CN105022161B - Air gap Fabry-Perot etalon with free spectral range being adjusted in large scope - Google Patents
Air gap Fabry-Perot etalon with free spectral range being adjusted in large scope Download PDFInfo
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- CN105022161B CN105022161B CN201510520544.5A CN201510520544A CN105022161B CN 105022161 B CN105022161 B CN 105022161B CN 201510520544 A CN201510520544 A CN 201510520544A CN 105022161 B CN105022161 B CN 105022161B
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Abstract
The invention provides an air gap Fabry-Perot etalon with the free spectral range being adjusted in a large scope. The etalon comprises a base, three substrates, at least three supporting bars, an optical mirror bracket, a stepping screw and two high-reflection cavity mirrors, and is characterized in that the three substrates are vertically installed on the base in sequence and are fixed through the plurality of supporting bars, thereby enabling the three substrates to keep parallel; one of the high-reflection cavity mirrors is installed on the optical mirror bracket, the optical mirror bracket is installed on one of the substrates, the other high-reflection cavity mirror is installed on the substrate adjacent to the optical mirror bracket, and the two substrates form a cavity of the air gap etalon; and the stepping screw penetrates through a bottom circular hole of the substrates located at the middle position, is screwed into a U-shaped groove of the base, and is used for adjusting the position of the substrate located at the middle position. The air gap etalon provided by the invention can adjust the cavity length in a large scope, and realizes free spectral ranges with different scopes.
Description
Technical field
The present invention relates to optics and laser field, the air-gap method that more particularly to a kind of free spectral range can be adjusted on a large scale
Amber etalon.
Background technology
At present, more general Fabry-Perot etalon is made up of two blocks of glass plates that there is certain interval, two pieces
Reflectance coating is coated with the relative plane of glass plate, and is parallel to each other, thus the middle air layer for forming one layer of uniform thickness, it is this
Etalon is referred to as air-gap type etalon.Also a kind of Fabry-Perot etalon is one piece of solid transparent plate, by flat board
Two Surface Machinings into the plane being parallel to each other, and plate reflectance coating, so made by be solid etalon, it is alternatively referred to as solid
Body etalon.Both Fabry-Perot etalons are all made up of the dielectric layer of two parallel reflectings surface and centre;It is incident
Light multiple reflections between two parallel reflectings surface, form multiple-beam interference.
Etalon is a kind of multi-beam interferometric device, with high spectral resolution, is had in optical field extensive
Using.In tunable laser, it is mainly used in precision tuning and obtains extremely narrow live width.
The processing method of air gap etalon, usually links together two sides hysteroscope by spacer block to keep two chambers
The depth of parallelism between mirror, two hysteroscopes are non-exchange;And the solid etalon for processing, its hysteroscope plated film, chamber length is also can not be more
Change;Therefore the index parameter of both etalons:Chamber is long, fineness, what free spectral range etc. was all to determine, causes etalon
Cannot be used for kinds of experiments occasion.
The content of the invention
It is an object of the invention to overcome the nonadjustable defect of index parameter that current air-gap solid etalon is present,
The air-gap method amber etalon that a kind of free spectral range can be adjusted on a large scale is devised, the chamber length of the etalon can be adjusted arbitrarily
Section, two hysteroscopes of etalon can be changed, and the parameter of such etalon just can need change with experiment, meet different
Experiment demand.
To achieve these goals, the invention provides a kind of air-gap method amber mark that can adjust on a large scale of free spectral range
Quasi- tool, the etalon includes:Base 1, the first substrate 2, the second substrate 3, the 3rd substrate 4,5, second, first support bar frame
Supporting pole rack 6, the 3rd bracing member 7, stand for optical lens 8, progressive screw 9, the first high reflective cavity mirror 10 and the second high reflective cavity mirror 11;
The substrate 4 of first substrate 2 and the 3rd is vertically fixed on the two ends of base 1, and second substrate 3 is between first substrate 2
And the 3rd between substrate 4, scale is carried on the first support bar frame 5, second support bar frame 6, the 3rd bracing member 7, respectively
Through the first substrate 2, the second substrate 3, the 3rd substrate 4 and it is fixed;First high reflective cavity mirror 10 is arranged on optical frames
On frame 8, the stand for optical lens 8 is arranged on second high reflective cavity mirror 11 on the first substrate 2 and is arranged on the second substrate 3;Institute
State the chamber that air gap etalon is constituted between the substrate 3 of stand for optical lens 8 and second;The progressive screw 9 is U-shaped through base 1
Groove, and be fixed in the U-type groove of base 1 by cover plate, the movement of progressive screw 9 second substrate 3 is adjusted to precalculated position.
In above-mentioned technical proposal, the etalon also includes:Lucite outer cover 12;For covering the main body of etalon.
In above-mentioned technical proposal, the base 1 is a cuboid, and centre is provided with a U-type groove;In one end of U-type groove
Perforation is provided with, for by the U-type groove of one end inserted base 1 of progressive screw 9;The upper surface of the base 1 is provided with four spiral shells
Hole, for fixing the first substrate 2 and the 3rd substrate 4;The base 1 also includes U-type groove cover plate.
In above-mentioned technical proposal, first substrate 2 includes a rectangular seat and a U-shaped plate, and both are vertical
, two screws are provided with rectangular seat, align with two screws of the left end of base 1 respectively, and with the spiral shell of two M6
Nail is fixed;A big hole is provided with U-shaped plate, surrounding is evenly distributed with several small sircle holes, and big hole is logical for optics
Unthreaded hole, described several small sircle holes are used to fix stand for optical lens 8;3 pilot holes are uniformly provided with the periphery of small sircle hole, first is supplied
Bracing member 5, the bracing member 7 of second support bar frame 6 and the 3rd are passed through.
In above-mentioned technical proposal, in the U-type groove of the plinth inserted base 1 of second substrate 3;And the second substrate
3 plinth is provided with screw 314, passes through for progressive screw 9;A big hole 315 is provided with the top of the second substrate 3, is used
In the second high reflective cavity mirror 9 of installation;Be uniformly provided with three pilot holes in the periphery of big hole 315, for first support bar frame 5,
Two bracing members 6 and the 3rd bracing member 7 are passed through.
In above-mentioned technical proposal, the 3rd substrate 4 includes a rectangular seat and a U-shaped plate, at rectangle bottom
Seat is provided with two screws, aligns with two screws of the right-hand member of base 1 respectively, and the screw with two M6 is fixed;In U
Template is provided with a big hole, and in the surrounding of big hole 3 pilot holes are uniformly provided with, and supports for first support bar frame 5, second
The bracing member 7 of bridge 6 and the 3rd is passed through.
In above-mentioned technical proposal, the stand for optical lens 8 is a torus;Centre is provided with circular hole 823, in circular hole 823
Around be uniformly provided with several T-shaped holes, its quantity is identical with the quantity of the small sircle hole of the first substrate 2, the T-shaped hole and the first base
Corresponding small sircle hole is fixed by extension spring on piece 2;Additionally, 3 small sircle holes are additionally provided with the stand for optical lens 8, three identicals
Fine setting screw thread pair is inserted respectively in this 3 small sircle holes and is fixed;For adjusting the luffing angle of stand for optical lens 8;First is high anti-
Hysteroscope 10 is penetrated in the circular hole 823 of stand for optical lens 8, the coated surface of the first high reflective cavity mirror 10 is pointed in chamber, uses trim ring pressure
Tightly;Second high reflective cavity mirror 11 is installed in the second substrate 3, and the coated surface of the second high reflective cavity mirror 11 is pointed in chamber, uses trim ring
Compress.
In above-mentioned technical proposal, the base 1, the first substrate 2, the second substrate 3, the 3rd substrate 4, first support bar frame 5,
The material of second support bar frame 6, the 3rd bracing member 7, stand for optical lens 8 and progressive screw 9 is indium steel.
In above-mentioned technical proposal, the high reflective cavity mirror 11 of first high reflective cavity mirror 10 and second is coated with the height more than 99%
Anti- film, and with the angle of wedge of 30 arcs point.
It is an advantage of the current invention that:
1st, etalon of the invention can on a large scale adjust that chamber is long, so as to realize the free spectral range of different range;
2nd, two hysteroscopes of the invention can be changed according to experiment wavelength, and preparation method is simple, and be easy to behaviour
Make, installation cost is relatively low, be suitable for doing measurement use using etalon;
3rd, the distance between the first high reflective cavity mirror of the invention and the second high reflective cavity mirror are by adjusting progressive screw
What the knob of one end was realized, control method is simple and convenient, wherein the first high reflective cavity mirror can carry out three-dimensional by stand for optical lens
The depth of parallelism of two high reflective cavity mirrors of regulating guarantee.
Description of the drawings
Fig. 1 is the structural representation of the air-gap method amber etalon that the free spectral range of the present invention can be adjusted on a large scale;
Fig. 2 is the lucite outer cover of the air-gap method amber etalon that the free spectral range of the present invention can be adjusted on a large scale
Schematic diagram;
Fig. 3 is the schematic diagram of the base of the air-gap method amber etalon that the free spectral range of the present invention can be adjusted on a large scale;
Fig. 4 is the signal of the first basal plane of the air-gap method amber etalon that the free spectral range of the present invention can be adjusted on a large scale
Figure;
Fig. 5 is the signal of the second basal plane of the air-gap method amber etalon that the free spectral range of the present invention can be adjusted on a large scale
Figure;
Fig. 6 is the signal of the 3rd basal plane of the air-gap method amber etalon that the free spectral range of the present invention can be adjusted on a large scale
Figure;
Fig. 7 is the signal of the stand for optical lens of the air-gap method amber etalon that the free spectral range of the present invention can be adjusted on a large scale
Figure.
Accompanying drawing is identified:
1st, base 2, the first substrate 3, the second substrate
4th, the 3rd substrate 5, first support bar frame 6, second support bar frame
7th, the 3rd bracing member 8, stand for optical lens 9, progressive screw
10th, the first high reflective cavity mirror 11, the second high reflective cavity mirror 12, lucite outer cover
314th, the circular hole of 315 big hole of screw 823
Specific embodiment
Below in conjunction with the accompanying drawings the present invention will be further described in detail with specific embodiment.
As shown in figure 1, the air-gap method amber etalon that a kind of free spectral range can be adjusted on a large scale, the etalon bag
Include:Base 1, the first substrate 2, the second substrate 3, the 3rd substrate 4, first support bar frame 5, second support bar frame 6, the 3rd support bar
Frame 7, stand for optical lens 8, progressive screw 9, the first high reflective cavity mirror 10 and the second high reflective cavity mirror 11;First substrate 2 and
Three substrates 4 are vertically fixed on the two ends of base 1, second substrate 3 between the substrate 4 of first substrate 2 and the 3rd, institute
State first support bar frame 5, second support bar frame 6, the 3rd bracing member 7 and be each passed through the first substrate 2, the second substrate 3, the 3rd base
Piece 4, to ensure that three substrates are parallel;First high reflective cavity mirror 10 is arranged in stand for optical lens 8, and described second is high anti-
Penetrate hysteroscope 11 to be arranged on the second substrate 3;The stand for optical lens 8 is arranged on the first substrate 2;For carrying out three-dimensional adjustment, with
Ensure that two high reflective cavity mirror faces are parallel;Air gap etalon is constituted between the substrate 3 of the stand for optical lens 8 and second
Chamber;The progressive screw 9 passes through the U-type groove of base 1, and is fixed in the U-type groove of base 1 by cover plate, adjusts progressive screw 9
Mobile second substrate 3 is to precalculated position.
As shown in Fig. 2 described device also includes:Lucite outer cover 12;For covering whole optical standard tool.
As shown in figure 3, the base 1 is a cuboid, centre is provided with a U-type groove;It is provided with one end of U-type groove and wears
Hole, for by the U-type groove of one end inserted base 1 of progressive screw 9;The upper surface of the base 1 is provided with four screws, respectively
For fixing the first substrate 2 and the 3rd substrate 4;The base 1 also includes U-type groove cover plate.
As shown in figure 4, first substrate 2 includes a rectangular seat and a U-shaped plate, both be it is vertical,
Rectangular seat is provided with two screws, aligns with two screws of the left end of base 1 respectively, and is carried out with the screw of two M6
It is fixed;A big hole is provided with U-shaped plate, surrounding is evenly distributed with several small sircle holes, and big hole is optics light hole, if
Dry small sircle hole is used to fix stand for optical lens 8;Be uniformly provided with 3 pilot holes in the periphery of small sircle hole, for first support bar frame 5,
The bracing member 7 of second support bar frame 6 and the 3rd is passed through.
As shown in figure 5, in the U-type groove of the plinth inserted base 1 of second substrate 3;And the side of the second substrate 3
Shape bottom is provided with screw 314, passes through for progressive screw 9;A big hole 315 is provided with the top of the second substrate 3, for installing
Second high reflective cavity mirror 9;Three pilot holes are uniformly provided with the periphery of big hole 315, are supported for first support bar frame 5, second
The bracing member 7 of bridge 6 and the 3rd is passed through.
As shown in fig. 6, the 3rd substrate 4 includes a rectangular seat and a U-shaped plate, set on rectangular seat
There are two screws, align with two screws of the right-hand member of base 1 respectively, and the screw with two M6 is fixed;On U-shaped plate
A big hole is provided with, in the surrounding of big hole 3 pilot holes are uniformly provided with, for first support bar frame 5, second support bar frame 6
Pass through with the 3rd bracing member 7.
As shown in fig. 7, the stand for optical lens 8 is a torus;Centre is provided with circular hole 823, around circular hole 823
Even to be provided with several T-shaped holes, its quantity is identical with the quantity of the small sircle hole of the first substrate 2, in the T-shaped hole and the first substrate 2
Corresponding small sircle hole is fixed by extension spring;Additionally, 3 small sircle holes are additionally provided with the stand for optical lens 8, three identical fine settings
Screw thread pair is inserted respectively in this 3 small sircle holes and is fixed;For adjusting the luffing angle of stand for optical lens 8;First high reflection chamber
Mirror 10 is arranged in the circular hole 823 of stand for optical lens 8, and the coated surface of the first high reflective cavity mirror 10 is pointed in chamber, is compressed with trim ring;The
Two high reflective cavity mirrors 11 are installed in the second substrate 3, and the coated surface of the second high reflective cavity mirror 11 is pointed in chamber, is compressed with trim ring.
As shown in figure 1, the screw 314 of the second substrate 3 is inserted in one end of progressive screw 9, and by rotating progressive screw 9, will
Second substrate 3 is screw in the U-type groove of base 1;Described progressive screw 9, for adjusting between the second substrate and the first substrate
Distance.
The base 1, the first substrate 2, the second substrate 3, the 3rd substrate 4, first support bar frame 5, second support bar frame 6,
The material of the 3rd bracing member 7, stand for optical lens 8 and progressive screw 9 is indium steel.
The high reflective cavity mirror 11 of first high reflective cavity mirror 10 and second is coated with the high-reflecting film more than 99%, and with 30 arcs
The angle of wedge for dividing.
Based on said apparatus, present invention also offers a kind of control method of the free spectral range of optical standard tool, specifically
Comprise the following steps:
Step 1) optical standard tool is placed in the optical table of leveling or hard plane plane, it is ensured that optical standard
Tool is generally in level;
Step 2) hysteroscope spacing d is calculated according to the free spectral range computing formula of optical standard tool, by adjusting stepping spiral shell
Bar 9 moves the second substrate 3, is finally reached required free spectral range;
In formula, c is the light velocity in vacuum;N is medium refraction index between optical standard tool hysteroscope;D is hysteroscope spacing;ΔνfIt is certainly
By spectral region;
Step 3) alignment demarcation is carried out to optical standard tool using narrow linewidth laser, regulation is fixed on the first basal plane 2
Three of stand for optical lens 8 fine setting screw thread pairs to clear uniform interference ring is observed.
When being adjusted, the laboratory apparatus of needs has:(laser wavelength is high anti-according to etalon first for narrow linewidth laser
The plated film situation for penetrating hysteroscope and the second high reflective cavity mirror determines wavelength, and live width is less than 100MHz), concave mirror, long focus lens, CCD
Camera.The laser that narrow linewidth laser sends makes it uniform according to the full high reflective cavity mirror of etalon second after concave mirror diverging
Surface, now generates multiple-beam interference in etalon, then converged through long focus lens, obtains same on its focal plane
Heart interference circle, CCD camera is placed on focal length lens focal plane, it is possible to obtain the photo of interference ring, experiment Analysis.
Adjust three of stand for optical lens 8 fine setting screw thread pairs, until obtaining clear uniform interference ring till,
Example 1:
Setting experiment needs the Free Spectral Range of etalon as 0.5GHz, according to the Free Spectral Range of optical standard tool
Computing formula:It is calculated the long 30cm in chamber of optical standard tool.Adjust progressive screw 9 and move the second substrate 3,
So that groove value is in the chamber intersected with first support bar frame 5, the bracing member 7 of second support bar frame 6 and the 3rd of the second substrate 3
30cm.Three fine setting screw thread pairs of stand for optical lens 8 are adjusted, is finally substantially parallel two hysteroscopes, observed clearly in experimental station
Till interference fringe.In sum, the long 30cm in its chamber of the etalon for now regulating, Free Spectral Range 0.5GHz.
Example 2:
Setting experiment needs the Free Spectral Range of etalon as 1GHz, is calculated the long 15cm in optical standard tool chamber.Adjust
Section progressive screw 9 moves the second substrate 3 so that the second substrate 3 is supported with first support bar frame 5, second support bar frame 6 and the 3rd
Groove value is 15cm in the intersecting chamber of bridge 7.Three fine setting screw thread pairs of stand for optical lens 8 are adjusted, two hysteroscopes is put down completely
OK, till experimental station observes clearly interference fringe.
Example 3:
Setting experiment needs the Free Spectral Range of etalon as 15GHz, is calculated the long 1cm in optical standard tool chamber.Adjust
Section progressive screw 9 moves the second substrate 3 so that the second substrate 3 with first support bar frame 5, second support bar frame 6 and the 3rd
Groove value is 1cm in the intersecting chamber of supporting pole rack 7.Three fine setting screw thread pairs of stand for optical lens 8 are adjusted, two hysteroscopes is put down completely
OK, till experimental station observes clearly interference fringe.
Claims (9)
1. a kind of air-gap method amber etalon that free spectral range can be adjusted on a large scale, the etalon includes:Base (1),
One substrate (2), the second substrate (3), the 3rd substrate (4), first support bar frame (5), second support bar frame (6), the 3rd support bar
Frame (7), stand for optical lens (8), progressive screw (9), the first high reflective cavity mirror (10) and the second high reflective cavity mirror (11);Its feature exists
The two ends of base (1) are vertically fixed in, first substrate (2) and the 3rd substrate (4), second substrate (3) is between institute
State between the first substrate (2) and the 3rd substrate (4), the first support bar frame (5), second support bar frame (6), the 3rd support bar
Scale is carried on frame (7), the first substrate (2), the second substrate (3), the 3rd substrate (4) is each passed through and is fixed;Described
In stand for optical lens (8), the stand for optical lens (8) is on the first substrate (2) for one high reflective cavity mirror (10);Described
Two high reflective cavity mirrors (11) are on the second substrate (3);Sky is constituted between the stand for optical lens (8) and the second substrate (3)
The chamber of air gap etalon;The progressive screw is screwed in the U-type groove of base, for adjusting through the bottom circular aperture of the second substrate (3)
The second substrate (3) is saved to precalculated position.
2. the air-gap method amber etalon that free spectral range according to claim 1 can be adjusted on a large scale, it is characterised in that
The etalon also includes:Lucite outer cover (12), for covering the main body of etalon.
3. the air-gap method amber etalon that free spectral range according to claim 1 and 2 can be adjusted on a large scale, its feature exists
In the base (1) is a cuboid, and centre is provided with a U-type groove;Perforation is provided with one end of U-type groove, for by stepping
In the U-type groove of one end inserted base (1) of screw rod (9);The upper surface of the base (1) is provided with four screws, for fixing
One substrate (2) and the 3rd substrate (4);The base (1) also includes U-type groove cover plate.
4. the air-gap method amber etalon that free spectral range according to claim 1 and 2 can be adjusted on a large scale, its feature exists
In first substrate (2) includes a rectangular seat and a U-shaped plate, and both are vertical, are set on rectangular seat
There are two screws, align with two screws of the left end of base (1) respectively, and the screw with two M6 is fixed;In U-shaped plate
It is provided with a big hole, surrounding is evenly distributed with several small sircle holes, big hole is optics light hole, described several roundlets
Hole is used to fix stand for optical lens (8);Be uniformly provided with 3 pilot holes in the periphery of small sircle hole, for first support bar frame (5), second
Bracing member (6) and the 3rd bracing member (7) are passed through.
5. the air-gap method amber etalon that free spectral range according to claim 1 and 2 can be adjusted on a large scale, its feature exists
In in the U-type groove of the plinth inserted base (1) of second substrate (3);And the plinth of the second substrate (3) sets
There is screw (314), pass through for progressive screw (9);A big hole (315) is provided with the top of the second substrate (3), for installing
Second high reflective cavity mirror (11);Be uniformly provided with three pilot holes in the periphery of big hole (315), for first support bar frame (5),
Two bracing members (6) and the 3rd bracing member (7) are passed through.
6. the air-gap method amber etalon that free spectral range according to claim 1 and 2 can be adjusted on a large scale, its feature exists
In, the 3rd substrate (4) includes a rectangular seat and a U-shaped plate, and two screws are provided with rectangular seat, point
Do not align with two screws of the right-hand member of base (1), and the screw with two M6 is fixed;One is provided with U-shaped plate greatly
Circular hole, in the surrounding of big hole 3 pilot holes are uniformly provided with, for first support bar frame (5), second support bar frame (6) and the 3rd
Bracing member (7) is passed through.
7. the air-gap method amber etalon that free spectral range according to claim 1 and 2 can be adjusted on a large scale, its feature exists
In the stand for optical lens (8) is a torus;Centre is provided with circular hole (823), in circular hole (823) if around be uniformly provided with
Dry T-shaped hole, its quantity is identical with the quantity of the small sircle hole of the first substrate (2), and the T-shaped hole is corresponding with the first substrate (2)
Small sircle hole fixed by extension spring;Additionally, being additionally provided with 3 small sircle holes on the stand for optical lens (8), three identicals finely tune screw thread
Pair is inserted respectively in this 3 small sircle holes and is fixed;Three identicals fine setting screw thread pair is used to adjust stand for optical lens (8)
Luffing angle;First high reflective cavity mirror (10) in the circular hole (823) of stand for optical lens (8), the first high reflective cavity mirror (10)
Coated surface point to chamber in, compressed with trim ring;Second high reflective cavity mirror (11) is installed in the second substrate (3), the second high reflection
The coated surface of hysteroscope (11) is pointed in chamber, is compressed with trim ring.
8. the air-gap method amber etalon that free spectral range according to claim 1 and 2 can be adjusted on a large scale, its feature exists
In the base (1), the first substrate (2), the second substrate (3), the 3rd substrate (4), first support bar frame (5), second support bar
The material of frame (6), the 3rd bracing member (7), stand for optical lens (8) and progressive screw (9) is indium steel.
9. the air-gap method amber etalon that free spectral range according to claim 1 and 2 can be adjusted on a large scale, its feature exists
The high-reflecting film more than 99% is coated with, first high reflective cavity mirror (10) and the second high reflective cavity mirror (11), and with 30 arcs
The angle of wedge for dividing.
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201035181Y (en) * | 2007-04-11 | 2008-03-12 | 福州高意通讯有限公司 | A F-P etalon type wavestrip switch |
CN101982801A (en) * | 2010-10-12 | 2011-03-02 | 华中科技大学 | Piezoelectric-driven F-P cavity tunable filter |
CN103873014A (en) * | 2014-03-13 | 2014-06-18 | 青岛市光电工程技术研究院 | Ultra-narrow band filtering device |
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2015
- 2015-08-21 CN CN201510520544.5A patent/CN105022161B/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201035181Y (en) * | 2007-04-11 | 2008-03-12 | 福州高意通讯有限公司 | A F-P etalon type wavestrip switch |
CN101982801A (en) * | 2010-10-12 | 2011-03-02 | 华中科技大学 | Piezoelectric-driven F-P cavity tunable filter |
CN103873014A (en) * | 2014-03-13 | 2014-06-18 | 青岛市光电工程技术研究院 | Ultra-narrow band filtering device |
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