CN103791840A - Simple apparatus for measuring micro displacement - Google Patents
Simple apparatus for measuring micro displacement Download PDFInfo
- Publication number
- CN103791840A CN103791840A CN201210432940.9A CN201210432940A CN103791840A CN 103791840 A CN103791840 A CN 103791840A CN 201210432940 A CN201210432940 A CN 201210432940A CN 103791840 A CN103791840 A CN 103791840A
- Authority
- CN
- China
- Prior art keywords
- measuring
- diaphragm
- micro displacement
- array ccd
- ccd unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Measurement Of Optical Distance (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Disclosed is a simple apparatus for measuring micro displacement. The apparatus comprises a laser emitter. There is an oblique included angle between the optical path of the laser emitter and an object to be measured; a collimating lens and a diaphragm are successively arranged on the optical path of the laser emitter; emitted light is irradiated on the object to be measured after passing through the collimating lens and the diaphragm; a focusing lens and a linear array CCD unit are successively arranged on a reflection optical light generated on the object to be measured; and the output of the linear array CCD unit, after passing through a signal processing circuit, is inputted to a processor. By using the simple apparatus for measuring micro displacement, non-contact micro displacement measuring can be carried out, the measuring precision is high, the measuring range scope of the apparatus is wide, a result can be processed in real time, a detection result can be obtained on site, and the use is quite convenient.
Description
?
Technical field
The present invention relates to micrometric displacement detection technique field, particularly a kind of easy device of measuring micrometric displacement.
Background technology
Along with microelectric technique, aerospace, the development of the subjects such as bioengineering, accuracy requirement to precision optical machinery and instrument is more and more higher, wherein the micrometric displacement of material is an important detection index, at present the detection of micrometric displacement is mainly contained to mechanical sensor, electro-optical pickoff and electronic sensor, wherein mechanical sensor only can be used for contact measurement, electronic sensor precision is inadequate, and although more existing electro-optical pickoffs can be used in contactless detection, and precision can reach requirement substantially, but its range is limited, cannot be in industrial widespread use.
Summary of the invention
In order to overcome above-mentioned the deficiencies in the prior art, the object of the present invention is to provide a kind of easy device of measuring micrometric displacement.
Based on this, the technical solution used in the present invention is:
A kind of easy device of measuring micrometric displacement, comprise generating laser 1, the light path that generating laser 1 is launched and object under test 4 have oblique angle, in the transmitting light path of generating laser 1, be disposed with collimation lens 2 and diaphragm 3, utilizing emitted light exposes on object under test 4 after collimation lens 2 and diaphragm 3, on the reflected light path producing on object under test 4, be disposed with condenser lens 5 and line array CCD unit 6, the output of line array CCD unit 6 inputs to processor 8 after signal processing circuit 7.
Compared with prior art, the present invention can carry out contactless microdisplacement measurement, and measuring accuracy is high, and the range ability of device is wide, can be by fructufy time, processes, and scene obtains testing result, very easy to use.
Accompanying drawing explanation
Accompanying drawing is structural representation of the present invention.
Embodiment
Below in conjunction with drawings and Examples, the present invention is carried out to more detailed explanation.
As shown in the figure, the present invention is a kind of easy device of measuring micrometric displacement, comprise generating laser 1, the light path that generating laser 1 is launched and object under test 4 have oblique angle, in the transmitting light path of generating laser 1, be disposed with collimation lens 2 and diaphragm 3, utilizing emitted light exposes on object under test 4 after collimation lens 2 and diaphragm 3, on the reflected light path producing on object under test 4, be disposed with condenser lens 5 and line array CCD unit 6, the output of line array CCD unit 6 inputs to processor 8 after signal processing circuit 7.
Principle of work of the present invention is:
The laser that generating laser 1 is launched collimates and becomes directional light after collimation lens 2, then by diaphragm 3, beam diameter is adjusted, and the light after adjustment incides on object under test 4, produces reflection.The hot spot that becomes minor diameter after reflected light line focus lens 5, this hot spot is incident on line array CCD unit 6.In the time that object under test 4 moves, can there is certain variation in hot spot, and the generation signal of line array CCD unit 6 correspondences also can respective change.After this variation is output, carry out the processing such as necessary amplification by signal processing circuit 7, then transfer to single-chip microcomputer and setup parameter to contrast, to judge the amount of its displacement.
Claims (1)
1. measure the easy device of micrometric displacement for one kind, it is characterized in that, comprise generating laser (1), light path and the object under test (4) of generating laser (1) transmitting have oblique angle, in the transmitting light path of generating laser (1), be disposed with collimation lens (2) and diaphragm (3), utilizing emitted light exposes on object under test (4) after collimation lens (2) and diaphragm (3), on the upper reflected light path producing of object under test (4), be disposed with condenser lens (5) and line array CCD unit (6), the output of line array CCD unit (6) inputs to processor (8) after signal processing circuit (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210432940.9A CN103791840A (en) | 2012-11-03 | 2012-11-03 | Simple apparatus for measuring micro displacement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210432940.9A CN103791840A (en) | 2012-11-03 | 2012-11-03 | Simple apparatus for measuring micro displacement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103791840A true CN103791840A (en) | 2014-05-14 |
Family
ID=50667730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210432940.9A Pending CN103791840A (en) | 2012-11-03 | 2012-11-03 | Simple apparatus for measuring micro displacement |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103791840A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105212264A (en) * | 2015-10-08 | 2016-01-06 | 中国电子科技集团公司第四十一研究所 | A kind of glue heap checkout gear of cigarette rolling up and connecting machine |
| CN107907051A (en) * | 2017-12-29 | 2018-04-13 | 上海兰宝传感科技股份有限公司 | The adjustable Laser Triangulation Measurement System Based of range and method |
-
2012
- 2012-11-03 CN CN201210432940.9A patent/CN103791840A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105212264A (en) * | 2015-10-08 | 2016-01-06 | 中国电子科技集团公司第四十一研究所 | A kind of glue heap checkout gear of cigarette rolling up and connecting machine |
| CN107907051A (en) * | 2017-12-29 | 2018-04-13 | 上海兰宝传感科技股份有限公司 | The adjustable Laser Triangulation Measurement System Based of range and method |
| CN107907051B (en) * | 2017-12-29 | 2024-06-04 | 上海兰宝传感科技股份有限公司 | Laser triangulation system and method with adjustable measuring range |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107941154B (en) | Displacement measurement system and measurement method | |
| CN102155927A (en) | Two-dimensional micro angle measuring device based on laser auto-collimation | |
| CN101545761A (en) | Optical measuring system with multiple degrees of freedom | |
| CN204831220U (en) | Calcirm -fluoride optical flat two sides depth of parallelism high accuracy testing arrangement | |
| CN103542813B (en) | One kind is based on border differential and the self-alignment laser diameter measuring instrument of ambient light | |
| CN102589428B (en) | Asymmetric-incidence-based sample axial position tracking and correcting method and device | |
| CN103399413B (en) | Double helix light beam-based sample axial drift detection and compensation method and device | |
| CN101915658B (en) | Laser designator multiple-parameter detector | |
| CN104792798A (en) | Total internal reflection illumination technology-based subsurface damage measuring apparatus and method thereof | |
| CN102768184A (en) | System for Young modulus measurement of film | |
| CN101865684B (en) | Device and method for measuring slope and length of dry beach | |
| CN103673926A (en) | Reflection cavity type confocal measuring method of super-large radius of curvature | |
| CN201974214U (en) | Liquid level measuring device based on linear array CCD (charge coupled device) and transparent tube | |
| CN103712562A (en) | High-precision laser micro displacement sensing and positioning method and device | |
| CN104714289A (en) | Automatic focusing device capable of achieving light path amplification | |
| CN205594083U (en) | Detect piezoceramics piezoelectric constant d31's device | |
| CN103791840A (en) | Simple apparatus for measuring micro displacement | |
| CN203396397U (en) | Laser indicator device | |
| CN102607428B (en) | Two-dimensional displacement measurement device based on micro-optics array elements | |
| CN106374998B (en) | The measuring device and method of a kind of pointing system to beacon hot spot displacement sensitivity | |
| CN105783859B (en) | A kind of high-accuracy control method of triaxial movement platform | |
| CN108362210A (en) | Simple lens laser displacement gauge head with linear structure | |
| CN101614585A (en) | A kind of novel focal depth area of light beam light distribution method for real-time measurement and device | |
| CN105783745B (en) | The measuring device and measuring method of spherical lens | |
| CN101625423B (en) | The debugging apparatus of emitter position of ceilometer and adjustment method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140514 |