CN105067634A - Method and system for detecting surface quality of flat plate - Google Patents
Method and system for detecting surface quality of flat plate Download PDFInfo
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- CN105067634A CN105067634A CN201510500219.2A CN201510500219A CN105067634A CN 105067634 A CN105067634 A CN 105067634A CN 201510500219 A CN201510500219 A CN 201510500219A CN 105067634 A CN105067634 A CN 105067634A
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- light
- micromirror device
- digital micromirror
- optical axis
- flat plate
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Abstract
The invention discloses a system for detecting surface quality of a flat plate. The system comprises a collimating lens, a digital micro mirror device, a spectroscope and a dispersing lens which are sequentially arranged on the light path of a light beam emitted by a light source, wherein the flat plate to be detected is correspondingly arranged on the emitting side of the dispersing lens, and conducts transversal reciprocating motion in the direction perpendicular to an optical axis. The digital micro mirror device is used as the linear light source, and is combined with the dispersing lens to generate linear dispersed light, so as to conduct transversal linear scanning on the surface of the flat plate; under the premise that longitudinal scanning in the optical axis direction is not needed, one-dimensional movement in the direction perpendicular to the optical axis is utilized to obtain three-dimensional information of the surface of the flat plate to be detected as well as quality information of flaws, scratches and the like on the surface of the flat plate to be detected, so that the detection efficiency aiming at the surface quality problem of the flat plate is greatly improved.
Description
Technical field
The present invention relates to and be applied to optical surface topography measurement field and optical surface detection field.
Background technology
Planar surface quality problems mainly comprise the cut, flaw etc. of planar surface, and cut or the situation such as flaw is little, position is fixing are the difficult problems on detecting.Current detection means mainly relies on manually, inefficiency; Also there is automatic detection system, but be mostly common apparatus, not strong to the specific aim of planar surface quality testing.
For the technical barrier of prior art planar surface quality testing, applicant carries out deep research, then has this case to produce.
Summary of the invention
The object of this invention is to provide a kind of detection method for planar surface quality and system, it, specially for planar surface quality testing, drastically increases the detection efficiency for planar surface quality problems.
To achieve these goals, the present invention adopts following technical scheme:
A kind of detection system for planar surface quality, the light path sending light beam along light source sets gradually collimation lens and Digital Micromirror Device, and be 66 ° of incidences through the light beam of collimation lens collimation and the surface of Digital Micromirror Device, this light beam reflects in the direction on the surface perpendicular to Digital Micromirror Device; Spectroscope and dispersing lens is set gradually in the light path of the light beam of Digital Micromirror Device reflection; Treat that master plate corresponds to the exiting side setting of dispersing lens, and treat that master plate is moving perpendicular to transverse reciprocating is done in the direction of optical axis.
Described Digital Micromirror Device is an array be made up of the micro-reflector of the length of side ten microns; Gap between each described micro-reflector is a microns.
A kind of detection method for planar surface quality, the light beam sent by light source is by being 66 ° of incidences with the surface of Digital Micromirror Device after collimation lens, this light beam reflects in the direction on the surface perpendicular to Digital Micromirror Device, line style light is formed by after Digital Micromirror Device modulation, this line style light is radiated at dispersing lens surface after spectroscope, by dispersing lens, in the direction of the optical axis dispersion is carried out to this line style light, form line style dispersed light, and be radiated at planar surface to be measured; Treat that master plate is moving perpendicular to transverse reciprocating is done in the direction of optical axis, thus make line style dispersed light treat master plate surface to carry out line sweep, under not treating master plate and doing the prerequisite of longitudinal scanning in the direction of the optical axis, obtain the geometric sense information of planar surface to be measured and detect the quality condition on its surface.
After adopting such scheme, compared with the prior art, beneficial effect of the present invention is embodied in:
Using Digital Micromirror Device as linear light sources, line style dispersed light is produced in conjunction with dispersing lens, x wire scanning can be carried out to planar surface, the three-dimensional information obtaining tested planar surface perpendicular to the motion in one dimension on optical axis direction is utilized under the prerequisite without the need to doing longitudinal scanning along optical axis direction, and the quality information such as the flaw on its surface, cut, drastically increase the detection efficiency for planar surface quality problems.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Embodiment
A kind of detection system for planar surface quality of the present invention, as shown in Figure 1, the light path sending light beam along light source 1 sets gradually collimation lens 2 and Digital Micromirror Device 3, and the light beam collimated through collimation lens 2 is to be incident on the surface of Digital Micromirror Device 3 with the surface of Digital Micromirror Device 3 angle that is 66 °, this light beam reflects in the direction on the surface perpendicular to Digital Micromirror Device 3; The light path of the light beam reflected through Digital Micromirror Device 3 sets gradually spectroscope 4 and dispersing lens 5.
Treat that master plate 6 is arranged corresponding to the exiting side of dispersing lens 5, and treat that master plate 6 is moving perpendicular to transverse reciprocating is done in the direction of optical axis.
The light path that spectroscope 4 separates is disposed with diaphragm 7 and ccd video camera 8, diaphragm 7 plays a part to stop parasitic light, and ccd video camera 8 comes from the reflected light on emery wheel 6 surface to be measured for collecting, and is converted into electric signal and carries out subsequent treatment.
A kind of detection method for planar surface quality of the present invention, is achieved by the following scheme:
The light beam that light source 1 sends forms directional light after collimation lens 2, this directional light is to be incident on the surface of Digital Micromirror Device 3 with the surface of Digital Micromirror Device 3 angle that is 66 °, this directional light reflects in the direction on the surface perpendicular to Digital Micromirror Device 3, rear formation line style light is modulated by Digital Micromirror Device 3, this line style light is radiated at dispersing lens 5 surface after spectroscope 4, by dispersing lens 5, in the direction of the optical axis dispersion is carried out to this line style light, form line style dispersed light 51, and be radiated at the surface to be measured for the treatment of master plate 6; Treat that the surface to be measured of master plate 6 is being moved perpendicular to transverse reciprocating is done in the direction of optical axis, thus line sweep is carried out on the surface to be measured making line style dispersed light 51 treat master plate 6, under not treating master plate 6 and doing the prerequisite of longitudinal scanning in the direction of the optical axis, obtain and treat the geometric sense information on master plate 6 surface and detect the quality condition on its surface.
Digital Micromirror Device 3 adopts known Digital Micromirror Device, and it is an array be made up of the micro-reflector of the length of side ten microns, and the gap between each micro-reflector is a microns.Dispersing lens 5 can by the dispersion in the direction of the optical axis of line style light, and form line style dispersed light 51, line style dispersed light 51 is the light beams after carrying out dispersion decomposition in the direction of the optical axis.
Claims (3)
1. the detection system for planar surface quality, it is characterized in that: the light path sending light beam along light source sets gradually collimation lens and Digital Micromirror Device, and be 66 ° of incidences through the light beam of collimation lens collimation and the surface of Digital Micromirror Device, this light beam reflects in the direction on the surface perpendicular to Digital Micromirror Device; Spectroscope and dispersing lens is set gradually in the light path of the light beam of Digital Micromirror Device reflection; Treat that master plate corresponds to the exiting side setting of dispersing lens, and treat that master plate is moving perpendicular to transverse reciprocating is done in the direction of optical axis.
2. a kind of detection system for planar surface quality according to claim 1, is characterized in that: described Digital Micromirror Device is an array be made up of the micro-reflector of the length of side ten microns; Gap between each described micro-reflector is a microns.
3. the detection method for planar surface quality, it is characterized in that: the light beam sent by light source is by being 66 ° of incidences with the surface of Digital Micromirror Device after collimation lens, this light beam reflects in the direction on the surface perpendicular to Digital Micromirror Device, line style light is formed by after Digital Micromirror Device modulation, this line style light is radiated at dispersing lens surface after spectroscope, by dispersing lens, in the direction of the optical axis dispersion is carried out to this line style light, form line style dispersed light, and be radiated at planar surface to be measured; Treat that master plate is moving perpendicular to transverse reciprocating is done in the direction of optical axis, thus make line style dispersed light treat master plate surface to carry out line sweep, under not treating master plate and doing the prerequisite of longitudinal scanning in the direction of the optical axis, obtain the geometric sense information of planar surface to be measured and detect the quality condition on its surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510500219.2A CN105067634A (en) | 2015-08-14 | 2015-08-14 | Method and system for detecting surface quality of flat plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510500219.2A CN105067634A (en) | 2015-08-14 | 2015-08-14 | Method and system for detecting surface quality of flat plate |
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| Publication Number | Publication Date |
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| CN105067634A true CN105067634A (en) | 2015-11-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510500219.2A Pending CN105067634A (en) | 2015-08-14 | 2015-08-14 | Method and system for detecting surface quality of flat plate |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107843200A (en) * | 2017-10-31 | 2018-03-27 | 西安理工大学 | A kind of transparent membrane thickness measurement system and method |
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| CN1271086A (en) * | 2000-05-12 | 2000-10-25 | 清华大学 | Schileren instrument for the measurement of body surface appearance |
| JP2008051576A (en) * | 2006-08-23 | 2008-03-06 | Ricoh Co Ltd | Shape-measuring apparatus and shape-measuring method |
| CN201569419U (en) * | 2009-11-16 | 2010-09-01 | 浙江大学 | Rapid surface quality measuring device |
| CN101872064A (en) * | 2009-04-24 | 2010-10-27 | 陈亮嘉 | Linear multi-wavelength confocal microscope module and confocal microscopic method and system thereof |
| CN103486980A (en) * | 2013-08-28 | 2014-01-01 | 华侨大学 | Cross-scale measurement method based on digital micromirror device |
| CN103954232A (en) * | 2014-04-21 | 2014-07-30 | 华侨大学 | Flexible surface appearance quick extraction method |
| CN204945056U (en) * | 2015-08-14 | 2016-01-06 | 华侨大学 | A kind of detection system for planar surface quality |
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2015
- 2015-08-14 CN CN201510500219.2A patent/CN105067634A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1271086A (en) * | 2000-05-12 | 2000-10-25 | 清华大学 | Schileren instrument for the measurement of body surface appearance |
| JP2008051576A (en) * | 2006-08-23 | 2008-03-06 | Ricoh Co Ltd | Shape-measuring apparatus and shape-measuring method |
| CN101872064A (en) * | 2009-04-24 | 2010-10-27 | 陈亮嘉 | Linear multi-wavelength confocal microscope module and confocal microscopic method and system thereof |
| CN201569419U (en) * | 2009-11-16 | 2010-09-01 | 浙江大学 | Rapid surface quality measuring device |
| CN103486980A (en) * | 2013-08-28 | 2014-01-01 | 华侨大学 | Cross-scale measurement method based on digital micromirror device |
| CN103954232A (en) * | 2014-04-21 | 2014-07-30 | 华侨大学 | Flexible surface appearance quick extraction method |
| CN204945056U (en) * | 2015-08-14 | 2016-01-06 | 华侨大学 | A kind of detection system for planar surface quality |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107843200A (en) * | 2017-10-31 | 2018-03-27 | 西安理工大学 | A kind of transparent membrane thickness measurement system and method |
| CN107843200B (en) * | 2017-10-31 | 2020-05-22 | 西安理工大学 | Transparent film thickness measuring method |
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Application publication date: 20151118 |