修造厂 | Bearing support |
| CN205065184U (en) * | 2015-08-25 | 2016-03-02 | 太仓金马金属构件有限公司 | Semiconductor device manufacture equipment frame |
-
2015
- 2015-08-25 CN CN201510524278.3A patent/CN105090683A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0051319A2 (en) * | 1980-11-04 | 1982-05-12 | Felix, Gerhard | Hollow section support and/or assembly part for buildings to be erected by the prefabrication method |
| US20060025035A1 (en) * | 2004-07-27 | 2006-02-02 | Glickman Joel I | Panel and girder system for construction toy |
| CN101646875A (en) * | 2006-12-19 | 2010-02-10 | 安德鲁斯·克劳斯·格斯温 | The component groups that can be coupled together |
| CN203286213U (en) * | 2013-05-17 | 2013-11-13 | 刘有林 | Pumping unit supporting frame |
| CN104223921A (en) * | 2013-06-08 | 2014-12-24 | 天津市志国电力修造厂 | Bearing support |
| CN203834805U (en) * | 2014-03-10 | 2014-09-17 | 天津东方澳华彩钢钢结构有限公司 | Cross beam structure for portal frame |
| CN205065184U (en) * | 2015-08-25 | 2016-03-02 | 太仓金马金属构件有限公司 | Semiconductor device manufacture equipment frame |
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Legal Events
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|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20151125 |
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| RJ01 | Rejection of invention patent application after publication |