CN105044117A - Detection method and detection system used for surface quality of flat plate - Google Patents
Detection method and detection system used for surface quality of flat plate Download PDFInfo
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- CN105044117A CN105044117A CN201510500067.6A CN201510500067A CN105044117A CN 105044117 A CN105044117 A CN 105044117A CN 201510500067 A CN201510500067 A CN 201510500067A CN 105044117 A CN105044117 A CN 105044117A
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- microlens array
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Abstract
The invention discloses a detection method and a detection system used for surface quality of a flat plate. The detection system comprises a collimating lens, a reflecting mirror, a spectroscope and a microlens array which are arranged along a light path of a light beam emitted from a light source; a to-be-detected flat plate is arranged corresponding to the emitting side of the microlens array, and the to-be-detected flat plate does lateral reciprocating motion in a direction vertical to an optical axis. According to the detection method and the detection system disclosed by the invention, by taking the microlens array as a parallel optical dispersion device, transverse scan vertical to the direction of the optical axis can be performed on multiple points on the surface of the to-be-detected flat plate simultaneously by a produced dispersion optical spot array; on the premise that longitudinal scan does not need to be performed along the direction of the light axis, the three-dimensional information, and the quality information, such as flaws and scratches, of the surface of the to-be-detected flat plate are obtained by utilizing the motion vertical to the direction of the optical axis, therefore the efficiency of detection aiming at the surface quality problem of the flat plate is greatly improved.
Description
Technical field
The present invention relates to and be applied to optical surface topography measurement field and optical surface detection field.
Background technology
Planar surface quality problems mainly comprise the cut, flaw etc. of planar surface, and cut or the situation such as flaw is little, position is fixing are the difficult problems on detecting.Current detection means mainly relies on manually, inefficiency; Also there is automatic detection system, but be mostly common apparatus, not strong to the specific aim of planar surface quality testing.
For the technical barrier of prior art planar surface quality testing, applicant carries out deep research, then has this case to produce.
Summary of the invention
The object of this invention is to provide a kind of detection method for planar surface quality and system, it, specially for planar surface quality testing, drastically increases the detection efficiency for planar surface quality problems.
To achieve these goals, the present invention adopts following technical scheme:
For the detection system of planar surface quality, comprise and send along light source collimation lens, catoptron, spectroscope and microlens array that the light path of light beam sets gradually; Treat that master plate corresponds to the exiting side setting of microlens array, and treat that master plate is moving perpendicular to transverse reciprocating is done in the direction of optical axis.
Described microlens array is an array be made up of the lenslet of diameter hundreds of micron, focal length tens to tens microns.
For the detection method of planar surface quality, the light beam sent by light source is radiated at mirror surface after collimation lens, be radiated at microlens array surface through spectroscope after being reflected, by microlens array dispersion, focus on rear formation dispersed light lattice array, and be radiated at planar surface to be measured; Treat that master plate is moving perpendicular to transverse reciprocating is done in the direction of optical axis, thus make dispersed light lattice array treat master plate surface to carry out transversal scanning, under not treating master plate and doing the prerequisite of longitudinal scanning in the direction of the optical axis, obtain the geometric sense information of planar surface to be measured and detect the quality condition on its surface.
After adopting such scheme, compared with the prior art, beneficial effect of the present invention is embodied in:
Using microlens array as parallel light Dispersive Devices, the dispersed light lattice array the produced multiple spot can simultaneously treated on master plate surface carries out the transversal scanning perpendicular to optical axis direction, utilize under the prerequisite without the need to doing longitudinal scanning along optical axis direction and obtain the three-dimensional information of planar surface to be measured perpendicular to moving on optical axis direction, and the quality information such as the flaw on its surface, cut, drastically increase the detection efficiency for planar surface quality problems.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Embodiment
The present invention is used for the detection system of planar surface pattern, as shown in Figure 1, comprise send light beam along light source 1 light path on set gradually collimation lens 2, catoptron 3, spectroscope 4 and microlens array 5.
Treat that master plate 6 is arranged corresponding to the exiting side of microlens array 5, and treat that master plate 6 is moving perpendicular to transverse reciprocating is done in the direction of optical axis.
The light path that spectroscope 4 separates is disposed with diaphragm 7 and ccd video camera 8, diaphragm 7 plays a part to stop parasitic light, and ccd video camera 8 for collecting the reflected light coming from and treat master plate 6 surface, and is converted into electric signal and carries out subsequent treatment.
The present invention is used for the detection method of planar surface pattern, is achieved by the following scheme:
The light beam that light source 1 sends forms directional light after collimation lens 2, this directional light is radiated at the surface of catoptron 3, be radiated at the surface of microlens array 5 through spectroscope 4 after being reflected by catoptron 3, by microlens array 5 dispersion, focus on rear formation dispersed light lattice array 51, and be radiated at the surface to be measured for the treatment of master plate 6; Treat that the surface to be measured of master plate 6 is being moved perpendicular to transverse reciprocating is done in the direction of optical axis, thus transversal scanning is carried out on the surface to be measured making dispersed light lattice array 51 treat master plate 6, under not treating master plate 6 and doing the prerequisite of longitudinal scanning in the direction of the optical axis, obtain and treat the geometric sense information on master plate 6 surface and detect the quality condition on its surface.
Microlens array 5 adopts known microlens array, and it is an array be made up of the lenslet of diameter hundreds of micron, focal length tens to tens microns, and these lenslets can carry out along the dispersion on optical axis direction and focusing to light beam; Described dispersion is after light beam scioptics, and the light of different wave length is focused on along on the differing heights of optical axis direction.
Claims (3)
1. for the detection system of planar surface quality, it is characterized in that: comprise and send along light source collimation lens, catoptron, spectroscope and microlens array that the light path of light beam sets gradually; Treat that master plate corresponds to the exiting side setting of microlens array, and treat that master plate is moving perpendicular to transverse reciprocating is done in the direction of optical axis.
2. the detection system for planar surface quality according to claim 1, is characterized in that: described microlens array is an array be made up of the lenslet of diameter hundreds of micron, focal length tens to tens microns.
3. for the detection method of planar surface quality, it is characterized in that: the light beam sent by light source is radiated at mirror surface after collimation lens, microlens array surface is radiated at through spectroscope after being reflected, by microlens array dispersion, focus on rear formation dispersed light lattice array, and be radiated at planar surface to be measured; Treat that master plate is moving perpendicular to transverse reciprocating is done in the direction of optical axis, thus make dispersed light lattice array treat master plate surface to carry out transversal scanning, under not treating master plate and doing the prerequisite of longitudinal scanning in the direction of the optical axis, obtain the geometric sense information of planar surface to be measured and detect the quality condition on its surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510500067.6A CN105044117A (en) | 2015-08-14 | 2015-08-14 | Detection method and detection system used for surface quality of flat plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201510500067.6A CN105044117A (en) | 2015-08-14 | 2015-08-14 | Detection method and detection system used for surface quality of flat plate |
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| CN105044117A true CN105044117A (en) | 2015-11-11 |
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| CN201510500067.6A Pending CN105044117A (en) | 2015-08-14 | 2015-08-14 | Detection method and detection system used for surface quality of flat plate |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108398102A (en) * | 2018-01-22 | 2018-08-14 | 江苏珩图智能科技有限公司 | Image collecting device and acquisition method when a kind of Curved screen detection |
| CN109839383A (en) * | 2018-06-07 | 2019-06-04 | 江阴通利光电科技有限公司 | A kind of flaw detection method and its detection device of microlens array microstructured optical film |
| CN111487038A (en) * | 2020-04-23 | 2020-08-04 | 华侨大学 | Integrated micro-dispersion lens array panel and parallel chromatic confocal measurement system |
| CN113866170A (en) * | 2021-12-01 | 2021-12-31 | 聚时科技(江苏)有限公司 | Surface defect detection vision system |
| CN114397300A (en) * | 2021-12-10 | 2022-04-26 | 慧三维智能科技(苏州)有限公司 | High bright face defect detection device based on microlens array projection |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108398102A (en) * | 2018-01-22 | 2018-08-14 | 江苏珩图智能科技有限公司 | Image collecting device and acquisition method when a kind of Curved screen detection |
| CN109839383A (en) * | 2018-06-07 | 2019-06-04 | 江阴通利光电科技有限公司 | A kind of flaw detection method and its detection device of microlens array microstructured optical film |
| CN109839383B (en) * | 2018-06-07 | 2024-04-16 | 江阴通利光电科技有限公司 | Flaw detection method and flaw detection equipment for micro-lens array microstructure optical film |
| CN111487038A (en) * | 2020-04-23 | 2020-08-04 | 华侨大学 | Integrated micro-dispersion lens array panel and parallel chromatic confocal measurement system |
| CN113866170A (en) * | 2021-12-01 | 2021-12-31 | 聚时科技(江苏)有限公司 | Surface defect detection vision system |
| CN114397300A (en) * | 2021-12-10 | 2022-04-26 | 慧三维智能科技(苏州)有限公司 | High bright face defect detection device based on microlens array projection |
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