CN105034179B - The brisement device of brittle substrate - Google Patents
The brisement device of brittle substrate Download PDFInfo
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- CN105034179B CN105034179B CN201510142652.3A CN201510142652A CN105034179B CN 105034179 B CN105034179 B CN 105034179B CN 201510142652 A CN201510142652 A CN 201510142652A CN 105034179 B CN105034179 B CN 105034179B
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- microscope carrier
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- end material
- brittle substrate
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Abstract
The brisement device of brittle substrate of the present invention, be directed to longitudinal direction and transverse direction in the functional region of arrangement form in array and in addition to resin bed by the substrate of brisement, separate the end material around it, invert, brisement is carried out to resin bed.Substrate (20) is kept on end material separation microscope carrier (15) and declines push pedal (47), separating end material.Then, sandwich substrate with extension microscope carrier (16) in end material separation microscope carrier (15) and rotate it.Afterwards, end material separation microscope carrier is made（15）Toward opposite direction rotation, by extension header（73）With with substrate it is perpendicular decline and to resin bed carry out brisement, each chip is separated whereby.Due to holding material separation microscope carrier to be used in end material separation with inverting, extension microscope carrier is used in reversion and extension, therefore of the invention can obtain can make device integral miniaturization, the effect of efficient activity.
Description
Technical field
The present invention be on it is a kind of be used to the end material around substrate separate and fully brisement brisement device, this
Substrate is to be coated with resin bed on the brittle substrates such as semiconductor substrate, ceramic substrate to form.
Background technology
In patent document 1, following substrate brisement device is referred to：Substrate to being formed with score line, by from shape
Into the back side in the face for having score line, pressed with face along score line and vertically using brisement bar and carry out brisement.As brisement
The substrate of object is semiconductor crystal wafer and is in when being formed with the situation of multiple functional areas in array, first in substrate with work(
Across mode at equal intervals in longitudinal direction and transverse direction formation score line between energy region.Then it must be filled along the score line with brisement
Put carry out disjunction.
In addition, in patent document 2, referring to following transport mechanism：Make supporting in order to transport brittle substrate
Arm is contacted with substrate and adsorbed with vacuum, moves supporting arm, and substrate is transported whereby.
After the end material around brisement brittle substrate, taking-up, for disrumpent feelings resin bed, to be kept completely separate each chip,
And be necessary to invert substrate.In patent document 3, disclosing has the reverse engine for inverting brittle substrate using mechanical arm
Structure.In the reverse turn operation, once the substrate delineated is configured at into pallet with mechanical arm, carried out by supporting from below is changed
Reversion.
Patent document 1：Japanese Unexamined Patent Publication 2004-39931 publications
Patent document 2：Japanese Unexamined Patent Publication 2013-177309 publications
Patent document 3：No. 3787489 publications of Japanese Patent Publication No.
On brittle substrate, such as ceramic substrate, form many along x-axis and y-axis with a determining deviation in manufacturing step
Individual functional area, using brisement device to the substrate progress brisement filled with silicones on ceramic substrate.To the substrate
Score line is formed in lattice shape, and when carrying out brisement, along score line only being partially separated ceramic substrate, silicone layer is still tieed up
Hold original state and remain.Substrate must therefore inverted and delineation is stretched in silicone layer.
But in existing known technology, the brittle substrate of the brisement in addition to resin bed is transported
Carrying device, the separating end material device of separating end material, the brisement device of inversion set and brisement resin bed are respective independence, these
Device is not integrated into one, and the problem of there are larger-scale unit.
The content of the invention
The present invention is the problem of being conceived to existing known larger-scale unit, can its object is to miniaturization of the apparatus
Efficiency carries out operation goodly, and the device is that the substrate only in addition to resin bed can tieed up by the brittle substrate of brisement
Hold and do not transported with falling off under original state, and the end material of surrounding can be separated and inverted, separation resin layer is simultaneously completely carried out
Brisement.
The object of the invention to solve the technical problems is realized using following technical scheme.According to present invention proposition
Brittle substrate brisement device, be the brisement device that brisement is carried out to brittle substrate, the brittle substrate is
There is the functional area formed in longitudinal direction and transverse direction with both determining deviations in one side, and be coated with resin, along with the function
Region be located at the score line that is formed in lattice shape of mode at center and by its brisement；The brisement device, possesses to being held in end
End material separator that the end material around brittle substrate on material separation microscope carrier is separated, end material separate microscope carrier and
The extension microscope carrier inversion set that sandwiches the brittle substrate and inverted and the resin bed for extending the brittle substrate
And the extension mechanism of the score line brisement along formation clathrate.
The object of the invention to solve the technical problems can be also applied to the following technical measures to achieve further.
The brisement device of foregoing brittle substrate, wherein the brisement device, possess be arranged to rotate freely upper
Face keeps the end material separation microscope carrier of the brittle substrate, with right with the part as the end material around the brittle substrate
The frame-shaped push pedal on the side answered, make the first elevating mechanism that the push pedal abreast lifts with the face with the brittle substrate, with
The mode that microscope carrier coincidence is separated with the end material with the same rotary shaft of rotary shaft that the end material separates microscope carrier is arranged to what is rotated freely
Extension microscope carrier, make first and second rotating mechanism that end material separation microscope carrier and the extension microscope carrier rotate independently of one another, under
Face have expander bar expander, by make the expander from the top of brittle substrate along score line decline and to the fragility
The resin bed of material substrate carries out the second elevating mechanism of brisement.
The present invention has clear advantage and beneficial effect compared with prior art.By above-mentioned technical proposal, the present invention
Resin bed is formed with brittle substrate and is had on surface in the brittle substrate of functional area, by will only remove
The substrate of substrate brisement beyond resin bed with push pedal is pressed and end material around separating.Then, by the coaxial rotation of utilization
Rotation mechanism makes extension microscope carrier separate microscope carrier simultaneously toward equidirectional rotation with end material, and brittle substrate can be made to remain stationary
Inverted under state.Further, substrate is kept by extension microscope carrier, resin bed is pressed with expander, and tree can be separated
Lipid layer.Because end material separation microscope carrier is used in end material separation and reversion, extension microscope carrier is used in reversion and extension, therefore can obtain
Device integral miniaturization, the effect of efficient activity can be made.
Described above is only the general introduction of technical solution of the present invention, in order to better understand the technological means of the present invention,
And can be practiced according to the content of specification, and in order to allow the above and other objects, features and advantages of the present invention can
Become apparent, below especially exemplified by preferred embodiment, and coordinate accompanying drawing, describe in detail as follows.
Brief description of the drawings
Fig. 1 is the stereogram being monolithically fabricated for representing to realize the brisement device of embodiment of the present invention.
Fig. 2 is the front view for representing to realize the brisement device of embodiment of the present invention.
Fig. 3 (a) is the front view of substrate one for representing to transport by the conveyance head of this embodiment.
Fig. 3 (b) is the cut-away section along line A-A of substrate one for representing to transport by the conveyance head of this embodiment
Figure.
Fig. 4 is the stereogram for the conveyance head for representing embodiment of the present invention.
Fig. 5 is the front view of the conveyance head of this embodiment.
Fig. 6 is the upward view of the conveyance head of this embodiment.
Fig. 7 is the stereogram for cutting off a part for this embodiment conveyance head and representing.
Fig. 8 is the stereogram for representing to be used in the precipitron one of the carrying device of this embodiment.
Fig. 9 is the stereogram for representing to be used in the push pedal one of the end material separator of this embodiment.
Figure 10 is the side view of the end material separation microscope carrier and extension microscope carrier that represent this embodiment.
Figure 11 is that the conveyance head for representing this embodiment separates microscope carrier with end material and extends the profile of microscope carrier.
Figure 12 is that the conveyance head for representing this embodiment separates the profile of a part for microscope carrier with end material.
Figure 13 is the stereogram of the end material separation microscope carrier and extension microscope carrier that represent this embodiment.
Figure 14 is the stereogram of the extension microscope carrier and the expander above and below it that represent this embodiment.
Figure 15 is end material separation microscope carrier, conveyance head, extension microscope carrier and the prolate-headed side view for representing this embodiment.
Figure 16 is the stereogram for sandwiching substrate and making its state rotated for representing this embodiment.
Figure 17 be represent this embodiment it is rotated after extension microscope carrier separate the side view of microscope carrier with end material.
Figure 18 (a) to Figure 18 (d) is the amplification profile for the state for making resin extend and separate for representing this embodiment.
【Main element symbol description】
10：Pedestal 11：Beam
12：Linear saddle 13：Transport head
14：Brisement microscope carrier 15：Hold material separation microscope carrier
16：Extend microscope carrier 17：Extension mechanism
20：Substrate 21：Ceramic substrate
22：Functional area 23：Silicones
24：Wire projection 31：Suspension bracket pedestal
32：Suspension bracket 33,34：Suspension bracket bracket
35：Linear saddle 40：Head
41：Bottom plate 42：Flexure strip
43：Conduit 44：Air blower
46：Latch mechanism 47：Push pedal
48：Cylinder 51：Arm
52：Chamber 53：Bottom plate
54：Elastic plate 55：Rotary shaft
61：Arm 62：Casket
63：Partition 64：Sponge
65：Extend rubber 67：Keep tool
71：Pedestal 72,74：Linear saddle
73：Extension header 75：Rotating mechanism
80：Expander 81：Expander bar
Embodiment
Illustrated for the brisement device of embodiment of the present invention.Fig. 1 is to represent to realize the brisement dress of this embodiment
The stereogram being monolithically fabricated put, Fig. 2 is its front view.As shown in Figures 1 and 2, on pedestal 10, beam 11 is protected by pillar
Hold into parallel with above pedestal 10, linear saddle 12 is set in the side of the beam 11.Linear saddle 12 makes conveyance first 13 along beam
11 act comfortablely.On pedestal 10, as shown in Figure 1 and Figure 2, it is provided with and brittle substrate (hereinafter referred to as substrate) is carried out
The brisement microscope carrier 14 of brisement, the end material separation microscope carrier 15 of the following end materials of separation and extension microscope carrier 16.First 13 are transported from brisement microscope carrier
End material separation microscope carrier 15 of the 14 attraction substrates simultaneously toward right in figure is transported.
Illustrated for the substrate for turning into brisement object in embodiment of the present invention.Substrate 20, such as takes off in Fig. 3 (a)
Show that front view and Fig. 3 (b) are disclosed shown in its fragmentary cross-sectional view, be on ceramic substrate 21 in manufacturing step along x-axis and y-axis with
One determining deviation is formed with the substrate of multiple functional areas 22.The functional area 22, for example, with the region as LED function,
In each functional area, the rod-like crystal for LED is formed at each surface.Silicones 23 is filled above the substrate, but is
Make the indwelling of silicones 23 in the scope for being formed with LED function region 22, be formed with around the outside of functional area 22 compared with
The slightly higher wire projection 24 in the surface of ceramic substrate 21.When filling silicones 23, the arrival wire of silicones 23 is had sometimes and is dashed forward
Rise above 24 or the situation on the outside of it.
Moreover, in order to carry out disjunction with regard to each functional area to form LED chip, before brisement is carried out to substrate 20, by
Scoring device is in the way of each functional area is located at center, and with the score line Sy1~Syn and the score line of transverse direction of longitudinal direction
Mode mutually orthogonal Sx1~Sxm is delineated.
Substrate 20 through delineation is in the brisement microscope carrier 14 shown in Fig. 2, to be formed with the face of crystal as above, and by not
The brisement device of diagram is along score line Sx1~Sxm ' and score line Sy1~Syn by its brisement.Substrate 20 after brisement is only
21 layers of ceramic substrate is along score line disjunction, but 23 layers of silicones is not by brisement.That is, substrate 20 turns into only relatively thin by surface
23 layers of silicones and as the state of connection, and have in the inner side of wire projection 24 and to be arranged in x, multiple functional areas of y-axis
Part with as outer circumference end material should not part.
Then, illustrated for the conveyance first 13 for attracting the substrate 20 and being transported.Fig. 4 is to represent to transport head
13 stereogram, Fig. 5 is its side view, and Fig. 6 is its upward view, and Fig. 7 is the stereogram that excision transports first part and represented.
As shown in figure 4, conveyance first 13, is vertically connected with greatly in the suspension bracket pedestal 31 of the horizontal direction of substantially square shape
Cause the suspension bracket 32 of L-shaped.The suspension bracket bracket 33 of oblong-shaped is connected with the side of suspension bracket 32, in suspension bracket bracket 33 further
The suspension bracket bracket 34 of oblong-shaped is installed in the way of overlapping its face, the line that can be moved up and down freely is set in suspension bracket bracket 34
Property saddle 35.In the lower section of linear saddle 35, head 40 is set.Linear saddle 35 is up distinguished to two directions in lower direction
With the inflow entrance for flowing into air stream, flow into by it is switched and head 40 is moved up and down elevating mechanism freely.In addition, line
As long as property saddle 35 can lift head 40, not only to move up and down it by the inflow of air stream,
Also can be to move up and down it using motor etc..
Head 40 is for cavity, open underneath inside the basket of straight cube shape, basket.And as shown in fig. 7, set below
Bottom set plate 41.It is flat metal member, for example, aluminum below that bottom plate 41, which is,.Bottom plate 41 with the substrate 20 through brisement
The corresponding mode of functional area 22, be equally spaced in being arranged in multiple openings in xy directions in array.The opening
It is configured to the path length of respectively greater than crystal.In addition, also in part corresponding with the outer circumference end material of the functional area 22 of substrate 20, if
It is equipped with opening circumferentially.
Thin flexure strip 42 is mounted below in bottom plate 41.Flexure strip 42 is flat rubber system flat board.Moreover, such as Fig. 6
It is shown, also flexure strip 42 with as conveyance object substrate 20 the corresponding mode of each functional area 22 in x directions and y side
To equally spaced having opening, further 24 pairs of the wire projection around with it to part have dimetric ring-type recessed
Portion.In addition, being also provided with edge on the outside of annular recessed portion in part corresponding with the outer circumference end material of the functional area 22 of substrate 20
The opening of periphery.The opening turns into same position when overlapping bottom plate 41 with flexure strip 42.Herein, the opening and bullet of bottom plate 41
Property piece 42 opening be configured to the path length slightly larger compared with the path length for the LED crystal for being formed at functional area 22, and attracting through brisement
Substrate 20 when, the crystal for being configured to functional area 22 is not contacted directly with flexure strip 42.
Then, in the one side on the head 40, conduit 43 is installed, the collection shown in Fig. 8 is linked with the front end of conduit 43
The air blower (blower) 44 of dirt machine.Though in addition, the monomer of air blower 44 also can be used using precipitron here.In substrate
20 in the state of contact resilient piece 42, once blower 44 and air is attracted by conduit 43, then from bottom plate 41, elasticity
The opening of piece 42 attracts air, and can attract substrate 20.In addition, air stream is switched from inflow by switching part (not shown)
Into outflow, the state for making air be sprayed from the opening of flexure strip 42 is allowed hand over into whereby.
Moreover, the side wall in four sides on the head 40 is provided with multiple latches (latch) mechanism 46.Latch mechanism 46 be for
Below head 40 by bottom plate 41 be set as being integrated with flexure strip 42 and be kept into it is detachable, and in flexure strip 42
Can easily it be changed during the situation that rubber has been deteriorated.In addition, the latch mechanism 46 also can be located at least parallel of head 40
A pair of sidewalls.
Lower, outer perimeter on head 40, in the push pedal 47 for moving up and down frame-shaped freely shown in setting Fig. 9.Push pedal 47,
It is in the state of substrate 20 is held in head 40 and hold material to separate between microscope carrier 15, by push pedal 47 is declined, by base
Around plate 20 should not part separated as end material.Push pedal 47 is the size suitable with the end material part around substrate 20
Frame-shaped component.In addition as shown as, be configured to height certain above, a pair it is relative to side 47a, 47b thickness it is thicker,
With this it is rectangular it is relative to two side 47c, 47d thinner thickness.
Then, illustrated for the elevating mechanism of push pedal 47.Among the side wall on head 40, except linking conduit 43
Be parallel to each other 2 side walls beyond one side wall, set cylinder 48 to be used as the first elevating mechanism.Cylinder 48, as shown in Figure 5
Body 48a with the side wall that head 40 is fixed on bolt, move up and down flat coupling member 48b freely and
The coupling member 48c of connected frame-shaped.In addition, being in move up and down to be linked with freely to push away in coupling member 48c lower section
Plate 47.
Illustrated then for the end material separation microscope carrier 15 for the separation and substrate reversion for being used in end material.Material separation is held to carry
Platform 15, as shown in Figure 10~Figure 12, on arm 51 bottom plate 53 on chamber 52 and its top with oblong-shaped and with this almost
The elastic plate 54 of same shape.Be formed with big recess in the middle body of chamber 52, and with the conduit 51a that is formed inside arm 51
Connection.Bottom plate 53 is the flat board of the oblong-shaped suitable with the global function region of the substrate through brisement, but preferably slightly less than
Global function region.Bottom plate 53 is, for example, aluminum.In bottom plate 53 to be provided with the corresponding mode of each functional area 22 in array
It is arranged in multiple openings in xy directions.
Elastic plate 54 is pasted with above bottom plate 41.Elastic plate 54 is the length with the global function region equivalent to substrate 20
The flat boards such as the rubber system of the suitable shape in square shape region, but preferably it is slightly less than global function region.In elastic plate 54 except 4
Outside the peripheral part on individual side, it is provided with the opening of bottom plate 53 that is, is in mode corresponding with the functional area of the substrate through brisement
Multiple openings in xy directions are arranged in array.The part of edge preferably above elastic plate 54 is the construction of slight curvature.
In addition, the elastic plate 54 be configured to the opening of bottom plate 53 it is corresponding with each functional area 22, therefore, it is possible to weight
Extraneous air is set to circulate in the recess of chamber 52 by the opening during conjunction.Conduit 51a inside arm 51 passes through not shown
Pipe linked with vacuum absorption device, and by driving vacuum absorption device air can be made to be sprayed from the opening of elastic plate 54
Or attracted.
In addition, be configured to can be centered on rotary shaft 55 and from Figure 10 state toward being rotated clockwise freely for the arm 51
180°.The first rotation for making arm 51 be rotated together with the chamber 52, bottom plate 53 and elastic plate 54 on its top is provided with the axle
Mechanism.It can be revolving cylinder as long as rotating mechanism can make arm 51 rotate 180 ° of persons, or also can be with slowing down by motor
Gear is constituted.
Then, it is directed to the reversion of substrate 20 and used extension microscope carrier 16 during brisement is carried out to 23 layers of silicones, makes
Illustrated with Figure 10, Figure 11, Figure 13~Figure 15.Microscope carrier 16 is extended as shown in Figure 11, Figure 13, with arm 61 with being installed on arm 61
Straight cube shape casket (cartridge) 62.Casket 62 is the columnar part for having L-shaped in its four corners, and is protected on the inside of it
Hold partition (spacer) 63, sponge (sponge) 64 and extension rubber 65.Partition 63 and extension rubber 65 are the functions with substrate
The flat board of the suitable size in region, extension rubber 65 is the elastically supported plate of rubber system.Extension rubber 65, with through brisement
Substrate 20 the corresponding mode of functional area 22, be equally spaced in being arranged in multiple openings in xy directions in array.
The opening is configured to the path length slightly larger compared with the path length for the LED crystal for being formed at functional area 22, and is configured to attracting through brisement
Substrate 20 when, the crystal of functional area 22 is not contacted directly with extension rubber 65.
And in fig. 11, the flat pressing of the frame-shaped of shape almost identical with casket is set below extension rubber 65
Plate 66.Pressing plate 66 is connected by bolt with casket 62, is prevented partition 63 or sponge 64, is extended coming off for rubber 65.
In addition, be configured to can be with rotating freely 180 ° centered on the identical rotary shaft of rotary shaft 55 of arm 51 for arm 61.
And the second rotating mechanism for making arm 61 be rotated together with casket 62 or partition 63, sponge 64 and extension rubber 65 is set.Whirler
Can be revolving cylinder as long as structure can make arm 61 rotate 180 °, also can be to be made up of motor with reduction gearing.Moreover,
On pedestal 10, as shown in figure 13 as provided with keep tool 67.It is to make the arm 61 of extension microscope carrier toward clockwise to keep tool 67
When rotating 180 °, below its position supporting arm 61.
Then, for the silicones 23 that is used in the embodiment brisement extension mechanism 17, use Figure 14, Tu15Jin
Row explanation.Extension mechanism 17, is broken for 23 layers of the silicones by the substrate 20 to being held on extension microscope carrier 16
It is disconnected, and brisement substrate 20 completely.Extension mechanism 17, with the pedestal 71 parallel with pedestal 10 and is moved it as shown in figure 14
In the second elevating mechanism of above-below direction be linear saddle 72.In pedestal 71 in extension header 73 is movably provided with, set
The rotating mechanism 75 for having the linear saddle 74 for making extension header 73 be displaced into x-axis direction and making extension header 73 be rotated along the axle.Rotation
Mechanism 75, though be herein with a pair of belt pulleys and belt and connected motor and swing pinion, as long as due to making
Extension header 73 rotates, therefore also can be to use to have motor and reducing gear.
Expander 80 is abreast provided with the face with extension microscope carrier 16 below extension header 73.Whereby, by line
Property saddle 72 when making the situation that extension header is moved about 73, expander 80 is also simultaneously in integratedly dynamic up and down.Expander 80, in many
The individual expander bar 81 for being abreast formed with the tendon shape parallel with plane pedestal, all crest lines of each expander bar constitute a plane.
As long as in addition, the interval of expander bar 81 is certain and is more than 2 integral multiple at delineation preset lines interval, in this embodiment
In be 2 times.Moreover, the section of each expander bar 81, as shown in Figure 14, Figure 15, circular arc is set as in the way of it can be pressed along score line
Shape.
Then, the situation for transporting substrate 20 from brisement microscope carrier 14 toward end material separation microscope carrier 15 by the carrying device
Illustrate.First, the conveyance first 13 of carrying device is displaced into the surface of the substrate 20 on brisement microscope carrier 14, make head 40
Decline is harmonious with substrate 20.Then, carried out in the way of the opening of flexure strip 42 of the foot of head 40 is corresponded to LED crystal
Positioning.Then, when blower 44 and when attracting air by conduit 43, attract empty from the opening of bottom plate 41, flexure strip 42
Gas, and the substrate 20 that is contacted with flexure strip 42 can be attracted.Herein, produced when air is attracted from the opening of flexure strip 42
Air is leaked, and because air is flowed into from opening toward internal all the time, therefore can also attract substrate 20.Then, by lifting conveyance
First 13, and the substrate 20 through brisement can be lifted under state of remaining stationary.
In this condition, make conveyance first 13 is overall to be moved by linear saddle 12, substrate 20 can be transported whereby to
Desired position.In such a manner, as shown in Figure 10, after conveyance first 13 is moved to the surface of end material separation microscope carrier 15,
Head 40 is set to decline by linear saddle 35.Then, the substrate 20 being held in below head 40 separates microscope carrier 15 with end material
Upper contact, and under positioning and stop in the way of its functional area 22 turning into and corresponds to the position that elastic plate 54 is open respectively
Drop.Then, air is attracted by arm 51 in the state of contact resilient plate 54 below the substrate 20, whereby can be by substrate 20
It is held on the material separation microscope carrier 15 of end.Now, also can be to maintain the state for acting air blower 44, and can also stop it.
Then, action when being separated for the end material for holding material separator is illustrated.First, can be by from push pedal 47
The blow out air of cylinder 48 of elevating mechanism, and decline the push pedal 47 of the bottom of head 15.Once make push pedal 47 parallel with substrate 20
Ground declines, then first by thickness thicker side 47a, 47b, the only elongated peripheral part on the outside of the functional area of substrate 20 is held
By downward pressure, separate and as end material.Once further continuous decrease, then by two side 47c, 47d of thinner thickness,
Elongated peripheral part on the outside of the functional area of substrate 20 bears the pressure declined and separates and turn into end material.Figure 13, which is disclosed, to be had
Separated 4 ends material.And substrate can be kept completely separate by the step-down operation pressed with push pedal 47 or the like as so
End material around 20.Now, side adjacent around substrate 20 is not made while being separated as end material.In addition, elastic plate 54
Slightly less than push pedal 47, the edge point bending above it.Therefore, it is possible in the case of the not functional area of wounded substrate 20,
The end material of surrounding is kept completely separate in short time.
Afterwards, in the state of air is attracted from arm 51, air is sprayed from air blower 44, head 40 is increased.Whereby, head
Portion 40 is separated from substrate 20.In the state of head 40 is increased, conveyance first 13 is set to be moved toward Fig. 2 lefts by linear saddle 12
And it is back to original state.
Head 40 is set away from after, to revolve the arm 61 of extension microscope carrier 16 from the top of end material separation microscope carrier 15 in such a manner
It is dynamic, the contact jaw material of extension rubber 65 is separated above the substrate 20 on the top of microscope carrier 15.Figure 13 is the schema for representing the state.This
When by crystal do not contact extension rubber 65 be open inwall in the way of position.And substrate 20 is sandwiched in end material separation microscope carrier 15
Between extension microscope carrier 16.Make in this condition arm 51 and arm 61 along same rotary shaft it is as shown in figure 16 as rotate.Hereby it is possible to
It is inverted being separated using end material in the state of microscope carrier 15 fully keeps substrate 20 with extension microscope carrier 16, and on rotation way
Middle substrate 20 will not fall off.Figure 17 is the grade microscope carrier is rotated 180 °, will be extended below microscope carrier 16 by keeping the supporting of tool 67
State.
After rotation is terminated in such a manner, by holding the conduit of arm 51 of material separation microscope carrier 15 to make air from elastic plate
54 opening sprays, and substrate 20 is separated from end material separation microscope carrier 15.Then end material separation microscope carrier 15 opposite direction rotation is only made
180 °, it is back to original position.Whereby, though substrate 20 is held on extension microscope carrier 16, the top of substrate 20 is in open shape
State.
Then, for making to be formed at point that the score line of ceramic substrate 21 is also stretched with completing substrate 20 toward 23 layers of silicones
Disconnected method is illustrated.First, moved it by linear saddle 74 in the way of extension header 73 is come directly over substrate 20.
Then, make crest line such as Figure 18 (a) of the foot of each expander bar 81 of expander 80 shown, borrowed in the way of being closed with score line S-phase
Positioned by linear saddle 74.
Then, linear saddle 72 is driven, expander 80 is kept parallel while slowly relative to extension microscope carrier 16
Decline.Then, as shown in Figure 18 (b), ceramic substrate 21 is pressed from score line S surface by expander bar 81.Accordingly, as schemed
Shown in 18 (c), ceramic substrate 21 is pressed by expander bar 81 and deformed, sink and extends rubber 65 and be similarly deformed into V shape, energy
23 layers of the silicones of enough brisement substrates 20.Once completing brisement, invert linear saddle 72 and expander 80 is increased.
Now, expander 80, are formed with multiple expander bars 81 side by side, and its interval is 2 times of score line spacing, therefore,
Can be every one along a plurality of score line simultaneously brisement silicones 23.
Moreover, extension header 73 can be made only to be moved in x-axis direction with the amount of separation of score line, and similarly by making expander
80 decline and also other adjacent score lines are completed the brisement of resin bed.Herein, because the interval of expander bar 81 is score line
2 times of spacing, therefore, it is possible to by making the extension header 73 shift 1 time and carry out brisement and all x-axis directions of completing substrate 20 are split
It is disconnected., can be by making extension header 73 move 2 times and carry out in addition, in situation of the expander bar 81 at intervals of 3 times of score line spacing
Brisement and the brisement for completing all x-axis directions.
Then, extension header 73 is made to be rotated by 90 ° by rotating mechanism 75.Also extension is made after being positioned to the score line of y-axis
Device 80 declines, 23 layers of brisement silicones.Then, extension header 73 is made only to be moved in x-axis direction with the amount of separation of score line, and equally
Ground declines expander 80.Hereby it is possible to which functional area disjunction is formed into multiple LED to complete comprehensive brisement into clathrate
Chip.
In addition, in the embodiment, though using extend multiple openings of rubber 65 as through hole and being capable of defencive function
Region, but as long as being the tectosome not contact protection hole of the substrate 20 in brisement, therefore also can be non-through hole, and be structure
Make the groove of the body not depth of exposure level.
In the embodiment, though possess for manufacture in the LED chip of the LED-baseplate above with crystal functional area
Example be illustrated, but the present invention is applicable not only to surface and has the chip of crystal, especially is also applicable to have not have
The chip of the functional area of any protrusion, in addition, the functional area for the thrust being also applicable to beyond possessing with crystal
Brittle substrate.
Further, in the embodiment, though enter for the brittle substrate that silicones is coated with ceramic substrate
Explanation is gone, but also can be the substrate of other various material layers.For example, also can be to there is the layers such as Polarizer to glass substrate lamination
Into.
Though the elevating mechanism for separating push pedal in microscope carrier as above-mentioned end material for cylinder is illustrated, elevating mechanism
Certainly also can be the elevating mechanism of the other shapes such as linear saddle.
The present invention can be transported to the substrate only by the ceramic substrate brisement of brittle substrate, and separating end material is simultaneously
Reversion, carries out brisement, can be applied to the manufacture of substrate in a effective manner.
The above described is only a preferred embodiment of the present invention, any formal limitation not is done to the present invention, though
So the present invention is disclosed above with preferred embodiment, but is not limited to the present invention, any to be familiar with this professional technology people
Member, without departing from the scope of the present invention, when the technology contents using the disclosure above make a little change or modification
For the equivalent embodiment of equivalent variations, as long as being the content without departing from technical solution of the present invention, the technical spirit according to the present invention
To any simple modification made for any of the above embodiments, equivalent variations and modification, in the range of still falling within technical solution of the present invention.
Claims (2)
1. a kind of brisement device of brittle substrate, is to carry out brisement to brittle substrate, it is characterised in that：
The brittle substrate, is to have the functional area that is formed in longitudinal direction and transverse direction with both determining deviations in one side, and
Resin is coated with, along the score line formed in lattice shape in the way of being located at center by the functional area by its brisement；
The brisement device, possesses：
To be held in end material separation microscope carrier on brittle substrate around end material separated end material separator,
Material separation microscope carrier sandwiches the brittle substrate with extension microscope carrier and inverted at the end inversion set and
Extend the extension mechanism of the resin bed of the brittle substrate and the score line brisement along formation clathrate.
2. the brisement device of brittle substrate according to claim 1, it is characterised in that wherein the brisement device, tool
It is standby：
Be arranged to rotate freely keep in the above the brittle substrate end material separation microscope carrier,
Frame-shaped push pedal with side corresponding with the part as the end material around the brittle substrate,
Make the first elevating mechanism that the push pedal abreast lifts with the face with the brittle substrate,
To be rotatably arranged to separate with the end material centered on the same rotary shaft of rotary shaft that the end material separates microscope carrier
The extension microscope carrier of microscope carrier coincidence,
Make first and second rotating mechanism that end material separation microscope carrier and the extension microscope carrier rotate independently of one another,
In its lower section with expander bar expander and
By make the expander from the top of brittle substrate along score line decline and to the resin bed of the brittle substrate
Carry out the second elevating mechanism of brisement.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-092493 | 2014-04-28 | ||
| JP2014092493A JP6256178B2 (en) | 2014-04-28 | 2014-04-28 | Breaking device for brittle material substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105034179A CN105034179A (en) | 2015-11-11 |
| CN105034179B true CN105034179B (en) | 2017-10-20 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510142652.3A Expired - Fee Related CN105034179B (en) | 2014-04-28 | 2015-03-27 | The brisement device of brittle substrate |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6256178B2 (en) |
| KR (1) | KR20150124376A (en) |
| CN (1) | CN105034179B (en) |
| TW (1) | TWI639566B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6282176B2 (en) * | 2014-05-29 | 2018-02-21 | 三星ダイヤモンド工業株式会社 | Edge material separator for brittle material substrate |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1359784A (en) * | 2000-12-19 | 2002-07-24 | 三星钻石工业股份有限公司 | Method and device for dividing brittle substrate |
| CN1750917A (en) * | 2003-02-21 | 2006-03-22 | 三星钻石工业股份有限公司 | Substrate-processing table and substrate processing device |
| CN101708633A (en) * | 2008-08-29 | 2010-05-19 | 三星钻石工业股份有限公司 | Brittle material breaking device |
| CN103381624A (en) * | 2012-05-03 | 2013-11-06 | 江俊昇 | Method and device for cutting fragile sheet work piece |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09136319A (en) * | 1995-11-15 | 1997-05-27 | Fujitsu Ten Ltd | Apparatus for dividing substrate |
| JP2001058317A (en) * | 1999-08-20 | 2001-03-06 | Berudekkusu:Kk | Method and apparatus for scribing |
| JP4646467B2 (en) * | 2001-09-04 | 2011-03-09 | 旭化成せんい株式会社 | Spun yarn |
| JP2005225637A (en) * | 2004-02-13 | 2005-08-25 | Toyota Industries Corp | Panel inverting device |
| JP2011037104A (en) * | 2009-08-10 | 2011-02-24 | Asahi Glass Co Ltd | Device and method for dividing substrate |
| JP5170195B2 (en) * | 2010-09-24 | 2013-03-27 | 三星ダイヤモンド工業株式会社 | Method for dividing brittle material substrate with resin |
| JP5981791B2 (en) * | 2012-07-18 | 2016-08-31 | 三星ダイヤモンド工業株式会社 | Breaking device for brittle material substrate |
| JP5744109B2 (en) * | 2013-06-05 | 2015-07-01 | 三星ダイヤモンド工業株式会社 | Brittle substrate transfer unit |
-
2014
- 2014-04-28 JP JP2014092493A patent/JP6256178B2/en active Active
- 2014-12-10 TW TW103142982A patent/TWI639566B/en not_active IP Right Cessation
-
2015
- 2015-01-09 KR KR1020150003344A patent/KR20150124376A/en not_active Application Discontinuation
- 2015-03-27 CN CN201510142652.3A patent/CN105034179B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1359784A (en) * | 2000-12-19 | 2002-07-24 | 三星钻石工业股份有限公司 | Method and device for dividing brittle substrate |
| CN1750917A (en) * | 2003-02-21 | 2006-03-22 | 三星钻石工业股份有限公司 | Substrate-processing table and substrate processing device |
| CN101708633A (en) * | 2008-08-29 | 2010-05-19 | 三星钻石工业股份有限公司 | Brittle material breaking device |
| CN103381624A (en) * | 2012-05-03 | 2013-11-06 | 江俊昇 | Method and device for cutting fragile sheet work piece |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6256178B2 (en) | 2018-01-10 |
| KR20150124376A (en) | 2015-11-05 |
| TWI639566B (en) | 2018-11-01 |
| TW201540678A (en) | 2015-11-01 |
| CN105034179A (en) | 2015-11-11 |
| JP2015208937A (en) | 2015-11-24 |
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